Patents by Inventor Michael A. Stuber

Michael A. Stuber has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9390974
    Abstract: An integrated circuit assembly includes a first substrate and a second substrate, with active layers formed on the first surfaces of each substrate, and with the second surfaces of each substrate coupled together. A method of fabricating an integrated circuit assembly includes forming active layers on the first surfaces of each of two substrates, and coupling the second surfaces of the substrates together.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: July 12, 2016
    Assignee: QUALCOMM INCORPORATED
    Inventors: Michael A. Stuber, Stuart B. Molin
  • Publication number: 20160191040
    Abstract: A method and apparatus for use in improving the linearity characteristics of MOSFET devices using an accumulated charge sink (ACS) are disclosed. The method and apparatus are adapted to remove, reduce, or otherwise control accumulated charge in SOI MOSFETs, thereby yielding improvements in FET performance characteristics. In one exemplary embodiment, a circuit having at least one SOI MOSFET is configured to operate in an accumulated charge regime. An accumulated charge sink, operatively coupled to the body of the SOI MOSFET, eliminates, removes or otherwise controls accumulated charge when the FET is operated in the accumulated charge regime, thereby reducing the nonlinearity of the parasitic off-state source-to-drain capacitance of the SOI MOSFET. In RF switch circuits implemented with the improved SOI MOSFET devices, harmonic and intermodulation distortion is reduced by removing or otherwise controlling the accumulated charge when the SOI MOSFET operates in an accumulated charge regime.
    Type: Application
    Filed: September 3, 2015
    Publication date: June 30, 2016
    Inventors: Christopher N. Brindle, Michael A. Stuber, Dylan J. Kelly, Clint L. Kemerling, George Imthurn, Robert B. Welstand, Mark L. Burgener
  • Patent number: 9368468
    Abstract: An integrated circuit assembly includes an insulating layer having a having a first surface and a second surface, where the first surface of the insulating layer is less than 10 microns below an upper plane of the integrated circuit assembly. An active layer contacts the first surface of the insulating layer. A metal bond pad is electrically connected to the active layer and formed on the second surface of the insulating layer, and is also electrically connected to a printed circuit board.
    Type: Grant
    Filed: December 30, 2014
    Date of Patent: June 14, 2016
    Assignee: QUALCOMM SWITCH CORP.
    Inventors: Michael A. Stuber, Stuart B. Molin, Mark Drucker, Peter Fowler
  • Patent number: 9362492
    Abstract: Various methods and devices that involve phase change material (PCM) switches are disclosed. An exemplary integrated circuit comprises an active layer with a plurality of field effect transistor (FET) channels for a plurality of FETs. The integrated circuit also comprises an interconnect layer comprising a plurality of conductive interconnects. The plurality of conductive interconnects couple the plurality of field effect transistors. The integrated circuit also comprises an insulator layer covering at least a portion of the interconnect layer. The integrated circuit also comprises a channel of a radio-frequency (RF) PCM switch. The channel of the RF PCM switch is formed on the insulator layer.
    Type: Grant
    Filed: August 25, 2014
    Date of Patent: June 7, 2016
    Assignee: QUALCOMM SWITCH CORP.
    Inventors: Sinan Goktepeli, Michael A. Stuber
  • Patent number: 9331098
    Abstract: An integrated circuit assembly comprises an insulating layer, a semiconductor layer, a handle layer, a metal interconnect layer, and transistors. The insulating layer has a first surface, a second surface, and a hole extending from the first surface to the second surface. The semiconductor layer has a first surface and a second surface, the first surface of the semiconductor layer contacting the first surface of the insulating layer. The handle layer is coupled to the second surface of the semiconductor layer. The metal interconnect layer is coupled to the second surface of the insulating layer, the metal interconnect layer being disposed within the hole in the insulating layer. The transistors are located in the semiconductor layer. The hole in the insulating layer extends to at least the first surface of the semiconductor layer. The metal interconnect layer electrically couples a plurality of the transistors to each other.
