Patents by Inventor Mohamad A. Shaheen
Mohamad A. Shaheen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20140225182Abstract: A substrate comprises a base wafer, an insulating layer over the base wafer, and a top semiconductor layer over the insulating layer on a side thereof opposite the base wafer. The insulating layer comprises a charge-confining layer confined on one or both sides with diffusion barrier layers, wherein the charge-confining layer has a density of charges in absolute value higher than 1010 charges/cm2. Alternatively, the insulating layer comprises charge-trapping islands embedded therein, wherein the charge-trapping islands have a total density of charges in absolute value higher than 1010 charges/cm2.Type: ApplicationFiled: April 15, 2014Publication date: August 14, 2014Applicant: SoitecInventors: Mohamad A. Shaheen, Frederic Allibert, Gweltaz Gaudin, Fabrice Lallement, Didier Landru, Karine Landry, Carlos Mazure
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Patent number: 8735946Abstract: Embodiments of the invention relate to substrates comprising a base wafer, an insulating layer and a top semiconductor layer, wherein the insulating layer comprises at least a zone wherein a density of charges is in absolute value higher than 1010 charges/cm2. The invention also relates to processes for making such substrates.Type: GrantFiled: September 16, 2013Date of Patent: May 27, 2014Assignee: SoitecInventors: Mohamad A Shaheen, Frederic Allibert, Gweltaz Gaudin, Fabrice Lallement, Didier Landru, Karine Landry, Carlos Mazure
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Publication number: 20140015023Abstract: Embodiments of the invention relate to substrates comprising a base wafer, an insulating layer and a top semiconductor layer, wherein the insulating layer comprises at least a zone wherein a density of charges is in absolute value higher than 1010 charges/cm2. The invention also relates to processes for making such substrates.Type: ApplicationFiled: September 16, 2013Publication date: January 16, 2014Applicant: SoitecInventors: Frederic Allibert, Gweltaz Gaudin, Fabrice Lallement, Didier Landru, Karine Landry, Carlos Mazure, Mohamad A. Shaheen
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Patent number: 8617945Abstract: A stacking fault and twin blocking barrier for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations. In an embodiment of the present invention, GaSb buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a III-V InSb device layer is formed directly on the GaSb buffer.Type: GrantFiled: February 3, 2012Date of Patent: December 31, 2013Assignee: Intel CorporationInventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W. K. Liu
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Patent number: 8535996Abstract: Embodiments of the invention relate to substrates comprising a base wafer, an insulating layer and a top semiconductor layer, wherein the insulating layer comprises at least a zone wherein a density of charges is in absolute value higher than 1010 charges/cm2. The invention also relates to processes for making such substrates.Type: GrantFiled: March 13, 2008Date of Patent: September 17, 2013Assignee: SOITECInventors: Mohamad Shaheen, Frederic Allibert, Gweltaz Gaudin, Fabrice Lallement, Didier Landru, Karin Landry, Carlos Mazure
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Publication number: 20120142166Abstract: A stacking fault and twin blocking barrier for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations. In an embodiment of the present invention, GaSb buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a III-V InSb device layer is formed directly on the GaSb buffer.Type: ApplicationFiled: February 3, 2012Publication date: June 7, 2012Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W.K. Liu
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Patent number: 8143646Abstract: A stacking fault and twin blocking barrier for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations. In an embodiment of the present invention, GaSb buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a III-V InSb device layer is formed directly on the GaSb buffer.Type: GrantFiled: August 2, 2006Date of Patent: March 27, 2012Assignee: Intel CorporationInventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W. K. Liu
