Abstract: A test board can be inserted to a test head and removed from the test head while the connecting section for mounting thereon devices under test is mounted on the upper portion of the test head. A test head for retaining therein at least one test board for testing devices under test, includes: a casing provided with, on one side surface thereof, an opening through which the at least one test board is inserted and removed, the casing retaining therein the at least one test board with an upper side thereof oriented towards an upper surface of the casing; and a mounting member that guides a lower side of the at least one test board through the opening to a pre-set position, imposes an upward force to the lower side of the at least one test board, thereby mounting the at least one test board to the casing.

Abstract: A three-dimensional measuring machine (industrial machine) includes an air supplier supplying air; a drive mechanism driven by the air supplied from the air supplier; an electromagnetic valve provided inside an air regulator set to open and close an air supply passage inside the air regulator set, the air regulator set introducing the air from the air supplier to the drive mechanism; and a motion controller controlling the electromagnetic valve to block the air supply passage when a time since the drive mechanism stopped operation reaches a preset time.

Abstract: According to an exemplary embodiment, an industrial machine includes: a movement mechanism configured to move along a specific axis direction; a controller configured to control the movement mechanism; and an angle detector configured to detect an angle of the movement mechanism about an axis perpendicular to the specific axis direction. The controller comprises: an angular error acquisition section configured to acquire angular errors of the movement mechanism for respective positions of the movement mechanism based on the angle detected when the movement mechanism is moved; a parameter generator configured to generate respective straightness correction parameters for correcting straightness errors of the movement mechanism in the specific axis direction by integrating the angular errors at the respective positions of the movement mechanism; and a correction section configured to correct movement errors of the movement mechanism based on the straightness correction parameters.

Abstract: Provided are a substrate processing apparatus, a method of processing a substrate, a method of manufacturing a semiconductor device, and a non-transitory computer readable recording medium storing a program for performing the method of manufacturing the semiconductor device, that are capable of improving manufacturing throughput of the apparatus. The apparatus includes a substrate to be processed, a transfer chamber under a vacuum atmosphere, a substrate transfer unit installed at the transfer chamber and configured to transfer the substrate, at least two process chambers installed near the transfer chamber and configured to process the substrate, at least two gate valves installed between the transfer chamber and the at least two process chambers, and a control unit configured to control the substrate transfer unit and the at least two gate valves, wherein the control unit opens and closes the at least two gate valves while the substrate transfer unit transfers the substrate.

Abstract: A test board can be inserted to a test head and removed from the test head while the connecting section for mounting thereon devices under test is mounted on the upper portion of the test head. A test head for retaining therein at least one test board for testing devices under test, includes: a casing provided with, on one side surface thereof, an opening through which the at least one test board is inserted and removed, the casing retaining therein the at least one test board with an upper side thereof oriented towards an upper surface of the casing; and a mounting member that guides a lower side of the at least one test board through the opening to a pre-set position, imposes an upward force to the lower side of the at least one test board, thereby mounting the at least one test board to the casing.

Abstract: An existing test head is made best use of and a capital investment is reduced. A test apparatus for testing a plurality of devices under test includes: a plurality of test heads for retaining therein at least one test board to test devices under test; a connecting section mounted on upper surfaces of the plurality of test heads and is independently fixed to each of the plurality of test heads; and a DUT board on which the plurality of devices under test are mounted, the DUT board being mounted to the connecting section, where the at least one test board is mountable and removable through a side surface of each of the plurality of test heads while the connecting section is mounted to the test head.

Abstract: A method according to the invention includes measuring respective geometric errors that occur in a three-dimensional movement mechanism when different weights are applied to a ram, storing in a storage section respective correction parameters for correcting the respective geometric errors measured for the different weights, inputting weight information of a probe attached to the ram, reading from the storage section one of the correction parameters that corresponds to the inputted weight information, and correcting measurement data with the read correction parameter.

Abstract: A three-dimensional measuring machine (industrial machine) includes an air supplier supplying air; a drive mechanism driven by the air supplied from the air supplier; an electromagnetic valve provided inside an air regulator set to open and close an air supply passage inside the air regulator set, the air regulator set introducing the air from the air supplier to the drive mechanism; and a motion controller controlling the electromagnetic valve to block the air supply passage when a time since the drive mechanism stopped operation reaches a preset time.

Abstract: According to an exemplary embodiment, an industrial machine includes: a movement mechanism configured to move along a specific axis direction; a controller configured to control the movement mechanism; and an angle detector configured to detect an angle of the movement mechanism about an axis perpendicular to the specific axis direction. The controller comprises: an angular error acquisition section configured to acquire angular errors of the movement mechanism for respective positions of the movement mechanism based on the angle detected when the movement mechanism is moved; a parameter generator configured to generate respective straightness correction parameters for correcting straightness errors of the movement mechanism in the specific axis direction by integrating the angular errors at the respective positions of the movement mechanism; and a correction section configured to correct movement errors of the movement mechanism based on the straightness correction parameters.

