Patents by Inventor Matthias Georg Gottwald

Matthias Georg Gottwald has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170125481
    Abstract: Magnetic tunnel junction (MTJ) devices with a heterogeneous free layer structure particularly suited for efficient spin-torque-transfer (STT) magnetic random access memory (MRAM) (STT MRAM) are disclosed. In one aspect, a MTJ structure with a reduced thickness first pinned layer section provided below a first tunnel magneto-resistance (TMR) barrier layer is provided. The first pinned layer section includes one pinned layer magnetized in one magnetic orientation. In another aspect, a second pinned layer section and a second TMR barrier layer are provided above a free layer section and above the first TMR barrier layer in the MTJ. The second pinned layer is magnetized in a magnetic orientation that is anti-parallel (AP) to that of the first pinned layer section. In yet another aspect, the free layer comprises first and second heterogeneous layers separated by an anti-ferromagnetic coupling spacer, the first and second heterogeneous layers differing in their magnetic anisotropy.
    Type: Application
    Filed: April 25, 2016
    Publication date: May 4, 2017
    Inventors: Jimmy Jianan Kan, Chando Park, Matthias Georg Gottwald, Seung Hyuk Kang
  • Patent number: 9634237
    Abstract: A material stack of a synthetic anti-ferromagnetic (SAF) reference layer of a perpendicular magnetic tunnel junction (MTJ) may include an SAF coupling layer. The material stack may also include and an amorphous spacer layer on the SAF coupling layer. The amorphous spacer layer may include an alloy or multilayer of tantalum and cobalt or tantalum and iron or cobalt and iron and tantalum. The amorphous spacer layer may also include a treated surface of the SAF coupling layer.
    Type: Grant
    Filed: December 23, 2014
    Date of Patent: April 25, 2017
    Assignee: QUALCOMM INCORPORATED
    Inventors: Kangho Lee, Jimmy Kan, Xiaochun Zhu, Matthias Georg Gottwald, Chando Park, Seung Hyuk Kang
  • Publication number: 20170104153
    Abstract: A semiconductor device includes a first magnetic tunnel junction (MTJ) device, a second MTJ device, and a top electrode. The first MTJ device includes a barrier layer. The second MTJ device includes the barrier layer. The top electrode is coupled to the first MTJ device and the second MTJ device.
    Type: Application
    Filed: December 22, 2016
    Publication date: April 13, 2017
    Inventors: Vladimir Machkaoutsan, Matthias Georg Gottwald, Mustafa Badaroglu, Jimmy Kan, Kangho Lee, Yu Lu, Chando Park
  • Patent number: 9620706
    Abstract: An apparatus includes a capping layer disposed on top of a free layer. The apparatus also includes a magnetic etch stop layer disposed on top of the capping layer. The capping layer and the magnetic etch stop layer are included in a spin-transfer torque magnetoresistive random access memory (STT-MRAM) magnetic tunnel junction (MTJ) device.
    Type: Grant
    Filed: December 2, 2014
    Date of Patent: April 11, 2017
    Assignee: QUALCOMM Incorporated
    Inventors: Kangho Lee, Chando Park, Jimmy Kan, Matthias Georg Gottwald, Xiaochun Zhu, Seung Hyuk Kang
  • Publication number: 20170077387
    Abstract: Magnetic Tunnel Junction (MTJ) devices particularly suited for efficient spin-torque-transfer (STT) magnetic random access memory (MRAM) (STT MRAM) are disclosed. In one aspect, a MTJ structure with a reduced thickness first pinned layer provided below a tunnel magneto-resistance (TMR) barrier layer is provided. The first pinned layer provided below the TMR bather layer includes one pinned layer magnetized in only one magnetic orientation. In another aspect, a second pinned layer and a spacer layer are provided above a free layer and the TMR barrier layer in the MTJ. The second pinned layer is magnetized in a magnetic orientation that is anti-parallel to that of the first pinned layer. In yet another aspect, a giant magneto-resistance (GMR) spacer layer is provided as the spacer layer between the second pinned layer and the free layer in the MTJ.
