Patents by Inventor Michael Berman

Michael Berman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20060065985
    Abstract: A substrate that is adapted for the fabrication of integrated circuits, having an improved scribe mark. The scribe mark is small enough to fit within an edge exclusion zone of the substrate, is disposed wholly within the edge exclusion zone of the substrate, is not disposed on a backside of the substrate, and is readable by optical character recognition equipment. By placing the scribe mark within the edge exclusion zone of the substrate, in this manner, none of the space for salable dice is taken by the scribe mark. Further, the small size of the scribe mark reduces effects from chemical streaming, chemical mechanical polishing, and particulate expulsion. In addition, standard optical character recognition equipment can be used to read the scribe mark, without rendering the equipment unable to read prior art scribe marks.
    Type: Application
    Filed: September 30, 2004
    Publication date: March 30, 2006
    Inventors: Michael Berman, Bruce Whitefield
  • Publication number: 20060043582
    Abstract: A device and method wherein a thermo electric generator device is disposed between stacks of a multiple level device, or is provided on or under a die of a package and is conductively connected to the package. The thermo electric generator device is configured to generate a voltage by converting heat into electric power. The voltage which is generated by the thermo electric generator can be recycled back into the die itself, or to a higher-level unit in the system, even to a cooling fan.
    Type: Application
    Filed: August 31, 2004
    Publication date: March 2, 2006
    Inventors: Zachary Prather, Steven Reder, Michael Berman
  • Publication number: 20060009830
    Abstract: Devices and methods for stabilizing a lead in a cardiac vein.
    Type: Application
    Filed: May 27, 2005
    Publication date: January 12, 2006
    Inventors: Robert Atkinson, Peter Keith, Michael Berman
  • Publication number: 20050287927
    Abstract: A pad groove analyzer and associated method configured to assess the grooves on the pad and determine how worn the pad is. The pad groove analyzer may be configured to monitor the grooves via a contact or no-contact process. In a contact process, the pad groove analyzer may include a stylus which physically contacts and moves along the pad. As the stylus falls into the grooves in the pad as the stylus moves along the pad, signals are created, and a stylus monitor uses the signals to determine to what extent the pad is worn. The stylus monitor can be configured to communicate with the general tool controller. In a no-contact process, the pad groove analyzer may take several different forms.
    Type: Application
    Filed: June 29, 2004
    Publication date: December 29, 2005
    Inventors: Michael Berman, Steven Reder, Matthew Trattles
  • Publication number: 20050263160
    Abstract: An intraoral aversion device to assist a user in quitting an undesirable behavior such as tobacco smoking, tobacco chewing, use of snuff, illicit drug use, excessive alcohol consumption, excessive food consumption, and/or other undesirable activity facilitated via the mouth. The aversion device may be wholly or partially configured to be disposed in the user's mouth, for example. The aversion device may include a detector and a output device, wherein the detector is configured to detect a parameter indicative of the user engaging in the habit or undesirable activity. If (and only if) the detector detects such a parameter, the output device delivers a negative stimulus to the user, thus providing negative feedback and creating an incentive for the user to limit if not eliminate the undesirable activity.
    Type: Application
    Filed: September 17, 2004
    Publication date: December 1, 2005
    Inventors: David Utley, Jack Utley, Peter Keith, Michael Berman, Robert Atkinson
  • Publication number: 20050258044
    Abstract: A method and system wherein magnets are employed on the outside of a plating bath chamber to control the field lines that are used during the plating process. By being able to control the field lines during the plating process, improved gap fill and uniformity can be achieved. The magnetic field acting on the bath can be continuous, pulsed, stressed (i.e., the shape of the field can be changed), sinusoidal, etc. The magnetic field can be modulated as function of time to produce a desired copper uniformity on the wafer. It is anticipated that there is no limit to how the shape of the magnets or magnetic field can be configured and controlled to achieve the desired result for both fill of deep contacts and the uniformity needed to match the succeeding polishing process.
    Type: Application
    Filed: May 21, 2004
    Publication date: November 24, 2005
    Inventors: Michael Berman, Steven Reder
  • Publication number: 20050181706
    Abstract: A method and control system for detecting harmonic oscillation in a chemical mechanical polishing process and reacting thereto, such as by taking steps to at least one of: 1) reduce or eliminate the harmonic oscillation; and 2) counter the noise which is associated with the harmonic oscillation. By reducing or eliminating harmonic oscillation, films with reduced structure strengths including low k dielectric films can be used. By countering the noise, the quality of the work environment is improved.
