Abstract: A method of processing specimens, an apparatus therefor, and a method of manufacture of a magnetic head are provided wherein a complicated conventional post processing step for removing corrosion products is eliminated by a corrosion prevention processing for removing only a residual chlorine compound produced in the gas plasma etching. More specifically, the method is comprised of the steps of: forming a lamination film including a seed layer made of NiFe alloy, an upper magnetic pole made of NiFe alloy connected to the seed layer, a gap layer made of oxide film in close contact with the seed layer, and a shield layer made of NiFe alloy in close contact with the gap layer; plasma-etching the seed layer with a gas which contains chlorine using the upper magnetic pole as a mask; and after that removing the residual chlorine compound by a plasma post treatment with a gas plasma which contains H2O or methanol.

Abstract: There is provided a thin film magnetic head, with letting a distance of a portion, where a width of a track portion in an upper magnetic pole changes, from a flying plane from a medium be Ly, and letting a distance of a portion, where a distance between right and left of a surface portion in a lower magnetic pole in a track width direction is wider than the width of the upper magnetic pole in the track width direction, from the flying plane from a medium be Tp, by creating a thin film magnetic head that is equipped with a recording head that has a relation of Tp≦Ly, it becomes possible to reduce a needless leakage magnetic field in the track width direction with securing magnetic field strength.

Abstract: A lower magnetic pole front end layer is formed on a lower magnetic pole main layer, and a lower magnetic pole projection layer, a recording gap layer and an upper magnetic pole front end layer each having substantially the same planar shape are formed on a planar surface of the lower magnetic pole front end layer. Trimming of a lower electrode is not necessary, and track width accuracy can be drastically improved because a resist frame is formed on the planar surface. A length of the upper magnetic pole front end layer from an air bearing surface to a head rear direction is greater than a length of the lower magnetic pole front end layer, and the rear end portion of the lower magnetic pole front end layer substantially defines a gap depth.

Abstract: A method of forming a thin film magnetic head, including forming a first magnetic layer, forming a second magnetic layer as a magnetic flux passage in combination with the first magnetic layer, and forming a laminate structure body between the first magnetic layer and the second magnetic layer. The forming of the laminate structure body includes forming a third magnetic layer, a fourth magnetic layer and a non-magnetic conductive layer between the third magnetic layer and the fourth magnetic layer, projecting the laminate structure body more toward an air bearing surface than a projection of the first magnetic layer and the second magnetic layer toward the air bearing surface, and providing the laminate structure body with a width which is smaller than a width of the first magnetic layer and the second magnetic layer.

Abstract: A lower magnetic pole front end portion is provided on a lower magnetic pole main layer, and then, an upper magnetic pole front end portion or an upper magnetic pole front end layer is formed on the flat surface so as to enhance the track width accuracy of thin film head. The height of the lower magnetic pole front end portion is increased so as to enhance the magnetic field intensity. A projection step portion having a width larger than that of the upper magnetic pole front end layer is provided on the lower magnetic pole front end portion. The unnecessary medium in-plane magnetic field can be thus reduced in the off-track position. The respective parts of the head are corrected, thereby realizing a high recording magnetic field intensity exceeding 716 kA/m (9000 Oe).

Abstract: An inductive thin-film magnetic head with small fluctuations of the reproduction output and noises for reproduction is disclosed. The forward end of each of a lower magnetic core and an upper magnetic core has the same width as the track. The rear end of each of the lower magnetic core and the upper magnetic core, on the other hand, is wider than the forward end thereof in the direction transverse of the track. Also, the lower magnetic core is formed of at least two magnetic layers with a non-magnetic layer interposed therebetween.

Abstract: A method of processing specimens, an apparatus therefor, and a method of manufacture of a magnetic head are provided wherein a complicated conventional post processing step for removing corrosion products is eliminated by a corrosion prevention processing for removing only a residual chlorine compound produced in the gas plasma etching. More specifically, the method is comprised of the steps of: forming a lamination film including a seed layer made of NiFe alloy, an upper magnetic pole made of NiFe alloy connected to the seed layer, a gap layer made of oxide film in close contact with the seed layer, and a shield layer made of NiFe alloy in close contact with the gap layer; plasma-etching the seed layer with a gas which contains chlorine using the upper magnetic pole as a mask; and after that removing the residual chlorine compound by a plasma post treatment with a gas plasma which contains H2O or methanol.

Abstract: A slider having a thin film magnetic head. The thin film magnetic head has an upper magnetic core, a lower magnetic core and a coil disposed between the upper magnetic core and the lower magnetic core. The upper magnetic core and the lower magnetic core is an electroplated thin film with an average crystal grain size smaller than 500 Å, and the electroplated thin film is made of Ni—Fe alloy of which Ni is 38 to 60 wt % and Fe is 40 to 62 wt %.

Abstract: An inductive thin-film magnetic head with small fluctuations of the reproduction output and noises for reproduction is disclosed. The forward end of each of a lower magnetic core and an upper magnetic core has the same width as the track. The rear end of each of the lower magnetic core and the upper magnetic core, on the other hand, is wider than the forward end thereof in the direction transverse of the track. Also, the lower magnetic core is formed of at least two magnetic layers with a non-magnetic layer interposed therebetween.

Abstract: A slider having a thin film magnetic head. The thin film magnetic head has an upper magnetic core, a lower magnetic core and a coil disposed between the upper magnetic core and the lower magnetic core. The upper magnetic core and the lower magnetic core is an electroplated thin film with an average crystal grain size smaller than 500 Å, and the electroplated thin film is made of Ni—Fe alloy of which Ni is 38 to 60 wt% and Fe is 40 to 62 wt%.

