Abstract: There is provided an electrostatic chuck assembly including: an electrode-embedded ceramic plate; a cooling plate that supports a bottom surface of the ceramic plate and has an internal space of an annular or arcuate shape; an internal fixation member of an annular or arcuate shape accommodated in the internal space so as to be rotatable about a central axis of the cooling plate; female threads in a multiple of n, which is an integer of 2 or more, spaced apart from each other in the internal fixation member; and n insertion holes for insertion of bolts for being fixed to a chamber, the insertion holes each being provided at the bottom of the cooling plate such that one set of n female threads is exposed. Each of the female threads is disposed such that another set of n female threads is exposed in the insertion holes when rotated.

Abstract: A member for semiconductor manufacturing apparatus includes a ceramic plate incorporating an electrode; a ceramic plate through hole extending through the ceramic plate in an up-and-down direction; a base plate having electrical conductivity and located adjacent to a lower surface of the ceramic plate; a base plate through hole extending through the base plate in the up-and-down direction; an insulating sleeve inserted into the base plate through hole and having an outer circumferential surface adhered to an inner circumferential surface of the base plate through hole with an adhesive layer therebetween; and a sleeve through hole extending through the insulating sleeve in the up-and-down direction and communicating with the ceramic plate through hole, wherein the insulating sleeve has at least one ring-shaped or spiral outer circumferential groove on the outer circumferential surface of the insulating sleeve except for an upper end portion of the insulating sleeve.

Abstract: A member for semiconductor manufacturing apparatus includes: a ceramic plate having a wafer placement surface; a conductive base plate; a gas common passage provided inside the base plate; gas outlet passages provided to reach the wafer placement surface from the gas common passage; at least one gas inlet passage provided to communicate with the gas common passage from a lower surface of the base plate; and an insulating sleeve disposed in a base plate through-hole. The insulating sleeve has a first communication hole that constitutes part of the gas common passage, and a second communication hole that is provided to reach an upper surface of the insulating sleeve from the first communication hole, and constitute part of the gas outlet passages.

Abstract: A member for a semiconductor manufacturing apparatus, the member has a wafer placement surface and includes: a plurality of gas outflow passages each having an opening on the wafer placement surface; a common gas passage that is in communication with the plurality of gas outflow passages; and at least one gas inflow passage that is in communication with the common gas passage from a surface of the member for a semiconductor manufacturing apparatus that is on an opposite side from the wafer placement surface, the number of the at least one gas inflow passage being smaller than the number of the gas outflow passages in communication with the common gas passage. Among the plurality of gas outflow passages, a gas outflow passage closer to the gas inflow passage has a larger gas passage resistance than a gas outflow passage farther from the gas inflow passage.

Abstract: A feeder member includes an electrode-side terminal, an insert, a connector, and a cable. The electrode-side terminal is made of a high-melting-point metal containing material, and is joined to an electrode embedded in a ceramic base. Each of the insert, the connector and the cable is made of a Cu containing material. The insert has a joined portion that is directly joined to the electrode-side terminal without using a brazing material, and a hole portion that is provided on a side opposite to the joined portion. The connector has a socket portion that is electrically connected to a conductive member differing from the feeder member, and a recessed portion that is provided on a side opposite to the socket portion. The cable has one end joined to the hole portion of the insert, and the other end joined to the recessed portion of the connector.

Abstract: A wafer placement table includes a ceramic base, an electrode (FR attraction electrode), a bonding terminal (power supply terminal), and an electrode lead-out portion. The ceramic base has an upper surface serving as a wafer placement surface. The FR attraction electrode is embedded in the ceramic base. The power supply terminal is inserted into the ceramic base from a lower surface of the ceramic base and penetrates a through-hole formed in the FR attraction electrode. The electrode lead-out portion is provided at each of two or more positions at intervals along a peripheral edge of the through-hole to be thicker than the FR attraction electrode and has an inner peripheral surface bonded to a side surface of the power supply terminal.

Abstract: The invention provides a laminated nonwoven fabric sheet formed by uniting an ultrafine fiber layer and a hydrophilic short fiber layer, in which the hydrophilic short fiber layer is laminated on one surface or both surfaces of the ultrafine fiber layer, the ultrafine fiber layer is formed by combining 20 to 80% by mass of thermoplastic resin fibers (A) and 80 to 20% by mass of elastomer resin fibers (B) that melt or soften at a temperature lower than a temperature of thermoplastic resin fibers (A), and the ultrafine fiber layer includes a hindered amine compound, the laminated nonwoven fabric sheet is subjected to electret processing, and 10% stretch strength in one direction is different from 10% stretch strength in a direction perpendicular to the one direction.

