Patents by Inventor Ming-Wei Tsai

Ming-Wei Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11915976
    Abstract: An ammonium fluoride gas may be used to form a protection layer for one or more interlayer dielectric layers, one or more insulating caps, and/or one or more source/drain regions of a semiconductor device during a pre-clean etch process. The protection layer can be formed through an oversupply of nitrogen trifluoride during the pre-clean etch process. The oversupply of nitrogen trifluoride causes an increased formation of ammonium fluoride, which coats the interlayer dielectric layer(s), the insulating cap(s), and/or the source/drain region(s) with a thick protection layer. The protection layer protects the interlayer dielectric layer(s), the insulating cap(s), and/or the source/drain region(s) during the pre-clean process from being etched by fluorine ions formed during the pre-clean process.
    Type: Grant
    Filed: June 27, 2022
    Date of Patent: February 27, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Li-Wei Chu, Ying-Chi Su, Yu-Kai Chen, Wei-Yip Loh, Hung-Hsu Chen, Chih-Wei Chang, Ming-Hsing Tsai
  • Publication number: 20230369546
    Abstract: A light source device and a manufacturing method of the light source device is provided. The light source device includes a micro light-emitting element layer, a transparent substrate and a wavelength conversion module. The wavelength conversion module includes a first wavelength conversion layer, a second wavelength conversion layer, a light transmission layer, multiple barrier structures, multiple reflection layers and a light cut-off layer. The first wavelength conversion layer, the second wavelength conversion layer, and the light transmission layer are arranged in an arrangement direction. Any two of the first wavelength conversion layer, the second wavelength conversion layer, and the light transmission layer are separated from each other by one of the barrier structures. The reflection layers are located between the barrier structures and any one of a sidewall of the first wavelength conversion layer, a sidewall of the second wavelength conversion layer, and a sidewall of the light transmission layer.
    Type: Application
    Filed: May 11, 2023
    Publication date: November 16, 2023
    Applicant: Coretronic Corporation
    Inventors: Chien-Chih Chen, Ming-Wei Tsai, Chung-Jen Ou, Yu-Min Chen
  • Publication number: 20230369299
    Abstract: A display device including a light source module and a wavelength conversion module is provided. The light source module includes a substrate, a plurality of first LED elements and a second LED element. The first LED elements are configured for providing a plurality of first color lights, and the second LED element is configured for providing a second color light. The wavelength conversion module is overlapped and arranged on the light source module, and the wavelength conversion module includes a wavelength conversion element and at least one dichroic filter layer. The wavelength conversion element is configured to absorb the first color lights emitted by a part of the first LED elements and excite a converted light beam, wherein a color of the converted light beam is different from that of the first color lights and the second color light.
    Type: Application
    Filed: May 2, 2023
    Publication date: November 16, 2023
    Applicant: Coretronic Corporation
    Inventors: Chien-Chih Chen, Ming-Wei Tsai, Chung-Jen Ou, Yu-Min Chen
  • Patent number: 11757005
    Abstract: The present disclosure, in some embodiments, relates to a semiconductor device. The semiconductor device includes an electron supply layer that is disposed over an upper surface of a semiconductor material and that is laterally arranged between a first conductive terminal and a second conductive terminal. A III-N (III-nitride) semiconductor material is disposed over the electron supply layer. A passivation layer is disposed over the III-N semiconductor material, along a side of the III-N semiconductor material, and over the electron supply layer. An insulating material is arranged over the passivation layer and along opposing sidewalls of the second conductive terminal, and a gate structure is disposed over the passivation layer. The passivation layer has an uppermost surface that is directly coupled to a sidewall of the passivation layer. The insulating material extends along the sidewall of the passivation layer.
    Type: Grant
    Filed: May 19, 2021
    Date of Patent: September 12, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: King-Yuen Wong, Ming-Wei Tsai, Han-Chin Chiu
  • Publication number: 20220236465
    Abstract: A wavelength conversion module including an isolation structure layer, multiple wavelength conversion patterns, a dichroic filter film, and at least one dichroic filter layer is provided. The isolation structure layer has multiple openings. The wavelength conversion patterns are disposed in a part of the openings, and configured to absorb a first part of multiple excitation light beams be excited to generate multiple converted light beams. The dichroic filter film is disposed on one side of the isolation structure layer. The at least one dichroic filter layer is disposed on another side of the isolation structure layer or disposed in the openings. A part of the converted light beams are reflected to the wavelength conversion patterns by the dichroic filter film. A second part of the excitation light beams passing through the wavelength conversion patterns are reflected to the wavelength conversion patterns by the at least one dichroic filter layer.
