Patents by Inventor Matthew I. Egbe

Matthew I. Egbe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process and apparatus for removing residues from the microstructure of an object
    Publication number: 20040198627
    Abstract: A process for removing residues from the microstructure of an object is provided, which comprises steps of preparing a remover including CO2, an additive for removing the residues and a co-solvent dissolving the additive in said CO2 at a pressurized fluid condition; and bringing the object into contact with the remover so as to remove the residues from the object. An apparatus for implementing the process is also provided.
    Type: Application
    Filed: April 9, 2004
    Publication date: October 7, 2004
    Applicant: Kobe Steel, Ltd.
    Inventors: Kaoru Masuda, Katsuyuki Iijima, Tetsuo Suzuki, Nobuyuki Kawakami, Masahiro Yamagata, Darryl W. Peters, Matthew I. Egbe
  • Aqueous stripping and cleaning composition
    Publication number: 20030130146
    Abstract: The present invention relates to aqueous compositions used to remove post etch organic and inorganic residue as well polymeric residues and contaminants from semiconductor substrates. The compositions are comprised of a water soluble organic solvent, a sulfonic acid and water.
    Type: Application
    Filed: January 9, 2002
    Publication date: July 10, 2003
    Inventors: Matthew I. Egbe, Darryl W. Peters
  • Process and apparatus for removing residues from the microstructure of an object
    Publication number: 20020164873
    Abstract: A process for removing residues from the microstructure of an object is provided, which comprises steps of preparing a remover including CO2, an additive for removing the residues and a co-solvent dissolving the additive in said CO2 at a pressurized fluid condition; and bringing the object into contact with the remover so as to remove the residues from the object. An apparatus for implementing the process is also provided.
    Type: Application
    Filed: February 8, 2002
    Publication date: November 7, 2002
    Inventors: Kaoru Masuda, Katsuyuki IIjima, Tetsuo Suzuki, Nobuyuki Kawakami, Masahiro Yamagata, Darryl W. Peters, Matthew I. Egbe