Abstract: A cosmetic facial mask is described, having high fitting properties onto skin, an excellent skin tightening effect, and an excellent lift-up effect on a flaccid cheek or face line. The cosmetic facial mask includes a laminate in which a non-elastomeric fiber layer and an elastomer layer are integrated through lamination, and has stretchability in a vertical direction of a face.

Abstract: A laminated non-woven fabric and a manufactured article using the laminated non-woven fabric are provided. The laminated non-woven fabric is formed by clamping a fibrous layer B between two of fibrous layer A, wherein the fibrous layer B is obtained by using a fiber melting or softening at 120° C. or less, and fibrous layer A includes a fiber neither melting nor softening at 120° C. or less, in which the fibrous layer A and the fibrous layer B are integrated through point thermal compression bonding, and interlayer peeling strength between the fibrous layer A and the fibrous layer B ranges from 0.3 Newton (N)/25 millimeters (mm) to 4.0 N/25 mm.

Abstract: The nonwoven fabric is a blended filament nonwoven fabric including a blend of two types of filaments, wherein the two types of filaments are constituted of thermoplastic resins different from each other, an average fiber diameter obtained by dividing the total value of fiber diameters of the filaments present in the nonwoven fabric by the number of the constituent filaments is 0.1 to 10 ?m, and the nonwoven fabric has a specific volume of 12 cm3/g or more; the blended filament nonwoven fabric, wherein the ratio of the number of constituent filaments having fiber diameters of 0.1 to 3 ?m is 50% or more of the filaments constituting the nonwoven fabric, and the ratio of the number of constituent filaments having fiber diameters exceeding 3 ?m is 50% or less of the filaments constituting the nonwoven fabric; or the nonwoven fabric is produced by a melt-blowing process.

Abstract: Provided is a novel double-sided adhesive sheet for image display device which can be bonded to the adhesion surface in close contact without space therebetween although there is a step due to printing or the like on the adhesion surface to be bonded to the adhesive sheet. The double-sided adhesive sheet for image display device 1 of the invention is a sheet to bond any two adherends selected from a surface protective panel 2, a touch panel 3, and an image display panel, and the sheet is characterized in that at least one of the adherends (surface protective panel 2) has a stepped portion 2b on an adhesion surface 2a to adhere to the double-sided adhesive sheet 1 and the surface shape of the bonding surface 1a of the double-sided adhesive sheet 1 to be bonded to the adhesion surface 2a is shaped in accordance with the surface shape of the adhesion surface 2a.

Abstract: A nonwoven fabric is provided that has biodegradability and has excellent mechanical strength and excellent texture in combination, and a fiber product containing the nonwoven fabric is provided. The biodegradable nonwoven fabric contains at least two kinds of fibers including a fiber A and a fiber B, in which the fiber A contains a first component having biodegradability, and the fiber B contains a second component having biodegradability. The nonwoven fabric contains a mixed fiber web having a mixing ratio (weight ratio) of the fiber A and the fiber B in a range of from 5/95 to 95/5. The first component contains at least one member selected from the group consisting of an aliphatic polyester and an aliphatic polyester copolymer each having a melting point that is higher than a melting point of the second component. A half crystallization time at 85 degree Celsius of the second component is longer than a half crystallization time at 85 degree Celsius of the first component.

Abstract: Provided is a novel double-sided adhesive sheet for image display device which can be bonded to the adhesion surface in close contact without space therebetween although there is a step due to printing or the like on the adhesion surface to be bonded to the adhesive sheet. The double-sided adhesive sheet for image display device 1 of the invention is a sheet to bond any two adherends selected from a surface protective panel 2, a touch panel 3, and an image display panel, and the sheet is characterized in that at least one of the adherends (surface protective panel 2) has a stepped portion 2b on an adhesion surface 2a to adhere to the double-sided adhesive sheet 1 and the surface shape of the bonding surface 1a of the double-sided adhesive sheet 1 to be bonded to the adhesion surface 2a is shaped in accordance with the surface shape of the adhesion surface 2a.

