Patents by Inventor Michel Marty

Michel Marty has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10014337
    Abstract: A spectral filter is manufactured using a process wherein a first rectangular bar is formed within a first layer made of a first material, said first rectangular bar being made of a second material having a different optical index. The process further includes, in a second layer over the first layer, a second rectangular bar made of the second material. The second rectangular bar is positioned in contact with the first rectangular bar. The second layer is also made of the first material.
    Type: Grant
    Filed: September 29, 2016
    Date of Patent: July 3, 2018
    Assignees: STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS
    Inventors: Romain Girard Desprolet, Michel Marty, Salim Boutami, Sandrine Lhostis
  • Patent number: 9985119
    Abstract: An integrated image sensor may include adjacent pixels, with each pixel including an active semiconductor region including a photodiode, an antireflection layer disposed above the photodiode, a dielectric region disposed above the antireflection layer, an optical filter disposed above the dielectric region, and a diffraction grating disposed in the antireflection layer. The diffraction grating includes an array of pads.
    Type: Grant
    Filed: April 17, 2017
    Date of Patent: May 29, 2018
    Assignees: STMICROELECTRONICS S.A., STMICROELECTRONICS (Crolles 2) SAS
    Inventors: Axel Crocherie, Michel Marty, Jean-Luc Huguenin, Sébastien Jouan
  • Patent number: 9984789
    Abstract: An electric device has a cross-linked layer obtained from a polymer composition that includes at least one polymer having at least one epoxy function. The polymer composition also has a non-polymer compound as a cross-linking agent including at least one reactive function that can react with the epoxy function of the polymer in order to allow the polymer to be cross-linked.
    Type: Grant
    Filed: June 3, 2014
    Date of Patent: May 29, 2018
    Assignee: NEXANS
    Inventors: Ruben Briceno Garcia, Jean-Michel Marty, Maud Thivillon, Yannick Goutille, Laurent Keromnes
  • Patent number: 9871074
    Abstract: An image sensor having a portion including interconnection levels formed on a semiconductor substrate covered with a first layer of a dielectric material, including conductive tracks separated from one another by insulating layers interconnected by vias crossing the insulating layers, and an infrared bandpass filter comprising filter levels adjacent to the interconnection levels formed by an alternation of second layers of the dielectric material and of silicon layers, the refraction index of the dielectric material being smaller than 2.5 at the maximum transmission wavelength of the filter, one of the second dielectric layers of each filter level being identical to the insulating layer of the adjacent interconnection level.
    Type: Grant
    Filed: May 24, 2016
    Date of Patent: January 16, 2018
    Assignee: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
    Inventors: Laurent Frey, Michel Marty, Lilian Masarotto
  • Patent number: 9812615
    Abstract: A photodiode has an active portion formed in a silicon substrate and covered with a stack of insulating layers successively including at least one first silicon oxide layer, an antireflection layer, and a second silicon oxide layer. The quantum efficiency of the photodiode is optimized by: determining, for the infrared wavelength, first thicknesses of the second layer corresponding to maximum absorptions of the photodiode, and selecting, from among the first thicknesses, a desired thickness, eoxD, so that a maximum manufacturing dispersion is smaller than a half of a pseudo-period separating two successive maximum absorption values.
    Type: Grant
    Filed: March 17, 2015
    Date of Patent: November 7, 2017
    Assignees: STMicroelectronics SA, Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Laurent Frey, Michel Marty
  • Publication number: 20170221948
    Abstract: An integrated image sensor may include adjacent pixels, with each pixel including an active semiconductor region including a photodiode, an antireflection layer disposed above the photodiode, a dielectric region disposed above the antireflection layer, an optical filter disposed above the dielectric region, and a diffraction grating disposed in the antireflection layer. The diffraction grating includes an array of pads.
    Type: Application
    Filed: April 17, 2017
    Publication date: August 3, 2017
    Inventors: Axel Crocherie, Michel Marty, Jean-Luc Huguenin, Sébastien Jouan
  • Patent number: 9685472
    Abstract: An integrated image sensor may include adjacent pixels, with each pixel including an active semiconductor region including a photodiode, an antireflection layer above the photodiode, a dielectric region above the antireflection layer and an optical filter to pass incident luminous radiation having a given wavelength. The antireflection layer may include an array of pads mutually separated by a dielectric material of the dielectric region. The array may be configured to allow simultaneous transmission of the incident luminous radiation and a diffraction of the incident luminous radiation producing diffracted radiations which have wavelengths below that of the incident radiation, and are attenuated with respect to the incident radiation.
