Patents by Inventor Ming-Hong CHANG
Ming-Hong CHANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240055508Abstract: A nitride-based semiconductor device includes a first nitride-based semiconductor layer, a second nitride-based semiconductor layer, a doped nitride-based semiconductor layer, a gate electrode, and a protection layer. The doped nitride-based semiconductor layer has a first portion and a second portion over the first portion and narrower than the first portion. The gate electrode is disposed over the doped nitride-based semiconductor layer and narrower than the first portion. The protection layer is disposed over the doped nitride-based semiconductor layer and the gate electrode. A top surface of the first portion of the doped nitride-based semiconductor layer is covered by the protection layer, and a sidewall of the first portion of the doped nitride-based semiconductor layer is free from coverage by the protection layer.Type: ApplicationFiled: January 11, 2022Publication date: February 15, 2024Inventors: Jian RAO, Jheng-Sheng YOU, Weixing DU, Ming-Hong CHANG
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Publication number: 20230343864Abstract: A nitride-based semiconductor device includes a first nitride-based semiconductor layer, a second nitride-based semiconductor layer, a nitride-based layer, and a plurality of gate electrodes. The second nitride-based semiconductor layer is disposed on the first nitride-based semiconductor layer and has a bandgap greater than a bandgap of the first nitride-based semiconductor layer. The nitride-based layer is disposed over the second nitride-based semiconductor layer and extends along a first direction to have a strip profile. The gate electrodes are disposed over the nitride-based layer and arranged along the first direction such that at least two of the gate electrodes are separated from each other.Type: ApplicationFiled: December 7, 2021Publication date: October 26, 2023Inventors: Jian RAO, Jheng-Sheng YOU, Po-Wei CHEN, Ming-Hong CHANG
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Patent number: 11784237Abstract: A semiconductor device includes a substrate, a channel layer, a barrier layer, a gate, a strained layer and a passivation layer. The channel layer is disposed on the substrate. The barrier layer is disposed on the channel layer. The gate is disposed on the barrier layer. The strained layer is disposed on the barrier layer. The passivation layer covers the gate and the strained layer. The material of the passivation layer differs from that of the strained layer.Type: GrantFiled: December 20, 2019Date of Patent: October 10, 2023Assignee: INNOSCIENCE (ZHUHAI) TECHNOLOGY CO., LTD.Inventors: Kingyuen Wong, Han-Chin Chiu, Ming-Hong Chang, Chunhua Zhou, Jinhan Zhang
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Patent number: 11563097Abstract: The present disclosure relates to a high electron mobility transistor (HEMT) and a fabrication method thereof. The HEMT may include a substrate; a channel layer disposed on the substrate; a barrier layer disposed on the channel layer; a semiconductor gate disposed on the barrier layer; a metal gate disposed on the semiconductor gate, the metal gate having a trapezoidal cross-sectional shape; and a passivation layer directly contacting the metal gate. A first surface of the metal gate contacts a first surface of the semiconductor gate, and an edge of the first surface of the metal gate is located inside an edge of the first surface of the semiconductor gate.Type: GrantFiled: December 27, 2019Date of Patent: January 24, 2023Assignee: INNOSCIENCE (ZHUHAI) TECHNOLOGY CO., LTD.Inventors: Ming-Hong Chang, Kingyuen Wong, Han-Chin Chiu, Hang Liao
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Publication number: 20230005852Abstract: An integrated circuit (IC) comprising an enhanced passivation scheme for pad openings and trenches is provided. In some embodiments, an interlayer dielectric (ILD) layer covers a substrate and at least partially defines a trench. The trench extends through the ILD layer from a top of the ILD layer to the substrate. A conductive pad overlies the ILD layer. A first passivation layer overlies the ILD layer and the conductive pad, and further defines a pad opening overlying the conductive pad. A second passivation layer overlies the ILD layer, the conductive pad, and the first passivation layer, and further lines sidewalls of the first passivation layer in the pad opening and sidewalls of the ILD layer in the trench. Further, the second passivation layer has a low permeability for moisture or vapor relative to the ILD layer.Type: ApplicationFiled: September 8, 2022Publication date: January 5, 2023Inventors: Ming-Hong Chang, Chun-Yi Yang, Kun-Ming Huang, Po-Tao Chu, Shen-Ping Wang, Chien-Li Kuo
