Abstract: The invention concerns an ion trap, including a first ring-shaped end cap electrode and a second ring-shaped end cap electrode, between which is formed a ring-shaped ion storage cell, as well as a plurality of radially inner disk-shaped ring electrodes and a plurality of radially outer disk-shaped ring electrodes, which delimit the ring-shaped ion storage cell. The invention also relates to a mass spectrometer that has such an ion trap as well as a control device that is designed to actuate the disk-shaped ring electrodes and the end cap electrodes for the storage, selection, excitation and/or detection of ions in the ring-shaped ion storage cell.

Abstract: The invention relates to a mass spectrometer for analysing a gas by mass spectrometry, comprising: a controllable inlet system for pulsed feeding of the gas to be analysed from a process region outside the mass spectrometer into an ionisation region, an ionisation device for ionising the gas to be analysed in the ionisation region, an ion transfer device for transferring the ionised gas from a ionisation region via an ion transfer region into an analysis region, and an analyser for detecting the ionised gas in the analysis region. The invention further relates to an associated method for mass spectrometrically analysing a gas.

Abstract: The invention relates to a particle detector, comprising: a measuring electrode for measuring charged particles, a detection device for detecting the charged particles measured by the measuring electrode, and an evaluation device for determining the number of charged particles detected by the detection device. The detection device has a charge amplifier for converting a charge signal generated by the charged particles into a voltage signal and an amplifier device for amplifying the voltage signal.

Abstract: A drive device comprises a drive unit, a source, a filter unit, and a determining unit.

Abstract: The invention concerns an ion trap, including a first ring-shaped end cap electrode and a second ring-shaped end cap electrode, between which is formed a ring-shaped ion storage cell, as well as a plurality of radially inner disk-shaped ring electrodes and a plurality of radially outer disk-shaped ring electrodes, which delimit the ring-shaped ion storage cell. The invention also relates to a mass spectrometer that has such an ion trap as well as a control device that is designed to actuate the disk-shaped ring electrodes and the end cap electrodes for the storage, selection, excitation and/or detection of ions in the ring-shaped ion storage cell.

Abstract: The invention relates to an ionization device with an ionization space formed in a container, an inlet system for supplying a gas to be ionized to the ionization space, an electron source having at least one filament for supply of an electron beam to the ionization space, and an outlet system for letting the ionized gas out of the ionization space.

Abstract: The invention relates to a mass spectrometer for analysing a gas by mass spectrometry, comprising: a controllable inlet system for pulsed feeding of the gas to be analysed from a process region outside the mass spectrometer into an ionisation region, an ionisation device for ionising the gas to be analysed in the ionisation region, an ion transfer device for transferring the ionised gas from a ionisation region via an ion transfer region into an analysis region, and an analyser for detecting the ionised gas in the analysis region. The invention further relates to an associated method for mass spectrometrically analysing a gas.

Abstract: A method for analyzing a gas by mass spectrometry includes exciting ions of the gas to be analyzed in an FT ion trap, and recording a first frequency spectrum in a first measurement time interval during or after the excitation of the ions. The first frequency spectrum contains ion frequencies of the excited ions and interference frequencies. The method also includes recording a second frequency spectrum in a second measurement time interval. The second frequency spectrum contains the interference frequencies, but not the ion frequencies of the first frequency spectrum. The method further includes comparing the first frequency spectrum with the second frequency spectrum to identify the interference frequencies in the first frequency spectrum. The disclosure also relates to a mass spectrometer which is suitable for carrying out the method for analyzing the gas by mass spectrometry.

Abstract: A method includes parallel or serial ionization of a gas mixture by activating at least two ionization devices operating using different ionization procedures, and/or by ionizing the gas mixture in a detector to which the gas mixture and ions and/or metastable particles of an ionization gas are fed. The method also includes detecting the ionized gas mixture in the detector for the mass spectrometric examination thereof. A mass spectrometer for mass spectrometric examination of gas mixtures includes an ionization unit for ionizing a gas mixture and a detector for detecting the ionized gas mixture.

Abstract: A method for analyzing a gas by mass spectrometry includes exciting ions of the gas to be analyzed in an FT ion trap, and recording a first frequency spectrum in a first measurement time interval during or after the excitation of the ions. The first frequency spectrum contains ion frequencies of the excited ions and interference frequencies. The method also includes recording a second frequency spectrum in a second measurement time interval. The second frequency spectrum contains the interference frequencies, but not the ion frequencies of the first frequency spectrum. The method further includes comparing the first frequency spectrum with the second frequency spectrum to identify the interference frequencies in the first frequency spectrum. The disclosure also relates to a mass spectrometer which is suitable for carrying out the method for analyzing the gas by mass spectrometry.

Abstract: The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage and mass spectrometric examination of the gas mixture. In one aspect of the disclosure, the ionization device is embodied for supplying ions and/or metastable particles of an ionization gas and/or for supplying electrons to the ion trap for ionizing the gas mixture to be examined and the mass spectrometer is embodied to determine the number of ions and/or metastable particles of the ionization gas present in the ion trap and/or the number of ions of a residual gas present in the ion trap prior to examining the gas mixture. The disclosure also relates to the use of such a mass spectrometer and a method for mass spectrometric examination of a gas mixture.

