Mitsuhiro Okada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
Abstract: An information processing device having a processor and memory, and including one or more accelerators and one or more storage devices, wherein: the information processing device has one network for connecting the processor, the accelerators, and the storage devices; the storage devices have an initialization interface for accepting an initialization instruction from the processor, and an I/O issuance interface for issuing an I/O command; and the processor notifies the accelerators of the address of the initialization interface or the address of the I/O issuance interface.
Abstract: There is provided a substrate processing system including an etching apparatus configured to supply a gas containing fluorocarbon to generate plasma so as to perform an etching process on a film including silicon formed on a substrate, wherein the etching process is performed by using plasma through a mask formed on the film including silicon, a film forming apparatus configured to supply a gas containing carbon so as to form a film including carbon on the etched film including silicon.
Abstract: The PLD management system includes a PLD management unit that manages the usage status of each of one or more PLDs. The PLD management unit receives a PLD usage request from a request source module which is one of a plurality of processing modules sharing each of the one or more PLDs. when the PLD management unit receives the usage request, the PLD management unit performs control to prevent two or more processing modules including the request source module from utilizing the same PLD at the same time based on a current usage status of a PLD corresponding to the usage request and content of the usage request.
Abstract: A roller unit includes a base bracket (2) that supports a slide door, a cable holder (11) formed integrally with the base bracket (2) and that holds cable ends (112a and 113a) of cables (112 and 113), and a cable guide (40) detachably installed at the cable holder (11) and that guides the cables (112 and 113), wherein the cable guide (40) is formed to separate the cables (112 and 113) from the base bracket (2), and a load applied to the cable guide (40) by tensile forces of the cables (112 and 113) is received by the cable holder (11) and the base bracket (2).
Abstract: Provided is a heat insulation structure used for a vertical heat treatment apparatus that performs a heat treatment on a substrate. The vertical heat treatment apparatus includes: a processing container having a double tube structure including an inner tube and an outer tube closed upward, the processing container having an opening at a lower end thereof; a gas supply section and exhaust section provided on a lower side of the processing container; a lid configured to introduce or discharge the substrate into or from the opening and to open/close the opening; and a heating section provided to cover the processing container from an outside. The heat insulation structure is provided between the inner tube and the outer tube.
Abstract: There is provided a method of forming a silicon film, which includes: a film forming step of forming the silicon film on a base, the silicon film having a film thickness thicker than a desired film thickness; and an etching step of reducing the film thickness of the silicon film by supplying an etching gas containing bromine or iodine to the silicon film.
Abstract: A fuel cell module may include: a cell stack device including a cell stack including an array of a plurality of fuel cells, a manifold which supplies a fuel gas to each of the fuel cells, and a reformer which reforms a raw fuel; an oxygen-containing gas flow channel through which the oxygen-containing gas flows; an oxygen-containing gas introduction plate which supplies the oxygen-containing gas to each of the plurality of fuel cells; a housing including a box body of which one side is opened to provide an opening and a lid (closed plate) which closes the opening; a gas pipe joint, an ignition heater, a thermocouple, etc. which are a plurality of insertion members inserted from an outside of the housing into an accommodation chamber, the respective insertion members being inserted through one surface (lid surface) of the housing.
Abstract: There is provided a film forming method comprising an organic substance removal step of removing an organic substance adhering to an oxide film generated on a surface of a base by supplying a hydrogen-containing gas and an oxygen-containing gas to the base; an oxide film removal step of removing the oxide film formed on the surface of the base after the organic substance removal step; and a film forming step of forming a predetermined film on the surface of the base after the oxide film removal step.
Abstract: The disclosure provides a touch sensor unit. A conductive component is arranged between a pair of electrodes which are arranged inside an insulating tube, and the conductive component includes: a body section, which extends in a longitudinal direction of the insulating tube; and a convex section, which is arranged on an outer circumference of the body section, extends along the longitudinal direction of the body section, and sinks into the pair of electrodes. Short circuit or non-short circuit and so on of the electrodes can be detected by detecting the resistance value of the conductive component. Merely by inserting the conductive component into one end in the longitudinal direction of the electrodes, the pair of electrodes are electrically connected, and only the convex section sinks into the pair of electrodes, therefore the insertion load of the conductive component can be reduced, and the terminal treatment can be simplified.
Abstract: Disclosed is a resin modifier containing a polymer comprising a monomer unit having an epoxy group. In a 13C NMR spectrum of the polymer measured in deuterated orthodichlorobenzene to which tetramethylsilane is added, a signal X1 at a chemical shift of 69.4±0.5 ppm and a signal X2 at a chemical shift of 75.1±0.5 ppm are observed when a chemical shift of a signal attributed to tetramethylsilane is taken as 0 ppm.
Abstract: A roadside object recognition apparatus recognizes a roadside object that is present on a travel route on which an own vehicle travels. The roadside object is used for driving control of the vehicle. In the roadside object recognition apparatus, a reflection point acquiring unit acquires, using a radar that emits electromagnetic waves, a reflection-point group of reflection points of the electromagnetic waves reflected by an object that is present on the travel route. An image acquiring unit acquires an image of the travel route using a camera. A reflection point correcting unit corrects the reflection-point group by removing an erroneous reflection point that is determined to be highly likely not to be a reflection point of a roadside object from the reflection-point group through image processing of the image. A shape recognizing unit recognizes a shape of the roadside object using the corrected reflection-point group.