Abstract: A traction drive power transmission device, where a lubrication oil can be stably and continuously applied for a long period to portions at which rollers and a shaft are in contact with each other, shortage of the lubrication oil does not occur at the contact portions, the lubrication oil is not wasted, and which does not impair work environment by contaminating floor surface etc. A traction drive power transmission device has at least one drive roller (12a), a follower roller (12b), and a circular cylinder-like shaft (11). The shaft (11) is held between the drive roller (12a) and the follower roller (12b). When the drive roller (12a) is rotated, rotational force by the rotation is transmitted to the shaft (11) to drive it in its axial direction. The device has a lubrication oil-delivering portion (20) with application bodies (22-1, 22-2) for applying a lubrication oil only to portions where the shaft (11) is in contact with the drive roller (12a) and the follower roller (12b).

Abstract: A slider device includes a base (200), a running head (300) slidably provided on the base (200), a main guide mechanism (410) for guiding in a first direction in which the running head (300) runs, and sub-guide mechanism (450) allowing displacement to a second direction different from the first direction. The main guide mechanism (410) includes two main rails (421, 422) provided on the base (200) substantially parallel to each other along the first direction, and main sliders (431, 433) sliding on the main rails (421, 422). The sub-guide mechanism (450) includes a sub-rail (461) provided on the main slider (431) along the second direction, and a sub-slider (471) sliding on the sub-rail (461).

Abstract: A slider device (200, 800) according to the present invention includes a base (200); a running head (300) slidably provided on said base (200) along the direction guided by a prespecified guide mechanism (400); a rack (510) provided in the fixed state on either said base (200) or said running head (300) along the guide direction by said guide mechanism (400); a pinion (520) engaging with rack teeth of said rack and driven and rotated by a prespecified power source; a swing arm (540) rotatably supporting said pinion (520), having an oscillation shaft (550) parallel to a rotary shaft of said pinion, and coupled to either one of said base (200) and said running head (300) via said oscillation shaft (550) in the oscillation-allowable state with the line extending between said oscillation shaft (550) and the rotary shaft of said pinion substantially parallel to said rack (510) as the reference state; and a biasing mechanism (570) for biasing said pinion (520) toward said rack (510) via said swing arm (540).

Abstract: A slider device (200, 800) according to the present invention includes a base (200); a running head (300) slidably provided on said base (200) along the direction guided by a prespecified guide mechanism (400); a rack (510) provided in the fixed state on either said base (200) or said running head (300) along the guide direction by said guide mechanism (400); a pinion (520) engaging with rack teeth of said rack and driven and rotated by a prespecified power source; a swing arm (540) rotatably supporting said pinion (520), having an oscillation shaft (550) parallel to a rotary shaft of said pinion, and coupled to either one of said base (200) and said running head (300) via said oscillation shaft (550) in the oscillation-allowable state with the line extending between said oscillation shaft (550) and the rotary shaft of said pinion substantially parallel to said rack (510) as the reference state; and a biasing mechanism (570) for biasing said pinion (520) toward said rack (510) via said swing arm (540).

Abstract: A slider device includes a base (200), a running head (300) slidably provided on the base (200), a main guide mechanism (410) for guiding in a first direction in which the running head (300) runs, and sub-guide mechanism (450) allowing displacement to a second direction different from the first direction. The main guide mechanism (410) includes two main rails (421, 422) provided on the base (200) substantially parallel to each other along the first direction, and main sliders (431, 433) sliding on the main rails (421, 422). The sub-guide mechanism (450) includes a sub-rail (461) provided on the main slider (431) along the second direction, and a sub-slider (471) sliding on the sub-rail (461).

Abstract: A system for discharging a thermal decomposition residue containing carbon residue and steel wire balls, the discharge system including: a discharge mechanism including a double shaft screw conveyer having respective screws thereof supported at one end thereof and located contiguous to a residue outlet of a thermal decomposition unit, a housing hermetically connected to the residue outlet of the thermal decomposition unit and enclosing the double shaft screw conveyer with ample space on the upper side thereof; a first outlet provided in a front bottom portion of the housing for discharging the carbon residue transferred by lower portions of the double shaft conveyer; a second outlet provided at the discharging free end of the double screw conveyer for discharging the steel wire balls transferred by upper portions of the double screw conveyer; a seal provided in said first outlet for shielding the interior of the housing from ambient atmosphere; and a water-sealer including a water bath, a chute connected to t