Abstract: A foolproof device provided to a manufacturing process includes an imaging part that captures an object on which a plurality of identifiable marks are provided, an image processing part that obtains state data including a coordinate position of each mark from at least one captured image captured by the imaging part, a storage that stores reference data obtained by the image processing part, the reference data including a reference position of each mark, and a comparison processing part that compares the reference data stored in the storage with the current state data obtained by the image processing part, and outputs a result of the comparison regarding at least some of the plurality of marks.

Abstract: Provided is a flight device that can surely perform transformation operations of legs supporting a fuselage base in landing. A flight device 10 includes: a fuselage base 14; a first leg 26 provided on the fuselage base 14 and transformable between a flight state and a landing state; a second leg 27 provided on the fuselage base 14 as a separate body from the first leg 26 and transformable between the flight state and the landing state; a first drive unit 281 and a second drive unit 282 configured to drive transformation operations of the first leg 26 and the second leg 27; and an operation interconnecting mechanism 16 configured to interconnect the first leg 26 and the second leg 27 in terms of operation.

Abstract: There is provided a configuration that includes: a main controller configured to, when executing a process recipe including a specific step of executing a sub-recipe, control a process controller to execute the sub-recipe a predetermined number of times to perform a predetermined process to a substrate: and a device management controller configured to collect device data during an execution of the process, recipe and store the device data in a storage part. The device management controller is further configured to: search the storage part; acquire the device data in a designated step among respective steps constituting the sub-recipe for a number of times of execution of the sub-recipe; calculate a first standard deviation of the device data acquired for the number of times of execution; and compare the first standard deviation with a threshold value and generate an alarm when the first standard deviation exceeds the threshold value.

Abstract: There is provided a configuration at least including a screen control part configured to display on a display part a maintenance component management screen displaying a component, a mechanism, or both, as a maintenance component, a collection part configured to collect component data related to the maintenance component, a determination part configured to compare a cumulative value of the component data with a predetermined threshold value to determine the cumulative value exceeding the threshold value, a calculation part configured to calculate a replacement time, and an operation part configured to calculate replacement times based on an average value of the component data and a cumulative value of the component data for each predetermined cycle, display the maintenance component sequentially from the maintenance component reaching the earliest replacement time, and display the maintenance component on the display part in a state where the component data is updated for the predetermined cycle.

Abstract: A coordinate measuring machine including a surface plate; a probe moving body; an INC pattern and ABS pattern along a moving direction of the probe moving body; an INC detector that outputs a plurality of waveform signals in accordance with the moving amount based on the INC pattern; an ABS detector that outputs an absolute position signal of the probe moving body based on the ABS pattern in response to a request signal; and a control device that has a INC counting portion that counts the waveform signals outputted by the INC detector; a position information obtaining portion that reads a counted value at a timing when a work is detected by a probe; and a presetting portion that emits the request signal to the ABS detector to obtain the absolute position signal, and presets the counting portion to this absolute position signal.

Abstract: A coordinate measuring machine including a surface plate; a probe moving body; an INC pattern and ABS pattern along a moving direction of the probe moving body; an INC detector that outputs a plurality of waveform signals in accordance with the moving amount based on the INC pattern; an ABS detector that outputs an absolute position signal of the probe moving body based on the ABS pattern in response to a request signal; and a control device that has a INC counting portion that counts the waveform signals outputted by the INC detector; a position information obtaining portion that reads a counted value at a timing when a work is detected by a probe; and a presetting portion that emits the request signal to the ABS detector to obtain the absolute position signal, and presets the counting portion to this absolute position signal.

Abstract: There is provided a technique for detecting a fault of a device from an error in device data. According to the technique described herein, there is provided a substrate processing apparatus including: a pipe heater configured to heat a gas pipe; a temperature detecting unit provided at the pipe heater and configured to detect a temperature of the gas pipe; a control unit configured to control the pipe heater based on device data representing the temperature of the gas pipe measured by the temperature detecting unit by executing a process control program to adjust an electrical power applied to the pipe heater; a memory unit configured to store a monitored item table; and a device status monitoring unit configured to execute a device status monitoring program.

Abstract: An object of the present invention is to provide a measurement device and a measurement system which make it possible to obtain various pieces of driving information and realize accurate analysis of an operation state. A measurement device according to an embodiment comprises: a main body which comprises a probe having a gauge head which can be moved, in a relative manner, relative to an object to be measured, and a move mechanism for moving the gauge head; and a control section which controls driving of the move mechanism, and comprises a generation section for generating driving information of the main body, in association with identification information of the probe, in response to driving of the move mechanism, and a recording section for recording the driving information.

Abstract: Measuring apparatus includes an upper support supporting a first end of a columnar work piece in an axis direction, a lower support supporting a second end of the work piece in the axis direction, a probe measuring the work piece supported by the upper support and lower support, a rotary table coupled to the lower support and capable of rotating centered in the axis direction, and a post provided to the rotary table and mounting a first position determiner and a second position determiner so as to be switchable, the first and second position determiner determining a position of the work piece with respect to the rotary table. When a first columnar work piece as the work piece is supported by the upper support and lower support, the first position determiner is mounted to the post to determine a position by contacting the first work piece.

