Patents by Inventor Ming-Chang Hsieh

Ming-Chang Hsieh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11916110
    Abstract: Embodiments of the present disclosure provide a method for forming semiconductor device structures. The method includes forming a fin structure having a stack of semiconductor layers comprising first semiconductor layers and second semiconductor layers alternatingly arranged, forming a sacrificial gate structure over a portion of the fin structure, removing the first and second semiconductor layers in a source/drain region of the fin structure that is not covered by the sacrificial gate structure, forming an epitaxial source/drain feature in the source/drain region, removing portions of the sacrificial gate structure to expose the first and second semiconductor layers, removing portions of the second semiconductor layers so that at least one second semiconductor layer has a width less than a width of each of the first semiconductor layers, forming a conformal gate dielectric layer on exposed first and second semiconductor layers, and forming a gate electrode layer on the conformal gate dielectric layer.
    Type: Grant
    Filed: July 4, 2022
    Date of Patent: February 27, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chih-Ching Wang, Wei-Yang Lee, Ming-Chang Wen, Jo-Tzu Hung, Wen-Hsing Hsieh, Kuan-Lun Cheng
  • Patent number: 11081352
    Abstract: In some embodiments, a method for forming an integrated circuit is provided. The method includes forming a first layer over a semiconductor wafer, the first layer having a first portion and a second portion. The first portion is patterned by projecting a first image field over the first portion of the first layer, where the first portion of the first layer corresponds to the first image field. The second portion is patterned by projecting a second image field over the second portion of the first layer, where the second portion of the first layer corresponds to the second image field. A second layer is formed over the first layer. The second layer is patterned by projecting a third image field over the second layer, where the third image field covers a majority of the first portion and a majority of the second portion of the first layer.
    Type: Grant
    Filed: March 13, 2020
    Date of Patent: August 3, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Chen Lu, Ming-Chang Hsieh, Yi-Min Chen
  • Patent number: 10985020
    Abstract: In some embodiments, a method for forming an integrated circuit is provided. The method includes forming a first layer over a semiconductor wafer, the first layer having a first portion and a second portion. The first portion is patterned by projecting a first image field over the first portion of the first layer, where the first portion of the first layer corresponds to the first image field. The second portion is patterned by projecting a second image field over the second portion of the first layer, where the second portion of the first layer corresponds to the second image field. A second layer is formed over the first layer. The second layer is patterned by projecting a third image field over the second layer, where the third image field covers a majority of the first portion and a majority of the second portion of the first layer.
    Type: Grant
    Filed: March 13, 2020
    Date of Patent: April 20, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Chen Lu, Ming-Chang Hsieh, Yi-Min Chen
  • Publication number: 20200219721
    Abstract: In some embodiments, a method for forming an integrated circuit is provided. The method includes forming a first layer over a semiconductor wafer, the first layer having a first portion and a second portion. The first portion is patterned by projecting a first image field over the first portion of the first layer, where the first portion of the first layer corresponds to the first image field. The second portion is patterned by projecting a second image field over the second portion of the first layer, where the second portion of the first layer corresponds to the second image field. A second layer is formed over the first layer. The second layer is patterned by projecting a third image field over the second layer, where the third image field covers a majority of the first portion and a majority of the second portion of the first layer.
    Type: Application
    Filed: March 13, 2020
    Publication date: July 9, 2020
    Inventors: Wen-Chen Lu, Ming-Chang Hsieh, Yi-Min Chen
  • Publication number: 20200211836
    Abstract: In some embodiments, a method for forming an integrated circuit is provided. The method includes forming a first layer over a semiconductor wafer, the first layer having a first portion and a second portion. The first portion is patterned by projecting a first image field over the first portion of the first layer, where the first portion of the first layer corresponds to the first image field. The second portion is patterned by projecting a second image field over the second portion of the first layer, where the second portion of the first layer corresponds to the second image field. A second layer is formed over the first layer. The second layer is patterned by projecting a third image field over the second layer, where the third image field covers a majority of the first portion and a majority of the second portion of the first layer.