Abstract: Present invention provides an air filter material using a laminated electret nonwoven fabric subjected to electret processing in which one layer or a plurality of layers of nonwoven fabrics (referred to as nonwoven fabric B) including fibers having a mean fiber diameter in the range of 10 micrometers to 100 micrometers and being larger than a mean fiber diameter of fibers constituting nonwoven fabric A are laminated on at least one side of a nonwoven fabric (referred to as nonwoven fabric A) obtained by mixing two kinds of fibers having a mean fiber diameter in the range of 0.1 micrometer to 15 micrometers and having a different melting point (fibers having a lower melting point are defined as fibers D and fibers having a higher melting point are defined as fibers E), and a laminated electret filter material having a low pressure loss and a high collection efficiency. The filter material is suitably used for a medical mask, an industrial mask, a general purpose mask or the like.

Abstract: A cosmetic facial mask is described, having high fitting properties onto skin, an excellent skin tightening effect, and an excellent lift-up effect on a flaccid cheek or face line. The cosmetic facial mask includes a laminate in which a non-elastomeric fiber layer and an elastomer layer are integrated through lamination, and has stretchability in a vertical direction of a face.

Abstract: The nonwoven fabric is a blended filament nonwoven fabric including a blend of two types of filaments, wherein the two types of filaments are constituted of thermoplastic resins different from each other, an average fiber diameter obtained by dividing the total value of fiber diameters of the filaments present in the nonwoven fabric by the number of the constituent filaments is 0.1 to 10 ?m, and the nonwoven fabric has a specific volume of 12 cm3/g or more; the blended filament nonwoven fabric, wherein the ratio of the number of constituent filaments having fiber diameters of 0.1 to 3 ?m is 50% or more of the filaments constituting the nonwoven fabric, and the ratio of the number of constituent filaments having fiber diameters exceeding 3 ?m is 50% or less of the filaments constituting the nonwoven fabric; or the nonwoven fabric is produced by a melt-blowing process.

Abstract: A laminated non-woven fabric and a manufactured article using the laminated non-woven fabric are provided. The laminated non-woven fabric is formed by clamping a fibrous layer B between two of fibrous layer A, wherein the fibrous layer B is obtained by using a fiber melting or softening at 120° C. or less, and fibrous layer A includes a fiber neither melting nor softening at 120° C. or less, in which the fibrous layer A and the fibrous layer B are integrated through point thermal compression bonding, and interlayer peeling strength between the fibrous layer A and the fibrous layer B ranges from 0.3 Newton (N)/25 millimeters (mm) to 4.0 N/25 mm.

Abstract: Present invention provides an air filter material using a laminated electret nonwoven fabric subjected to electret processing in which one layer or a plurality of layers of nonwoven fabrics (referred to as nonwoven fabric B) including fibers having a mean fiber diameter in the range of 10 micrometers to 100 micrometers and being larger than a mean fiber diameter of fibers constituting nonwoven fabric A are laminated on at least one side of a nonwoven fabric (referred to as nonwoven fabric A) obtained by mixing two kinds of fibers having a mean fiber diameter in the range of 0.1 micrometer to 15 micrometers and having a different melting point (fibers having a lower melting point are defined as fibers D and fibers having a higher melting point are defined as fibers E), and a laminated electret filter material having a low pressure loss and a high collection efficiency. The filter material is suitably used for a medical mask, an industrial mask, a general purpose mask or the like.

Abstract: A nonwoven fabric is provided that has biodegradability and has excellent mechanical strength and excellent texture in combination, and a fiber product containing the nonwoven fabric is provided. The biodegradable nonwoven fabric contains at least two kinds of fibers including a fiber A and a fiber B, in which the fiber A contains a first component having biodegradability, and the fiber B contains a second component having biodegradability. The nonwoven fabric contains a mixed fiber web having a mixing ratio (weight ratio) of the fiber A and the fiber B in a range of from 5/95 to 95/5. The first component contains at least one member selected from the group consisting of an aliphatic polyester and an aliphatic polyester copolymer each having a melting point that is higher than a melting point of the second component. A half crystallization time at 85 degree Celsius of the second component is longer than a half crystallization time at 85 degree Celsius of the first component.

Abstract: A production method of a dielectric ceramic composition comprising a main component including barium titanate expressed by a composition formula of BamTiO2+m, wherein “m” satisfies 0.990<m<1.010, a fourth subcomponent including an oxide of R (note that R is at least one selected from Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu), and other subcomponent including at least BaO; comprising steps of preparing a post-reaction material by bringing a material of said main component to react in advance with at least a part of a material of said fourth subcomponent, wherein, when an amount of BaO included in said other subcomponent is n mole with respect to 100 moles of said main component, and said main component and said BaO are expressed by a composition formula of Bam+n/100TiO2+m+n/100, wherein “m” and “n” satisfy 0.994<m+n/100<1.