Patents by Inventor Michel Marty
Michel Marty has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10014337Abstract: A spectral filter is manufactured using a process wherein a first rectangular bar is formed within a first layer made of a first material, said first rectangular bar being made of a second material having a different optical index. The process further includes, in a second layer over the first layer, a second rectangular bar made of the second material. The second rectangular bar is positioned in contact with the first rectangular bar. The second layer is also made of the first material.Type: GrantFiled: September 29, 2016Date of Patent: July 3, 2018Assignees: STMicroelectronics SA, STMicroelectronics (Crolles 2) SASInventors: Romain Girard Desprolet, Michel Marty, Salim Boutami, Sandrine Lhostis
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Patent number: 9985119Abstract: An integrated image sensor may include adjacent pixels, with each pixel including an active semiconductor region including a photodiode, an antireflection layer disposed above the photodiode, a dielectric region disposed above the antireflection layer, an optical filter disposed above the dielectric region, and a diffraction grating disposed in the antireflection layer. The diffraction grating includes an array of pads.Type: GrantFiled: April 17, 2017Date of Patent: May 29, 2018Assignees: STMICROELECTRONICS S.A., STMICROELECTRONICS (Crolles 2) SASInventors: Axel Crocherie, Michel Marty, Jean-Luc Huguenin, Sébastien Jouan
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Patent number: 9984789Abstract: An electric device has a cross-linked layer obtained from a polymer composition that includes at least one polymer having at least one epoxy function. The polymer composition also has a non-polymer compound as a cross-linking agent including at least one reactive function that can react with the epoxy function of the polymer in order to allow the polymer to be cross-linked.Type: GrantFiled: June 3, 2014Date of Patent: May 29, 2018Assignee: NEXANSInventors: Ruben Briceno Garcia, Jean-Michel Marty, Maud Thivillon, Yannick Goutille, Laurent Keromnes
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Patent number: 9871074Abstract: An image sensor having a portion including interconnection levels formed on a semiconductor substrate covered with a first layer of a dielectric material, including conductive tracks separated from one another by insulating layers interconnected by vias crossing the insulating layers, and an infrared bandpass filter comprising filter levels adjacent to the interconnection levels formed by an alternation of second layers of the dielectric material and of silicon layers, the refraction index of the dielectric material being smaller than 2.5 at the maximum transmission wavelength of the filter, one of the second dielectric layers of each filter level being identical to the insulating layer of the adjacent interconnection level.Type: GrantFiled: May 24, 2016Date of Patent: January 16, 2018Assignee: Commissariat à l'Énergie Atomique et aux Énergies AlternativesInventors: Laurent Frey, Michel Marty, Lilian Masarotto
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Patent number: 9812615Abstract: A photodiode has an active portion formed in a silicon substrate and covered with a stack of insulating layers successively including at least one first silicon oxide layer, an antireflection layer, and a second silicon oxide layer. The quantum efficiency of the photodiode is optimized by: determining, for the infrared wavelength, first thicknesses of the second layer corresponding to maximum absorptions of the photodiode, and selecting, from among the first thicknesses, a desired thickness, eoxD, so that a maximum manufacturing dispersion is smaller than a half of a pseudo-period separating two successive maximum absorption values.Type: GrantFiled: March 17, 2015Date of Patent: November 7, 2017Assignees: STMicroelectronics SA, Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Laurent Frey, Michel Marty
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Publication number: 20170221948Abstract: An integrated image sensor may include adjacent pixels, with each pixel including an active semiconductor region including a photodiode, an antireflection layer disposed above the photodiode, a dielectric region disposed above the antireflection layer, an optical filter disposed above the dielectric region, and a diffraction grating disposed in the antireflection layer. The diffraction grating includes an array of pads.Type: ApplicationFiled: April 17, 2017Publication date: August 3, 2017Inventors: Axel Crocherie, Michel Marty, Jean-Luc Huguenin, Sébastien Jouan
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Patent number: 9685472Abstract: An integrated image sensor may include adjacent pixels, with each pixel including an active semiconductor region including a photodiode, an antireflection layer above the photodiode, a dielectric region above the antireflection layer and an optical filter to pass incident luminous radiation having a given wavelength. The antireflection layer may include an array of pads mutually separated by a dielectric material of the dielectric region. The array may be configured to allow simultaneous transmission of the incident luminous radiation and a diffraction of the incident luminous radiation producing diffracted radiations which have wavelengths below that of the incident radiation, and are attenuated with respect to the incident radiation.Type: GrantFiled: February 23, 2016Date of Patent: June 20, 2017Assignees: STMICROELECTRONICS SA, STMICROELECTRONICS (CROLLES 2) SASInventors: Axel Crocherie, Michel Marty, Jean-Luc Huguenin, Sébastien Jouan