    Type: Grant
    Filed: February 23, 2016
    Date of Patent: June 20, 2017
    Assignees: STMICROELECTRONICS SA, STMICROELECTRONICS (CROLLES 2) SAS
    Inventors: Axel Crocherie, Michel Marty, Jean-Luc Huguenin, Sébastien Jouan
  • Patent number: 9640704
    Abstract: A photodetector including a photoelectric conversion structure made of a semiconductor material and, on a light-receiving surface of the conversion structure, a stack of first and second diffractive elements, the second element being above the first element, wherein: the first element includes at least one pad made of a material having an optical index n1, laterally surrounded with a region made of a material having an optical index n2 different from n1; the second element includes at least one pad made of a material having an optical index n3, laterally surrounded with a region made of a material having an optical index n4 different from n3; the pads of the first and second elements are substantially vertically aligned; and optical index differences n1?n2 and n3?n4 have opposite signs.
    Type: Grant
    Filed: May 24, 2016
    Date of Patent: May 2, 2017
    Assignees: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, STMicroelectronics SA
    Inventors: Laurent Frey, Michel Marty
  • Publication number: 20170092678
    Abstract: A spectral filter is manufactured using a process wherein a first rectangular bar is formed within a first layer made of a first material, said first rectangular bar being made of a second material having a different optical index. The process further includes, in a second layer over the first layer, a second rectangular bar made of the second material. The second rectangular bar is positioned in contact with the first rectangular bar. The second layer is also made of the first material.
    Type: Application
    Filed: September 29, 2016
    Publication date: March 30, 2017
    Applicants: STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS, Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Romain Girard Desprolet, Michel Marty, Salim Boutami, Sandrine Lhostis
  • Publication number: 20170062507
    Abstract: An integrated image sensor may include adjacent pixels, with each pixel including an active semiconductor region including a photodiode, an antireflection layer above the photodiode, a dielectric region above the antireflection layer and an optical filter to pass incident luminous radiation having a given wavelength. The antireflection layer may include an array of pads mutually separated by a dielectric material of the dielectric region. The array may be configured to allow simultaneous transmission of the incident luminous radiation and a diffraction of the incident luminous radiation producing diffracted radiations which have wavelengths below that of the incident radiation, and are attenuated with respect to the incident radiation.
    Type: Application
    Filed: February 23, 2016
    Publication date: March 2, 2017
    Inventors: Axel CROCHERIE, Michel MARTY, Jean-Luc HUGUENIN, Sébastien JOUAN
  • Patent number: 9530817
    Abstract: A back side illumination photodiode includes a light-receiving back side surface of a semiconductor material substrate. An area of the light-receiving back side surface includes a recess. The recess is filled with a material having an optical index that is lower than an optical index of the semiconductor material substrate. Both the substrate and the filling material are transparent to an operating wavelength of the photodiode. The recess may be formed to have a ring shape.
    Type: Grant
    Filed: November 30, 2015
    Date of Patent: December 27, 2016
    Assignees: STMicroelectronics SA, Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Michel Marty, Laurent Frey
  • Patent number: 9520435
    Abstract: An image sensor including a semiconductor layer; a stack of insulating layers resting on the back side of the semiconductor layer; a conductive layer portion extending along part of the height of the stack and flush with the exposed surface of the stack; laterally-insulated conductive fingers extending through the semiconductor layer from its front side and penetrating into said layer portion; laterally-insulated conductive walls separating pixel areas, these walls extending through the semiconductor layer from its front side and having a lower height than the fingers; and an interconnection structure resting on the front side of the semiconductor layer and including vias in contact with the fingers.
    Type: Grant
    Filed: August 31, 2015
    Date of Patent: December 13, 2016
    Assignees: STMicroelectronics SA, STMicroelectronics (Crolles 2) SAS
    Inventors: Nayera Ahmed, Michel Marty
  • Publication number: 20160351617
    Abstract: An image sensor having a portion including interconnection levels formed on a semiconductor substrate covered with a first layer of a dielectric material, including conductive tracks separated from one another by insulating layers interconnected by vias crossing the insulating layers, and an infrared bandpass filter comprising filter levels adjacent to the interconnection levels formed by an alternation of second layers of the dielectric material and of silicon layers, the refraction index of the dielectric material being smaller than 2.5 at the maximum transmission wavelength of the filter, one of the second dielectric layers of each filter level being identical to the insulating layer of the adjacent interconnection level.
    Type: Application
    Filed: May 24, 2016
    Publication date: December 1, 2016
    Applicant: Commissariat à I'Énergie Atomique et aux Énergies Alternatives
    Inventors: Laurent Frey, Michel Marty, Lilian Masarotto
  • Publication number: 20160351745
    Abstract: A photodetector including a photoelectric conversion structure made of a semiconductor material and, on a light-receiving surface of the conversion structure, a stack of first and second diffractive elements, the second element being above the first element, wherein: the first element includes at least one pad made of a material having an optical index n1, laterally surrounded with a region made of a material having an optical index n2 different from n1; the second element includes at least one pad made of a material having an optical index n3, laterally surrounded with a region made of a material having an optical index n4 different from n3; the pads of the first and second elements are substantially vertically aligned; and optical index differences n1?n2 and n3?n4 have opposite signs.
