Patents by Inventor Michael L. Bufano

Michael L. Bufano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9881825
    Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.
    Type: Grant
    Filed: November 14, 2014
    Date of Patent: January 30, 2018
    Assignee: Brooks Automation, Inc.
    Inventors: Ulysses Gilchrist, Michael L. Bufano, William Fosnight, Christopher Hofmeister, Gerarld M. Friedman
  • Patent number: 9368382
    Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.
    Type: Grant
    Filed: March 24, 2014
    Date of Patent: June 14, 2016
    Assignee: Brooks Automation, Inc.
    Inventors: Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist, William Fosnight
  • Publication number: 20160111308
    Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
    Type: Application
    Filed: December 21, 2015
    Publication date: April 21, 2016
    Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
  • Patent number: 9224628
    Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
    Type: Grant
    Filed: September 24, 2012
    Date of Patent: December 29, 2015
    Assignee: Brooks Automation. Inc.
    Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
  • Publication number: 20150155192
    Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.
    Type: Application
    Filed: November 14, 2014
    Publication date: June 4, 2015
    Inventors: Ulysses Gilchrist, Michael L. Bufano, William Fosnight, Christopher Hofmeister, Gerarld M. Friedman
  • Publication number: 20140341679
    Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.
    Type: Application
    Filed: March 24, 2014
    Publication date: November 20, 2014
    Applicant: Brooks Automation, Inc.
    Inventors: Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist, William Fosnight
  • Patent number: 8888433
    Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.
    Type: Grant
    Filed: August 19, 2005
    Date of Patent: November 18, 2014
    Assignee: Brooks Automation, Inc.
    Inventors: Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Gerald M. Friedman, Michael L. Bufano
  • Publication number: 20140209820
    Abstract: Systems and methods for manufacturing a vacuum device, such as an electron emitter, that includes a foil exit window palced over and joined to a support grid. In one particular method, the vacuum chamber of an electron emitter has a thin foil forming an exit window at one end. The thin foil may be titanium or any suitable material and the foil will typically enlarge during a bonding process that attaches the foil to the support grid. In one manufacturing process, the support grid is provided with a surface that has contours, typically being smooth recessed surfaces, that the foil once enlarged can lie against as the vacuum pulls the foil against the grid.
    Type: Application
    Filed: April 2, 2014
    Publication date: July 31, 2014
    Inventors: Kenneth J. Barry, Mark T. Brown, Michael L. Bufano, Gerald M. Friedman, Peter M. King, Matthew A. Medford, Anne L. Testoni, Steven R. Walther, Tzvi Avnery
  • Patent number: 8766523
    Abstract: An exit window can include an exit window foil, and a support grid contacting and supporting the exit window foil. The support grid can have first and second grids, each having respective first and second grid portions that are positioned in an alignment and thermally isolated from each other. The first and second grid portions can each have a series of apertures that are aligned for allowing the passage of a beam therethrough to reach and pass through the exit window foil. The second grid portion can contact the exit window foil. The first grid portion can mask the second grid portion and the exit window foil from heat caused by the beam striking the first grid portion.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: July 1, 2014
    Assignee: Hitachi Zosen Corporation
    Inventors: Steven R. Walther, Gerald M. Friedman, Michael L. Bufano
  • Patent number: 8678734
    Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.
    Type: Grant
    Filed: October 4, 2010
    Date of Patent: March 25, 2014
    Assignee: Brooks Automation, Inc.
    Inventors: Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist, William Fosnight
  • Publication number: 20130009077
    Abstract: An exit window can include an exit window foil, and a support grid contacting and supporting the exit window foil. The support grid can have first and second grids, each having respective first and second grid portions that are positioned in an alignment and thermally isolated from each other. The first and second grid portions can each have a series of apertures that are aligned for allowing the passage of a beam therethrough to reach and pass through the exit window foil. The second grid portion can contact the exit window foil. The first grid portion can mask the second grid portion and the exit window foil from heat caused by the beam striking the first grid portion.
    Type: Application
    Filed: September 14, 2012
    Publication date: January 10, 2013
    Applicant: HITACHI ZOSEN CORPORATION
    Inventors: Steven R. Walther, Gerald M. Friedman, Michael L. Bufano
  • Patent number: 8339024
    Abstract: An exit window can include an exit window foil, and a support grid contacting and supporting the exit window foil. The support grid can have first and second grids, each having respective first and second grid portions that are positioned in an alignment and thermally isolated from each other. The first and second grid portions can each have a series of apertures that are aligned for allowing the passage of a beam therethrough to reach and pass through the exit window foil. The second grid portion can contact the exit window foil. The first grid portion can mask the second grid portion and the exit window foil from heat caused by the beam striking the first grid portion.
