Abstract: A low-cost, durable silicon carbide member for a plasma processing apparatus. The silicon carbide member for a plasma processing apparatus can be obtained by processing a sintered body which is produced with a method in which metal impurity is reduced to more than 20 ppm and 70 ppm or less, and an ?-structure silicon carbide power having an average particle diameter of 0.3 to 3 ?m and including 50 ppm or less of an Al impurity is mixed with 0.5 to 5 weight parts of a B4C sintering aid, or with a sintering aid comprising Al2O3 and Y2O3 with total amount of 3 to 15 weight parts, and then a mixture of the ?-structure silicon carbide power with the sintering aid is sintered in an argon atmosphere furnace or a high-frequency induction heating furnace.

Abstract: An electrostatic chuck can be manufactured at low cost and can securely prevent arcing even if the main body of the electrostatic chuck is thin. This electrostatic chuck is provided with an electrostatic chuck main body, an arcing prevention member, and a metal base member. The electrostatic chuck main body and the metal base member are provided with a plurality of vertical cooling gas holes. The arcing prevention member includes: a ceramic plate-shaped body through which a plurality of fine holes 20-100 ?m in diameter pass; and an exterior member that secures the ceramic plate-shaped body and is disposed in an upper part of the vertical cooling gas holes. The ceramic plate-shaped body is thicker than the electrostatic chuck main body.

Abstract: A low-cost, durable silicon carbide member for a plasma processing apparatus. The silicon carbide member for a plasma processing apparatus can be obtained by processing a sintered body which is produced with a method in which metal impurity is reduced to more than 20 ppm and 70 ppm or less, and an ?-structure silicon carbide power having an average particle diameter of 0.3 to 3 ?m and including 50 ppm or less of an Al impurity is mixed with 0.5 to 5 weight parts of a B4C sintering aid, or with a sintering aid comprising Al2O3 and Y2O3 with total amount of 3 to 15 weight parts, and then a mixture of the ?-structure silicon carbide power with the sintering aid is sintered in an argon atmosphere furnace or a high-frequency induction heating furnace.

Abstract: A silicon carbide member for a plasma processing apparatus is obtained by mixing an ?-silicon carbide powder having an average particle size of 0.3 to 3 ?m, with an amount of metal impurities in the ?-silicon carbide powder reduced to 20 ppm or less, and a sintering aid comprising B4C in amount of 0.5 to 5 weight parts or Al2O3 and Y2O3 in total amount of 3 to 15 weight parts; sintering a mixture of the ?-silicon carbide powder and the sintering aid in an argon atmosphere furnace or a high-frequency dielectric heating furnace; and then processing the resulting sintered body. The resulting silicon carbide member for a plasma processing apparatus is low cost and durable.

Abstract: A silicon carbide member for a plasma processing apparatus is obtained by mixing an ?-silicon carbide powder having an average particle size of 0.3 to 3 ?m, with an amount of metal impurities in the ?-silicon carbide powder reduced to 20 ppm or less, and a sintering aid comprising B4C in amount of 0.5 to 5 weight parts or Al2O3 and Y2O3 in total amount of 3 to 15 weight parts; sintering a mixture of the ?-silicon carbide powder and the sintering aid in an argon atmosphere furnace or a high-frequency dielectric heating furnace; and then processing the resulting sintered body. The resulting silicon carbide member for a plasma processing apparatus is low cost and durable.

Abstract: The nozzle member of a fluid nozzle includes at least one through hole that is parallel to a center axis, wherein a diameter dimension of the through hole is 10 ?m to 100 ?m, a length-to-diameter ratio (L/D) of the through hole is 5 or above, and the nozzle member is formed of ceramics having relative density of 95% or above. The nozzle member including a plurality of minute through holes is manufactured by performing extrusion or cast molding in such a way that a molded body includes a filament of synthetic resin, carbon, or metal in a direction of the center axis of the molded body, and then defatting/sintering the molded body after removing the filament or, when the filament is formed of synthetic resin or carbon, defatting/sintering the molded body under oxidizing atmosphere to evaporate and remove the filament without removing the filament from the molded body.

Abstract: The nozzle member of a fluid nozzle includes at least one through hole that is parallel to a center axis, wherein a diameter dimension of the through hole is 10 ?m to 100 ?m, a length-to-diameter ratio (L/D) of the through hole is 5 or above, and the nozzle member is formed of ceramics having relative density of 95% or above. The nozzle member including a plurality of minute through holes is manufactured by performing extrusion or cast molding in such a way that a molded body includes a filament of synthetic resin, carbon, or metal in a direction of the center axis of the molded body, and then defatting/sintering the molded body after removing the filament or, when the filament is formed of synthetic resin or carbon, defatting/sintering the molded body under oxidizing atmosphere to evaporate and remove the filament without removing the filament from the molded body.