    Type: Application
    Filed: May 24, 2016
    Publication date: December 1, 2016
    Applicants: Commissariat à I'Énergie Atomique et aux Énergies Alternatives, STMicroelectronics SA
    Inventors: Laurent Frey, Michel Marty
  • Patent number: 9450000
    Abstract: A photodiode includes at least one central pad arranged on a light-receiving surface of a photodiode semiconductor substrate. The pad is made of a first material and includes lateral sidewalls surrounded by a spacer made of a second material having a different optical index than the first material. The lateral dimensions of the pad are smaller than an operating wavelength of the photodiode. Both the first and second materials are transparent to that operating wavelength. The pads and spacers are formed at a same time gate electrodes and sidewall spacers of MOS transistors are formed.
    Type: Grant
    Filed: August 19, 2014
    Date of Patent: September 20, 2016
    Assignees: STMicroelectronics (Crolles 2) SAS, STMicroelectronics SA, Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Michel Marty, Sebastien Jouan, Laurent Frey, Salim Boutami
  • Patent number: 9397128
    Abstract: A stack of layers defines a filter and is formed by copper on hydrogenated silicon nitride supported by a carrier. The filter includes a layer of hydrogenated silicon nitride, a layer of silicon oxide on the layer of hydrogenated silicon nitride and a layer of copper on the layer of silicon oxide. The layer of hydrogenated silicon nitride may have, in a vicinity of its upper side, a ratio of a number of silicon atoms per cubic centimeter to a number of nitrogen atoms per cubic centimeter lower than 0.8 (or even lower than 0.6), with a number of silicon-hydrogen bonds smaller than or equal to 6×1021 bonds per cubic centimeter (or even smaller than 0.5×1021 bonds per cubic centimeter). The filter further includes an additional layer of copper between the layer of hydrogenated silicon nitride and the carrier.
    Type: Grant
    Filed: October 1, 2014
    Date of Patent: July 19, 2016
    Assignee: STMicroelectronics SA
    Inventors: Patrick Gros D'aillon, Michel Marty
  • Publication number: 20160172404
    Abstract: An image sensor including a semiconductor layer; a stack of insulating layers resting on the back side of the semiconductor layer; a conductive layer portion extending along part of the height of the stack and flush with the exposed surface of the stack; laterally-insulated conductive fingers extending through the semiconductor layer from its front side and penetrating into said layer portion; laterally-insulated conductive walls separating pixel areas, these walls extending through the semiconductor layer from its front side and having a lower height than the fingers; and an interconnection structure resting on the front side of the semiconductor layer and including vias in contact with the fingers.
    Type: Application
    Filed: August 31, 2015
    Publication date: June 16, 2016
    Inventors: Nayera Ahmed, Michel Marty
  • Publication number: 20160125975
    Abstract: The invention relates to an electrical device (1,20,30) comprising a cross-linked layer (3, 4, 5, 21, 22, 23, 31, 32) produced from a polymer composition comprising: at least one polymer A comprising at least one epoxy function; and a cross-linking agent B comprising at least one reactive function that can react with the epoxy function of said polymer A in order to allow the cross-linking of said polymer A. The device is characterised in that the polymer composition also comprises a compound C comprising: at least one aromatic group; and a reactive group that can physically interact with the hydroxyl function formed by the opening of said epoxy function during the cross-linking of polymer A.
    Type: Application
    Filed: June 3, 2014
    Publication date: May 5, 2016
    Inventors: Ruben Briceno Garcia, Jean-Michel Marty, Lucile Carteron, Yannick Goutille, Laurent Keromnes, Francoise Fenouillot, Phillippe Chaumont, Philippe Cassagnau
  • Publication number: 20160125974
    Abstract: The invention relates to an electric device (1, 20, 30) comprising a cross-linked layer (3, 4, 5, 21, 22, 23, 31, 32) obtained from a polymer composition including at least one polymer comprising at least one epoxy function, characterised in that the polymer composition also comprises a non-polymer compound as a cross-linking agent including at least one reactive function that can react with the epoxy function of the polymer in order to allow the polymer to be cross-linked.
    Type: Application
    Filed: June 3, 2014
    Publication date: May 5, 2016
    Inventors: Ruben Briceno Garcia, Jean-Michel Marty, Maud Thivillon, Yannick Goutille, Laurent Keromnes
  • Publication number: 20160093662
    Abstract: A back side illumination photodiode includes a light-receiving back side surface of a semiconductor material substrate. An area of the light-receiving back side surface includes a recess. The recess is filled with a material having an optical index that is lower than an optical index of the semiconductor material substrate. Both the substrate and the filling material are transparent to an operating wavelength of the photodiode. The recess may be formed to have a ring shape.
    Type: Application
    Filed: November 30, 2015
    Publication date: March 31, 2016
    Applicants: STMicroelectronics SA, Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Michel Marty, Laurent Frey