    Type: Grant
    Filed: July 19, 2014
    Date of Patent: May 3, 2016
    Assignee: QUALCOMM SWITCH CORP.
    Inventors: Michael A. Stuber, Stuart B. Molin, Chris Brindle
  • Publication number: 20160118406
    Abstract: A semiconductor structure is formed with an active layer having an active device including a body region. The active device is formed by top side processing in and on a top side of a semiconductor on insulator wafer. A damaged region is formed within a portion of the body region by bottom side processing at a bottom side of the semiconductor on insulator wafer, the damaged region having a structure sufficient to prevent a kink effect and self-latching in operation of the active device.
    Type: Application
    Filed: October 22, 2014
    Publication date: April 28, 2016
    Inventors: Paul A. Nygaard, Michael A. Stuber
  • Publication number: 20160056373
    Abstract: Various methods and devices that involve phase change material (PCM) switches are disclosed. An exemplary integrated circuit comprises an active layer with a plurality of field effect transistor (FET) channels for a plurality of FETs. The integrated circuit also comprises an interconnect layer comprising a plurality of conductive interconnects. The plurality of conductive interconnects couple the plurality of field effect transistors. The integrated circuit also comprises an insulator layer covering at least a portion of the interconnect layer. The integrated circuit also comprises a channel of a radio-frequency (RF) PCM switch. The channel of the RF PCM switch is formed on the insulator layer.
    Type: Application
    Filed: August 25, 2014
    Publication date: February 25, 2016
    Inventors: Sinan Goktepeli, Michael A. Stuber
  • Publication number: 20160043044
    Abstract: Various methods and devices that involve EMI shields for radio frequency layer transferred devices are disclosed. One method comprises forming a radio frequency field effect transistor in an active layer of a semiconductor on insulator wafer. The semiconductor on insulator wafer has a buried insulator side and an active layer side. The method further comprises bonding a second wafer to the active layer side of the semiconductor on insulator wafer. The method further comprises forming a shield layer for the semiconductor device. The shield layer comprises an electrically conductive material. The method further comprises coupling the radio frequency field effect transistor to a circuit comprising a radio frequency component. The method further comprises singulating the radio frequency field effect transistor, radio frequency component, and the shield layer into a die. The shield layer is located between a substrate of the radio frequency component and the radio frequency field effect transistor.
    Type: Application
    Filed: August 7, 2014
    Publication date: February 11, 2016
    Inventor: Michael A. Stuber
  • Publication number: 20160035833
    Abstract: An integrated circuit chip is formed with an active layer and a trap rich layer. The active layer is formed with an active device layer and a metal interconnect layer. The trap rich layer is formed above the active layer. In some embodiments, the active layer is included in a semiconductor wafer, and the trap rich layer is included in a handle wafer.
    Type: Application
    Filed: September 16, 2015
    Publication date: February 4, 2016
    Inventors: Christopher N. Brindle, Michael A. Stuber, Stuart B. Molin
  • Publication number: 20150364597
    Abstract: A vertical semiconductor device is formed in a semiconductor layer having a first surface, a second surface and background doping. A first doped region, doped to a conductivity type opposite that of the background, is formed at the second surface of the semiconductor layer. A second doped region of the same conductivity type as the background is formed at the second surface of the semiconductor layer, inside the first doped region. A portion of the semiconductor layer is removed at the first surface, exposing a new third surface. A third doped region is formed inside the semiconductor layer at the third surface. Electrical contact is made at least to the second doped region (via the second surface) and the third doped region (via the new third surface). In this way, vertical DMOS, IGBT, bipolar transistors, thyristors, and other types of devices can be fabricated in thinned semiconductor, or SOI layers.