    Type: Application
    Filed: January 25, 2022
    Publication date: July 28, 2022
    Applicant: Coretronic Corporation
    Inventors: Ming-Wei Tsai, Yu-An Huang, Fu-Ming Chuang
  • Publication number: 20210273059
    Abstract: The present disclosure, in some embodiments, relates to a semiconductor device. The semiconductor device includes an electron supply layer that is disposed over an upper surface of a semiconductor material and that is laterally arranged between a first conductive terminal and a second conductive terminal. A III-N(III-nitride) semiconductor material is disposed over the electron supply layer. A passivation layer is disposed over the III-N semiconductor material, along a side of the III-N semiconductor material, and over the electron supply layer. An insulating material is arranged over the passivation layer and along opposing sidewalls of the second conductive terminal, and a gate structure is disposed over the passivation layer. The passivation layer has an uppermost surface that is directly coupled to a sidewall of the passivation layer. The insulating material extends along the sidewall of the passivation layer.
    Type: Application
    Filed: May 19, 2021
    Publication date: September 2, 2021
    Inventors: King-Yuen Wong, Ming-Wei Tsai, Han-Chin Chiu
  • Patent number: 11038025
    Abstract: The present disclosure, in some embodiments, relates to a method of forming a transistor device. The method may be performed by forming an anode and a cathode over an electron supply layer disposed on a semiconductor material. A doped III-N semiconductor material is formed over the electron supply layer, and an insulating material is formed over the electron supply layer and the doped III-N semiconductor material. The insulating material continuously extends from over the anode to over the cathode. The insulating material is patterned to form sidewalls of the insulating material that define an opening over the doped III-N semiconductor material. A gate structure is formed directly between the sidewalls of the insulating material and over the doped III-N semiconductor material.
    Type: Grant
    Filed: September 6, 2019
    Date of Patent: June 15, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: King-Yuen Wong, Ming-Wei Tsai, Han-Chin Chiu
  • Patent number: 11011380
    Abstract: Some embodiments of the present disclosure provide a semiconductor device. The semiconductor device includes a semiconductive substrate. A donor-supply layer is over the semiconductive substrate. The donor-supply layer includes a top surface. A gate structure, a drain, and a source are over the donor-supply layer. A passivation layer covers conformably over the gate structure and the donor-supply layer. A gate electrode is over the gate structure. A field plate is disposed on the passivation layer between the gate electrode and the drain. The field plate includes a bottom edge. The gate electrode having a first edge in proximity to the field plate, the field plate comprising a second edge facing the first edge, a horizontal distance between the first edge and the second edge is in a range of from about 0.05 to about 0.5 micrometers.
    Type: Grant
    Filed: August 20, 2018
    Date of Patent: May 18, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Ming-Wei Tsai, King-Yuen Wong, Chih-Wen Hsiung, Ming-Cheng Lin
  • Patent number: 10991803
    Abstract: The present disclosure, in some embodiments relates to a semiconductor device. The semiconductor device includes a layer of semiconductor material disposed over a substrate and an electron supply layer disposed over the layer of semiconductor material between an anode terminal and a cathode terminal. A layer of III-N (III-nitride) semiconductor material is disposed over the electron supply layer. A passivation layer contacts an upper surface of the electron supply layer and further contacts an upper surface and a sidewall of the layer of III-N semiconductor material. A gate structure is separated from the layer of III-N semiconductor material by the passivation layer.
    Type: Grant
    Filed: April 23, 2018
    Date of Patent: April 27, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: King-Yuen Wong, Ming-Wei Tsai, Han-Chin Chiu
  • Patent number: 10811261
    Abstract: Some embodiments of the present disclosure provide a semiconductor device. The semiconductor device includes a semiconductive substrate. A donor-supply layer is over the semiconductive substrate. The donor-supply layer includes a top surface. A gate structure, a drain, and a source are over the donor-supply layer. A passivation layer covers conformally over the gate structure and the donor-supply layer. A gate electrode is over the gate structure. A field plate is disposed on the passivation layer between the gate electrode and the drain. The field plate includes a bottom edge. The gate electrode having a first edge in proximity to the field plate, the field plate comprising a second edge facing the first edge, a horizontal distance between the first edge and the second edge is in a range of from about 0.05 to about 0.5 micrometers.
