Patents by Inventor Meng LIANG

Meng LIANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11978641
    Abstract: A method for manufacturing a semiconductor structure includes: forming a semiconductor device on a main region of the device substrate, the device substrate having a peripheral region surrounding the main region; forming a first filling layer on the peripheral region of the device substrate; forming a second filling layer over the first filling layer and the semiconductor device after forming the first filling layer, the second filling layer having a polishing rate different from that of the first filling layer; performing a planarization process over the second filling layer to remove a portion of the second filling layer so that a remaining portion of the second filling layer has a planarized surface opposite to the device substrate; and bonding the device substrate to a carrier substrate through the first filling layer and the remaining portion of the second filling layer.
    Type: Grant
    Filed: June 6, 2022
    Date of Patent: May 7, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Pei-Yu Chou, Yen-Yu Chen, Meng-Ku Chen, Shiang-Bau Wang, Tze-Liang Lee
  • Publication number: 20240145302
    Abstract: A semiconductor device and a method for manufacturing an interconnecting metal layer thereof are provided. The semiconductor device includes a gate layer, a dielectric layer, an insulating layer, an epitaxial layer, and a sidewall liner. The dielectric layer is disposed on one side of the gate layer, the insulating layer is disposed on another side of the gate layer, the epitaxial layer is located on the insulating layer, and the sidewall liner penetrates the dielectric layer and the gate layer, and one end of the sidewall liner is connected to the epitaxial layer. The sidewall liner is converted from a high-k material to a low-k material by hydrogen and oxygen plasma treatments.
    Type: Application
    Filed: January 20, 2023
    Publication date: May 2, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Shien SHIAH, Bor Chiuan HSIEH, Tsai-Jung HO, Meng-Ku CHEN, Tze-Liang LEE
  • Publication number: 20240128928
    Abstract: A demodulation signal generator, coupled to an air-pulse generator comprising a flap pair, includes a resonance circuit. The resonance circuit produces a first demodulation signal and a second demodulation signal. The resonance circuit and the flap pair co-perform a resonance operation, such that the first demodulation signal and the second demodulation signal are generated via the co-performed resonance operation and have opposite polarity. The flap pair performs a differential movement to form an opening to perform a demodulation operation on a modulated air pressure variation.
    Type: Application
    Filed: December 26, 2023
    Publication date: April 18, 2024
    Applicant: xMEMS Labs, Inc.
    Inventors: Jemm Yue Liang, Jing-Meng Liu, Jye Ren
  • Patent number: 11955472
    Abstract: Disclosed are embodiments of a semiconductor structure that includes a semiconductor-controlled rectifier (e.g., for electrostatic discharge (ESD) protection). The SCR can be readily integrated into advanced semiconductor-on-insulator processing technology platforms (e.g., a fully depleted silicon-on-insulator (FDSOI) processing technology platform) that employ hybrid semiconductor substrates (i.e., semiconductor substrates with both bulk semiconductor and semiconductor-on-insulator regions) and is configured with an on-Pwell semiconductor-on-insulator gate structure that is tied to an anode terminal to effectively lower the SCR trigger voltage. To further lower the trigger voltage of the SCR, the Pwell on which the gate structure sits may be made narrower than the gate structure and/or the doping profile of the Pwell on which the gate structure sits may be graded (e.g., P to P? closer to insulator layer).
    Type: Grant
    Filed: December 17, 2021
    Date of Patent: April 9, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Meng Miao, Alain Loiseau, Souvick Mitra, Wei Liang, Robert J. Gauthier, Jr., Anindya Nath
  • Patent number: 11948892
    Abstract: A method for forming a package structure is provided. The method includes forming first conductive structures and a first semiconductor die on a same side of a redistribution structure. The method includes forming an interposer substrate over the redistribution structure, wherein the first semiconductor die is between the interposer substrate and the redistribution structure, and edges of the interposer substrate extend beyond edges of the first semiconductor die. The method includes forming a second semiconductor die on the redistribution structure, wherein the first semiconductor die and the second semiconductor die are disposed on opposite sides of the redistribution structure.