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Patent number: 9640704Abstract: A photodetector including a photoelectric conversion structure made of a semiconductor material and, on a light-receiving surface of the conversion structure, a stack of first and second diffractive elements, the second element being above the first element, wherein: the first element includes at least one pad made of a material having an optical index n1, laterally surrounded with a region made of a material having an optical index n2 different from n1; the second element includes at least one pad made of a material having an optical index n3, laterally surrounded with a region made of a material having an optical index n4 different from n3; the pads of the first and second elements are substantially vertically aligned; and optical index differences n1?n2 and n3?n4 have opposite signs.Type: GrantFiled: May 24, 2016Date of Patent: May 2, 2017Assignees: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, STMicroelectronics SAInventors: Laurent Frey, Michel Marty
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Publication number: 20170092678Abstract: A spectral filter is manufactured using a process wherein a first rectangular bar is formed within a first layer made of a first material, said first rectangular bar being made of a second material having a different optical index. The process further includes, in a second layer over the first layer, a second rectangular bar made of the second material. The second rectangular bar is positioned in contact with the first rectangular bar. The second layer is also made of the first material.Type: ApplicationFiled: September 29, 2016Publication date: March 30, 2017Applicants: STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS, Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Romain Girard Desprolet, Michel Marty, Salim Boutami, Sandrine Lhostis
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Publication number: 20170062507Abstract: An integrated image sensor may include adjacent pixels, with each pixel including an active semiconductor region including a photodiode, an antireflection layer above the photodiode, a dielectric region above the antireflection layer and an optical filter to pass incident luminous radiation having a given wavelength. The antireflection layer may include an array of pads mutually separated by a dielectric material of the dielectric region. The array may be configured to allow simultaneous transmission of the incident luminous radiation and a diffraction of the incident luminous radiation producing diffracted radiations which have wavelengths below that of the incident radiation, and are attenuated with respect to the incident radiation.Type: ApplicationFiled: February 23, 2016Publication date: March 2, 2017Inventors: Axel CROCHERIE, Michel MARTY, Jean-Luc HUGUENIN, Sébastien JOUAN
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Patent number: 9530817Abstract: A back side illumination photodiode includes a light-receiving back side surface of a semiconductor material substrate. An area of the light-receiving back side surface includes a recess. The recess is filled with a material having an optical index that is lower than an optical index of the semiconductor material substrate. Both the substrate and the filling material are transparent to an operating wavelength of the photodiode. The recess may be formed to have a ring shape.Type: GrantFiled: November 30, 2015Date of Patent: December 27, 2016Assignees: STMicroelectronics SA, Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Michel Marty, Laurent Frey
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Patent number: 9520435Abstract: An image sensor including a semiconductor layer; a stack of insulating layers resting on the back side of the semiconductor layer; a conductive layer portion extending along part of the height of the stack and flush with the exposed surface of the stack; laterally-insulated conductive fingers extending through the semiconductor layer from its front side and penetrating into said layer portion; laterally-insulated conductive walls separating pixel areas, these walls extending through the semiconductor layer from its front side and having a lower height than the fingers; and an interconnection structure resting on the front side of the semiconductor layer and including vias in contact with the fingers.Type: GrantFiled: August 31, 2015Date of Patent: December 13, 2016Assignees: STMicroelectronics SA, STMicroelectronics (Crolles 2) SASInventors: Nayera Ahmed, Michel Marty
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Publication number: 20160351745Abstract: A photodetector including a photoelectric conversion structure made of a semiconductor material and, on a light-receiving surface of the conversion structure, a stack of first and second diffractive elements, the second element being above the first element, wherein: the first element includes at least one pad made of a material having an optical index n1, laterally surrounded with a region made of a material having an optical index n2 different from n1; the second element includes at least one pad made of a material having an optical index n3, laterally surrounded with a region made of a material having an optical index n4 different from n3; the pads of the first and second elements are substantially vertically aligned; and optical index differences n1?n2 and n3?n4 have opposite signs.Type: ApplicationFiled: May 24, 2016Publication date: December 1, 2016Applicants: Commissariat à I'Énergie Atomique et aux Énergies Alternatives, STMicroelectronics SAInventors: Laurent Frey, Michel Marty