    Type: Grant
    Filed: June 8, 2018
    Date of Patent: October 20, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Ming-Wei Tsai, King-Yuen Wong, Chih-Wen Hsiung, Ming-Cheng Lin
  • Publication number: 20190393313
    Abstract: The present disclosure, in some embodiments, relates to a method of forming a transistor device. The method may be performed by forming an anode and a cathode over an electron supply layer disposed on a semiconductor material. A doped III-N semiconductor material is formed over the electron supply layer, and an insulating material is formed over the electron supply layer and the doped III-N semiconductor material. The insulating material continuously extends from over the anode to over the cathode. The insulating material is patterned to form sidewalls of the insulating material that define an opening over the doped III-N semiconductor material. A gate structure is formed directly between the sidewalls of the insulating material and over the doped III-N semiconductor material.
    Type: Application
    Filed: September 6, 2019
    Publication date: December 26, 2019
    Inventors: King-Yuen Wong, Ming-Wei Tsai, Han-Chin Chiu
  • Publication number: 20190006498
    Abstract: Some embodiments of the present disclosure provide a semiconductor device. The semiconductor device includes a semiconductive substrate. A donor-supply layer is over the semiconductive substrate. The donor-supply layer includes a top surface. A gate structure, a drain, and a source are over the donor-supply layer. A passivation layer covers conformably over the gate structure and the donor-supply layer. A gate electrode is over the gate structure. A field plate is disposed on the passivation layer between the gate electrode and the drain. The field plate includes a bottom edge. The gate electrode having a first edge in proximity to the field plate, the field plate comprising a second edge facing the first edge, a horizontal distance between the first edge and the second edge is in a range of from about 0.05 to about 0.5 micrometers.
    Type: Application
    Filed: August 20, 2018
    Publication date: January 3, 2019
    Inventors: MING-WEI TSAI, KING-YUEN WONG, CHIH-WEN HSIUNG, MING-CHENG LIN
  • Publication number: 20180294347
    Abstract: Some embodiments of the present disclosure provide a semiconductor device. The semiconductor device includes a semiconductive substrate. A donor-supply layer is over the semiconductive substrate. The donor-supply layer includes a top surface. A gate structure, a drain, and a source are over the donor-supply layer. A passivation layer covers conformally over the gate structure and the donor-supply layer. A gate electrode is over the gate structure. A field plate is disposed on the passivation layer between the gate electrode and the drain. The field plate includes a bottom edge. The gate electrode having a first edge in proximity to the field plate, the field plate comprising a second edge facing the first edge, a horizontal distance between the first edge and the second edge is in a range of from about 0.05 to about 0.5 micrometers.
    Type: Application
    Filed: June 8, 2018
    Publication date: October 11, 2018
    Inventors: MING-WEI TSAI, KING-YUEN WONG, CHIH-WEN HSIUNG, MING-CHENG LIN
  • Publication number: 20180248009
    Abstract: The present disclosure, in some embodiments relates to a semiconductor device. The semiconductor device includes a layer of semiconductor material disposed over a substrate and an electron supply layer disposed over the layer of semiconductor material between an anode terminal and a cathode terminal. A layer of III-N (III-nitride) semiconductor material is disposed over the electron supply layer. A passivation layer contacts an upper surface of the electron supply layer and further contacts an upper surface and a sidewall of the layer of III-N semiconductor material. A gate structure is separated from the layer of III-N semiconductor material by the passivation layer.
    Type: Application
    Filed: April 23, 2018
    Publication date: August 30, 2018
    Inventors: King-Yuen Wong, Ming-Wei Tsai, Han-Chin Chiu
  • Patent number: 10056478
    Abstract: Some embodiments of the present disclosure provide a semiconductor device. The semiconductor device includes a semiconductive substrate. A donor-supply layer is over the semiconductive substrate. The donor-supply layer includes a top surface. A gate structure, a drain, and a source are over the donor-supply layer. A passivation layer covers conformally over the gate structure and the donor-supply layer. A gate electrode is over the gate structure. A field plate is disposed on the passivation layer between the gate electrode and the drain. The field plate includes a bottom edge. The gate electrode having a first edge in proximity to the field plate, the field plate comprising a second edge facing the first edge, a horizontal distance between the first edge and the second edge is in a range of from about 0.05 to about 0.5 micrometers.