Abstract: A method of processing specimens, an apparatus therefor, and a method of manufacture of a magnetic head are provided wherein a complicated conventional post processing step for removing corrosion products is eliminated by a corrosion prevention processing of the invention for removing only a residual chlorine compound produced in the gas plasma etching. More specifically, the method of the invention is comprised of the steps of: forming a lamination film including a seed layer made of NiFe alloy, an upper magnetic pole made of NiFe alloy connected to the seed layer, a gap layer made of oxide film in close contact with the seed layer, and a shield layer made of NiFe alloy in close contact with the gap layer; plasma-etching the seed layer with a gas which contains chlorine using the upper magnetic pole as a mask; and after that removing the residual chlorine compound by a plasma post treatment with a gas plasma which contains H2O or methanol.

Abstract: A material for magnetic pole for attaining a writing head generating an intense recording magnetic field, and a structure and a manufacturing method therefor. The thin film magnetic head includes a magnetic pole layer having a plated magnetic layer containing Co, Ni and Fe formed on a plated underlayer of a sputtered magnetic layer containing Co, Ni and Fe. The CoNiFe magnetic layer having a composition: 40 wt %≦Co≦70 wt %, 10 wt %≦Ni≦25 wt % and 10 wt %≦Fe≦30 wt % and a peak intensity ratio in the X-ray diffraction of I(200)/I(111)≧0.5 and I(110)/I(111)≧1 (defining peak intensities for the face-centered cubic fcc (111) face, fcc (200) face and the body-centered cubic bcc (119) face as: I(111), I(200), I(110)).

Abstract: A method of processing a specimen, an apparatus therefor and a method of manufacture of a magnetic head using the same are provided, featuring a high etching rate at a low specimen temperature, and a simple corrosion prevention treatment for removing a residual chlorine component by liquid rinsing, and thereby eliminating provision of a post treatment step to remove a corrosion product. The method comprises the steps of: forming a lamination layer comprising a seed layer of NiFe alloy, an upper magnetic pole of NiFe alloy connected to the seed layer, a gas layer of an oxide film in close contact with the seed layer, and a shield layer of NiFe alloy in close contact with the gap layer; plasma-etching the seed layer using a gas which contains chlorine with the upper magnetic pole used as its mask; and removing a residual chlorine component by liquid rinsing, following by a drying process.

Abstract: A thin film magnetic head having a first magnetic core, a second magnetic core formed on the first magnetic core, a coil disposed between the first magnetic core and second magnetic core, and a non-magnetic insulator body for separating the first magnetic core, second magnetic core and coil with respect to each other. At least one of the first magnetic core and the second magnetic core includes an electroplated thin film with an average crystal grain size smaller than 500 Å and the electroplated thin film is made of Ni—Fe alloy of which Ni is 38 to 60 wt % and Fe is 40 to 62 wt %.

Abstract: A magnetoresistive effect type reproducing head is formed by stacking a lower magnetic shield made of magnetic material, a lower inter-layer insulation film, a magnetoresistive effect type element for detecting magnetic field by using a magnetoresistive effect, an upper inter-layer insulation film, and an upper magnetic shield made of magnetic material, on a substrate in this order, wherein a resistivity of at least one of the lower and upper magnetic shields is more than 200 &mgr;&OHgr;·cm.

Abstract: A magnetoresistive effect type reproducing head includes a lower magnetic shield made of magnetic material, an upper magnetic shield made of magnetic material, a magnetoresistive effect type element formed between the lower magnetic shield layer and the upper magnetic shield layer, a lower inter-layer insulating film formed between the magnetoresistive effect type element and the lower magnetic shield, and an upper inter-layer insulation film formed between the magnetoresistive effect type element and the upper magnetic shield. At least one of the lower and upper magnetic shields includes a first magnetic layer made of a first material having first electric resistivity and a second magnetic layer made of a second material having second electric resistivity higher than the first electric resistivity.

Abstract: A thin magnetic head having a first magnetic core, a second magnetic core formed on the first magnetic core, a coil disposed between the first magnetic core and second magnetic core, and a non-magnetic insulator body for separating the first magnetic core, second magnetic core and coil with respect to each other. At least one of the first magnetic core and the second magnetic core includes an electroplated thin film with a crystal grain size smaller than 500 Å and the electroplated thin film is made of Ni—Fe alloy of which Ni is 38 to 60 wt % and Fe is 40 to 62 wt %.

Abstract: An inductive thin-film magnetic head with small fluctuations of the reproduction output and noises for reproduction is disclosed. The forward end of each of a lower magnetic core and an upper magnetic core has the same width as the track. The rear end of each of the lower magnetic core and the upper magnetic core, on the other hand, is wider than the forward end thereof in the direction transverse of the track. Also, the lower magnetic core is formed of at least two magnetic layers with a non-magnetic layer interposed therebetween.

Abstract: A magnetoresistive effect type reproducing head is formed by stacking a lower magnetic shield made of magnetic material, a lower inter-layer insulation film, a magnetoresistive effect type element for detecting magnetic field by using a magnetoresistive effect, an upper inter-layer insulation film, and an upper magnetic shield made of magnetic material, on a substrate in this order, wherein a resistivity of at least one of the lower and upper magnetic shields is more than 200 &mgr;&OHgr;·cm.

Abstract: A magnetoresistive effect type reproducing head is formed by stacking a lower magnetic shield made of magnetic material, a lower inter-layer insulation film, a magnetoresistive effect type element for detecting a magnetic field by using a magnetoresistive effect, an upper inter-layer insulation film, and an upper magnetic shield made of magnetic material, on a substrate in this order, wherein the resistivity of at least one of the lower and upper magnetic shields is more than 200 &mgr;&OHgr;·cm.