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Publication number: 20160351617Abstract: An image sensor having a portion including interconnection levels formed on a semiconductor substrate covered with a first layer of a dielectric material, including conductive tracks separated from one another by insulating layers interconnected by vias crossing the insulating layers, and an infrared bandpass filter comprising filter levels adjacent to the interconnection levels formed by an alternation of second layers of the dielectric material and of silicon layers, the refraction index of the dielectric material being smaller than 2.5 at the maximum transmission wavelength of the filter, one of the second dielectric layers of each filter level being identical to the insulating layer of the adjacent interconnection level.Type: ApplicationFiled: May 24, 2016Publication date: December 1, 2016Applicant: Commissariat à I'Énergie Atomique et aux Énergies AlternativesInventors: Laurent Frey, Michel Marty, Lilian Masarotto
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Patent number: 9450000Abstract: A photodiode includes at least one central pad arranged on a light-receiving surface of a photodiode semiconductor substrate. The pad is made of a first material and includes lateral sidewalls surrounded by a spacer made of a second material having a different optical index than the first material. The lateral dimensions of the pad are smaller than an operating wavelength of the photodiode. Both the first and second materials are transparent to that operating wavelength. The pads and spacers are formed at a same time gate electrodes and sidewall spacers of MOS transistors are formed.Type: GrantFiled: August 19, 2014Date of Patent: September 20, 2016Assignees: STMicroelectronics (Crolles 2) SAS, STMicroelectronics SA, Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Michel Marty, Sebastien Jouan, Laurent Frey, Salim Boutami
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Patent number: 9397128Abstract: A stack of layers defines a filter and is formed by copper on hydrogenated silicon nitride supported by a carrier. The filter includes a layer of hydrogenated silicon nitride, a layer of silicon oxide on the layer of hydrogenated silicon nitride and a layer of copper on the layer of silicon oxide. The layer of hydrogenated silicon nitride may have, in a vicinity of its upper side, a ratio of a number of silicon atoms per cubic centimeter to a number of nitrogen atoms per cubic centimeter lower than 0.8 (or even lower than 0.6), with a number of silicon-hydrogen bonds smaller than or equal to 6×1021 bonds per cubic centimeter (or even smaller than 0.5×1021 bonds per cubic centimeter). The filter further includes an additional layer of copper between the layer of hydrogenated silicon nitride and the carrier.Type: GrantFiled: October 1, 2014Date of Patent: July 19, 2016Assignee: STMicroelectronics SAInventors: Patrick Gros D'aillon, Michel Marty
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Publication number: 20160172404Abstract: An image sensor including a semiconductor layer; a stack of insulating layers resting on the back side of the semiconductor layer; a conductive layer portion extending along part of the height of the stack and flush with the exposed surface of the stack; laterally-insulated conductive fingers extending through the semiconductor layer from its front side and penetrating into said layer portion; laterally-insulated conductive walls separating pixel areas, these walls extending through the semiconductor layer from its front side and having a lower height than the fingers; and an interconnection structure resting on the front side of the semiconductor layer and including vias in contact with the fingers.Type: ApplicationFiled: August 31, 2015Publication date: June 16, 2016Inventors: Nayera Ahmed, Michel Marty
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Publication number: 20160125974Abstract: The invention relates to an electric device (1, 20, 30) comprising a cross-linked layer (3, 4, 5, 21, 22, 23, 31, 32) obtained from a polymer composition including at least one polymer comprising at least one epoxy function, characterised in that the polymer composition also comprises a non-polymer compound as a cross-linking agent including at least one reactive function that can react with the epoxy function of the polymer in order to allow the polymer to be cross-linked.Type: ApplicationFiled: June 3, 2014Publication date: May 5, 2016Inventors: Ruben Briceno Garcia, Jean-Michel Marty, Maud Thivillon, Yannick Goutille, Laurent Keromnes
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Publication number: 20160125975Abstract: The invention relates to an electrical device (1,20,30) comprising a cross-linked layer (3, 4, 5, 21, 22, 23, 31, 32) produced from a polymer composition comprising: at least one polymer A comprising at least one epoxy function; and a cross-linking agent B comprising at least one reactive function that can react with the epoxy function of said polymer A in order to allow the cross-linking of said polymer A. The device is characterised in that the polymer composition also comprises a compound C comprising: at least one aromatic group; and a reactive group that can physically interact with the hydroxyl function formed by the opening of said epoxy function during the cross-linking of polymer A.Type: ApplicationFiled: June 3, 2014Publication date: May 5, 2016Inventors: Ruben Briceno Garcia, Jean-Michel Marty, Lucile Carteron, Yannick Goutille, Laurent Keromnes, Francoise Fenouillot, Phillippe Chaumont, Philippe Cassagnau
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Publication number: 20160093662Abstract: A back side illumination photodiode includes a light-receiving back side surface of a semiconductor material substrate. An area of the light-receiving back side surface includes a recess. The recess is filled with a material having an optical index that is lower than an optical index of the semiconductor material substrate. Both the substrate and the filling material are transparent to an operating wavelength of the photodiode. The recess may be formed to have a ring shape.Type: ApplicationFiled: November 30, 2015Publication date: March 31, 2016Applicants: STMicroelectronics SA, Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Michel Marty, Laurent Frey