    Type: Grant
    Filed: December 17, 2021
    Date of Patent: April 2, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Hao Tsai, Meng-Liang Lin, Po-Yao Chuang, Techi Wong, Shin-Puu Jeng
  • Publication number: 20240105705
    Abstract: Structures and methods of forming fan-out packages are provided. The packages described herein may include a cavity substrate, one or more semiconductor devices located in a cavity of the cavity substrate, and one or more redistribution structures. Embodiments include a cavity preformed in a cavity substrate. Various devices, such as integrated circuit dies, packages, or the like, may be placed in the cavity. Redistribution structures may also be formed.
    Type: Application
    Filed: December 1, 2023
    Publication date: March 28, 2024
    Inventors: Po-Hao Tsai, Techi Wong, Po-Yao Chuang, Shin-Puu Jeng, Meng-Wei Chou, Meng-Liang Lin
  • Publication number: 20240098669
    Abstract: The present application provides a communication method and apparatus, and a device and a medium in a deactivated state of a secondary cell group. The method includes: determining signal measurement and/or timing of a terminal for a secondary cell group (SCG) and/or a primary SCG cell (PSCell) of the SCG when the SCG is in a deactivated state; reconfiguring the signal measurement and/or the timing according to first information if the first information is acquired; where the first information indicates a communication status between the terminal and the PSCell related to the signal measurement and/or the timing, or, the first information is instruction information of a network device received by the terminal.
    Type: Application
    Filed: December 21, 2021
    Publication date: March 21, 2024
    Inventors: Xue YAN, Meng XU, Jing LIANG
  • Publication number: 20240087902
    Abstract: The present disclosure is directed to methods and devices for devices including multiple die. A wafer is received having a plurality of die and a plurality of scribe lines. A dicing process is performed on the wafer. The dicing process includes identifying a first scribe line of the plurality of scribe lines, the first scribe line interposing a first die and a second die of the plurality of die; and performing a partial cut on the first scribe line. In embodiments, other scribe lines of the wafer are, during the dicing process, fully cut. After the dicing, the first die and the second die are mounted on a substrate such as an interposer. The first die and the second die are connected by a portion of the first scribe line, e.g., remaining from the partial cut, during the mounting.
    Type: Application
    Filed: January 19, 2023
    Publication date: March 14, 2024
    Inventors: Chieh-Lung LAI, Meng-Liang LIN, Chun-Yueh YANG, Hsien-Wei CHEN
  • Publication number: 20240079356
    Abstract: An integrated circuit package includes an interposer, the interposer including: a first redistribution layer, a second redistribution layer over the first redistribution layer in a central region of the interposer, a dielectric layer over the first redistribution layer in a periphery of the interposer, the dielectric layer surrounding the second redistribution layer in a top-down view, a third redistribution layer over the second redistribution layer and the dielectric layer, and a first direct via extending through the dielectric layer. A conductive feature of the third redistribution layer is coupled to a conductive feature of the first redistribution layer through the first direct via.
    Type: Application
    Filed: January 9, 2023
    Publication date: March 7, 2024
    Inventors: Hsien-Wei Chen, Chieh-Lung Lai, Meng-Liang Lin, Chun-Yueh Yang, Shin-Puu Jeng
  • Publication number: 20240071812
    Abstract: A method for forming a semiconductor device includes providing a semiconductor substrate, implanting n-type impurities into a device region in the semiconductor substrate to form an implanted region and an un-implanted region. The method also includes forming an epitaxial layer on the semiconductor substrate and forming a trench surrounding the device region in direct contact with the implanted region. The method further includes performing a selective lateral etch through the trench to remove the implanted region to form a cavity under the epitaxial layer. The un-implanted region is retained to form a pillar under the epitaxial layer. Next, an insulating material is disposed in the cavity and the trench. The method forms a single crystalline region that is separated from the semiconductor substrate by the insulating material except at the pillar.