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Publication number: 20220376097Abstract: Semiconductor device structures and methods for manufacturing the same are provided. The semiconductor device structure includes a substrate, a first nitride semiconductor layer, a second nitride semiconductor layer, a first dielectric layer and a second dielectric layer. The first nitride semiconductor layer is disposed on the substrate. The second nitride semiconductor layer is disposed on the first nitride semiconductor layer and has a bandgap greater than that of the first nitride semiconductor layer. The first dielectric layer is disposed on the second nitride semiconductor layer. The second dielectric layer is disposed on the first dielectric layer. The second dielectric layer includes a first portion and a second portion separated from the first portion by a trench, wherein the trench terminates at an upper surface of the first dielectric layer.Type: ApplicationFiled: December 2, 2020Publication date: November 24, 2022Inventors: JUNHUI MA, YULONG ZHANG, MING-HONG CHANG
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Publication number: 20220376066Abstract: Some embodiments of the disclosure provide a semiconductor device. The semiconductor device comprises: a substrate; a first nitride semiconductor layer disposed on the substrate; a second nitride semiconductor layer disposed on the first nitride semiconductor layer and having a bandgap greater than that of the first nitride semiconductor layer; an ohmic contact disposed on the first nitride semiconductor layer; and a spacer disposed adjacent to a sidewall of the ohmic contact.Type: ApplicationFiled: November 30, 2020Publication date: November 24, 2022Inventors: MING-HONG CHANG, JIAN RAO, YULONG ZHANG
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Publication number: 20220376058Abstract: A semiconductor device and a fabrication method thereof are provided. The semiconductor device includes a first nitride semiconductor layer, a second nitride semiconductor layer, a gate structure, and a field plate. The second nitride semiconductor layer is formed on a first surface of the first nitride semiconductor layer. The gate structure is disposed on the second nitride semiconductor layer. The field plate includes a first portion and a second portion connected to the first portion. The first portion has a first surface substantially in parallel to the first surface of the first nitride semiconductor layer, and a second surface adjacent to the first surface of the first portion. The first surface of the first portion of the field plate and the second surface of the first portion of the field plate define a first angle of about 90°.Type: ApplicationFiled: July 7, 2020Publication date: November 24, 2022Inventors: Chao WANG, Ming-Hong CHANG
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Patent number: 11508829Abstract: Some embodiments of the disclosure provide a semiconductor device. The semiconductor device comprises: a substrate; a first nitride semiconductor layer on the substrate; a second nitride semiconductor layer on the first nitride semiconductor layer and having a band gap larger than a band gap of the first nitride semiconductor layer; an intermediate layer disposed on the second nitride semiconductor layer; and a conductive structure disposed on the intermediate layer, wherein a first even interface is formed between the intermediate layer and the second nitride semiconductor layer.Type: GrantFiled: May 28, 2020Date of Patent: November 22, 2022Assignee: INNOSCIENCE (ZHUHAI) TECHNOLOGY CO., LTD.Inventors: Chang An Li, Ming-Hong Chang, Jun Tang, Zi Ming Du
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Publication number: 20220352337Abstract: The present disclosure relates to a semiconductor device and a fabrication method thereof. The semiconductor device includes a substrate, a first nitride semiconductor layer disposed on the substrate, a second nitride semiconductor layer disposed on the first nitride semiconductor layer, a passivation layer disposed on the second nitride semiconductor layer, a first adhesive layer disposed on the passivation layer. The semiconductor device further includes a conductive contact disposed on the first adhesive layer and extending through the first adhesive layer into the passivation layer, the conductive contact has a first overhang on the passivation layer and in direct contact with the first adhesive layer, and the conductive contact comprising a first element. A concentration of the first element is less than approximate 3% around to a contact between the first overhang and the passivation layer.Type: ApplicationFiled: November 27, 2020Publication date: November 3, 2022Inventors: Chang An LI, Ming-Hong CHANG
