Patents by Inventor MATTHEW NG
MATTHEW NG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20170320724Abstract: A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.Type: ApplicationFiled: February 24, 2017Publication date: November 9, 2017Inventors: Roman Gutierrez, Tony Tang, Xiaolei Liu, Guiqin Wang, Matthew NG
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Patent number: 9769385Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.Type: GrantFiled: March 2, 2017Date of Patent: September 19, 2017Assignee: MEMS Drive, Inc.Inventors: Matthew Ng, Roman Gutierrez, Guiqin Wang
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Publication number: 20170197825Abstract: A simplified MEMS fabrication process and MEMS device is provided that allows for cheaper and lighter-weight MEMS devices to be fabricated. The process comprises etching a plurality of holes or other feature patterns into a MEMS device, and then etching away the underlying wafer such that, after the etching process, the MEMS device is the required thickness and the individual die are separated, avoiding the extra steps of wafer thinning and die dicing. By etching trenches into the substrate wafer and filling them with a MEMS base material, sophisticated taller MEMS devices with larger force may be made.Type: ApplicationFiled: March 24, 2017Publication date: July 13, 2017Inventors: Roman Gutierrez, Tony Tang, Xiaolei Liu, Matthew Ng, Guiqin Wang
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Publication number: 20170190569Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.Type: ApplicationFiled: May 26, 2016Publication date: July 6, 2017Applicant: MEMS DRIVE, INC.Inventors: XIAOLEI LIU, MATTHEW NG, ROBERT CALVET, GERARDO MORABITO
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Publication number: 20170190568Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.Type: ApplicationFiled: December 30, 2015Publication date: July 6, 2017Applicant: MEMS DRIVE, INC.Inventors: Gerardo MORABITO, Xiaolei LIU, Guiqin WANG, Roman GUTIERREZ, Matthew NG
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Publication number: 20170187937Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.Type: ApplicationFiled: March 2, 2017Publication date: June 29, 2017Inventors: Matthew NG, Roman Gutierrez, Guiqin Wang
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Publication number: 20170170059Abstract: A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.Type: ApplicationFiled: February 24, 2017Publication date: June 15, 2017Inventors: Roman Gutierrez, Tony Tang, Xiaolei Liu, Guiqin Wang, Matthew NG
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Publication number: 20170133951Abstract: A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.Type: ApplicationFiled: January 23, 2017Publication date: May 11, 2017Inventors: Xiaolei Liu, Guiqin Wang, Matthew Ng
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Publication number: 20170133950Abstract: A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.Type: ApplicationFiled: February 1, 2016Publication date: May 11, 2017Inventors: Xiaolei Liu, Guiqin Wang, Matthew Ng
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Patent number: 9630836Abstract: A simplified MEMS fabrication process and MEMS device is provided that allows for cheaper and lighter-weight MEMS devices to be fabricated. The process comprises etching a plurality of holes or other feature patterns into a MEMS device, and then etching away the underlying wafer such that, after the etching process, the MEMS device is the required thickness and the individual die are separated, avoiding the extra steps of wafer thinning and die dicing. By etching trenches into the substrate wafer and filling them with a MEMS base material, sophisticated taller MEMS devices with larger force may be made.Type: GrantFiled: September 30, 2015Date of Patent: April 25, 2017Assignee: MEMS Drive, Inc.Inventors: Roman Gutierrez, Tony Tang, Xiaolei Liu, Matthew Ng, Guiqin Wang
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Patent number: 9617142Abstract: A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.Type: GrantFiled: September 30, 2015Date of Patent: April 11, 2017Assignee: MEMS Drive, Inc.Inventors: Roman Gutierrez, Tony Tang, Xiaolei Liu, Guiqin Wang, Matthew Ng
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Patent number: 9621775Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.Type: GrantFiled: August 5, 2015Date of Patent: April 11, 2017Assignee: MEMS Drive, Inc.Inventors: Matthew Ng, Roman Gutierrez, Guiqin Wang
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Publication number: 20170088415Abstract: A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.Type: ApplicationFiled: September 30, 2015Publication date: March 30, 2017Applicant: MEMS DRIVE, INC.Inventors: ROMAN GUTIERREZ, TONY TANG, XIAOLEI LIU, GUIQIN WANG, MATTHEW NG
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Publication number: 20170088418Abstract: A simplified MEMS fabrication process and MEMS device is provided that allows for cheaper and lighter-weight MEMS devices to be fabricated. The process comprises etching a plurality of holes or other feature patterns into a MEMS device, and then etching away the underlying wafer such that, after the etching process, the MEMS device is the required thickness and the individual die are separated, avoiding the extra steps of wafer thinning and die dicing. By etching trenches into the substrate wafer and filling them with a MEMS base material, sophisticated taller MEMS devices with larger force may be made.Type: ApplicationFiled: September 30, 2015Publication date: March 30, 2017Applicant: MEMS DRIVE, INC.Inventors: ROMAN GUTIERREZ, TONY TANG, XIAOLEI LIU, MATTHEW NG, GUIQIN WANG
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Publication number: 20170040909Abstract: An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.Type: ApplicationFiled: August 4, 2015Publication date: February 9, 2017Applicant: MEMS DRIVE, INC.Inventors: XIAOLEI LIU, ROMAN GUTIERREZ, MATTHEW NG, GUIQIN WANG
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Publication number: 20150341534Abstract: A MEMS actuator including buckled flexures and a method of assembling the actuator are described. The assembled MEMS actuator includes an inner frame; an outer frame including latched electrical bars, where a first of the latched bars includes a latch protrusion secured to a corresponding latch groove of a second of the latched bars; and buckled flexures coupling the inner frame to the outer frame. The flexures are buckled during assembly of the MEMS actuator by incorporating the electrical bar latching mechanism into the design of the outer frame of the MEMS actuator. In one implementation, the MEMS actuator is assembled by providing a MEMS actuator with unbuckled flexures coupling the outer frame of the MEMS actuator to an inner frame of the MEMS actuator, where the outer frame includes unlatched electrical bars, and latching the electrical bars of the outer frame, resulting in buckled flexures.Type: ApplicationFiled: August 5, 2015Publication date: November 26, 2015Applicant: MEMS DRIVE, INC.Inventors: MATTHEW NG, ROMAN GUTIERREZ, GUIQIN WANG
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Publication number: 20150321900Abstract: A flexure includes a support first end connected to a first frame; a support second end connected to a second frame; and a buckled section connecting the first support end to the second support end. The length of the flexure is substantially greater than its width, and the width of the flexure is substantially greater than its thickness. During operation, the flexure is maintained in a buckled state where the flexure's stiffness is significantly less than in the unbuckled state. In one implementation, a stage includes a flexure array joining a first frame and a second frame, where: the first frame and the second frame are substantially on a plane; the flexure array is substantially on the plane prior to buckling by the flexures of the flexure array; and the flexure array is bent substantially out of the plane after buckling by the flexures.Type: ApplicationFiled: April 2, 2015Publication date: November 12, 2015Applicant: MEMS DRIVE, INC.Inventors: XIAOLEI LIU, ROMAN GUTIERREZ, GUIQIN WANG, BENSON MAI, MATTHEW NG