Abstract: A reliability calculation apparatus calculates a reliability of a recognized object that is recognized as being present on a route on which a vehicle travels. The reliability of the recognized object is used for driving control of the vehicle. In the reliability calculation apparatus, a provisional reliability calculating unit determines a feature quantity of each of a plurality of recognized objects, selects a plurality of pairs of recognized objects from the plurality of recognized objects, determines a difference in feature quantity of each pair of recognized objects, and calculates a reliability that decreases as the difference in feature quantity increases as a provisional reliability of each pair of recognized objects. An integrated reliability calculating unit calculates an integrated reliability of each recognized object from the provisional reliabilities of the plurality of pairs of recognized objects.
Abstract: The semiconductor memory device comprises a memory element group (one or more semiconductor memory elements) and a memory controller. The memory controller comprises a processor configured to process at least a part of an I/O command from a higher-level apparatus when the part of the I/O command satisfies a predetermined condition, and one or more hardware logic circuits configured to process the entire I/O command when the I/O command does not satisfy the predetermined condition.
Abstract: There is provided a cleaning method of a film forming apparatus in which a process of forming a silicon film, a germanium film or a silicon germanium film on a substrate mounted on a substrate holder in a processing container is performed, comprising: etching away the silicon film, the germanium film or the silicon germanium film adhered to an interior of the processing container including the substrate holder by supplying a halogen-containing gas not containing fluorine into the processing container in a state where the substrate holder, which was stored in a dew point-controlled atmosphere after the film forming process, is accommodated in the processing container with no substrate being mounted thereon.
Abstract: A first separator that prevents a pair of electrodes from short-circuiting each other is provided on end parts of the pair of electrodes in a longitudinal direction thereof, a first molded resin part that covers the first separator is provided on an end part of an insulation tube in a longitudinal direction thereof, a part of the first separator) on one side in a direction intersecting the longitudinal direction and another part of the first separator on the other side in the direction intersecting the longitudinal direction are each exposed to outside. When the first separator is embedded in the first molded resin part through insert molding, the first separator can be supported by a lower mold and an upper mold, portions of the first separator supported by the pair of molds at this time are portions exposed to outside.
Abstract: A silicon film forming method of forming a silicon film in a recess with respect to a target substrate having on its surface an insulating film in which the recess is formed. The method includes (a) forming a first silicon film filling the recess by supplying a Silicon raw material gas onto the target substrate, (b) subsequently, etching the first silicon film by supplying a halogen-containing etching gas onto the target substrate such that surfaces of the insulating film on the target substrate and on an upper portion of an inner wall of the recess are exposed and such that the first silicon film remains in a bottom portion of the recess, and (c) subsequently, growing a second silicon film in a bottom-up growth manner on the first silicon film that remains in the recess by supplying a Silicon raw material gas onto the target substrate after the etching.
Abstract: A flash memory package has a controller and at least one memory including a flash memory. The controller stores received write data in a primary storage area, which is a partial storage area of the memory, sets the unit of storage area including the plurality of physical pages as the unit of collective transfer to perform collective transfer and, when a volume of data accumulated in the primary storage area is equal to or larger than the capacity of one unit of collective transfer of the flash memory, collectively transfers a volume of data corresponding to the capacity of at least one unit of collective transfer from the primary storage area to a secondary storage area, which is a partial storage area of the flash memory.
Abstract: A computer system according to one preferred embodiment of the present invention has a server and a storage subsystem, wherein the server is configured to enable data write to a cache area of the storage subsystem. Further, the server manages the usages of the cache area. When storing data from the server to the cache area, the server determines whether a data-writable area exists in the cache area or not. If there is a writable area, data is stored in the writable area.
Abstract: A prismatic secondary battery includes an electrode body including a positive-electrode sheet and a negative-electrode sheet, a prismatic exterior body that accommodates the electrode body, a sealing plate that seals an opening of the prismatic exterior body, and a negative terminal electrically connected to the negative-electrode sheet. The positive-electrode sheet is electrically connected to the sealing plate. The sealing plate has a recessed portion on an outer surface and a terminal insertion hole formed in the recessed portion. The negative terminal is inserted in the terminal insertion hole. An outer insulating member is disposed between the negative terminal and the sealing plate. The sealing plate has a first groove extending to an end of the recessed portion in the longitudinal direction of the sealing plate.
Abstract: A prismatic secondary battery includes an electrode body including a positive-electrode sheet and a negative-electrode sheet, a prismatic exterior body that accommodates the electrode body, a sealing plate that seals an opening of the prismatic exterior body, and a negative terminal electrically connected to the negative-electrode sheet. The prismatic secondary battery is arranged such that the sealing plate extends in the vertical direction during use of the prismatic secondary battery. The positive-electrode sheet is electrically connected to the sealing plate. The sealing plate has a recessed portion on an outer surface and a terminal insertion hole formed in the recessed portion. The negative terminal is inserted in the terminal insertion hole. An outer insulating member is disposed between the negative terminal and the sealing plate. The sealing plate has a first groove extending to an end of the recessed portion in the longitudinal direction of the sealing plate.