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Patent number: 8084818Abstract: A high mobility semiconductor assembly. In one exemplary aspect, the high mobility semiconductor assembly includes a first substrate having a first reference orientation located at a <110> crystal plane location on the first substrate and a second substrate formed on top of the first substrate. The second substrate has a second reference orientation located at a <100> crystal plane location on the second substrate, wherein the first reference orientation is aligned with the second reference orientation. In another exemplary aspect, the second substrate has a second reference orientation located at a <110> crystal plane location on the second substrate, wherein the second substrate is formed over the first substrate with the second reference orientation being offset to the first reference orientation by about 45 degrees.Type: GrantFiled: January 12, 2006Date of Patent: December 27, 2011Assignee: Intel CorporationInventors: Mohamad A. Shaheen, Brian Doyle, Suman Dutta, Robert S. Chau, Peter Tolchinksy
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Patent number: 8034675Abstract: A composite buffer architecture for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a dual buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations and provide electrical isolation. In an embodiment of the present invention, the material of each buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a GaSb/AlSb buffer is utilized to form an InSb-based quantum well transistor on a silicon substrate.Type: GrantFiled: October 29, 2010Date of Patent: October 11, 2011Assignee: Intel CorporationInventors: Mantu K. Hudait, Mohamad A. Shaheen, Dmitri Loubychev, Amy W. K. Liu, Joel M. Fastenau
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Publication number: 20110045659Abstract: A composite buffer architecture for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a dual buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations and provide electrical isolation. In an embodiment of the present invention, the material of each buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a GaSb/AlSb buffer is utilized to form an InSb-based quantum well transistor on a silicon substrate.Type: ApplicationFiled: October 29, 2010Publication date: February 24, 2011Applicant: INTEL CORPORATIONInventors: Mantu K. Hudait, Mohamad A. Shaheen, Dmitri Loubychev, Amy W. K. Liu, Joel M. Fastenau
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Publication number: 20110012200Abstract: Embodiments of the invention relate to substrates comprising a base wafer, an insulating layer and a top semiconductor layer, wherein the insulating layer comprises at least a zone wherein a density of charges is in absolute value higher than 1010 charges/cm2. The invention also relates to processes for making such substrates.Type: ApplicationFiled: March 13, 2008Publication date: January 20, 2011Applicant: S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIESInventors: Frederic Allibert, Gweltaz Gaudin, Fabrice Lallement, Didier Landru, Karine Landry, Mohamad Shaheen, Carlos Mazure
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Patent number: 7851781Abstract: Various embodiments provide a buffer layer that is grown over a silicon substrate that provides desirable device isolation for devices formed relative to III-V material device layers, such as InSb-based devices, as well as bulk thin film grown on a silicon substrate. In addition, the buffer layer can mitigate parallel conduction issues between transistor devices and the silicon substrate. In addition, the buffer layer addresses and mitigates lattice mismatches between the film relative to which the transistor is formed and the silicon substrate.Type: GrantFiled: February 13, 2009Date of Patent: December 14, 2010Assignee: Intel CorporationInventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W. K. Liu
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Patent number: 7851780Abstract: A composite buffer architecture for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, a dual buffer layer is positioned between a III-V device layer and a silicon substrate to glide dislocations and provide electrical isolation. In an embodiment of the present invention, the material of each buffer layer is selected on the basis of lattice constant, band gap, and melting point to prevent many lattice defects from propagating out of the buffer into the III-V device layer. In a specific embodiment, a GaSb/AlSb buffer is utilized to form an InSb-based quantum well transistor on a silicon substrate.Type: GrantFiled: August 2, 2006Date of Patent: December 14, 2010Assignee: Intel CorporationInventors: Mantu K. Hudait, Mohamad A. Shaheen, Dmitri Loubychev, Amy W. K. Liu, Joel M. Fastenau
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Publication number: 20100155788Abstract: Embodiments of the invention provide a substrate with a first layer having a first crystal orientation on a second layer having a second crystal orientation different than the first crystal orientation. The first layer may have a uniform thickness.Type: ApplicationFiled: February 24, 2010Publication date: June 24, 2010Inventors: Mohamad A. Shaheen, Jack T. Kavlieros, Been-Yih Jin, Brian S. Doyle