    Type: Application
    Filed: August 12, 2015
    Publication date: December 17, 2015
    Inventors: Stuart B. Molin, Michael A. Stuber
  • Patent number: 9159825
    Abstract: A vertical semiconductor device is formed in a semiconductor layer having a first surface, a second surface and background doping. A first doped region, doped to a conductivity type opposite that of the background, is formed at the second surface of the semiconductor layer. A second doped region of the same conductivity type as the background is formed at the second surface of the semiconductor layer, inside the first doped region. A portion of the semiconductor layer is removed at the first surface, exposing a new third surface. A third doped region is formed inside the semiconductor layer at the third surface. Electrical contact is made at least to the second doped region (via the second surface) and the third doped region (via the new third surface). In this way, vertical DMOS, IGBT, bipolar transistors, thyristors, and other types of devices can be fabricated in thinned semiconductor, or SOI layers.
    Type: Grant
    Filed: April 10, 2013
    Date of Patent: October 13, 2015
    Assignee: Silanna Semiconductor U.S.A., Inc.
    Inventors: Stuart B. Molin, Michael A. Stuber
  • Publication number: 20150287783
    Abstract: A trap rich layer for an integrated circuit chip is formed by chemical etching and/or laser texturing of a surface of a semiconductor layer. In some embodiments, a trap rich layer is formed by a technique selected from the group of techniques consisting of laser texturing, chemical etch, irradiation, nanocavity formation, porous Si-etch, semi-insulating polysilicon, thermal stress relief and mechanical texturing. Additionally, combinations of two or more of these techniques may be used to form a trap rich layer.
    Type: Application
    Filed: June 22, 2015
    Publication date: October 8, 2015
    Inventors: Anton Arriagada, Michael A. Stuber, Stuart B. Molin
  • Patent number: 9153434
    Abstract: An integrated circuit chip is formed with an active layer and a trap rich layer. The active layer is formed with an active device layer and a metal interconnect layer. The trap rich layer is formed above the active layer. In some embodiments, the active layer is included in a semiconductor wafer, and the trap rich layer is included in a handle wafer.
    Type: Grant
    Filed: September 5, 2014
    Date of Patent: October 6, 2015
    Assignee: Silanna Semiconductor U.S.A., Inc.
    Inventors: Chris N. Brindle, Michael A. Stuber, Stuart B. Molin
  • Patent number: 9130564
    Abstract: A method and apparatus for use in improving the linearity characteristics of MOSFET devices using an accumulated charge sink (ACS) are disclosed. The method and apparatus are adapted to remove, reduce, or otherwise control accumulated charge in SOI MOSFETs, thereby yielding improvements in FET performance characteristics. In one exemplary embodiment, a circuit having at least one SOI MOSFET is configured to operate in an accumulated charge regime. An accumulated charge sink, operatively coupled to the body of the SOI MOSFET, eliminates, removes or otherwise controls accumulated charge when the FET is operated in the accumulated charge regime, thereby reducing the nonlinearity of the parasitic off-state source-to-drain capacitance of the SOI MOSFET. In RF switch circuits implemented with the improved SOI MOSFET devices, harmonic and intermodulation distortion is reduced by removing or otherwise controlling the accumulated charge when the SOI MOSFET operates in an accumulated charge regime.
    Type: Grant
    Filed: March 25, 2013
    Date of Patent: September 8, 2015
    Assignee: Peregrine Semiconductor Corporation
    Inventors: Christopher N. Brindle, Michael A. Stuber, Dylan J. Kelly, Clint L. Kemerling, George Imthurn, Robert B. Welstand, Mark L. Burgener
  • Publication number: 20150249056
    Abstract: In one embodiment, an integrated circuit with a signal-processing region is disclosed. The integrated circuit comprises a silicon-on-insulator die singulated from a silicon-on-insulator wafer. The silicon on insulator die comprises an active layer, an insulator layer, a substrate, and a strengthening layer. The substrate consists of an excavated substrate region, and a support region, the support region is in contact with the insulator layer. The excavated region covers a majority of the signal-processing region of the integrated circuit.