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Patent number: 11444046Abstract: An integrated circuit (IC) comprising an enhanced passivation scheme for pad openings and trenches is provided. In some embodiments, an interlayer dielectric (ILD) layer covers a substrate and at least partially defines a trench. The trench extends through the ILD layer from a top of the ILD layer to the substrate. A conductive pad overlies the ILD layer. A first passivation layer overlies the ILD layer and the conductive pad, and further defines a pad opening overlying the conductive pad. A second passivation layer overlies the ILD layer, the conductive pad, and the first passivation layer, and further lines sidewalls of the first passivation layer in the pad opening and sidewalls of the ILD layer in the trench. Further, the second passivation layer has a low permeability for moisture or vapor relative to the ILD layer.Type: GrantFiled: August 27, 2020Date of Patent: September 13, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Hong Chang, Chun-Yi Yang, Kun-Ming Huang, Po-Tao Chu, Shen-Ping Wang, Chien-Li Kuo
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Publication number: 20220140108Abstract: Some embodiments of the disclosure provide a semiconductor device. The semiconductor device comprises: a substrate; a first nitride semiconductor layer on the substrate; a second nitride semiconductor layer on the first nitride semiconductor layer and having a band gap larger than a band gap of the first nitride semiconductor layer; an intermediate layer disposed on the second nitride semiconductor layer; and a conductive structure disposed on the intermediate layer, wherein a first even interface is formed between the intermediate layer and the second nitride semiconductor layer.Type: ApplicationFiled: May 28, 2020Publication date: May 5, 2022Inventors: CHANG AN LI, MING-HONG CHANG, JUN TANG, ZI MING DU
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Patent number: 11114543Abstract: A group III-V device structure is provided. The group III-V device structure includes a channel layer formed over a substrate and an active layer formed over the channel layer. The group III-V device structure also includes a gate structure formed over the active layer and a source electrode and a drain electrode formed over the active layer. The source electrode and the drain electrode are formed on opposite sides of the gate structure. The group III-V device structure further includes a through via structure formed through the channel layer, the active layer and a portion of the substrate, and the through via structure is electrically connected to the source electrode or the drain electrode.Type: GrantFiled: March 16, 2017Date of Patent: September 7, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Ming-Hong Chang, Chih-Yuan Chan, Shen-Ping Wang, Chung-Cheng Chen, Chien-Li Kuo, Po-Tao Chu
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Publication number: 20210151594Abstract: A semiconductor device includes a substrate, a channel layer, a barrier layer, a gate, a strained layer and a passivation layer. The channel layer is disposed on the substrate. The barrier layer is disposed on the channel layer. The gate is disposed on the barrier layer. The strained layer is disposed on the barrier layer. The passivation layer covers the gate and the strained layer. The material of the passivation layer differs from that of the strained layer.Type: ApplicationFiled: December 20, 2019Publication date: May 20, 2021Inventors: KINGYUEN WONG, HAN-CHIN CHIU, MING-HONG CHANG, CHUNHUA ZHOU, JINHAN ZHANG
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Publication number: 20200395320Abstract: An integrated circuit (IC) comprising an enhanced passivation scheme for pad openings and trenches is provided. In some embodiments, an interlayer dielectric (ILD) layer covers a substrate and at least partially defines a trench. The trench extends through the ILD layer from a top of the ILD layer to the substrate. A conductive pad overlies the ILD layer. A first passivation layer overlies the ILD layer and the conductive pad, and further defines a pad opening overlying the conductive pad. A second passivation layer overlies the ILD layer, the conductive pad, and the first passivation layer, and further lines sidewalls of the first passivation layer in the pad opening and sidewalls of the ILD layer in the trench. Further, the second passivation layer has a low permeability for moisture or vapor relative to the ILD layer.Type: ApplicationFiled: August 27, 2020Publication date: December 17, 2020Inventors: Ming-Hong Chang, Chun-Yi Yang, Kun-Ming Huang, Po-Tao Chu, Shen-Ping Wang, Chien-Li Kuo