    Type: Application
    Filed: August 30, 2022
    Publication date: February 29, 2024
    Inventors: Chung-Lei Chen, Anhao Cheng, Meng-I Kang, Yen-Liang Lin
  • Publication number: 20240057944
    Abstract: A device of contactless physiological measurement with error compensation function is disclosed, and comprises a camera and a modular electronic device that is embedded with a face detection unit, a physiological parameter estimating unit, a feature extraction unit, an error compensation unit, and a physiological parameter generating unit therein. The face detection unit detects a face region from a user image, such that the physiological parameter estimating unit extracts an rPPG signal from the face region, so as to calculate a preliminary physiological parameter based on the rPPG signal. Simultaneously, the feature extraction unit extracts an error feature from the face region, such that the error compensation unit generates an error compensation parameter based on the error feature and the preliminary physiological parameter.
    Type: Application
    Filed: December 28, 2022
    Publication date: February 22, 2024
    Applicant: FaceHeart Inc.
    Inventors: Yi-Chiao Wu, Li-Wen Chiu, Meng-Liang Chung, Bing-Fei Wu
  • Publication number: 20240063083
    Abstract: A semiconductor device includes: a die having die connectors at a front side of the die; a molding material around the die; and a redistribution structure, where the die connectors of the die are attached to a first side of the redistribution structure, where the redistribution structure includes: a dielectric layer; a conductive line extending along a first surface of the dielectric layer facing the die; and a warpage tuning layer contacting and extending along a first surface of the conductive line facing the die, where a first coefficient of thermal expansion (CTE) of the conductive line is smaller than a second CTE of the warpage tuning layer.
    Type: Application
    Filed: August 19, 2022
    Publication date: February 22, 2024
    Inventors: Chieh-Lung Lai, Meng-Liang Lin, Hsien-Wei Chen, Shin-Puu Jeng
  • Patent number: 11908764
    Abstract: A semiconductor package and a manufacturing method thereof are provided. The semiconductor package includes at least a circuit substrate, a semiconductor die and a filling material. The circuit substrate has a first surface, a second surface opposite to the first surface and a cavity concave from the first surface. The circuit substrate includes a dielectric material and a metal floor plate embedded in the dielectric material and located below the cavity. A location of the metal floor plate corresponds to a location of the cavity. The metal floor plate is electrically floating and isolated by the dielectric material. The semiconductor die is disposed in the cavity and electrically connected with the circuit substrate. The filling material is disposed between the semiconductor die and the circuit substrate. The filling material fills the cavity and encapsulates the semiconductor die to attach the semiconductor die and the circuit substrate.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: February 20, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Meng-Liang Lin, Po-Yao Chuang, Te-Chi Wong, Shuo-Mao Chen, Shin-Puu Jeng
  • Patent number: 11901279
    Abstract: A semiconductor package and a method of manufacturing the same are provided. The semiconductor package includes a semiconductor die, an encapsulant and a redistribution structure. The encapsulant laterally encapsulates the semiconductor die. The redistribution structure is disposed on the encapsulant and electrically connected with the semiconductor die, wherein the redistribution structure comprises a first conductive via, a first conductive wiring layer and a second conductive via stacked along a stacking direction, the first conductive via has a first terminal surface contacting the first conductive wiring layer, the second conductive via has a second terminal surface contacting the first conductive wiring layer, an area of a first cross section of the first conductive via is greater than an area of the first terminal surface of the first conductive via, and an area of a second cross section of the second conductive via is greater than an area of the second terminal surface of the second conductive via.
    Type: Grant
    Filed: March 14, 2023
    Date of Patent: February 13, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Ting Hung, Meng-Liang Lin, Shin-Puu Jeng, Yi-Wen Wu, Po-Yao Chuang
  • Patent number: 11901277
    Abstract: A semiconductor package and a method of manufacturing the same are provided. The semiconductor package includes a semiconductor die, an encapsulant and a redistribution structure. The encapsulant laterally encapsulates the semiconductor die. The redistribution structure is disposed on the encapsulant and electrically connected with the semiconductor die, wherein the redistribution structure comprises a first conductive via, a first conductive wiring layer and a second conductive via stacked along a stacking direction, the first conductive via has a first terminal surface contacting the first conductive wiring layer, the second conductive via has a second terminal surface contacting the first conductive wiring layer, an area of a first cross section of the first conductive via is greater than an area of the first terminal surface of the first conductive via, and an area of a second cross section of the second conductive via is greater than an area of the second terminal surface of the second conductive via.