Abstract: A sub-nozzle in an air injection type weaving machine in which fluffing or the like caused by contact thereof with warp etc. does not occur, and for which its manufacture and control is facilitated. A sub-nozzle jetting a high-speed air flow for acceleration toward weft thrown from a main nozzle to between warps when they are raised and lowered to form shed opening comprises a holder connected to the side of a supply source of compressed air and a nozzle head connected to the holder, where at least the nozzle head is integrally formed by a high-strength glass material and occurrence of warp damage or wear of the nozzle head per se is restrained by the smoothness of its surface.

Abstract: Substrate materials for magnetic heads consisting of 24-75 mol % of .alpha.-Al.sub.2 O.sub.3 and the remaining 76-25 mol % of TiC.sub.x O.sub.y N.sub.z containing a small amount of additives, that has a NaCl-type structure which retain known characteristics required on such materials and have controlled sizes of crystallites of Al.sub.2 O.sub.3 and TiC.sub.x O.sub.y N.sub.z, uniformly dispersed TiC.sub.x O.sub.y N.sub.z crystallites and, if any, additive elements, in which internal stress is relieved. The materials are intended for eliminating problems in IBE to form steps and thus for fabricating high-precision thin-film heads for high-density recording.

Abstract: Substrate materials for magnetic heads consisting of 24-75 mol % of .alpha.-Al.sub.2 O.sub.3 and the remaining 76-25 mol % of TiC.sub.X O.sub.Y N.sub.Z, or TiC.sub.X O.sub.Y N.sub.Z containing a small amount of additives, that has a NaCl-type structure which retain known characteristics required on such materials and have controlled sizes of crystallites of Al.sub.2 O.sub.3 and TiC.sub.X O.sub.Y N.sub.Z, uniformly dispersed TiC.sub.X O.sub.Y N.sub.Z crystallites and, if any, additive elements, in which internal stress is relieved. The materials are intended for eliminating problems in machining to form steps and thus for fabricating high-precision thin-film heads for high-density recording.

Abstract: A sintered material for recording/reading (particularly magnetic) head slider is produced by:preparing a powdery mixture which comprises 0.5 to 6.0% by weight of at least one component selected from the component group A consisting of the following elements and compounds thereof, a garnet type compound consisting essentially of erbium oxide and aluminum oxide in amounts of 2 to 12% by weight and 0 (exclusive) to 2 (inclusive) % by weight based on the total composition, respectively, and expressed by the formula Er.sub.3 (Al,Er).sub.2 (AlO.sub.4).sub.3 through (Er, Al).sub.3 Al.sub.2 (AlO.sub.4).sub.3, and the balance being silicon carbide powder:the elements for the component group A being Ti, V, Cr, Mn, Mg, Y, Zr, Nb, Mo, Ba, La, Ce, Gd, Hf, Ta, W, Th, and Cs; andsintering the resultant mass under the application of a high pressure.Further sintering aids of Be, BeO, B and B.sub.4 C may be present. For the garnet type compound, erbium oxide may be used, preferably in combination with alumina.

Abstract: A water jet nozzle for a loom includes a nozzle member having a rear end portion, an interior orifice formed in the rear end portion, a stabilizer integrally connected to the orifice for adjusting water flow in the rear end portion of the nozzle member and a needle arranged centrally of the orifice for feeding out a weft yarn. The orifice and stabilizer define an annular groove therebetween and are made of a material having a high hardness and high corrosion resistance. The orifice and stabilizer are preferably made of a material such as a cemented carbide, cermet, or ceramic having a modulus of elasticity of at least 1.5.times.10.sup.4 kg/mm, an H.sub.R A hardness of at least 85 and a flexural strength of at least 50 kg/mm.sup.2. The stabilizer is constructed of a plurality of elongated blades of equal width arranged in concentric parallel spaced relation to define therebetween a plurality of elongated slits of equal width arranged in concentric parallel spaced relation.

Abstract: An auxiliary nozzle for a loom, such as an air jet loom within a shuttleless loom, jets pressurized gas in order to prevent stall of weft inserted into warp shedding. At least a tip portion of an auxiliary nozzle body is formed of ceramics material having a very small integrally-molded surface roughness of 0.5 .mu.m or less and having characteristics of high toughness and high strength whereby occurrence of flaws in warp can be minimized and woven fabric of high quality can be obtained. Particularly, by employment of particular zirconia-type ceramics, the moldability, processing properties for drilling and wear resistance can be improved.

Abstract: A material for thin film magnetic head slider particularly suited for high recording, which is obtained by sintering a mixture consisting essentially of:5 to 45% by weight of titanium carbide component;0.2 to 10% by weight of zirconium oxide;0.05 to 2% by weight of oxide of yttrium;0.2 to 25% by weight of aluminum nitride; and the balance of Al.sub.2 O.sub.3 component substituted with 0.5 to 8% by weight being at least one machinability agent selected from the group consisting of oxides of Mg, Ca, B, Ni and Cr and complex oxides thereof.