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Publication number: 20200365699Abstract: The present disclosure relates to a high electron mobility transistor (HEMT) and a fabrication method thereof. The HEMT may include a substrate; a channel layer disposed on the substrate; a barrier layer disposed on the channel layer; a semiconductor gate disposed on the barrier layer; a metal gate disposed on the semiconductor gate, the metal gate having a trapezoidal cross-sectional shape; and a passivation layer directly contacting the metal gate. A first surface of the metal gate contacts a first surface of the semiconductor gate, and an edge of the first surface of the metal gate is located inside an edge of the first surface of the semiconductor gate.Type: ApplicationFiled: December 27, 2019Publication date: November 19, 2020Inventors: MING-HONG CHANG, KINGYUEN WONG, HAN-CHIN CHIU, HANG LIAO
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Patent number: 10804231Abstract: An integrated circuit (IC) comprising an enhanced passivation scheme for pad openings and trenches is provided. In some embodiments, an interlayer dielectric (ILD) layer covers a substrate and at least partially defines a trench. The trench extends through the ILD layer from a top of the ILD layer to the substrate. A conductive pad overlies the ILD layer. A first passivation layer overlies the ILD layer and the conductive pad, and further defines a pad opening overlying the conductive pad. A second passivation layer overlies the ILD layer, the conductive pad, and the first passivation layer, and further lines sidewalls of the first passivation layer in the pad opening and sidewalls of the ILD layer in the trench. Further, the second passivation layer has a low permeability for moisture or vapor relative to the ILD layer.Type: GrantFiled: May 22, 2019Date of Patent: October 13, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ming-Hong Chang, Chun-Yi Yang, Kun-Ming Huang, Po-Tao Chu, Shen-Ping Wang, Chien-Li Kuo
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Publication number: 20200203502Abstract: The present disclosure provides a high electron mobility transistor, including a silicon substrate, a channel layer, a barrier layer and a gate sequentially stacked in a thickness direction of the high electron mobility transistor. The high electron mobility transistor further includes a strain layer made of an insulating material. A surface of the barrier layer distal to the channel layer includes a gate region and an enhancement region. The gate is disposed in the gate region. The strain layer includes an enhancement portion stacked in the enhancement region. A mismatch rate of a lattice constant of the strain layer to a lattice constant of the barrier layer is not less than 0.5%. The present disclosure further provides a method for manufacturing a high electron mobility transistor. The high electron mobility transistor has good performance and low cost.Type: ApplicationFiled: December 10, 2019Publication date: June 25, 2020Inventors: Roy Wong, Han-Chin Chiu, Ming-Hong Chang, David Zhou, Jinhan Zhang
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Publication number: 20190273059Abstract: An integrated circuit (IC) comprising an enhanced passivation scheme for pad openings and trenches is provided. In some embodiments, an interlayer dielectric (ILD) layer covers a substrate and at least partially defines a trench. The trench extends through the ILD layer from a top of the ILD layer to the substrate. A conductive pad overlies the ILD layer. A first passivation layer overlies the ILD layer and the conductive pad, and further defines a pad opening overlying the conductive pad. A second passivation layer overlies the ILD layer, the conductive pad, and the first passivation layer, and further lines sidewalls of the first passivation layer in the pad opening and sidewalls of the ILD layer in the trench. Further, the second passivation layer has a low permeability for moisture or vapor relative to the ILD layer.Type: ApplicationFiled: May 22, 2019Publication date: September 5, 2019Inventors: Ming-Hong Chang, Chun-Yi Yang, Kun-Ming Huang, Po-Tao Chu, Shen-Ping Wang, Chien-Li Kuo
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Patent number: 10312207Abstract: An integrated circuit (IC) comprising an enhanced passivation scheme for pad openings and trenches is provided. In some embodiments, an interlayer dielectric (ILD) layer covers a substrate and at least partially defines a trench. The trench extends through the ILD layer from a top of the ILD layer to the substrate. A conductive pad overlies the ILD layer. A first passivation layer overlies the ILD layer and the conductive pad, and further defines a pad opening overlying the conductive pad. A second passivation layer overlies the ILD layer, the conductive pad, and the first passivation layer, and further lines sidewalls of the first passivation layer in the pad opening and sidewalls of the ILD layer in the trench. Further, the second passivation layer has a low permeability for moisture or vapor relative to the ILD layer.Type: GrantFiled: January 30, 2018Date of Patent: June 4, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ming-Hong Chang, Chun-Yi Yang, Kun-Ming Huang, Po-Tao Chu, Shen-Ping Wang, Chien-Li Kuo