    Type: Grant
    Filed: July 3, 2022
    Date of Patent: February 13, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Ting Hung, Meng-Liang Lin, Shin-Puu Jeng, Yi-Wen Wu, Po-Yao Chuang
  • Publication number: 20240047401
    Abstract: A package structure is provided. The package structure includes an interposer substrate including an insulating structure, a conductive pad, a first conductive line, and a first conductive via structure. The package structure includes an electronic device bonded to the conductive pad. The package structure includes a chip structure bonded to the first end portion of the first conductive via structure. The package structure includes a first conductive bump connected between the chip structure and the first end portion of the first conductive via structure. The first end portion protrudes into the first conductive bump and is in direct contact with the first conductive bump.
    Type: Application
    Filed: October 17, 2023
    Publication date: February 8, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Meng-Liang LIN, Po-Yao CHUANG, Shin-Puu JENG
  • Publication number: 20240047251
    Abstract: A gas purge device includes a first nozzle and a gas gate. The first nozzle is coupled to a front-opening unified pod (FOUP) through a first port of the FOUP. The gas gate is coupled to the first nozzle via a first pipe. The gas gate includes a first mass flow controller (MFC), a second MFC, and a first switch unit. The first MFC is configured to control a first flow of a first gas. The second MFC is configured to control a second flow of a second gas. The first switch unit is coupled to the first MFC and the second MFC, and is configured to provide the first gas to the first nozzle through the first pipe or receive the second gas from the first nozzle through the first pipe according to a process configuration.
    Type: Application
    Filed: October 19, 2023
    Publication date: February 8, 2024
    Inventors: MENG-LIANG WEI, SUN-FU CHOU
  • Publication number: 20240030199
    Abstract: An embodiment semiconductor device includes an interposer, a semiconductor die electrically connected to the interposer, an integrated passive device die electrically connected to the interposer, the integrated passive device die including two or more seal rings, and a first alignment mark formed on the integrated passive device die within a first area enclosed by a first one of the two or more seal rings. The integrated passive device die may further include two or more integrated passive devices located within respective areas enclosed by respective ones of the two or more seal rings. Each of the two or more integrated passive devices may include electrical connections that are formed as a plurality of micro-bumps, and the first alignment mark may be electrically isolated from the electrical connections, and the first alignment mark and the electrical connections may share a common material.
    Type: Application
    Filed: July 21, 2022
    Publication date: January 25, 2024
    Inventors: Hsien-Wei Chen, Chun Huan Wei, Meng-Liang Lin, Shin-Puu Jeng
  • Publication number: 20240014115
    Abstract: A semiconductor structure includes an interposer including redistribution wiring interconnects and redistribution insulating layers; a first semiconductor die attached to the interposer through a first array of solder material portions; and a second semiconductor die attached to the interposer through a second array of solder material portions. The interposer includes at least one inductor structure located between an area of the first array of solder material portions and an area of the second array of solder material portions in a plan view and laterally encloses a respective area in the plan view.
    Type: Application
    Filed: July 5, 2022
    Publication date: January 11, 2024
    Inventors: Hsien-Wei Chen, Meng-Liang Lin, Shin-Puu Jeng
  • Patent number: 11854955
    Abstract: A method includes forming an interposer, which includes forming a rigid dielectric layer, and removing portions of the rigid dielectric layer. The method further includes bonding a package component to an interconnect structure, and bonding the interposer to the interconnect structure. A spacer in the interposer has a bottom surface contacting a top surface of the package component, and the spacer includes a feature selected from the group consisting of a metal feature, the rigid dielectric layer, and combinations thereof. A die-saw is performed on the interconnect structure.
    Type: Grant
    Filed: July 23, 2021
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Po-Hao Tsai, Techi Wong, Meng-Wei Chou, Meng-Liang Lin, Po-Yao Chuang, Shin-Puu Jeng