    Type: Application
    Filed: March 13, 2020
    Publication date: July 2, 2020
    Inventors: Wen-Chen Lu, Ming-Chang Hsieh, Yi-Min Chen
  • Patent number: 10665455
    Abstract: In some embodiments, a method for forming an integrated circuit is provided. The method includes forming a first layer over a semiconductor wafer, the first layer having a first portion and a second portion. The first portion is patterned by projecting a first image field over the first portion of the first layer, where the first portion of the first layer corresponds to the first image field. The second portion is patterned by projecting a second image field over the second portion of the first layer, where the second portion of the first layer corresponds to the second image field. A second layer is formed over the first layer. The second layer is patterned by projecting a third image field over the second layer, where the third image field covers a majority of the first portion and a majority of the second portion of the first layer.
    Type: Grant
    Filed: November 14, 2018
    Date of Patent: May 26, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Wen-Chen Lu, Ming-Chang Hsieh, Yi-Min Chen
  • Publication number: 20200126785
    Abstract: In some embodiments, a method for forming an integrated circuit is provided. The method includes forming a first layer over a semiconductor wafer, the first layer having a first portion and a second portion. The first portion is patterned by projecting a first image field over the first portion of the first layer, where the first portion of the first layer corresponds to the first image field. The second portion is patterned by projecting a second image field over the second portion of the first layer, where the second portion of the first layer corresponds to the second image field. A second layer is formed over the first layer. The second layer is patterned by projecting a third image field over the second layer, where the third image field covers a majority of the first portion and a majority of the second portion of the first layer.
    Type: Application
    Filed: November 14, 2018
    Publication date: April 23, 2020
    Inventors: Wen-Chen Lu, Ming-Chang Hsieh, Yi-Min Chen
  • Patent number: 10503600
    Abstract: A memory device receiving a host instruction generated by a host includes a flash memory array and a controller. The controller translates the host instruction into operation instructions, queues the operation instructions in a major command queue, and performs an operation on the flash memory array according to the operation instructions. When an error occurs during execution of the operation commands, the controller performs an error-handling process, queues operation commands related to the error-handling process in an auxiliary command queue, sequentially executes the operation commands in the auxiliary command queue, and stops executing the major command queue.
    Type: Grant
    Filed: March 15, 2018
    Date of Patent: December 10, 2019
    Assignee: Silicon Motion, Inc.
    Inventors: Che-Wei Hsu, Ming-Chang Hsieh
  • Patent number: 10336844
    Abstract: Provided is a method of preparing a powdery diacetal clarifying agent, which comprises mixing an aromatic aldehyde, a polyol, and an acid catalyst in an organic polar solvent, adding a hydrogenating agent and an inorganic silicon-containing agent into the foregoing mixture, and filtering the mixture. The powdery diacetal clarifying agent prepared by the method can have excellent flowability, dispersability, thermal resistance, and color stability. Accordingly, the powdery diacetal clarifying agent does not release stinking odor and incur yellowing at high temperature, allowing the plastic articles to have improved appearance and visual appeal.
    Type: Grant
    Filed: December 7, 2017
    Date of Patent: July 2, 2019
    Assignee: SUNKO INK CO., LTD.
    Inventors: Chiu-Peng Tsou, Ting-Ti Huang, Chen-Ku Hsieh, Tien-Chu Chang, Ming-Chang Hsieh
  • Publication number: 20190050167
    Abstract: A storage device receiving an external instruction from a host includes a plurality of flash memory spaces and a controller. The controller receives the external instruction, queues the external instruction in a first command queue, translates the external instruction into a plurality of operation commands, and sequentially executes the operation commands to respectively operate the flash memory spaces. The controller further gives an identity code to at least one specific operation command to track the execution result of the specific operation command.
