Abstract: An integrated thermal buckling micro switch is made by using electromechanical technology to integrate sensors and actuators on a single chip. An epitaxial chip is used and etched to form a mesa structure on a thin silicon film, whereon at least a thermal sensing element and a heating element are disposed. When an output signal of the thermal sensing element is greater than a pre-set critical value in a control circuit, the heating element is driven to heat, so that the thin silicon film will create a thermal buckling effect that makes the mesa structure touch at least one contact point on the baseboard to cut off or effectuate the circuit. On the contrary, when heating is ceased, the mesa structure will return back to the original normal state, and thereby, switching and controlling an external load can be achieved.

Abstract: A flow controller module comprising at least one micro flow sensor and a microvalve, integrated in a micro flow channel, is disclosed. The micro flow sensor comprises a pressure sensitive flow sensor. At the position of the micro flow sensor, the micro flow channel is provided with an orifice so that pressure of a flow may be enlarged to facilitate measurement of the flow speed. The microvalve comprises a silicon microbridge with a mesa structure and is driven by a voltage. The microvalve may operate under a normally closed mode or a normally open mode. Disclosed in this invention is also a flow sensor suited in the integrated flow controller module. Methods for preparing the flow sensor and the flow controller module are also disclosed.

Abstract: A monolithic silicon mass flow control structure is made by etching process to form a valve structure and a channel in a silicon chip, laser or electric discharge process to form a flow inlet and a flow outlet in a glass chip, and anode connection process to combine the silicon chip and the glass chip. At least a flow sensing element and a micro valve control element are disposed above the channel and the valve structure respectively for flow sensing and control purposes. A semi-complete product is sealed on a base board, wherein an output signal from the flow sensing element is compared with a pre-set value in an externally connected control circuit, which will change heating condition so as to control flow of the valve structure.

Abstract: A thermally buckling linear micro structure, in which by isolating technology a thermal oxidization isolation layer are generated on the two ends of a micro structure, or a material with larger thermal inflation coefficient is deposited, or the area of thermal conduction is reduced so that the two ends of a micro structure has a larger thermal stress and the membrane structure may be heated uniformly so to cause a thermally buckling deformation, therefore, the deformation of the membrane type micro structure is amplified linearly with the input power. This micro structure is formed as a membrane type by a membrane manufacturing technology.

Abstract: A flow controller module comprising at least one micro flow sensor and a microvalve, integrated in a micro flow channel, is disclosed. The micro flow sensor comprises a pressure sensitive flow sensor. At the position of the micro flow sensor, the micro flow channel is provided with an orifice so that pressure of a flow may be enlarged to facilitate measurement of the flow speed. The microvalve comprises a silicon microbridge with a mesa structure and is driven by a voltage. The microvalve may operate under a normally closed mode or a normally open mode. Disclosed in this invention is also a flow sensor suited in the integrated flow controller module. Methods for preparing the flow sensor and the flow controller module are also disclosed.

Abstract: An integrated micro thermister type flow control module in which, when a fluid enters the integrated module past a fluid channel and a suspended microstructure into a thermally-driven microvalve zone, the latter utilizes heat actuation to drive a silicon microbridge with mesa to open a linear proportional flow microvalve. A thermister type flow sensing unit is disposed in the fluid channel to sense the flow amount. The sensing unit is synchronously made with the microvalve and the silicon microbridge structure in an integration process so as to reduce manufacturing steps and minimize the size of the module.

Abstract: An electrode plate for use in an ozone generator containing a plurality of air vents. It includes: (a) a cathode electrode connected to a low voltage terminal and having a plurality of discharge portions at one side; (b) an anode electrode connected to a high voltage terminal for acting with the cathode electrode; and (c) an insulative layer sandwiched between the cathode electrode and the anode electrode, keeping the discharge portions to be spaced from the anode electrode within hundred micrometers. The cathode electrode and the anode electrode each comprises a plurality of air vents arranged in a staggered manner.

Abstract: An integrated ozone generator is disclosed. It includes: (a) an upper covering layer having a thin film, and a permanent magnet being installed on the thin film, the permanent magnet having a periphery which is surrounded with a coil on which a plurality of contact points are installed for inputting an oscillating signal, so as to form an electromagnetically actuating micro pump, the upper covering layer further having a hole formed on a first side of the upper covering layer and an upper thin film electrode and a discharging teethed structure installed on an inside surface of the covering layer away from the hole; and (b) a base having a groove which is connected with an inner hole of the upper covering layer to form a gas chamber, a gradually opened channel at one side of the gas chamber for inputting gas, and another gradually reducing channel at another side of the gas chamber.

Abstract: A thermally buckling control microvalve including three layers in which the intermediate layer is an electrically conductive one. The left side of the intermediate layer that aligns with an outlet of the lower layer has a suspension supported on both sides by a thin bridge structure. An upper side of the suspension is provided with an electrical thermal membrane which slightly curves upwardly, and a valve nozzle communicating with the outlet of the lower layer is caused to gradually open when actuated. A pressure chamber is disposed above the suspension and the bridge structures and a pressure distribution chamber communicating with the pressure chamber is disposed below.

Abstract: The present invention relates to an ozone generating device, comprising: a main body, having a cavity, on the lateral sides further having a plurality of inlet holes, which connect the cavity to the exterior to let in air, and on the top side having a plurality of outlet holes, which connect the cavity to the exterior to let out air with ozone; two electrodes, attached to the bottom and the top side of the cavity, for generating an electric discharge, so as to generate ozone in the cavity; and a heating device, installed below the electrode at the bottom side of the cavity, so as to heat the electrode and, indirectly, air in the cavity; wherein heating the first electrode by the heating device allows the operating voltage for generating an electric discharge to be reduced and heating the air with ozone within the cavity causes it to drift upward and to flow out of the cavity through the outlet holes.