Abstract: An apparatus for forming a thin film having a vacuum container evacuated to high vacuum and receiving a gas for vapor deposition, a generation device for generating a material vapor, a counter electrode holding a substrate to be vapor-deposited, a first grid disposed between the generation device and the electrode for accelerating the vapor, and a filament for emitting thermions to ionize the vapor. The grid and counter electrode surfaces may be curved and parallel to each other, and a second grid for accelerating the vapor, having a potential which is negative with respect to the potential of the first grid, may be placed between the first grid and the electrode, in the vicinity of the electrode, and a device may be provided for moving the first grid with respect to the electrode on a predetermined track.

Abstract: An apparatus for forming thin film includes a vacuum container to which an active gas, an inert gas, or a mixture thereof is introduced, a source of evaporation for evaporating a substance being evaporated in the vacuum container, a counter electrode disposed in the vacuum container and holding a substrate for forming a thin film thereon in such a manner as to be opposed to the source of evaporation, a grid disposed between the source of evaporation and the counter electrode and having openings which allow the substance being evaporated to pass therethrough, a filament for thermionic emission disposed between the grid and the source of evaporation and a power source device for establishing a predetermined electric potential relationship between the grid, the counter electrode, and the filament.

Abstract: An apparatus for forming a thin film having a vacuum container evacuated to high vacuum and receiving a gas for vapor deposition, a generation device for generating a material vapor, a counter electrode holding a substrate to be vapor-deposited, a first grid disposed between the generation device and the electrode for accelerating the vapor, and a filament for emitting thermions to ionize the vapor. The first grid and counter electrode surfaces may be curved and parallel to each other, and a second grid for accelerating the vapor, having a potential which is negative with respect to the potential of the first grid, may be placed between the first grid and the electrode, in the vicinity of the electrode, and a device may be provided for moving the first grid with respect to the electrode on a predetermined track.

Abstract: An apparatus for forming a thin film having a vacuum container evacuated to high vacuum and receiving a gas for vapor deposition, a source of evaporation for evaporating a substance, a counter electrode holding a substrate to be vapor-deposited, a grid disposed between the source and the electrode for accelerating the evaporated substance, and an electronic gun for emitting thermions, which are hit on the evaporated substances to ionize them.

Abstract: A thin film forming apparatus including a vacuum tank capable of introducing an active gas and/or an inert gas thereinto; a source of evaporable substance disposed in the tank; a counter electrode disposed opposite to the source of evaporable substance in the tank and holding a substrate on which a thin film is to be vapor-deposited; a filament disposed between the source of evaporable substance and the counter electrode for generating thermal electrons; a grid disposed between the filament and the source of evaporable substance, and allowing evaporated substance to pass therethrough; and power source means for putting the grid at a positive potential relative to the counter electrode. Electrons emitted from the filament form a plasma in the vicinity of the grid and ionize evaporable substance from the source of evaporable substance before being absorbed by the grid. The ionized evaporated substance then is accelerated toward the substrate for low-temperature deposition on the substrate.

Abstract: A transmission for agricultural tractors in which a front wheel speed increasing transmission part (12) is disposed forwardly of a main transmission part (8). An input shaft (13) and an output shaft (15) of the speed increasing transmission part (12) are arranged coaxial with a front wheel drive output shaft (14a) of the main transmission part (8).

Abstract: An automatic tool replacing device for use in a machining center of the type equipped with a tool storage magazine having a linear portion in which a plurality of tools are arrayed in a row at a predetermined pitch. The tool replacing device has a turret having a plurality of tool holding sections and adapted to make an indexing rotation to bring any one of the tool holding sections to an index position adjacent to the linear portion. A plurality of tool grippers are attached to each of the tool holding sections of the turret and adapted to grip tools in such a manner that the axes of the gripped tools extend in the same direction as the axes of the tools stored in the linear portion of the tool storage magazine and that the axes of the gripped tools are spaced from adjacent ones by the same distance as that between adjacent tools stored in the linear portion of the tool storage magazine.

Abstract: In a drive for driving front wheels through transmissions disposed at the ends of front axles to be drivingly rotated, a cylindrical front axle case for enveloping and rotatably supporting the front axles is integrally formed with transmission cases for enveloping and rotatably supporting the transmissions.

Abstract: A travel speed change apparatus for a farm vehicle in which a first speed change mechanism and a second speed change mechanism coact to change the travelling speed. The first and second speed change mechanisms are operable by manipulating a single hand lever movable in two different directions and not two independent levers. This single lever is adapted to actuate the first and second speed change mechanisms by moving in the same direction.

Abstract: Load control for engine of vehicle for agricultural work with rotary working implement, for avoiding too much deviation of the working depth while preventing the engine from stopping under heavy overloading. The rotary working implement is automatically raised and lowered in accordance with the results of sensing the engine rotation and of the actual working depth. For prevention of the engine failure, the rotary working implement is unconditionally raised whenever engine rotation below a predetermined value is sensed.