Patents by Inventor Michael L. Bufano
Michael L. Bufano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10679882Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.Type: GrantFiled: December 21, 2015Date of Patent: June 9, 2020Assignee: BROOKS AUTOMATION, INCInventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Patent number: 9881825Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.Type: GrantFiled: November 14, 2014Date of Patent: January 30, 2018Assignee: Brooks Automation, Inc.Inventors: Ulysses Gilchrist, Michael L. Bufano, William Fosnight, Christopher Hofmeister, Gerarld M. Friedman
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Patent number: 9368382Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.Type: GrantFiled: March 24, 2014Date of Patent: June 14, 2016Assignee: Brooks Automation, Inc.Inventors: Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist, William Fosnight
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Publication number: 20160111308Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.Type: ApplicationFiled: December 21, 2015Publication date: April 21, 2016Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Patent number: 9224628Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.Type: GrantFiled: September 24, 2012Date of Patent: December 29, 2015Assignee: Brooks Automation. Inc.Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Publication number: 20150155192Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.Type: ApplicationFiled: November 14, 2014Publication date: June 4, 2015Inventors: Ulysses Gilchrist, Michael L. Bufano, William Fosnight, Christopher Hofmeister, Gerarld M. Friedman
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Publication number: 20140341679Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.Type: ApplicationFiled: March 24, 2014Publication date: November 20, 2014Applicant: Brooks Automation, Inc.Inventors: Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist, William Fosnight
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Patent number: 8888433Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.Type: GrantFiled: August 19, 2005Date of Patent: November 18, 2014Assignee: Brooks Automation, Inc.Inventors: Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Gerald M. Friedman, Michael L. Bufano
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Publication number: 20140209820Abstract: Systems and methods for manufacturing a vacuum device, such as an electron emitter, that includes a foil exit window palced over and joined to a support grid. In one particular method, the vacuum chamber of an electron emitter has a thin foil forming an exit window at one end. The thin foil may be titanium or any suitable material and the foil will typically enlarge during a bonding process that attaches the foil to the support grid. In one manufacturing process, the support grid is provided with a surface that has contours, typically being smooth recessed surfaces, that the foil once enlarged can lie against as the vacuum pulls the foil against the grid.Type: ApplicationFiled: April 2, 2014Publication date: July 31, 2014Inventors: Kenneth J. Barry, Mark T. Brown, Michael L. Bufano, Gerald M. Friedman, Peter M. King, Matthew A. Medford, Anne L. Testoni, Steven R. Walther, Tzvi Avnery
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Patent number: 8766523Abstract: An exit window can include an exit window foil, and a support grid contacting and supporting the exit window foil. The support grid can have first and second grids, each having respective first and second grid portions that are positioned in an alignment and thermally isolated from each other. The first and second grid portions can each have a series of apertures that are aligned for allowing the passage of a beam therethrough to reach and pass through the exit window foil. The second grid portion can contact the exit window foil. The first grid portion can mask the second grid portion and the exit window foil from heat caused by the beam striking the first grid portion.Type: GrantFiled: September 14, 2012Date of Patent: July 1, 2014Assignee: Hitachi Zosen CorporationInventors: Steven R. Walther, Gerald M. Friedman, Michael L. Bufano
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Patent number: 8678734Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.Type: GrantFiled: October 4, 2010Date of Patent: March 25, 2014Assignee: Brooks Automation, Inc.Inventors: Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist, William Fosnight
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Publication number: 20130009077Abstract: An exit window can include an exit window foil, and a support grid contacting and supporting the exit window foil. The support grid can have first and second grids, each having respective first and second grid portions that are positioned in an alignment and thermally isolated from each other. The first and second grid portions can each have a series of apertures that are aligned for allowing the passage of a beam therethrough to reach and pass through the exit window foil. The second grid portion can contact the exit window foil. The first grid portion can mask the second grid portion and the exit window foil from heat caused by the beam striking the first grid portion.Type: ApplicationFiled: September 14, 2012Publication date: January 10, 2013Applicant: HITACHI ZOSEN CORPORATIONInventors: Steven R. Walther, Gerald M. Friedman, Michael L. Bufano
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Patent number: 8338796Abstract: An electron beam emitter includes an electron generator for generating electrons. The electron generator can have a housing containing at least one electron source for generating the electrons. The at least one electron source has a width. The electron generator housing can have an electron permeable region spaced from the at least one electron source for allowing extraction of the electrons from the electron generator housing. The electron permeable region can include a series of narrow elongate slots and ribs formed in the electron generator housing and extending laterally beyond the width of the at least one electron source. The electron permeable region can be configured and positioned relative to the at least one electron source for laterally spreading the electrons that are generated by the at least one electron source.Type: GrantFiled: May 20, 2009Date of Patent: December 25, 2012Assignee: Hitachi Zosen CorporationInventors: Steven Raymond Walther, Michael L. Bufano, Gerald M. Friedman
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Patent number: 8339024Abstract: An exit window can include an exit window foil, and a support grid contacting and supporting the exit window foil. The support grid can have first and second grids, each having respective first and second grid portions that are positioned in an alignment and thermally isolated from each other. The first and second grid portions can each have a series of apertures that are aligned for allowing the passage of a beam therethrough to reach and pass through the exit window foil. The second grid portion can contact the exit window foil. The first grid portion can mask the second grid portion and the exit window foil from heat caused by the beam striking the first grid portion.Type: GrantFiled: July 16, 2010Date of Patent: December 25, 2012Assignee: Hitachi Zosen CorporationInventors: Steven R. Walther, Gerald M. Friedman, Michael L. Bufano
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Patent number: 8328495Abstract: A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.Type: GrantFiled: August 19, 2009Date of Patent: December 11, 2012Assignee: Brooks Automation, Inc.Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Patent number: 8272827Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.Type: GrantFiled: August 13, 2007Date of Patent: September 25, 2012Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Patent number: 8267634Abstract: A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.Type: GrantFiled: May 11, 2007Date of Patent: September 18, 2012Assignee: Brooks Automation, Inc.Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
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Publication number: 20110245964Abstract: A semiconductor workpiece processing system comprises at least one processing tool; a transport section configured to transport carriers to and from the processing tool; and a transport vehicle movably mounted on the transport section; wherein the transport vehicle is configured to: sense a location of a transport carrier alignment feature; adjust a location of a transport vehicle gripper based on the location of the transport carrier alignment feature; sense an attitude of the gripper at a point of engagement with the transport carrier; and adjust the location of the gripper based on the attitude of the gripper.Type: ApplicationFiled: April 6, 2010Publication date: October 6, 2011Inventors: Robert P. Sullivan, Michael L. Bufano
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Publication number: 20110142575Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.Type: ApplicationFiled: October 4, 2010Publication date: June 16, 2011Applicant: BROOKS AUTOMATION, INC.Inventors: Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist, William Fosnight
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Publication number: 20110012495Abstract: An exit window can include an exit window foil, and a support grid contacting and supporting the exit window foil. The support grid can have first and second grids, each having respective first and second grid portions that are positioned in an alignment and thermally isolated from each other. The first and second grid portions can each have a series of apertures that are aligned for allowing the passage of a beam therethrough to reach and pass through the exit window foil. The second grid portion can contact the exit window foil. The first grid portion can mask the second grid portion and the exit window foil from heat caused by the beam striking the first grid portion.Type: ApplicationFiled: July 16, 2010Publication date: January 20, 2011Applicant: Advanced Electron Beams, Inc.Inventors: Steven R. Walther, Gerald M. Friedman, Michael L. Bufano