    Type: Application
    Filed: February 17, 2004
    Publication date: August 18, 2005
    Inventors: Michael Berman, Steven Reder, Bruce Whitefield
  • Patent number: 6917430
    Abstract: A method and control system for controlling the delivery of a source chemical by a carrier gas. The carrier gas is delivered to a vessel containing the source chemical, and a flow of source chemical and carrier gas is carried from the vessel along a flow line. A sensor is used to detect light absorption of the flow, and the flow is adjusted based on what is detected. The sensor provides that light is directed transversely through the flow line and that the intensity of the light which passes through the flow line is detected by a detector. The detector forwards an output signal to a signal processing unit which thereafter adjusts the flow based on what was detected. The light may be filtered. The flow line includes at least a portion which provides an optical window for allowing light to pass therethrough.
    Type: Grant
    Filed: June 17, 2002
    Date of Patent: July 12, 2005
    Assignee: LSI Logic Corporation
    Inventors: Michael Berman, Scott Gould
  • Publication number: 20050131447
    Abstract: An evacuation sheath assembly and method of treating occluded vessels which reduces the risk of distal embolization during vascular interventions is provided. The evacuation sheath assembly includes an elongated tube defining an evacuation lumen having proximal and distal ends. A proximal sealing surface is provided on a proximal portion of the tube and is configured to form a seal with a lumen of a guided catheter. A distal sealing surface is provided on a distal portion of the tube and is configured to form a seal with a blood vessel. A method of treatment of a blood vessel using the evacuation sheath assembly includes advancing the evacuation sheath assembly into the blood vessel through a guide catheter. Prior to advancing a device across a stenosis to be treated, normal antegrade blood flow in the blood vessel proximate to the stenosis is stopped. While blood flow is stopped, the stenosis is treated.
    Type: Application
    Filed: January 14, 2005
    Publication date: June 16, 2005
    Inventors: Dennis Wahr, Thomas Ressemann, Peter Keith, David Blaeser, Michael Berman
  • Publication number: 20050110512
    Abstract: A device for measuring resistances associated with electrical contacts of a contact ring used in a semiconductor wafer electroplating process. The device includes a substrate and a conductive pattern on the substrate. The conductive pattern is electrically contactable with the electrical contacts of the contact ring. Resistance measurement circuitry is connected to the conductive pattern. The resistance measurement circuitry is configured to send test signals to the conductive pattern, receive signals from the conductive pattern, and measure the resistances associated with the electrical contacts of the contact ring. A method of using such a device to measure resistances associated with electrical contacts of a contact ring used in a semiconductor wafer electroplating process is also provided.
    Type: Application
    Filed: November 26, 2003
    Publication date: May 26, 2005
    Inventors: Michael Berman, Steven Reder
  • Publication number: 20050109369
    Abstract: A method for performing the edge clean operation on a semiconductor wafer. A laser beam is used to accurately clean the edge of the wafer. The wafer is clamped concentrically to a chuck and rotated at a selectable speed, preferably in the range of 10 rpm to 1,000 rpm. A laser beam of variable power is directed onto toward the edge of the wafer at an oblique angle through a nozzle through which an inert purge gas is simultaneously passed. The laser beam removes unwanted deposits at the edge of the wafer and the gas is used to blow away the residue and prevent slag buildup on other parts of the wafer. The process is preferably carried out in an exhausted chamber.
    Type: Application
    Filed: December 16, 2004
    Publication date: May 26, 2005
    Inventors: Steven Reder, Michael Berman, Rennie Barber
  • Publication number: 20050093111
    Abstract: An integrated circuit package comprises a cavity for housing an integrated circuit (IC) and an antenna provided as part of the package that is located substantially outside the cavity. The antenna may be located on the floor of the IC package that lies in the region outside of the IC cavity. Alternatively, the antenna may be located on the upper or lower surface of the lid sealing the IC package. The antenna may be placed in the floor or on a surface of the IC lid by forming depressions in the floor or lid surface and depositing conductive material in the depressions. The conductive material deposition may be by sputtering, evaporation, or other known physical or chemical deposition method. Antennas formed in the upper surface of an IC lid may be coupled to a pin of the IC package so that the antenna may be electrically coupled to a transceiver component on the IC within the package.
