Abstract: A neural probe includes at least one shaft, at least one first electrode disposed on a first side of the at least one shaft, and at least one second electrode disposed on a second side of the at least one shaft. The at least one second electrode is separately addressable from the at least first electrode.

Abstract: The present invention concerns a device for detecting gases or volatile organic compounds (VOC) comprising an electrically conducting or semiconducting zone functionalized with an organic film resulting from the polymerization of aromatic diazonium salt derived monomer.

Abstract: We describe the use of a high-quality-factor torsional resonator of microscale dimensions. The resonator has a paddle that is supported by two nanoscale torsion rods made of a very low thermal conductivity material, such as amorphous (“a-”) silicon. The body of the torsion paddle is coated with an infrared-absorbing material that is thin and light weight, but provides sufficient IR absorption for the applications. It may be placed above a reflecting material of similar dimensions to form a quarter wave cavity. Sensing of the response of the paddle to applied electromagnetic radiation provides a measure of the intensity of the radiation as detected by absorption, and the resulting temperature change, in the paddle.

Abstract: Cantilever chemical vapor sensors that can be tailored to respond preferentially in frequency by controlling the location of deposition of an adsorbing layer. Cantilever chemical vapor sensor having a base, one or more legs and a tip are fabricated using a gold layer to promote deposition of a sorbing layer of a polymeric material in a desired location, and using a chromium layer to inhibit deposition of the sorbing layer in other locations. Sorbing layers having different glass temperatures Tg and their effects are described. The methods of making such cantilever chemical vapor sensors are described.

Abstract: Methods and devices relating to measuring a landing position and mass of an analyte adsorbed to a nanomechanical resonator by resolving adsorbate-induced frequency shifts in at least two modes of a resonator resonance frequency, where during the resolving of the frequency shifts in the at least two modes analysis is so that the transformation (G) from the fractional-frequency shift pair to the analyte mass-position pair is one-to-one. Complex protein mixtures can be analyzed at high sensitivity and resolution.

Abstract: A sensor for detecting analytes, a method of making the sensor, and a method of using the sensor. In one embodiment, the present invention comprises at least one array comprising a plurality of resonators. The resonators can be arranged in a plurality of rows and a plurality of columns, and can be connected in a combined series-parallel configuration. The resonators can be adapted to vibrate independently at about the same resonance frequency and about the same phase. The sensor can also comprise an actuator and a signal detector electrically coupled to the array. The sensor can also further comprise an analyte delivery system and can be functionalized for detection of at least one analyte.

Abstract: A passive electro-mechanical device that reduces phase noise in oscillators, thereby improving their frequency precision. The noise reduction device can consist of a pair of coupled nonlinear resonators that are driven parametrically—by modulating their natural frequency in time, through the output signal of a conventional oscillator at a frequency close to the sum of the linear mode frequencies. Above the threshold for parametric response, the coupled resonators can exhibit oscillation at an inherent frequency. The novel possibility for noise elimination is realized by tuning the system to operating points for which this periodic signal is immune to frequency noise in the drive signal, providing a way to clean the phase noise of the driving oscillator.

Abstract: We describe the use of a high-quality-factor torsional resonator of microscale dimensions. The resonator has a paddle that is supported by two nanoscale torsion rods made of a very low thermal conductivity material, such as amorphous (“a-”) silicon. The body of the torsion paddle is coated with an infrared-absorbing material that is thin and light weight, but provides sufficient IR absorption for the applications. It may be placed above a reflecting material of similar dimensions to form a quarter wave cavity. Sensing of the response of the paddle to applied electromagnetic radiation provides a measure of the intensity of the radiation as detected by absorption, and the resulting temperature change, in the paddle.

Abstract: A system for analyzing a gas mixture, including at least one chromatography column, a mechanism injecting the mixture into the column, and a mechanism detecting compound(s) forming the gas mixture, the detection mechanism including at least one detector of nanosensor type of an outlet of the column and a detector of nanosensor type in the column, capable of detecting passage of the compounds. It is then possible to determine the velocity of each of the compounds within the system.

Abstract: A passive electro-mechanical device that reduces phase noise in oscillators, thereby improving their frequency precision. The noise reduction device can consist of a pair of coupled nonlinear resonators that are driven parametrically—by modulating their natural frequency in time, through the output signal of a conventional oscillator at a frequency close to the sum of the linear mode frequencies. Above the threshold for parametric response, the coupled resonators can exhibit oscillation at an inherent frequency. The novel possibility for noise elimination is realized by tuning the system to operating points for which this periodic signal is immune to frequency noise in the drive signal, providing a way to clean the phase noise of the driving oscillator.