    Type: Grant
    Filed: July 16, 2010
    Date of Patent: December 25, 2012
    Assignee: Hitachi Zosen Corporation
    Inventors: Steven R. Walther, Gerald M. Friedman, Michael L. Bufano
  • Patent number: 8338796
    Abstract: An electron beam emitter includes an electron generator for generating electrons. The electron generator can have a housing containing at least one electron source for generating the electrons. The at least one electron source has a width. The electron generator housing can have an electron permeable region spaced from the at least one electron source for allowing extraction of the electrons from the electron generator housing. The electron permeable region can include a series of narrow elongate slots and ribs formed in the electron generator housing and extending laterally beyond the width of the at least one electron source. The electron permeable region can be configured and positioned relative to the at least one electron source for laterally spreading the electrons that are generated by the at least one electron source.
    Type: Grant
    Filed: May 20, 2009
    Date of Patent: December 25, 2012
    Assignee: Hitachi Zosen Corporation
    Inventors: Steven Raymond Walther, Michael L. Bufano, Gerald M. Friedman
  • Patent number: 8328495
    Abstract: A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
    Type: Grant
    Filed: August 19, 2009
    Date of Patent: December 11, 2012
    Assignee: Brooks Automation, Inc.
    Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
  • Patent number: 8272827
    Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.
    Type: Grant
    Filed: August 13, 2007
    Date of Patent: September 25, 2012
    Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
  • Patent number: 8267634
    Abstract: A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
    Type: Grant
    Filed: May 11, 2007
    Date of Patent: September 18, 2012
    Assignee: Brooks Automation, Inc.
    Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May
  • Publication number: 20110245964
    Abstract: A semiconductor workpiece processing system comprises at least one processing tool; a transport section configured to transport carriers to and from the processing tool; and a transport vehicle movably mounted on the transport section; wherein the transport vehicle is configured to: sense a location of a transport carrier alignment feature; adjust a location of a transport vehicle gripper based on the location of the transport carrier alignment feature; sense an attitude of the gripper at a point of engagement with the transport carrier; and adjust the location of the gripper based on the attitude of the gripper.
    Type: Application
    Filed: April 6, 2010
    Publication date: October 6, 2011
    Inventors: Robert P. Sullivan, Michael L. Bufano
  • Publication number: 20110142575
    Abstract: A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.
    Type: Application
    Filed: October 4, 2010
    Publication date: June 16, 2011
    Applicant: BROOKS AUTOMATION, INC.
    Inventors: Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist, William Fosnight
  • Publication number: 20110012495
    Abstract: An exit window can include an exit window foil, and a support grid contacting and supporting the exit window foil. The support grid can have first and second grids, each having respective first and second grid portions that are positioned in an alignment and thermally isolated from each other. The first and second grid portions can each have a series of apertures that are aligned for allowing the passage of a beam therethrough to reach and pass through the exit window foil. The second grid portion can contact the exit window foil. The first grid portion can mask the second grid portion and the exit window foil from heat caused by the beam striking the first grid portion.
    Type: Application
    Filed: July 16, 2010
    Publication date: January 20, 2011
    Applicant: Advanced Electron Beams, Inc.
    Inventors: Steven R. Walther, Gerald M. Friedman, Michael L. Bufano
  • Publication number: 20110008136
    Abstract: A load port including a frame defining a load port opening, a substrate carrier interface connected to the frame and configured to removably couple with a substrate carrier shell, a load port door configured to interface with a substrate carrier door, the load port door being movably coupled to frame and having a first position substantially blocking the load port opening, and a second position where the load port opening is substantially unblocked by the load port door, and a door coupling member without moving parts, located on the load port door configured to releasably couple with a corresponding member without moving parts on the substrate carrier door, wherein activation of the door coupling member effects coupling between the load port door and substrate carrier door and a passive release of the substrate carrier door from the substrate carrier shell.
    Type: Application
    Filed: September 20, 2010
    Publication date: January 13, 2011
    Applicant: Brooks Automation, Inc.
    Inventors: Michael L. Bufano, Ulysses Gilchrist, William Fosnight, Christopher Hofmeister, Daniel Babbs, Robert C. May