    Type: Application
    Filed: September 16, 2015
    Publication date: March 16, 2017
    Inventors: Jimmy Jianan Kan, Matthias Georg Gottwald, Xiaochun Zhu, Chando Park, Seung Hyuk Kang
  • Patent number: 9595666
    Abstract: A method for fabricating a perpendicular magnetic tunnel junction (pMTJ) device includes growing a seed layer on a first electrode of the pMTJ device. The seed layer has a uniform predetermined crystal orientation along a growth axis. The method also includes planarizing the seed layer while maintaining the uniform predetermined crystal orientation of the seed layer.
    Type: Grant
    Filed: June 3, 2016
    Date of Patent: March 14, 2017
    Assignee: QUALCOMM INCORPORATED
    Inventors: Matthias Georg Gottwald, Jimmy Kan, Kangho Lee, Chando Park, Seung Hyuk Kang
  • Patent number: 9590010
    Abstract: Perpendicular magnetic tunnel junction (pMTJ) devices employing a pinned layer stack with a thin top anti-parallel (AP2) layer and having a transitioning layer providing a transitioning start to a body-centered cubic (BCC) crystalline/amorphous structure below the top anti-parallel (AP2) layer, to promote a high tunnel magnetoresistance ratio (TMR) with reduced pinned layer thickness are disclosed. A first anti-parallel (AP) ferromagnetic (AP1) layer in a pinned layer has a face-centered cubic (FCC) or hexagonal closed packed (HCP) crystalline structure. A transitioning material (e.g., Iron (Fe)) is provided in a transitioning layer between the AP1 layer and an AFC layer (e.g., Chromium (Cr)) that starts a transition from a FCC or HCP crystalline structure, to a BCC crystalline/amorphous structure.
    Type: Grant
    Filed: March 24, 2016
    Date of Patent: March 7, 2017
    Assignee: QUALCOMM Incorporated
    Inventors: Matthias Georg Gottwald, Jimmy Jianan Kan, Chando Park, Xiaochun Zhu, Seung Hyuk Kang
  • Publication number: 20170059669
    Abstract: A method and apparatus for testing a magnetic memory device is provided. The method begins when a magnetic field enhancing backing plate is installed in the test fixture. The magnetic field enhancing backing plate may be installed in the wafer chuck of a wafer testing probe station. The magnetic memory device is installed in the test fixture and a magnetic field is applied to the magnetic memory device. The magnetic field may be applied in-plane or perpendicular to the magnetic memory device. The performance of the magnetic memory device may be determined based on the magnetic field applied to the device. The apparatus includes a magnetic field enhancing backing plate adapted to fit a test fixture, possibly in the wafer chuck. The magnetic field enhancing backing plate is fabricated of high permeability magnetic materials, such as low carbon steel, with a thickness based on the magnetic field used in testing.
    Type: Application
    Filed: August 26, 2015
    Publication date: March 2, 2017
    Inventors: Jimmy Kan, Matthias Georg Gottwald, Chando Park, Seung Hyuk Kang
  • Patent number: 9583696
    Abstract: An apparatus includes a perpendicular magnetic anisotropy magnetic tunnel junction (pMTJ) device. The pMTJ device includes a storage layer and a reference layer. The reference layer includes a portion configured to produce a ferrimagnetic effect. The portion includes a first layer, a second layer, and a third layer. The second layer is configured to antiferromagnetically (AF) couple the first layer and the third layer during operation of the pMTJ device.
    Type: Grant
    Filed: August 15, 2014
    Date of Patent: February 28, 2017
    Assignee: QUALCOMM Incorporated
    Inventors: Matthias Georg Gottwald, Chando Park, Xiaochun Zhu, Kangho Lee, Seung Hyuk Kang
  • Patent number: 9570509
    Abstract: A semiconductor device includes a first magnetic tunnel junction (MTJ) device, a second MTJ device, and a top electrode. The first MTJ device includes a barrier layer. The second MTJ device includes the barrier layer. The top electrode is coupled to the first MTJ device and the second MTJ device.
