Patents by Inventor Miki Egami
Miki Egami has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11613683Abstract: There is provided a production method of a chain silica particle dispersion. This production method includes a dispersion preparation step of hydrolyzing alkoxysilane in the presence of ammonia to prepare a silica particle dispersion, an ammonia removal step of removing the ammonia from the silica particle dispersion such that an ammonia amount relative to silica contained in the silica particle dispersion is 0.3% by mass or less, and a hydrothermal treatment step of hydrothermally treating the silica particle dispersion having a silica concentration of 12% by mass or more, from which the ammonia has been removed, at a temperature of not lower than 150° C. and lower than 250° C. An abrasive including such chain silica particles is high in polishing rate and excellent in polishing properties.Type: GrantFiled: December 27, 2018Date of Patent: March 28, 2023Assignee: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Miki Egami, Masanobu Taniguchi, Mitsuaki Kumazawa, Ryo Muraguchi
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Patent number: 11542167Abstract: Provided is a production method of a silica particle dispersion liquid which includes, preparing a linked silica particle by adding a liquid A containing alkoxysilane and a liquid B containing an alkali catalyst to a liquid containing water, an organic solvent, and an alkali catalyst in a container. The preparing a linked silica particle includes initially adding an alkali catalyst, the initially adding an alkali catalyst includes decreasing a molar ratio of an alkali catalyst to silica in the liquid in the container to 0.15 to 0.60 by adding the liquid A containing alkoxysilane to the liquid in the container, and increasing the molar ratio by 0.2 or more by adding the liquid B to the liquid having the decreased molar ratio in the container.Type: GrantFiled: September 23, 2020Date of Patent: January 3, 2023Assignee: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Shogo Hayashi, Miki Egami, Mitsuaki Kumazawa, Ryo Muraguchi, Michio Komatsu
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Patent number: 11492513Abstract: A polishing composition that can not only achieve high polishing speed, but also can improve the surface smoothness (surface quality) of a polished substrate and reduce defects is provided. That is, provided is a polishing composition comprising silica particles and a water soluble polymer, wherein the contained silica particles satisfy the following requirements (a) to (c): (a) the primary particle diameter based on the specific surface area is 5 to 300 nm; (b) the coefficient of variation in the particle diameter is 10% or less; and (c) the Sears number Y is 10.0 to 12.0.Type: GrantFiled: March 28, 2019Date of Patent: November 8, 2022Assignee: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Miki Egami, Mitsuaki Kumazawa, Ryo Muraguchi, Michio Komatsu
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Patent number: 11427730Abstract: Provided is a dispersion liquid of silica particles, comprising silica particles having an average particle diameter of 5 to 300 nm determined from an electron micrograph and a density of 1.20 g/cm3 or more determined from a specific surface area determined by a BET method using nitrogen adsorption, wherein the dispersion liquid has a pH of less than 8, a silica concentration of 12 to 40% by mass, and a viscosity in terms of a silica concentration of 20% by mass of 40 mPa·s or less. When this silica particle is used as an abrasive, it is possible to realize a sufficient polishing speed and a smooth polished surface on which occurrence of scratches is suppressed.Type: GrantFiled: November 15, 2018Date of Patent: August 30, 2022Assignee: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Miki Egami, Mitsuaki Kumazawa, Hirotada Arakane, Ryo Muraguchi, Toshiharu Hirai
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Patent number: 11312634Abstract: A method for producing a dispersion liquid of silica particles, by simultaneously adding a liquid A containing silane alkoxide and a liquid B containing an alkali catalyst and water to a liquid I containing silica seed particles to cause the particles to grow, so as to produce silica particles; wherein the variation rate of the mole ratio of the alkali catalyst to silica components in the reaction system during a period from the start to the end of the addition relative to the initial mole ratio is 0.90 to 1.10; and the variation rate of the mole ratio of water to the silica components in the reaction system during a period from the start to the end of the addition relative to the initial mole ratio is 0.90 to 1.10.Type: GrantFiled: March 29, 2018Date of Patent: April 26, 2022Assignee: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Miki Egami, Mitsuaki Kumazawa, Hirotada Arakane, Ryo Muraguchi, Toshiharu Hirai