    Type: Application
    Filed: March 15, 2018
    Publication date: February 14, 2019
    Inventors: Ming-Chang Hsieh, Che-Wei Hsu, Wen-Chi Hong
  • Publication number: 20190042366
    Abstract: A memory device receiving a host instruction generated by a host includes a flash memory array and a controller. The controller translates the host instruction into operation instructions, queues the operation instructions in a major command queue, and performs an operation on the flash memory array according to the operation instructions. When an error occurs during execution of the operation commands, the controller performs an error-handling process, queues operation commands related to the error-handling process in an auxiliary command queue, sequentially executes the operation commands in the auxiliary command queue, and stops executing the major command queue.
    Type: Application
    Filed: March 15, 2018
    Publication date: February 7, 2019
    Inventors: Che-Wei Hsu, Ming-Chang Hsieh
  • Patent number: 10081690
    Abstract: Provided are a powdery diacetal clarifying agent and a method of preparing the same. The powdery diacetal clarifying agent comprises a diacetal compound and an inorganic silicon-containing compound having a pH value equal to or more than 6 and equal to or less than 12. The powdery diacetal clarifying agent of the composition can have excellent flowability, dispersability, thermal resistance, and color stability. Accordingly, the powdery diacetal clarifying agent does not release stinking odor and incur yellowing at high temperature, allowing the plastic articles to have improved appearance and visual appeal.
    Type: Grant
    Filed: June 23, 2016
    Date of Patent: September 25, 2018
    Inventors: Ting-Ti Huang, Chiu-Peng Tsou, Tien-Chu Chang, Ming-Chang Hsieh, Chen-Ku Hsieh
  • Publication number: 20180094091
    Abstract: Provided is a method of preparing a powdery diacetal clarifying agent, which comprises mixing an aromatic aldehyde, a polyol, and an acid catalyst in an organic polar solvent, adding a hydrogenating agent and an inorganic silicon-containing agent into the foregoing mixture, and filtering the mixture. The powdery diacetal clarifying agent prepared by the method can have excellent flowability, dispersability, thermal resistance, and color stability. Accordingly, the powdery diacetal clarifying agent does not release stinking odor and incur yellowing at high temperature, allowing the plastic articles to have improved appearance and visual appeal.
    Type: Application
    Filed: December 7, 2017
    Publication date: April 5, 2018
    Inventors: Chiu-Peng TSOU, Ting-Ti HUANG, Chen-Ku HSIEH, Tien-Chu CHANG, Ming-Chang HSIEH
  • Publication number: 20170369611
    Abstract: Provided are a powdery diacetal clarifying agent and a method of preparing the same. The powdery diacetal clarifying agent comprises a diacetal compound and an inorganic silicon-containing compound having a pH value equal to or more than 6 and equal to or less than 12. The powdery diacetal clarifying agent of the composition can have excellent flowability, dispersability, thermal resistance, and color stability. Accordingly, the powdery diacetal clarifying agent does not release stinking odor and incur yellowing at high temperature, allowing the plastic articles to have improved appearance and visual appeal.
    Type: Application
    Filed: June 23, 2016
    Publication date: December 28, 2017
    Inventors: Ting-Ti Huang, Chiu-Peng Tsou, Tien-Chu Chang, Ming-Chang Hsieh, Chen-Ku Hsieh
  • Patent number: 9006040
    Abstract: A method of fabricating a semiconductor device is disclosed. A photosensitive material is coated over the device. A plurality of masks for a chip layout are obtained. The plurality of masks are exposed to encompass a chip area of the device using at least one reticle repeatedly. The at least one reticle is of a set of reticles. The chip area has a resultant dimension greater than a dimension of the at least one reticle. A developer is used to remove soluble portions of the photosensitive material forming a resist pattern in the chip area.