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Patent number: 7723749Abstract: A method for in situ formation of low defect, strained silicon and a device formed according to the method are disclosed. In one embodiment, a silicon germanium layer is formed on a substrate, and a portion of the silicon germanium layer is removed to expose a surface that is smoothed with a smoothing agent. A layer of strained silicon is formed on the silicon germanium layer. In various embodiments, the entire method is conducted in a single processing chamber, which is kept under vacuum.Type: GrantFiled: September 13, 2006Date of Patent: May 25, 2010Assignee: Intel CorporationInventor: Mohamad A. Shaheen
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Publication number: 20100072580Abstract: A multi-layered substrate with bulk substrate characteristics and processes for the fabrication of such substrates are herein disclosed. The multi-layered substrate can include a first layer, a second layer and an interfacial layer therebetween. The first and second layers can be silicon, germanium, or any other suitable material of the same or different crystal orientations. The interfacial layer can be an oxide layer from about 5 Angstroms to about 50 Angstroms.Type: ApplicationFiled: November 17, 2009Publication date: March 25, 2010Applicant: INTEL CORPORATIONInventors: Mohamad A. Shaheen, Willy Rachmady, Peter Toichinsky
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Publication number: 20100065888Abstract: A high mobility semiconductor assembly. In one exemplary aspect, the high mobility semiconductor assembly includes a first substrate having a first reference orientation located at a <110> crystal plane location on the first substrate and a second substrate formed on top of the first substrate. The second substrate has a second reference orientation located at a <100> crystal plane location on the second substrate, wherein the first reference orientation is aligned with the second reference orientation. In another exemplary aspect, the second substrate has a second reference orientation located at a <110> crystal plane location on the second substrate, wherein the second substrate is formed over the first substrate with the second reference orientation being offset to the first reference orientation by about 45 degrees.Type: ApplicationFiled: January 12, 2006Publication date: March 18, 2010Inventors: Mohamad A. Shaheen, Brian Doyle, Suman Datta, Robert S. Chau, Peter Tolchinksy
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Patent number: 7670928Abstract: A multi-layered substrate with bulk substrate characteristics and processes for the fabrication of such substrates are herein disclosed. The multi-layered substrate can include a first layer, a second layer and an interfacial layer therebetween. The first and second layers can be silicon, germanium, or any other suitable material of the same or different crystal orientations. The interfacial layer can be an oxide layer from about 5 Angstroms to about 50 Angstroms.Type: GrantFiled: June 14, 2006Date of Patent: March 2, 2010Assignee: Intel CorporationInventors: Mohamad A. Shaheen, Willy Rachmady, Peter Tolchinsky
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Publication number: 20090218596Abstract: Various embodiments provide a buffer layer that is grown over a silicon substrate that provides desirable device isolation for devices formed relative to III-V material device layers, such as InSb-based devices, as well as bulk thin film grown on a silicon substrate. In addition, the buffer layer can mitigate parallel conduction issues between transistor devices and the silicon substrate. In addition, the buffer layer addresses and mitigates lattice mismatches between the film relative to which the transistor is formed and the silicon substrate.Type: ApplicationFiled: February 13, 2009Publication date: September 3, 2009Inventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Joel M. Fastenau, Dmitri Loubychev, Amy W. K. Liu
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Patent number: 7573059Abstract: A device grade III-V quantum well structure formed on a silicon substrate using a composite buffer architecture and the method of manufacture is described. Embodiments of the present invention enable III-V InSb quantum well device layers with defect densities below 1×108 cm?2 to be formed on silicon substrates. In an embodiment of the present invention, an InSb quantum well layer is sandwiched between two larger band gap barrier layers. In an embodiment of the present invention, InSb quantum well layer is strained. In a specific embodiment, the two larger band gap barrier layers are graded.Type: GrantFiled: August 2, 2006Date of Patent: August 11, 2009Assignee: Intel CorporationInventors: Mantu K. Hudait, Mohamad A. Shaheen, Loren A. Chow, Peter G. Tolchinsky, Dmitri Loubychev, Joel M. Fastenau, Amy W. K. Liu