    Type: Application
    Filed: May 8, 2015
    Publication date: September 3, 2015
    Inventors: Stuart B. Molin, Paul A. Nygaard, Michael A. Stuber
  • Publication number: 20150179505
    Abstract: A method is disclosed. The method comprises fabricating a device layer on a top portion of a semiconductor wafer that comprises a substrate. The device layer comprises an active device. The method also comprises forming a trap rich layer at a top portion of a handle wafer. The forming comprises etching the top portion of the handle wafer to form a structure in the top portion of the handle wafer that configures the trap rich layer. The method also comprises bonding a top surface of the handle wafer to a top surface of the semiconductor wafer. The method also comprises removing a bottom substrate portion of the semiconductor wafer.
    Type: Application
    Filed: February 26, 2015
    Publication date: June 25, 2015
    Inventors: Michael A. Stuber, George Imthurn
  • Patent number: 9064697
    Abstract: A trap rich layer for an integrated circuit chip is formed by chemical etching and/or laser texturing of a surface of a semiconductor layer. In some embodiments, a trap rich layer is formed by a technique selected from the group of techniques consisting of laser texturing, chemical etch, irradiation, nanocavity formation, porous Si-etch, semi-insulating polysilicon, thermal stress relief and mechanical texturing. Additionally, combinations of two or more of these techniques may be used to form a trap rich layer.
    Type: Grant
    Filed: August 28, 2013
    Date of Patent: June 23, 2015
    Assignee: Silanna Semiconductor U.S.A., Inc.
    Inventors: Anton Arriagada, Michael A. Stuber, Stuart B. Molin
  • Publication number: 20150140782
    Abstract: An integrated circuit assembly includes an insulating layer having a having a first surface and a second surface. A first active layer contacts the first surface of the insulating layer. A metal bond pad is electrically connected to the first active layer and formed on the second surface of the insulating layer. A substrate having a first surface and a second surface, with a second active layer formed in the first surface, is provided such that the first active layer is coupled to the second surface of the substrate.
    Type: Application
    Filed: December 16, 2014
    Publication date: May 21, 2015
    Inventors: Michael A. Stuber, Stuart B. Molin, Mark Drucker, Peter Fowler
  • Publication number: 20150137307
    Abstract: An integrated circuit assembly is formed with an insulating layer, a semiconductor layer, an active device, first, second, and third electrically conductive interconnect layers, and a plurality of electrically conductive vias. The insulating layer has a first surface and a second surface. The second surface is below the first surface. A substrate layer has been removed from the second surface. The semiconductor layer has a first surface and a second surface. The first surface of the semiconductor layer contacts the first surface of the insulating layer. The active device is formed in a region of the semiconductor layer. The first electrically conductive interconnect layer forms an electrically conductive ring. The second electrically conductive interconnect layer forms a first electrically conductive plate above the electrically conductive ring and the region of the semiconductor layer.
    Type: Application
    Filed: January 14, 2015
    Publication date: May 21, 2015
    Inventor: Michael A. Stuber
  • Patent number: 9034732
    Abstract: Embodiments of the present invention provide for the provisioning of efficient support to semiconductor-on-insulator (SOI) structures. Embodiments of the present invention may additionally provide for SOI structures with improved heat dissipation performance while preserving the beneficial electrical device characteristics that accompany SOI architectures. In one embodiment, an integrated circuit is disclosed. The integrated circuit comprises a silicon-on-insulator die from a silicon-on-insulator wafer. The silicon on insulator die comprises an active layer, an insulator layer, a substrate, and a strengthening layer. The substrate consists of an excavated substrate region, and a support region, the support region is in contact with the insulator layer. The support region and the strengthening layer are configured to act in combination to provide a majority of a required stabilizing force to the silicon-on-insulator die when it is singulated from the silicon-on-insulator wafer.
    Type: Grant
    Filed: July 14, 2010
    Date of Patent: May 19, 2015
    Assignee: Silanna Semiconductor U.S.A., Inc.
    Inventors: Stuart B. Molin, Paul A. Nygaard, Michael A. Stuber