Abstract: A biofunctionalized nanoelectromechanical device (BioNEMS) for sensing single-molecules in solution by measuring the variation in the mechanical displacement of the BioNEMS device during a binding event is provided. The biofunctionalized nanoelectromechanical device according to the invention generally comprises a nanomechanical mechanical resonator, a detector integral with the mechanical resonator for measuring the mechanical displacement of the resonator, and electronics connected to the detector for communicating the results to a user. A system of biofunctionalized nanoelectromechanical devices and a method for utilizing the biofunctionalized nanoelectromechanical device of the present invention are also provided.

Abstract: A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

Abstract: NEMS (Nano-Electro-Mechanical Systems) apparatuses are described. By applying a static electric field, an arm or beam in a NEMS apparatus is made to bend so that one electrical conductor is made to contact another electrical conductor, thereby closing the NEMS apparatus. Some apparatus embodiments make use of electrostatic coupling to cause the arm or beam to bend, and some apparatus embodiments make use of piezoelectric materials to cause the arm or beam to bend. Other embodiments are described and claimed.

Abstract: A nanoelectromechanical systems (NEMS) device and method for using the device provide for a movable member that includes a region of low conductivity over which an electric field is developed. A region width is within a factor of ten (10) of a thickness of the NEMS device. The region is formed between a junction that incorporates piezoelectric material. A first voltage is applied across the region which alters a width of an active portion of the region thereby adjusting a movement of the movable member induced by a second voltage. The second voltage is applied across the region to produce a strain on the active portion of the region. The strain results in a defined movement of the movable member.

Abstract: A system, device, method, and apparatus provide the ability to wire a voltage sensitive device to a nanoelectromechanical system (NEMS) resonator. A voltage sensitive device is configured to detect one or more voltage signals and output one or more electrical potentials in real-time. An array of piezoelectric NEMS resonators (with each resonator tuned to a unique frequency) is used to receive the output electrical potentials and convert each output electrical potential to a corresponding resonance frequency varying signal. The output signal from each resonator varies in linear proportion to the resonator's corresponding frequency variation arising from the applied elecrical potential. The frequency varying signals are multiplexed together into a single readout signal path that is monitored to determine variations in vibrational amplitude. A demodulation device deconvolves the multiplexed frequency varying signals to recover and uniquely identify the output electrical signal.

Abstract: Microcalorimeters having low addendum heat capacities and attojoule/Kscale resolutions are provided. These microcalorimeters make use of very small calorimeter bodies composed of materials with very low heat capacities. Also provided are polymer-based microcalorimeters with thermally isolated reagent chambers. These microcalorimeters use a multi-layered polymer membrane structure to provide improved thermal isolation of a reagent chamber.

Abstract: A rapid and robust device and method for the capture and manipulation of single cells and beads in a microfluidic environment using positive dielectrophoresis (pDEP) is provided. The capture device uses a highly localized and non-uniform pDEP electric field gradient to allow for the simultaneous capture and manipulation of single cells and beads in standard cell growth media.

Abstract: The invention provides lateral nanoelectromechanical switches useful for integration into circuitry fabricated using standard semiconductor processing methods, or using techniques compatible with the mainstream semiconductor processing technologies. Methods of fabricating the switches are described. Some exemplary designs for two and three terminal switches are provided. Descriptions of structural features and the operating parameters for some exemplary switches are given. The switches are expected to be compatible with circuitry that is operable in computer-based systems.

Abstract: A self-sustaining ultra-high frequency oscillator and method enable the ability to oscillate and output a signal. A balanced bridge circuit is utilized to null an embedding background response. A first vibrating nanoelectromechanical (NEMS) beam resonator is part of one of the branches of the balanced bridge circuit and determines the frequency of the oscillator's output signal. A feedback loop establishes and sets oscillation conditions of the oscillator's signal. Further, the feedback loop connects an output of the first resonator to an input of the balanced bridge circuit.

Abstract: We describe the use of a high-quality-factor torsional resonator of microscale dimensions. The resonator has a paddle that is supported by two nanoscale torsion rods made of a very low thermal conductivity material, such as amorphous (“a-”) silicon. The body of the torsion paddle is coated with an infrared-absorbing material that is thin and light weight, but provides sufficient IR absorption for the applications. It may be placed above a reflecting material of similar dimensions to form a quarter wave cavity. Sensing of the response of the paddle to applied electromagnetic radiation provides a measure of the intensity of the radiation as detected by absorption, and the resulting temperature change, in the paddle.

Abstract: A method of screening one or more cells is described; the method includes: (i) providing one or more cells to a nanoelectromechanical system (NEMS) force sensor; (ii) applying at least one reagent to the one or more cells; and (iii) observing a response of the one or more cells to the reagent with the force sensor, thereby screening the one or more cells.

Abstract: A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.

Abstract: Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.

Abstract: The present invention relates to an apparatus for measuring a mass of a sample, using a nanoelectromechanical system (NEMS) arranged to receive the sample added onto a resonator of the NEMS and a microfluidic sample delivery and sample ionization system. The nanoelectromechanical system is located at an output of the ionization system. The nanoelectromechanical resonator system is highly sensitive and is capable of detecting masses in the single Dalton range.

Abstract: A neural probe includes at least one shaft, at least one first electrode disposed on a first side of the at least one shaft, and at least one second electrode disposed on a second side of the at least one shaft. The at least one second electrode is separately addressable from the at least first electrode.

Abstract: Systems and methods for thermally actuating piezoresistive cantilevers are described. One embodiment includes a nanoelectromechanical resonator connected in at least one location to a substrate, an electrically conductive path formed on the resonator and a signal source connected to the electrically conductive path and configured to provide an oscillating actuation signal capable of exciting a resonant mode in the resonator.

Abstract: A system containing a micro-mechanical or nano-mechanical device and a method of operating the same is provided. The device includes a resonator and a piezoresistive element connected to the resonator. The method includes AC biasing the piezoresistive element at a first frequency, driving the resonator at a second frequency different from the first frequency, and detecting a mechanical response of the resonator at one or both of a difference frequency and a sum frequency of the first and second frequencies.

Abstract: A biofunctionalized nanoelectromechanical device (BioNEMS) for sensing single-molecules in solution by measuring the variation in the mechanical displacement of the BioNEMS device during a binding event is provided. The biofunctionalized nanoelectromechanical device according to the invention generally comprises a nanomechanical mechanical resonator, a detector integral with the mechanical resonator for measuring the mechanical displacement of the resonator, and electronics connected to the detector for communicating the results to a user. A system of biofunctionalized nanoelectromechanical devices and a method for utilizing the biofunctionalized nanoelectromechanical device of the present invention are also provided.

Abstract: Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.

Abstract: A MEMS system, such as a biosensor, includes a micromechanical resonator and a piezoresistive sensing element which includes an organic semiconductor, such as an organic thin film transistor.