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Patent number: 11254580Abstract: A method for producing a liquid dispersion containing irregular-shaped silica particles in which two or more primary particles are linked together, by simultaneously adding a liquid A containing silane alkoxide and a liquid B containing an alkali catalyst and water to a liquid I consisting substantially of an organic solvent to cause hydrolysis and polycondensation of the silane alkoxide, wherein the period from the start of the addition until the silica concentration of the reaction system at the end of the addition reaches 70% is 20% or less of the full reaction time period.Type: GrantFiled: January 18, 2018Date of Patent: February 22, 2022Assignee: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Miki Egami, Mitsuaki Kumazawa, Hirotada Arakane, Ryo Muraguchi, Toshiharu Hirai
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Publication number: 20210094835Abstract: There are provided spherical porous silica particles that do not disintegrate during production and exhibit high disintegration properties (easily disintegrating properties) during use, so as to be used in an abrasive to perform precise abrading, a scrub material of cosmetics, or the like. There have been achieved porous silica particles that have an average particle diameter of 0.5 to 50 ?m, a pore volume of 0.5 to 5.0 cm3/g, a mode of a pore diameter of 2 to 50 nm, a shape factor of 0.8 to 1.0, an average compression strength of 0.1 to less than 1.0 kgf/mm2, and a sodium content of 10 ppm or less, and possess a network structure.Type: ApplicationFiled: December 27, 2018Publication date: April 1, 2021Inventors: Miki EGAMI, Takuji MIYAMOTO, Ryo MURAGUCHI
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Publication number: 20210094832Abstract: A silica particle dispersion liquid includes a silica particle that satisfies (i) to (iii) below: (i) an average particle diameter d is 5 to 300 nm; (ii) an occlusion amount of a basic substance per 1 g of the particle is 2 mg or more; and (iii) a Sears number Y exceeds 12.0.Type: ApplicationFiled: September 23, 2020Publication date: April 1, 2021Inventors: Miki EGAMI, Mitsuaki KUMAZAWA, Ryo MURAGUCHI, Michio KOMATSU
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Publication number: 20210094833Abstract: Provided is a production method of a silica particle dispersion liquid which includes, preparing a linked silica particle by adding a liquid A containing alkoxysilane and a liquid B containing an alkali catalyst to a liquid containing water, an organic solvent, and an alkali catalyst in a container. The preparing a linked silica particle includes initially adding an alkali catalyst, the initially adding an alkali catalyst includes decreasing a molar ratio of an alkali catalyst to silica in the liquid in the container to 0.15 to 0.60 by adding the liquid A containing alkoxysilane to the liquid in the container, and increasing the molar ratio by 0.2 or more by adding the liquid B to the liquid having the decreased molar ratio in the container.Type: ApplicationFiled: September 23, 2020Publication date: April 1, 2021Inventors: Shogo HAYASHI, Miki Egami, Mitsuaki Kumazawa, Ryo Muraguchi, Michio Komatsu
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Publication number: 20210002513Abstract: A polishing composition that can not only achieve high polishing speed, but also can improve the surface smoothness (surface quality) of a polished substrate and reduce defects is provided. That is, provided is a polishing composition comprising silica particles and a water soluble polymer, wherein the contained silica particles satisfy the following requirements (a) to (c): (a) the primary particle diameter based on the specific surface area is 5 to 300 nm; (b) the coefficient of variation in the particle diameter is 10% or less; and (c) the Sears number Y is 10.0 to 12.0.Type: ApplicationFiled: March 28, 2019Publication date: January 7, 2021Applicant: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Miki EGAMI, Mitsuaki KUMAZAWA, Ryo MURAGUCHI, Michio KOMATSU
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Publication number: 20200392385Abstract: There is provided a production method of a chain silica particle dispersion. This production method includes a dispersion preparation step of hydrolyzing alkoxysilane in the presence of ammonia to prepare a silica particle dispersion, an ammonia removal step of removing the ammonia from the silica particle dispersion such that an ammonia amount relative to silica contained in the silica particle dispersion is 0.3% by mass or less, and a hydrothermal treatment step of hydrothermally treating the silica particle dispersion having a silica concentration of 12% by mass or more, from which the ammonia has been removed, at a temperature of not lower than 150° C. and lower than 250° C. An abrasive including such chain silica particles is high in polishing rate and excellent in polishing properties.Type: ApplicationFiled: December 27, 2018Publication date: December 17, 2020Inventors: Miki EGAMI, Masanobu TANIGUCHI, Mitsuaki KUMAZAWA, Ryo MURAGUCHI