Abstract: There is provided a configuration that includes: a main controller configured to, when executing a process recipe including a specific step of executing a sub-recipe, control a process controller to execute the sub-recipe a predetermined number of times to perform a predetermined process to a substrate: and a device management controller configured to collect device data during an execution of the process, recipe and store the device data in a storage part. The device management controller is further configured to: search the storage part; acquire the device data in a designated step among respective steps constituting the sub-recipe for a number of times of execution of the sub-recipe; calculate a first standard deviation of the device data acquired for the number of times of execution; and compare he first standard deviation with a threshold value and generate an alarm when the first standard deviation exceeds the threshold value.

Abstract: An object of the present invention is to provide a measurement device and a measurement system which make it possible to obtain various pieces of driving information and realize accurate analysis of an operation state. A measurement device according to an embodiment comprises: a main body which comprises a probe having a gauge head which can be moved, in a relative manner, relative to an object to be measured, and a move mechanism for moving the gauge head; and a control section which controls driving of the move mechanism, and comprises a generation section for generating driving information of the main body, in association with identification information of the probe, in response to driving of the move mechanism, and a recording section for recording the driving information.

Abstract: There is provided a configuration at least including a screen control part configured to display on a display part a maintenance component management screen displaying a component, a mechanism, or both, as a maintenance component, a collection part configured to collect component data related to the maintenance component, a determination part configured to compare a cumulative value of the component data with a predetermined threshold value to determine the cumulative value exceeding the threshold value, a calculation part configured to calculate a replacement time, and an operation part configured to calculate replacement times based on an average value of the component data and a cumulative value of the component data for each predetermined cycle, display the maintenance component sequentially from the maintenance component reaching the earliest replacement time, and display the maintenance component on the display part in a state where the component data is updated for the predetermined cycle.

Abstract: A coordinate measuring apparatus includes a base on which an object to be measured is mounted, a movable X-axis beam, a Y-axis column with a hollow part that is provided on the base and supports the X-axis beam, a control unit that is provided under the base and controls the movement of the X-axis beam, and a cable that is wired from the X-axis beam to the control unit through the hollow part of the Y-axis column.

Abstract: There is provided a technique for detecting a fault of a device from an error in device data. According to the technique described herein, there is provided a substrate processing apparatus including: a pipe heater configured to heat a gas pipe; a temperature detecting unit provided at the pipe heater and configured to detect a temperature of the gas pipe; a control unit configured to control the pipe heater based on device data representing the temperature of the gas pipe measured by the temperature detecting unit by executing a process control program to adjust an electrical power applied to the pipe heater; a memory unit configured to store a monitored item table; and a device status monitoring unit configured to execute a device status monitoring program.

Abstract: Measuring apparatus includes an upper support supporting a first end of a columnar work piece in an axis direction, a lower support supporting a second end of the work piece in the axis direction, a probe measuring the work piece supported by the upper support and lower support, a rotary table coupled to the lower support and capable of rotating centered in the axis direction, and a post provided to the rotary table and mounting a first position determiner and a second position determiner so as to be switchable, the first and second position determiner determining a position of the work piece with respect to the rotary table. When a first columnar work piece as the work piece is supported by the upper support and lower support, the first position determiner is mounted to the post to determine a position by contacting the first work piece.

Abstract: A coordinate measuring apparatus includes a base on which an object to be measured is mounted, a movable X-axis beam, a Y-axis column with a hollow part that is provided on the base and supports the X-axis beam, a control unit that is provided under the base and controls the movement of the X-axis beam, and a cable that is wired from the X-axis beam to the control unit through the hollow part of the Y-axis column.

Abstract: Provided are a substrate processing apparatus, a method of processing a substrate, a method of manufacturing a semiconductor device, and a non-transitory computer readable recording medium storing a program for performing the method of manufacturing the semiconductor device, that are capable of improving manufacturing throughput of the apparatus. The substrate processing apparatus includes a substrate to be processed, a transfer chamber under a vacuum atmosphere, a substrate transfer unit installed at the transfer chamber and configured to transfer the substrate, at least two process chambers installed near the transfer chamber and configured to process the substrate, at least two gate valves installed between the transfer chamber and the at least two process chambers, and a control unit configured to control the substrate transfer unit and the at least two gate valves, wherein the control unit opens and closes the at least two gate valves while the substrate transfer unit transfers the substrate.

Abstract: A method according to the invention includes measuring respective geometric errors that occur in a three-dimensional movement mechanism when different weights are applied to a ram, storing in a storage section respective correction parameters for correcting the respective geometric errors measured for the different weights, inputting weight information of a probe attached to the ram, reading from the storage section one of the correction parameters that corresponds to the inputted weight information, and correcting measurement data with the read correction parameter.

Abstract: An existing test head is made best use of and a capital investment is reduced. A test apparatus for testing a plurality of devices under test includes: a plurality of test heads for retaining therein at least one test board to test devices under test; a connecting section mounted on upper surfaces of the plurality of test heads and is independently fixed to each of the plurality of test heads; and a DUT board on which the plurality of devices under test are mounted, the DUT board being mounted to the connecting section, where the at least one test board is mountable and removable through a side surface of each of the plurality of test heads while the connecting section is mounted to the test head.