Patents by Inventor Matthew R. Graham

Matthew R. Graham has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8648999
    Abstract: An extreme ultraviolet light system includes a steering system that steers and focuses an amplified light beam traveling along a propagation direction to a focal plane near a target location within an extreme ultraviolet light chamber, a detection system including at least one detector positioned to detect an image of a laser beam reflected from at least a portion of a target material within the chamber, a wavefront modification system in the path of the reflected laser beam and between the target location and the detection system, and a controller. The wavefront modification system is configured to modify the wavefront of the reflected laser beam as a function of a target focal plane position along the propagation direction. The controller includes logic for adjusting a location of the focal plane of the amplified light beam relative to the target material based on the detected image of the reflected laser beam.
    Type: Grant
    Filed: July 22, 2010
    Date of Patent: February 11, 2014
    Assignee: Cymer, LLC
    Inventors: Matthew R. Graham, William N. Partlo, Steven Chang, Robert A. Bergstedt
  • Publication number: 20130320244
    Abstract: Energy output from a laser-produced plasma (LPP) extreme ultraviolet light (EUV) system varies based on how well the laser beam can maintain focus on a target material to generate the plasma that gives off light. The system and method described herein optimize EUV light generation by using a closed-loop gradient process to track and fine-tune in real-time the positioning of optical elements that determine how the laser beam is focused on the target material. When real-time alignment of the drive laser on droplet position is achieved, EUV generation is optimized.
    Type: Application
    Filed: July 13, 2012
    Publication date: December 5, 2013
    Applicant: Cymer, Inc.
    Inventors: Paul Frihauf, Daniel J. Riggs, Matthew R. Graham, Steven Chang, Wayne J. Dunstan
  • Patent number: 8598552
    Abstract: Energy output from a laser-produced plasma (LPP) extreme ultraviolet light (EUV) system varies based on how well the laser beam can maintain focus on a target material to generate the plasma that gives off light. The system and method described herein optimize EUV light generation by using a closed-loop gradient process to track and fine-tune in real-time the positioning of optical elements that determine how the laser beam is focused on the target material. When real-time alignment of the drive laser on droplet position is achieved, EUV generation is optimized.
    Type: Grant
    Filed: July 13, 2012
    Date of Patent: December 3, 2013
    Assignee: Cymer, Inc.
    Inventors: Paul Frihauf, Daniel J. Riggs, Matthew R. Graham, Steven Chang, Wayne J. Dunstan
  • Patent number: 8368041
    Abstract: A method and apparatus for compensating for thermal effects on the focal spot of a lens used to focus a laser beam on a target material at an irradiation site in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system is disclosed. The EUV energy output of the light system is measured at sample intervals as a proxy for the laser power. The thermal load on the focusing lens is estimated from the measured EUV power, the expected change in the focal length of the lens for the thermal load is calculated, and the lens position is adjusted to compensate for the calculated focal length change. The actual position of the lens may be determined and compared to its desired position, and adjusted to insure that it remains in the desired position.
    Type: Grant
    Filed: March 31, 2011
    Date of Patent: February 5, 2013
    Assignee: Cymer, Inc.
    Inventors: Matthew R. Graham, Olav Haugan, William N. Partlo
  • Patent number: 8295316
    Abstract: A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.
    Type: Grant
    Filed: March 24, 2010
    Date of Patent: October 23, 2012
    Assignee: Cymer, Inc.
    Inventors: Robert P. Akins, Richard L. Sandstrom, Daniel J. W. Brown, Matthew R. Graham, Kevin W. Zhang, Patrick L. Nelissen
  • Publication number: 20120248341
    Abstract: A method and apparatus for compensating for thermal effects on the focal spot of a lens used to focus a laser beam on a target material at an irradiation site in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system is disclosed. The EUV energy output of the light system is measured at sample intervals as a proxy for the laser power. The thermal load on the focusing lens is estimated from the measured EUV power, the expected change in the focal length of the lens for the thermal load is calculated, and the lens position is adjusted to compensate for the calculated focal length change. The actual position of the lens may be determined and compared to its desired position, and adjusted to insure that it remains in the desired position.