Abstract: An ionization device includes: a plasma generating device for generating metastable particles and/or ions of an ionization gas in a primary plasma region; a field generating device for generating a glow discharge in a secondary plasma region; an inlet for supplying a gas to be ionized into the secondary plasma region; and a further inlet for supplying the metastable particles and/or the ions of the ionization gas into the secondary plasma region. A mass spectrometer includes such an ionization device and a detector downstream of the outlet of the ionization device for the mass-spectrometric analysis of the ionized gas.

Abstract: A method for examining a gas by mass spectrometry includes: ionizing the gas for producing ions; and storing, exciting and detecting at least some of the produced ions in an FT ion trap. Producing and storing the ions in the FT ion trap and/or exciting the ions prior to the detection of the ions in the FT ion trap includes at least one selective IFT excitation, such as a SWIFT excitation, which is dependent on the mass-to-charge ratio of the ions. The disclosure further relates to a mass spectrometer. A mass spectrometer includes: an FT ion trap; and an excitation device for storing, exciting, and detecting ions in the FT ion trap.

Abstract: The system described herein relates to a particle beam apparatus for analyzing and/or for processing an object and to a method for operating a particle beam apparatus. The particle beam apparatus is designed for example as an electron beam apparatus and/or an ion beam apparatus. The particle beam apparatus comprises a beam deflection device, for example an objective lens, which is provided with a first coil and a second coil. The first coil is operated with a first coil current. The second coil is operated with a second coil current. The first coil current and/or the second coil current may always be controlled in such a way that the sum of the first coil current and the second coil current (the summation current) or the difference between the first coil current and the second coil current (the difference current) is controlled to a setpoint value.

Abstract: A method for examining a gas by mass spectrometry includes: ionizing the gas for producing ions; and storing, exciting and detecting at least some of the produced ions in an FT ion trap. Producing and storing the ions in the FT ion trap and/or exciting the ions prior to the detection of the ions in the FT ion trap includes at least one selective IFT excitation, such as a SWIFT excitation, which is dependent on the mass-to-charge ratio of the ions. The disclosure further relates to a mass spectrometer. A mass spectrometer includes: an FT ion trap; and an excitation device for storing, exciting, and detecting ions in the FT ion trap.

Abstract: An ionization device includes: a plasma generating device for generating metastable particles and/or ions of an ionization gas in a primary plasma region; a field generating device for generating a glow discharge in a secondary plasma region; an inlet for supplying a gas to be ionized into the secondary plasma region; and a further inlet for supplying the metastable particles and/or the ions of the ionization gas into the secondary plasma region. A mass spectrometer includes such an ionization device and a detector downstream of the outlet of the ionization device for the mass-spectrometric analysis of the ionized gas.

Abstract: The system described herein relates to a particle beam apparatus for analyzing and/or for processing an object and to a method for operating a particle beam apparatus. The particle beam apparatus is designed for example as an electron beam apparatus and/or an ion beam apparatus. The particle beam apparatus comprises a beam deflection device, for example an objective lens, which is provided with a first coil and a second coil. The first coil is operated with a first coil current. The second coil is operated with a second coil current. The first coil current and/or the second coil current may always be controlled in such a way that the sum of the first coil current and the second coil current (the summation current) or the difference between the first coil current and the second coil current (the difference current) is controlled to a setpoint value.

Abstract: A method includes parallel or serial ionization of a gas mixture by activating at least two ionization devices operating using different ionization procedures, and/or by ionizing the gas mixture in a detector to which the gas mixture and ions and/or metastable particles of an ionization gas are fed. The method also includes detecting the ionized gas mixture in the detector for the mass spectrometric examination thereof. A mass spectrometer for mass spectrometric examination of gas mixtures includes an ionization unit for ionizing a gas mixture and a detector for detecting the ionized gas mixture.

Abstract: The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage and mass spectrometric examination of the gas mixture. In one aspect of the disclosure, the ionization device is embodied for supplying ions and/or metastable particles of an ionization gas and/or for supplying electrons to the ion trap for ionizing the gas mixture to be examined and the mass spectrometer is embodied to determine the number of ions and/or metastable particles of the ionization gas present in the ion trap and/or the number of ions of a residual gas present in the ion trap prior to examining the gas mixture. The disclosure also relates to the use of such a mass spectrometer and a method for mass spectrometric examination of a gas mixture.

Abstract: An apparatus for focusing and for storage of ions and an apparatus for separation of a first pressure area from a second pressure area are disclosed, in particular for an analysis apparatus for ions. A particle beam device may have at least one of the abovementioned apparatuses. A container for holding ions and at least one multipole unit are provided. The multipole unit has a through-opening with a longitudinal axis as well as a multiplicity of electrodes. A first set of the electrodes is at a first radial distance from the longitudinal axis. A second set of the electrodes is in each case at a second radial distance from the longitudinal axis. The first radial distance is less than the second radial distance. Alternatively or additionally, the apparatus may have an elongated opening with a radial extent. The opening has a longitudinal extent which is greater than the radial extent.