    Type: Grant
    Filed: January 29, 2015
    Date of Patent: February 14, 2017
    Assignee: QUALCOMM Incorporated
    Inventors: Vladimir Machkaoutsan, Matthias Georg Gottwald, Mustafa Badaroglu, Jimmy Kan, Kangho Lee, Yu Lu, Chando Park
  • Patent number: 9548446
    Abstract: A magnetic tunnel junction (MTJ) device in a magnetoresistive random access memory (MRAM) and method of making the same are provided to achieve a high tunneling magnetoresistance (TMR), a high perpendicular magnetic anisotropy (PMA), good data retention, and a high level of thermal stability. The MTJ device includes a first free ferromagnetic layer, a synthetic antiferromagnetic (SAF) coupling layer, and a second free ferromagnetic layer, where the first and second free ferromagnetic layers have opposite magnetic moments.
    Type: Grant
    Filed: April 19, 2016
    Date of Patent: January 17, 2017
    Assignee: QUALCOMM Incorporated
    Inventors: Chando Park, Matthias Georg Gottwald, Kangho Lee, Seung Hyuk Kang
  • Publication number: 20160284988
    Abstract: A method for fabricating a perpendicular magnetic tunnel junction (pMTJ) device includes growing a seed layer on a first electrode of the pMTJ device. The seed layer has a uniform predetermined crystal orientation along a growth axis. The method also includes planarizing the seed layer while maintaining the uniform predetermined crystal orientation of the seed layer.
    Type: Application
    Filed: June 3, 2016
    Publication date: September 29, 2016
    Inventors: Matthias Georg GOTTWALD, Jimmy KAN, Kangho LEE, Chando PARK, Seung Hyuk KANG
  • Patent number: 9444035
    Abstract: A magnetic tunnel junction (MTJ) device includes a pinned layer, a tunnel barrier layer on the pinned layer, and a free layer on the tunnel barrier layer. The MTJ device also includes a perpendicular magnetic anisotropic (PMA) enhancement layer on the free layer, a capping layer on the PMA enhancement layer, and a conductive path electrically shorting the capping layer, the PMA enhancement layer and the free layer. A method of fabricating a perpendicular magnetic tunnel junction (pMTJ) device includes forming a capping layer, a perpendicular magnetic anisotropic (PMA) enhancement layer and a free layer. The method also includes forming a conductive layer to short the capping layer, the PMA enhancement layer and the free layer.
    Type: Grant
    Filed: September 10, 2014
    Date of Patent: September 13, 2016
    Assignee: QUALCOMM INCORPORATED
    Inventors: Chando Park, Kangho Lee, Jimmy Kan, Matthias Georg Gottwald, Xiaochun Zhu, Seung Hyuk Kang
  • Publication number: 20160233418
    Abstract: A magnetic tunnel junction (MTJ) device in a magnetoresistive random access memory (MRAM) and method of making the same are provided to achieve a high tunneling magnetoresistance (TMR), a high perpendicular magnetic anisotropy (PMA), good data retention, and a high level of thermal stability. The MTJ device includes a first free ferromagnetic layer, a synthetic antiferromagnetic (SAF) coupling layer, and a second free ferromagnetic layer, where the first and second free ferromagnetic layers have opposite magnetic moments.
    Type: Application
    Filed: April 19, 2016
    Publication date: August 11, 2016
    Inventors: Chando PARK, Matthias Georg GOTTWALD, Kangho LEE, Seung Hyuk KANG
  • Publication number: 20160225817
    Abstract: A semiconductor device includes a first magnetic tunnel junction (MTJ) device, a second MTJ device, and a top electrode. The first MTJ device includes a barrier layer. The second MTJ device includes the barrier layer. The top electrode is coupled to the first MTJ device and the second MTJ device.