    Type: Grant
    Filed: November 6, 2015
    Date of Patent: August 21, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Ming-Wei Tsai, King-Yuen Wong, Chih-Wen Hsiung, Ming-Cheng Lin
  • Patent number: 10002955
    Abstract: Some embodiments of the present disclosure provide a semiconductor device. The semiconductor device includes a semiconductive substrate. A donor-supply layer is over the semiconductive substrate. The donor-supply layer includes a top surface. A gate structure, a drain, and a source are over the donor-supply layer. A passivation layer covers conformally over the gate structure and the donor-supply layer. A gate electrode is over the gate structure. A field plate is disposed on the passivation layer between the gate electrode and the drain. The field plate includes a bottom edge. The gate electrode having a first edge in proximity to the field plate, the field plate comprising a second edge facing the first edge, a horizontal distance between the first edge and the second edge is in a range of from about 0.05 to about 0.5 micrometers.
    Type: Grant
    Filed: April 6, 2017
    Date of Patent: June 19, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Ming-Wei Tsai, King-Yuen Wong, Chih-Wen Hsiung, Ming-Cheng Lin
  • Patent number: 9978844
    Abstract: The present disclosure relates to a high electron mobility transistor compatible power lateral field-effect rectifier (L-FER) device. In some embodiments, the rectifier device has an electron supply layer located over a layer of semiconductor material at a position between an anode terminal and a cathode terminal. A layer of doped III-N semiconductor material is disposed over the electron supply layer. A passivation layer is located over the electron supply layer and the layer of doped III-N semiconductor material. A gate structure is disposed over the layer of doped III-N semiconductor material and the passivation layer. The layer of doped III-N semiconductor material modulates the threshold voltage of the rectifier device, while the passivation layer improves reliability of the L-FER device by mitigating current degradation due to high-temperature reverse bias (HTRB) stress.
    Type: Grant
    Filed: December 26, 2014
    Date of Patent: May 22, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: King-Yuen Wong, Ming-Wei Tsai, Han-Chin Chiu
  • Publication number: 20170213903
    Abstract: Some embodiments of the present disclosure provide a semiconductor device. The semiconductor device includes a semiconductive substrate. A donor-supply layer is over the semiconductive substrate. The donor-supply layer includes a top surface. A gate structure, a drain, and a source are over the donor-supply layer. A passivation layer covers conformally over the gate structure and the donor-supply layer. A gate electrode is over the gate structure. A field plate is disposed on the passivation layer between the gate electrode and the drain. The field plate includes a bottom edge. The gate electrode having a first edge in proximity to the field plate, the field plate comprising a second edge facing the first edge, a horizontal distance between the first edge and the second edge is in a range of from about 0.05 to about 0.5 micrometers.
    Type: Application
    Filed: April 6, 2017
    Publication date: July 27, 2017
    Inventors: MING-WEI TSAI, KING-YUEN WONG, CHIH-WEN HSIUNG, MING-CHENG LIN
  • Patent number: 9649247
    Abstract: A breast massage device includes a main body; a drive unit installed within the main body; and a massage disk mounted on the main body and coupled with the drive unit so as to be driven rotatably thereby. The massage disk has a central axis, a concave surface for covering a breast, and a periphery confining the concave surface, wherein the periphery has a highest point and a lowest point located at two opposite sides of the central axis such that a portion of the concave surface extending from the highest point toward the central axis is longer in curved distance than another portion of the concave surface extending from the lowest point to the central axis. A plurality of massage elements are mounted rotatably on the concave surface such that the massage elements are rotatable relative to the concave surface when the drive unit is activated.
    Type: Grant
    Filed: August 28, 2014
    Date of Patent: May 16, 2017
    Inventor: Ming-Wei Tsai
  • Publication number: 20170133496
    Abstract: Some embodiments of the present disclosure provide a semiconductor device. The semiconductor device includes a semiconductive substrate. A donor-supply layer is over the semiconductive substrate. The donor-supply layer includes a top surface. A gate structure, a drain, and a source are over the donor-supply layer. A passivation layer covers conformally over the gate structure and the donor-supply layer. A gate electrode is over the gate structure. A field plate is disposed on the passivation layer between the gate electrode and the drain. The field plate includes a bottom edge. The gate electrode having a first edge in proximity to the field plate, the field plate comprising a second edge facing the first edge, a horizontal distance between the first edge and the second edge is in a range of from about 0.05 to about 0.5 micrometers.
    Type: Application
    Filed: November 6, 2015
    Publication date: May 11, 2017
    Inventors: MING-WEI TSAI, KING-YUEN WONG, CHIH-WEN HSIUNG, MING-CHENG LIN