    Type: Application
    Filed: December 15, 2004
    Publication date: May 5, 2005
    Applicant: LSI Logic Corporation
    Inventors: Michael Berman, Rennie Barber
  • Publication number: 20050090121
    Abstract: A system for thinning a layer on a substrate without damaging a delicate underlying layer in the substrate. The system includes means for mechanically eroding the layer on the substrate, and means for electropolishing the layer on the substrate. In this manner, portions of the layer that cannot be removed by electropolishing can be removed by the mechanical erosion. However, electropolishing can preferentially be used on some portions of the layer so that unnecessary mechanical stresses can be avoided. Thus, the system imparts less mechanical stress to the substrate during the removal of the layer, and the delicate underlying layer receives less damage during the process, and preferably no damage whatsoever.
    Type: Application
    Filed: October 24, 2003
    Publication date: April 28, 2005
    Inventors: Steven Reder, Michael Berman
  • Publication number: 20050087451
    Abstract: An abrasive electrolyte solution adapted for thinning a layer on a substrate without contaminating the substrate. The abrasive electrolyte solution includes an electrically conductive fluid that is substantially free of materials that are reactive within a desired operating voltage potential range, and substantially free of materials that inhibit desired reactions within the desired operating voltage potential range. Also included are abrasive particles that have a size that is small enough for the particles to substantially remain in suspension in the electrically conductive fluid, and large enough for the particles to provide a desired degree of erosion of the layer on the substrate when the abrasive electrolyte solution is forced against the layer on the substrate.
    Type: Application
    Filed: October 24, 2003
    Publication date: April 28, 2005
    Inventors: Michael Berman, Steven Reder
  • Publication number: 20050087450
    Abstract: An electropolishing pad adapted for thinning a layer on a substrate, without damaging a delicate underlying layer in the substrate. The electropolishing pad includes a pad formed of an electrically conductive material, for applying a desired voltage potential through the electropolishing pad to electrolytically erode the layer on the substrate. An operating surface on the pad physically erodes the layer on the substrate. The operating surface has a roughness that is not so great as to create friction sufficient to induce a shearing force that damages the delicate underlying layer in the substrate, but great enough so as to physically erode the layer on the substrate.
    Type: Application
    Filed: October 24, 2003
    Publication date: April 28, 2005
    Inventors: Steven Reder, Michael Berman
  • Publication number: 20050080472
    Abstract: Devices and methods for stabilizing a lead in a cardiac vein.
    Type: Application
    Filed: December 16, 2003
    Publication date: April 14, 2005
    Inventors: Robert Atkinson, Peter Keith, Michael Berman
  • Patent number: 6874510
    Abstract: A method for performing the edge clean operation on a semiconductor wafer. A laser beam is used to accurately clean the edge of the wafer. The wafer is clamped concentrically to a chuck and rotated at a selectable speed, preferably in the range of 10 rpm to 1,000 rpm. A laser beam of variable power is directed onto toward the edge of the wafer at an oblique angle through a nozzle through which an inert purge gas is simultaneously passed. The laser beam removes unwanted deposits at the edge of the wafer and the gas is used to blow away the residue and prevent slag buildup on other parts of the wafer. The process is preferably carried out in an exhausted chamber.
    Type: Grant
    Filed: February 7, 2003
    Date of Patent: April 5, 2005
    Assignee: LSI Logic Corporation
    Inventors: Steven Reder, Michael Berman, Rennie Barber
  • Publication number: 20050064792
    Abstract: A method for inspecting the uniformity of the pressure applied between a conditioner and a polishing pad on a chemical mechanical polisher. A sheet of pressure sensitive material is placed between the conditioner and the polishing pad, and the conditioner is lowered onto the sheet of pressure sensitive material. A desired degree of pressure is applied between the conditioner and the polishing pad, thereby creating an impression in the sheet of pressure sensitive material, and the conditioner is lifted from the sheet of pressure sensitive material. The sheet of pressure sensitive material is inspected to determine the uniformity of the pressure applied between the conditioner and the polishing pad.
    Type: Application
    Filed: September 22, 2003
    Publication date: March 24, 2005
    Inventors: Michael Berman, Jan Fure
  • Patent number: D511563
    Type: Grant
    Filed: July 6, 2004
    Date of Patent: November 15, 2005
    Inventor: Michael Berman
  • Patent number: D511564
    Type: Grant
    Filed: July 6, 2004
    Date of Patent: November 15, 2005
    Inventor: Michael Berman