    Type: Application
    Filed: January 29, 2015
    Publication date: August 4, 2016
    Inventors: Vladimir Machkaoutsan, Matthias Georg Gottwald, Mustafa Badaroglu, Jimmy Kan, Kangho Lee, Yu Lu, Chando Park
  • Patent number: 9385309
    Abstract: A method for fabricating a perpendicular magnetic tunnel junction (pMTJ) device includes growing a seed layer on a first electrode of the pMTJ device. The seed layer has a uniform predetermined crystal orientation along a growth axis. The method also includes planarizing the seed layer while maintaining the uniform predetermined crystal orientation of the seed layer.
    Type: Grant
    Filed: July 17, 2014
    Date of Patent: July 5, 2016
    Assignee: QUALCOMM INCORPORATED
    Inventors: Matthias Georg Gottwald, Jimmy Kan, Kangho Lee, Chando Park, Seung Hyuk Kang
  • Publication number: 20160181508
    Abstract: A material stack of a synthetic anti-ferromagnetic (SAF) reference layer of a perpendicular magnetic tunnel junction (MTJ) may include an SAF coupling layer. The material stack may also include and an amorphous spacer layer on the SAF coupling layer. The amorphous spacer layer may include an alloy or multilayer of tantalum and cobalt or tantalum and iron or cobalt and iron and tantalum. The amorphous spacer layer may also include a treated surface of the SAF coupling layer.
    Type: Application
    Filed: December 23, 2014
    Publication date: June 23, 2016
    Inventors: Kangho LEE, Jimmy KAN, Xiaochun ZHU, Matthias Georg GOTTWALD, Chando PARK, Seung Hyuk KANG
  • Publication number: 20160155931
    Abstract: An apparatus includes a capping layer disposed on top of a free layer. The apparatus also includes a magnetic etch stop layer disposed on top of the capping layer. The capping layer and the magnetic etch stop layer are included in a spin-transfer torque magnetoresistive random access memory (STT-MRAM) magnetic tunnel junction (MTJ) device.
    Type: Application
    Filed: December 2, 2014
    Publication date: June 2, 2016
    Inventors: Kangho Lee, Chando Park, Jimmy Kan, Matthias Georg Gottwald, Xiaochun Zhu, Seung Hyuk Kang
  • Patent number: 9324939
    Abstract: A magnetic tunnel junction (MTJ) device in a magnetoresistive random access memory (MRAM) and method of making the same are provided to achieve a high tunneling magnetoresistance (TMR), a high perpendicular magnetic anisotropy (PMA), good data retention, and a high level of thermal stability. The MTJ device includes a first free ferromagnetic layer, a synthetic antiferromagnetic (SAF) coupling layer, and a second free ferromagnetic layer, where the first and second free ferromagnetic layers have opposite magnetic moments.
    Type: Grant
    Filed: July 1, 2014
    Date of Patent: April 26, 2016
    Assignee: QUALCOMM Incorporated
    Inventors: Chando Park, Matthias Georg Gottwald, Kangho Lee, Seung Hyuk Kang
  • Publication number: 20160072043
    Abstract: A magnetic tunnel junction (MTJ) device includes a pinned layer, a tunnel barrier layer on the pinned layer, and a free layer on the tunnel barrier layer. The MTJ device also includes a perpendicular magnetic anisotropic (PMA) enhancement layer on the free layer, a capping layer on the PMA enhancement layer, and a conductive path electrically shorting the capping layer, the PMA enhancement layer and the free layer. A method of fabricating a perpendicular magnetic tunnel junction (pMTJ) device includes forming a capping layer, a perpendicular magnetic anisotropic (PMA) enhancement layer and a free layer. The method also includes forming a conductive layer to short the capping layer, the PMA enhancement layer and the free layer.
    Type: Application
    Filed: September 10, 2014
    Publication date: March 10, 2016
    Inventors: Chando PARK, Kangho LEE, Jimmy KAN, Matthias Georg Gottwald, Xiaochun ZHU, Seung Hyuk KANG