Abstract: An apparatus, system, device, and method provide the ability to measure forces a cell exerts on its surroundings. A platform is suspended across an opening using support legs. The platform is able to move horizontally in a plane of the opening. A piezoresistive strain sensor is integrated into the platform and measures strain induced in the support legs when the platform moves horizontally thereby measuring displacement of the platform.

Abstract: Doubly-clamped nanowire electromechanical resonators that can be used to generate parametric oscillations and feedback self-sustained oscillations. The nanowire electromechanical resonators can be made using conventional NEMS and CMOS fabrication methods. In very thin nanowire structures (sub-micron-meter in width), additive piezoresistance patterning and fabrication can be highly difficult and thus need to be avoided. This invention shows that, in piezoresistive nanowires with homogeneous material composition and symmetric structures, no conventional and additive piezoresistance loops are needed. Using AC and DC drive signals, and bias signals of controlled frequency and amplitude, output signals having a variety of frequencies can be obtained. Various examples of such resonators and their theory of operation are described.

Abstract: A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

Abstract: A system for analyzing a gas mixture, including at least one chromatography column, a mechanism injecting the mixture into the column, and a mechanism detecting compound(s) forming the gas mixture, the detection mechanism including at least one detector of nanosensor type of an outlet of the column and a detector of nanosensor type in the column, capable of detecting passage of the compounds. It is then possible to determine the velocity of each of the compounds within the system.

Abstract: The spatial distribution of mass within an individual analyte can be imaged—in real time and with molecular-scale resolution—when it adsorbs onto a nanomechanical resonator. Each single-molecule adsorption event induces discrete, time-correlated perturbations to the modal frequencies of the device. By continuous monitoring of multiple vibrational modes, the spatial moments of mass distribution can be deduced for individual analytes, one-by-one, as they adsorb. This new method was validated for inertial imaging using both experimental multimode frequency-shift data and finite-element simulations—to analyze the inertial mass, position-of-adsorption, and the shape of individual analytes. Unlike conventional imaging, the spatial resolution of nanomechanical inertial imaging is not limited by wavelength-dependent diffraction phenomena; instead frequency fluctuation processes determine the ultimate attainable resolution. Advanced NEMS devices can provide atomic-scale resolution.

Abstract: A sensor for detecting analytes, a method of making the sensor, and a method of using the sensor. In one embodiment, the present invention comprises at least one array comprising a plurality of resonators. The resonators can be arranged in a plurality of rows and a plurality of columns, and can be connected in a combined series-parallel configuration. The resonators can be adapted to vibrate independently at about the same resonance frequency and about the same phase. The sensor can also comprise an actuator and a signal detector electrically coupled to the array. The sensor can also further comprise an analyte delivery system and can be functionalized for detection of at least one analyte.

Abstract: Synchronization of oscillators based on anharmonic nanoelectromechanical resonators. Experimental implimentation allows for unprecedented observation and control of parameters governing the dynamics of synchronization. Close quantitative agreement is found between experimental data and theory describing reactively coupled Duffing resonators with fully saturated feedback gain. In the synchonized state, a significant reduction in the phase noise of the oscillators is demonstrated, which is key for applications such as sensors and clocks. Oscillator networks constructed from nanomechanical resonators form an important laboratory to commercialize and study synchronization—given their high-quality factors, small footprint, and ease of co-integration with modern electronic signal processing technologies. Networks can be made including one-, two-, and three-dimensional networks. Triangular and square lattices can be made.

Abstract: An embodiment of the invention provides a neural probe containing a plurality of nanoscale recording electrodes. The recording electrodes have a width of 1 micron or less and a distance between adjacent recording electrodes is 10 microns or less. Another embodiment of the invention provides a neural probe comprising a plurality of microfabricated recording electrodes located on a polymer base material, such as a flexible polymer cantilever.

Abstract: Methods and devices relating to measuring a landing position and mass of an analyte adsorbed to a nanomechanical resonator by resolving adsorbate-induced frequency shifts in at least two modes of a resonator resonance frequency, where during the resolving of the frequency shifts in the at least two modes analysis is so that the transformation (G) from the fractional-frequency shift pair to the analyte mass-position pair is one-to-one. Complex protein mixtures can be analyzed at high sensitivity and resolution.

Abstract: A neural probe is provided. The probe includes: a base that includes an optical demultiplexer, and one or more shanks extending from the base, with each shank including one or more waveguides. In the neural probe, the optical demultiplexer is optically connected to the one or more waveguides of each shank. A system including the neural probe and an optical multiplexer optically connected to the demultiplexer of the neural probe is also provided. Further, a method of emitting light from a neural probe is provided. The method includes receiving and demultiplexing multiplexed optical signals at a base of a neural probe, and emitting the demultiplexed optical signals from one or more shanks of the neural probe.