Abstract: A sensor arrangement includes at least one transparent elevation, which is formed on the surface. The transparent elevation is made of a first transparent material. At least one first facet of the transparent elevation defines a first angle with the surface. This first angle is larger than an angle at which a total-reflection occurs at an interface of the first transparent material and air and is at the same time smaller than an angle at which a total reflection occurs at an interface of the first transparent material and the liquid. A light source is arranged for emitting an incident ray into a first direction passing through the surface into the transparent elevation such that in a presence of a liquid at the first facet, an incident ray is transmitted through the first facet. In an absence of a liquid, the incident ray is reflected due to a total reflection at the facets. A light detector is provided for detecting the reflected ray.

Abstract: The invention relates to a device for optical distance measurement, particularly to a handheld device, comprising a transmission unit (12) with a light source (17, 18) for emitting optical measurement radiation (13, 20, 22) onto a target object (15), and comprising a receiving unit (14) arranged at a distance from the optical axis (38) of the transmission unit (12) and equipped with at least one optical detector (54) for receiving optical radiation (16, 49, 50) reflected from the target object (15). According to the invention, the detector (54) of the receiving unit (14) comprises a detection surface (66), the optical surface of which has varying optical sensitivity.

Abstract: The obstruction detection device for an infrared intruder detection system comprises at least one transparent facet having a roughened surface; a light emitter arranged for emitting light towards the roughened surface; a light detector arranged for detecting the intensity of light, which is transmitted or reflected or diffracted by the roughened surface into a specific direction of space; and an output device for outputting an alarm-signal, when an absolute difference between the intensity of the detected light and a reference value exceeds a threshold value. A liquid or spray applied onto the roughened surface changes its scattering patterns. This change triggers the alarm-signal.

Abstract: A substrate support constructed to support a substrate for immersion lithographic processing is disclosed. The substrate support has a central part and a peripheral part positioned around the central part. The substrate support further includes a thermal decoupler arranged to decrease heat transport between the central part and the peripheral part.

Abstract: The invention relates to an infrared intrusion detection device. It comprises a housing 1, a window 2, which is arranged at a front side of the housing and which is transparent for at least infrared radiation emitted by an intruder, an infrared sensor arranged inside the housing for detecting the infrared radiation emitted by the intruder. Further it comprises a light guide 7, which is arranged inside the housing, which has at least one light entrance facet and which has a plurality of light exit facets 3 being arranged at the front side of the housing. A light emitter 6 is arranged inside the housing for injecting light into the at least one light entrance facet of the light guide. A light detector is provided for detecting light reflected back into the housing by an obstacle in the vicinity of the window. A signal processing unit is arranged for triggering an alarm, when an absolute difference of the intensity of back-reflected light to a predetermined value exceeds a threshold value.

Abstract: The obstruction detection device for an infrared intruder detection system comprises at least one transparent facet having a roughened surface; a light emitter arranged for emitting light towards the roughened surface; a light detector arranged for detecting the intensity of light, which is transmitted or reflected or diffracted by the roughened surface into a specific direction of space; and an output device for outputting an alarm-signal, when an absolute difference between the intensity of the detected light and a reference value exceeds a threshold value. A liquid or spray applied onto the roughened surface changes its scattering patterns. This change triggers the alarm-signal.

Abstract: The sensor arrangement comprises at least one transparent elevation, which is formed on the surface. The transparent elevation is made of a first transparent material. At least one first facet of the transparent elevation defines a first angle with the surface. This first angle is larger than an angle at which a total reflection occurs at an interface of the first transparent material and air and is at the same time smaller at an angle at which a total reflection occurs at an interface of the first transparent material and the liquid. A light source is arranged for emitting an incident ray into a first direction passing through the surface into the transparent elevation such that in presence of a liquid at the first facet an incident ray will be transmitted through the first facet, wherein in absence of a liquid the incident ray will be reflected due to a total reflection at the facets. Additionally, a light detector is provided for detecting the reflected ray.

Abstract: The invention provides an obstruction detection device. It comprises a light guide having at least one groove formed into one of the light-guiding surfaces of the light guide. A light emitter is provided for emitting light into the light guide, and at least one light detector is provided for detecting the intensity of light transmitted through the light guide and/or which is reflected by at least one groove inside the light guide. Further, the obstruction detection device comprises an output device for outputting an alarm signal when an absolute difference between the intensity and a reference value exceeds a threshold value.

Abstract: The invention relates to an infrared intrusion detection device. It comprises a housing 1, a window 2, which is arranged at a front side of the housing and which is transparent for at least infrared radiation emitted by an intruder, an infrared sensor arranged inside the housing for detecting the infrared radiation emitted by the intruder. Further it comprises a light guide 7, which is arranged inside the housing, which has at least one light entrance facet and which has a plurality of light exit facets 3 being arranged at the front side of the housing. A light emitter 6 is arranged inside the housing for injecting light into the at least one light entrance facet of the light guide. A light detector is provided for detecting light reflected back into the housing by an obstacle in the vicinity of the window. A signal processing unit is arranged for triggering an alarm, when an absolute difference of the intensity of back-reflected light to a predetermined value exceeds a threshold value.

Abstract: A substrate support constructed to support a substrate for immersion lithographic processing is disclosed. The substrate support has a central part and a peripheral part positioned around the central part. The substrate support further includes a thermal decoupler arranged to decrease heat transport between the central part and the peripheral part.

Abstract: A substrate support constructed to support a substrate for immersion lithographic processing is disclosed. The substrate support has a central part and a peripheral part, the peripheral part comprising an extraction duct configured to extract a liquid from a top surface of the substrate support, the extraction duct connected to an exit duct configured to duct the liquid away from the substrate support. The substrate support further includes a thermal stabilizer, arranged in the peripheral part, configured to thermally stabilize a central part of the substrate support relative to the peripheral part.

Abstract: The field of the invention is that of devices for detecting objects concealed on human subjects. These devices are more particularly dedicated to the surveillance and protection of airport areas and transport airplanes. Currently, the devices rely either on X-ray detection or on microwave imaging. In the former case, the system can prove hazardous to human beings, and in the other case, the device raises ethical problems. The invention proposes a device whose operation relies on the reflective properties of the microwave signals polarized by the suspect objects that we are seeking to detect. This device can be portable or installed on security gates. This technique is simple to design, inexpensive, does not require any great computing power and is very well suited to the objects to be detected. The complete measurement is extremely quick and requires no sophisticated measuring instrument.