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Publication number: 20200392374Abstract: Provided is a dispersion liquid of silica particles, comprising silica particles having an average particle diameter of 5 to 300 nm determined from an electron micrograph and a density of 1.20 g/cm3 or more determined from a specific surface area determined by a BET method using nitrogen adsorption, wherein the dispersion liquid has a pH of less than 8, a silica concentration of 12 to 40% by mass, and a viscosity in terms of a silica concentration of 20% by mass of 40 mPa·s or less. When this silica particle is used as an abrasive, it is possible to realize a sufficient polishing speed and a smooth polished surface on which occurrence of scratches is suppressed.Type: ApplicationFiled: November 15, 2018Publication date: December 17, 2020Applicant: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Miki EGAMI, Mitsuaki KUMAZAWA, Hirotada ARAKANE, Ryo MURAGUCHI, Toshiharu HIRAI
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Publication number: 20200231451Abstract: A method for producing a dispersion liquid of silica particles, by simultaneously adding a liquid A containing silane alkoxide and a liquid B containing an alkali catalyst and water to a liquid I containing silica seed particles to cause the particles to grow, so as to produce silica particles; wherein the variation rate of the mole ratio of the alkali catalyst to silica components in the reaction system during a period from the start to the end of the addition relative to the initial mole ratio is 0.90 to 1.10; and the variation rate of the mole ratio of water to the silica components in the reaction system during a period from the start to the end of the addition relative to the initial mole ratio is 0.90 to 1.10.Type: ApplicationFiled: March 29, 2018Publication date: July 23, 2020Applicant: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Miki EGAMI, Mitsuaki KUMAZAWA, Hirotada ARAKANE, Ryo MURAGUCHI, Toshiharu HIRAI
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Publication number: 20190359491Abstract: A method for producing a liquid dispersion containing irregular-shaped silica particles in which two or more primary particles are linked together, by simultaneously adding a liquid A containing silane alkoxide and a liquid B containing an alkali catalyst and water to a liquid I consisting substantially of an organic solvent to cause hydrolysis and polycondensation of the silane alkoxide, wherein the period from the start of the addition until the silica concentration of the reaction system at the end of the addition reaches 70% is 20% or less of the full reaction time period.Type: ApplicationFiled: January 18, 2018Publication date: November 28, 2019Applicant: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Miki EGAMI, Mitsuaki KUMAZAWA, Hirotada ARAKANE, Ryo MURAGUCHI, Toshiharu HIRAI
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Patent number: 10358353Abstract: Silica particles calcined in a calcination step are supplied in a swirling flow generated by a gas introduced in a disintegration container and disintegrated therein, whereby the silica particles can be easily disintegrated and there can be obtained disintegrated silica particles having both low hygroscopicity and high dispersibility in resin. In addition, the introduction of dehumidified air (gas) during the disintegration reduces hygroscopicity and greatly improves dispersibility in resin. Furthermore, performing heating treatment (calcination) again after the disintegration causes the surface modification of the disintegrated silica particles, greatly improving hygroscopicity and dispersibility in resin. The resin composition obtained in this manner including silica particles provides good injectability and filterability when used for an underfill material for semiconductors and an in-plane spacer or sealing spacer of liquid crystal displays.Type: GrantFiled: August 1, 2014Date of Patent: July 23, 2019Assignee: JGC Catalysts and Chemicals Ltd.Inventors: Ryo Muraguchi, Miki Egami, Mitsuaki Kumazawa, Masanobu Taniguchi, Tsuguo Koyanagi, Michio Komatsu, Kazutaka Egami