Abstract: A sintered material for recording/reading (particularly magnetic) head slider is produced by:preparing a powdery mixture which comprises 0.5 to 6.0% by weight of at least one component selected from the component group A consisting of the following elements and compounds thereof, a garnet type compound consisting essentially of erbium oxide and aluminum oxide in amounts of 2 to 12% by weight and 0 (exclusive) to 2 (inclusive) % by weight based on the total composition, respectively, and expressed by the formula Er.sub.3 (Al,Er).sub.2 (AlO.sub.4).sub.3 through (Er,Al).sub.3 Al.sub.2 (AlO.sub.4).sub.3, and the balance being silicon carbide powder:the elements for the component group A being Ti, V, Cr, Mn, Mg, Y, Zr, Nb, Mo, Ba, La, Ce, Gd, Hf, Ta, W, Th, and Cs; andsintering the resultant mass under the application of a high pressure.Further sintering aids of Be, BeO, B and B.sub.4 C may be present. For the garnet type compound, erbium oxide may be used, preferably in combination with alumina.

Abstract: A magnetic head slider and a material for it which comprises a sintered body obtained by sintering a raw material powder composed of 65 to 90% by weight of ZrO.sub.2 component containing therein a stabilizer and the balance of Al.sub.2 O.sub.3 component, 2% by weight or below of which has been substituted with a binder. The stabilizer is Y.sub.2 O.sub.3, MgO or CeO and the binder is Y.sub.2 O.sub.3 or MgO.

Abstract: A recording head slider comprises a slider body having a fluid bearing surface on a primary surface thereof and at least one transducer on at least one side of the slider body, the slider body being made of a sintered body produced by sintering a base composition consisting essentially of 10-40 percent by volume of silicon carbide and the balance being alumina. The base composition may comprise 0.2-10 percent by weight of sintering aids MgO, Y.sub.2 O.sub.3, ZrO.sub.2, CaO, Er.sub.2 O.sub.3 and Cr.sub.2 O.sub.3. This slider has high precision machinability and compatibility with recording media.

Abstract: An alumina base substrate material for recording heads, which comprises a densely sintered body consisting essentially of:per 100 parts by weight of a base component of 30 to 40% by weight of a titanium compound having TiO.sub.2 to (TiC+TiO.sub.2) percentage of 5 to 15% by weight and the balance being Al.sub.2 O.sub.3,components A, B and C, provided that the A to B ratio is within a hatched KLMN area in FIG. 1, in the following given parts by weight, andoxidic impurities in amounts of no higher than 0.2% by weight based on the total composition,said sintered body having an average crystal grain size of no higher than 1.3 microns, a porosity per area of no higher than 0.5%, a bending strength of at least 70 kg/cm.sup.2 and a hardness H.sub.R A of at least 93.0: whereincomponent A is at least one of spinels expressed by RO-Al.sub.2 O.sub.3, where R is at least one of Mg, Mn, Ni and Co, in an amount of 2.0 to 17.5 parts by weight,component B is 0.2 to 2.0 parts by weight of ZrO.sub.2, andComponent C is 0.

Abstract: Aluminum oxide substrate material for magnetic heads having improved toughness consisting essentially of: (1) 100 parts by weight, consisting of aluminum oxide and 30 to 50 parts by weight of (TiC+TiO.sub.2), and that provided TiO.sub.2 /(TiC+TiO.sub.2).times.100=5 to 15, (2) 0.5 to 5 parts by weight of addition of free cutting comprising at least one from the group of MgO, NiO, Cr.sub.2 O.sub.3 and ZrO.sub.2, and (3) 0.05 to 2 parts by weight of Y.sub.2 O.sub.3.The method of hot-forming aluminum oxide substrate material for magnetic head having improved sinterability consisting of (a) preparing a green compact by molding a raw material mixture which contains: (1) 100 parts by weight, consisting of aluminum oxide and 30 to 50 percent by weight of (TiC+TiO.sub.2), and that provided TiO.sub.2 /(TiC+TiO.sub.2).times.100=5 to 15, (2) 0.5 to 5 parts by weight of machinability agents comprising at least one from the group of MgO, NiO, Cr.sub.2 O.sub.3 and ZrO.sub.2, and (3) 0.05 to 2 parts by weight of Y.sub.2 O.

Abstract: Magnetic head slider material consisting of 5.about.10 percent by weight of silicon, 1.3.about.7.8 percent by weight of tungsten silicide and essentially balanced silicon carbide. And it is method for producing said magnetic head slider material that at the time of which the mixed powder consisting of silicon carbide, carbon and tungsten is sintered, cellulose is also mixed with said mixed powder and sintered together at the same time. And then fibrous micropores are caused to the sintered body by the above-described sintering, after that molten metallic silicon infiltrated into fibrous micropores.