    Type: Grant
    Filed: April 16, 2013
    Date of Patent: April 14, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ming-Chang Hsieh, Kong-Beng Thei
  • Publication number: 20140264823
    Abstract: A method of fabricating a semiconductor device is disclosed. A photosensitive material is coated over the device. A plurality of masks for a chip layout are obtained. The plurality of masks are exposed to encompass a chip area of the device using at least one reticle repeatedly. The at least one reticle is of a set of reticles. The chip area has a resultant dimension greater than a dimension of the at least one reticle. A developer is used to remove soluble portions of the photosensitive material forming a resist pattern in the chip area.
    Type: Application
    Filed: April 16, 2013
    Publication date: September 18, 2014
    Applicant: Taiwan Semiconductor Manufacturing Co. Ltd.
    Inventors: Ming-Chang Hsieh, Kong-Beng Thei
  • Patent number: 8669641
    Abstract: The present disclosure provides a method of making an integrated circuit (IC) device. The method includes forming a first IC feature and a second IC feature in a semiconductor substrate, the first and second IC features being spaced from each other and separated by a scribe region; forming, in the semiconductor substrate, a doped routing feature at least partially within the scribe region and configured to connect the first and second IC features; forming a multilayer interconnect (MLI) structure and an interlayer dielectric (ILD) on the semiconductor substrate, wherein the MLI is configured to be absent within the scribe region; and etching the ILD and the semiconductor substrate within the scribe region to form a scribe-line trench.
    Type: Grant
    Filed: June 20, 2011
    Date of Patent: March 11, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Chang Hsieh, Hung-Lin Chen, Hsiu-Mei Yu, Chin Kun Lan, Dong-Lung Lee
  • Publication number: 20110241179
    Abstract: The present disclosure provides a method of making an integrated circuit (IC) device. The method includes forming a first IC feature and a second IC feature in a semiconductor substrate, the first and second IC features being spaced from each other and separated by a scribe region; forming, in the semiconductor substrate, a doped routing feature at least partially within the scribe region and configured to connect the first and second IC features; forming a multilayer interconnect (MLI) structure and an interlayer dielectric (ILD) on the semiconductor substrate, wherein the MLI is configured to be absent within the scribe region; and etching the ILD and the semiconductor substrate within the scribe region to form a scribe-line trench.
    Type: Application
    Filed: June 20, 2011
    Publication date: October 6, 2011
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Ming-Chang Hsieh, Hung-Lin Chen, Hsiu-Mei Yu, Chin Kun Lan, Dong-Lung Lee
  • Patent number: 7968431
    Abstract: The present disclosure provides a method of making an integrated circuit (IC) device. The method includes forming a first IC feature and a second IC feature in a semiconductor substrate, the first and second IC features being spaced from each other and separated by a scribe region; forming, in the semiconductor substrate, a doped routing feature at least partially within the scribe region and configured to connect the first and second IC features; forming a multilayer interconnect (MLI) structure and an interlayer dielectric (ILD) on the semiconductor substrate, wherein the MLI is configured to be absent within the scribe region; and etching the ILD and the semiconductor substrate within the scribe region to form a scribe-line trench.
    Type: Grant
    Filed: July 15, 2008
    Date of Patent: June 28, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Chang Hsieh, Hung-Lin Chen, Hsiu-Mei Yu, Chin Kun Lan, Dong-Lung Lee
  • Publication number: 20110084391
    Abstract: An integrated circuit structure includes a semiconductor substrate; a first titanium layer over the semiconductor substrate, wherein the first titanium layer has a first thickness less than 130 ?; a first titanium nitride layer over and contacting the first titanium layer; and an aluminum-containing layer over and contacting the first titanium nitride layer.
    Type: Application
    Filed: July 23, 2010
    Publication date: April 14, 2011
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shyh-Wei Cheng, Pin-Shyne Chin, Kuo-Chio Liu, Che-Jung Chu, Ming-Chang Hsieh, Hung-Lin Chen, Tian Sheng Lin