Patents by Inventor Matthew T. Willson

Matthew T. Willson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering target having RFID information
    Patent number: 10896812
    Abstract: A method for affixing an RFID tag to sputtering targets is disclosed. A cavity is formed on the back of the backing plate adjacent to the outer edge. Within the cavity, an RFID tag is secured with an encapsulant. The encapsulant is cured with the RFID tag capable of communicating with an associated reader through the encapsulant.
    Type: Grant
    Filed: January 23, 2018
    Date of Patent: January 19, 2021
    Assignee: MATERION CORPORATION
    Inventors: Michael V. Pasquariello, Thomas P. St. Vincent, Matthew T. Willson, Richard J. Koba
  • SPUTTERING TARGET HAVING RFID INFORMATION
    Publication number: 20180211825
    Abstract: A method for affixing an RFID tag to sputtering targets is disclosed. A cavity is formed on the back of the backing plate adjacent to the outer edge. Within the cavity, an RFID tag is secured with an encapsulant. The encapsulant is cured with the RFID tag capable of communicating with an associated reader through the encapsulant.
    Type: Application
    Filed: January 23, 2018
    Publication date: July 26, 2018
    Inventors: Michael V. Pasquariello, Thomas P. St. Vincent, Matthew T. Willson, Richard J. Koba
  • Process for the refurbishing of a sputtering target
    Patent number: 7871563
    Abstract: Disclosed in this specification is a process for refurbishing a spent sputtering target. The process includes the step of applying sufficient heat and axial force to the filled sputtering target to hot press the filled sputtering target such that the powdered metal fuses with the un-sputtered metal, producing a refurbished target. The process may be used to refurbish precious metal targets, such as ruthenium targets.
    Type: Grant
    Filed: July 15, 2008
    Date of Patent: January 18, 2011
    Assignee: Williams Advanced Materials, Inc.
    Inventors: Robert Acker, Adrish Ganguly, Matthew T. Willson
  • PROCESS FOR THE REFURBISHING OF A SPUTTERING TARGET
    Publication number: 20090022616
    Abstract: Disclosed in this specification is a process for refurbishing a spent sputtering target. The process includes the step of applying sufficient heat and axial force to the filled sputtering target to hot press the filled sputtering target such that the powdered metal fuses with the un-sputtered metal, producing a refurbished target. The process may be used to refurbish precious metal targets, such as ruthenium targets.
    Type: Application
    Filed: July 15, 2008
    Publication date: January 22, 2009
    Inventors: Robert Acker, Adrish Ganguly, Matthew T. Willson
  • Ion beam deposition targets having an interlocking interface and a replaceable insert
    Publication number: 20020053512
    Abstract: An ion beam deposition target source consisting of a removable, centrally located inner insert surrounded by an outer region. The insert can be removed and replaced when eroded, while the outer region of the target source not eroded by the ion beam remains in place attached to a backing plate. The inner insert and the outer region are joined to each other by an interface comprising an interlocking lip or grove structure located on opposing mating surfaces on the inner insert and outer region, thereby forming the deposition target source when these components are united. The deposition target source can be attached by a bonding layer to a backing plate which is installed into an ion beam deposition machine.
    Type: Application
    Filed: November 2, 2001
    Publication date: May 9, 2002
    Inventors: Henry L. Grohman, Robert Acker, Matthew T. Willson
  • Sputtering target
    Patent number: D529057
    Type: Grant
    Filed: August 16, 2004
    Date of Patent: September 26, 2006
    Assignee: Williams Advanced Materials, Inc.
    Inventors: Matthew T. Willson, Henry L. Grohman