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Patent number: 10301183Abstract: Producing a silica particle by inhibiting the generation of incompletely reacted materials such as oligomers which have not been grown to the silica particles having the intended particle size. A dispersion liquid of a silica particle is produced by simultaneously adding, to a liquid substantially consisting of an organic solvent, a liquid containing silane alkoxide and a liquid containing an alkali catalyst and water to cause hydrolysis and polycondensations to produce a silica particle. The variation rate of the mole ratio of the alkali catalyst to silane alkoxide in the reaction system for a period from the start to the end of the reaction relative to the initial mole ratio is 0.90 to 1.10; and the variation rate of the mole ratio of water to silane alkoxide for a period from the start to the end of the reaction relative to the initial mole ratio is 0.90 to 1.10.Type: GrantFiled: December 27, 2017Date of Patent: May 28, 2019Assignee: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Miki Egami, Mitsuaki Kumazawa, Hirotada Arakane, Ryo Muraguchi, Toshiharu Hirai
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Patent number: 10190023Abstract: Provided is a silica-based polishing particle which can polish and flatten the surface of a substrate at a sufficient polishing rate with generation of scratches prevented, and successfully prevents generation of particle residues on a substrate after polishing. A silica-based polishing particle with a three-dimensional polycondensation structure containing an alkoxy group, wherein the particle has an average particle diameter (d) of 5 to 300 nm, an aspect ratio of 1.00 or more and 1.20 or less, and a carbon content of 0.005% by mass or more and less than 0.50% by mass.Type: GrantFiled: November 6, 2017Date of Patent: January 29, 2019Assignee: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Mitsuaki Kumazawa, Miki Egami, Hirotada Arakane, Ryo Muraguchi, Toshiharu Hirai
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Patent number: 10184069Abstract: Provided is a silica-based polishing particle, particularly suitable for primary polishing, which provides a high polishing rate on the surface of a substrate and which prevents particle residues on the substrate after polishing, and an abrasive including the silica-based polishing particle. A silica-based polishing particle with a three-dimensional polycondensation structure containing an alkoxy group, wherein the particle has an average particle diameter (d) of 5 to 300 nm, an aspect ratio of more than 1.20 and 5.00 or less, and a carbon content of 0.005% by mass or more and less than 0.50% by mass.Type: GrantFiled: December 1, 2017Date of Patent: January 22, 2019Assignee: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Mitsuaki Kumazawa, Miki Egami, Hirotada Arakane, Ryo Muraguchi, Toshiharu Hirai
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Publication number: 20180179076Abstract: Producing a silica particle by inhibiting the generation of incompletely reacted materials such as oligomers which have not been grown to the silica particles having the intended particle size. A dispersion liquid of a silica particle is produced by simultaneously adding, to a liquid substantially consisting of an organic solvent, a liquid containing silane alkoxide and a liquid containing an alkali catalyst and water to cause hydrolysis and polycondensations to produce a silica particle. The variation rate of the mole ratio of the alkali catalyst to silane alkoxide in the reaction system for a period from the start to the end of the reaction relative to the initial mole ratio is 0.90 to 1.10; and the variation rate of the mole ratio of water to silane alkoxide for a period from the start to the end of the reaction relative to the initial mole ratio is 0.90 to 1.10.Type: ApplicationFiled: December 27, 2017Publication date: June 28, 2018Applicant: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Miki EGAMI, Mitsuaki KUMAZAWA, Hirotada ARAKANE, Ryo MURAGUCHI, Toshiharu HIRAI
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Publication number: 20180155591Abstract: Provided is a silica-based polishing particle, particularly suitable for primary polishing, which provides a high polishing rate on the surface of a substrate and which prevents particle residues on the substrate after polishing, and an abrasive including the silica-based polishing particle. A silica-based polishing particle with a three-dimensional polycondensation structure containing an alkoxy group, wherein the particle has an average particle diameter (d) of 5 to 300 nm, an aspect ratio of more than 1.20 and 5.00 or less, and a carbon content of 0.005% by mass or more and less than 0.50% by mass.Type: ApplicationFiled: December 1, 2017Publication date: June 7, 2018Applicant: JGC CATALYSTS AND CHEMICALS LTD.Inventors: Mitsuaki KUMAZAWA, Miki EGAMI, Hirotada ARAKANE, Ryo MURAGUCHI, Toshiharu HIRAI