    Type: Application
    Filed: March 31, 2011
    Publication date: October 4, 2012
    Inventors: Matthew R. Graham, Olav Haugan, William N. Partlo
  • Publication number: 20120191216
    Abstract: Described are devices, methods, and systems useful in the treatment of fistulae, and in certain embodiments those having openings extending into the alimentary canal, such as anorectal fistulae. Illustratively, an anorectal fistula can be treated by placing a volumetric construct within the primary opening of the fistula. In certain embodiments, the volumetric construct can include a rolled remodelable material processed to form a substantially unitary body. Advantageous such remodelable materials can include collagenous extracellular matrix materials, such as small intestine submucosa.
    Type: Application
    Filed: April 2, 2012
    Publication date: July 26, 2012
    Inventors: F. Joseph Obermiller, Michael C. Hiles, Matthew R. Graham, Clay D. Fette
  • Publication number: 20120019826
    Abstract: An extreme ultraviolet light system includes a steering system that steers and focuses an amplified light beam traveling along a propagation direction to a focal plane near a target location within an extreme ultraviolet light chamber, a detection system including at least one detector positioned to detect an image of a laser beam reflected from at least a portion of a target material within the chamber, a wavefront modification system in the path of the reflected laser beam and between the target location and the detection system, and a controller. The wavefront modification system is configured to modify the wavefront of the reflected laser beam as a function of a target focal plane position along the propagation direction. The controller includes logic for adjusting a location of the focal plane of the amplified light beam relative to the target material based on the detected image of the reflected laser beam.
    Type: Application
    Filed: July 22, 2010
    Publication date: January 26, 2012
    Applicant: CYMER, INC.
    Inventors: Matthew R. Graham, William N. Partlo, Steven Chang, Robert A. Bergstedt
  • Publication number: 20110235663
    Abstract: A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.
    Type: Application
    Filed: March 24, 2010
    Publication date: September 29, 2011
    Inventors: Robert P. Akins, Richard L. Sandstrom, Daniel J.W. Brown, Matthew R. Graham, Kevin W. Zhang, Patrick L. Nelissen
  • Patent number: 7959554
    Abstract: Described are methods and systems for drying remodelable materials, such that selective regions of the remodelable materials have differing properties. Also described are medical graft products having selective regions of differing material properties. Advantageous remodelable materials include collagenous extracellular matrix material, such as small intestine submucosa.
    Type: Grant
    Filed: September 19, 2006
    Date of Patent: June 14, 2011
    Assignee: Cook Biotech Incorporated
    Inventors: Chad S. McAlexander, Clay Fette, Jason P. Hodde, Matthew R. Graham
  • Publication number: 20100241162
    Abstract: Described are devices, methods, and systems useful in the treatment of fistulae, and in certain embodiments those having openings extending into the alimentary canal, such as anorectal fistulae. Illustratively, an anorectal fistula can be treated by placing a volumetric construct within the primary opening of the fistula. In certain embodiments, the volumetric construct can include a rolled remodelable material processed to form a substantially unitary body. Advantageous such remodelable materials can include collagenous extracellular matrix materials, such as small intestine submucosa.
    Type: Application
    Filed: June 3, 2010
    Publication date: September 23, 2010
    Inventors: F. Joseph Obermiller, Michael C. Hiles, Matthew R. Graham, Clay D. Fette
  • Publication number: 20100049246
    Abstract: Described are devices, methods, and systems useful in the treatment of fistulae, and in certain embodiments those having openings extending into the alimentary canal, such as anorectal fistulae. Illustratively, an anorectal fistula can be treated by placing a volumetric construct within the primary opening of the fistula. In certain embodiments, the volumetric construct can include a rolled remodelable material processed to form a substantially unitary body. Advantageous such remodelable materials can include collagenous extracellular matrix materials, such as small intestine submucosa.
    Type: Application
    Filed: November 4, 2009
    Publication date: February 25, 2010
    Inventors: F. Joseph Obermiller, Michael C. Hiles, Matthew R. Graham, Clay D. Fette
  • Publication number: 20090082816
    Abstract: A remodelable spacer for use in a bone plating procedure is fabricated from an extracellular matrix material. The remodelable spacer is positionable between a bone plate and a bone during an orthopaedic plating procedure. A method of using a remodelable spacer is also disclosed.
    Type: Application
    Filed: September 20, 2007
    Publication date: March 26, 2009
    Inventors: Matthew R. Graham, Dale R. Schulze, Philip J. Jenks