Patents by Inventor Motoki ETO

Motoki ETO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12733530
    Abstract: To provide a novel Cu bonding wire that achieves a favorable FAB shape and a favorable bondability of the 2nd bonded part, and further achieves favorable bond reliability even in a rigorous high-temperature environment. The bonding wire for semiconductor devices includes: a core material of Cu or Cu alloy; and a coating layer containing conductive metal other than Cu formed on a surface of the core material, wherein the coating layer has a region containing Ni as a main component on a core material side, and has a region containing Au and Ni on a wire surface side, in a thickness direction of the coating layer, a thickness of the coating layer is 10 nm or more and 130 nm or less, a ratio CAu/CNi of a concentration CAu (mass %) of Au to a concentration CNi (mass %) of Ni relative to the entire wire is 0.02 or more and 0.
    Type: Grant
    Filed: March 16, 2022
    Date of Patent: September 8, 2026
    Assignee: Nippon Micrometal Corporation
    Inventors: Daizo Oda, Motoki Eto, Takashi Yamada, Teruo Haibara, Ryo Oishi
  • Patent number: 12721208
    Abstract: There is provided a novel Cu bonding wire that achieves a favorable FAB shape and achieves a favorable bond reliability of the 2nd bonded part even in a rigorous high-temperature environment. The bonding wire for semiconductor devices is characterized in that the bonding wire includes: a core material of Cu or Cu alloy; and a coating layer containing conductive metal other than Cu formed on a surface of the core material, wherein the coating layer has a region containing Pd as a main component on a core material side, and has a region containing Ni and Pd in a range from a wire surface to a depth of 0.5d when a thickness of the coating layer is defined as d (nm) in a thickness direction of the coating layer, the thickness d of the coating layer is 10 nm or more and 130 nm or less, a ratio CNi/CPd of a concentration CNi (mass %) of Ni to a concentration CPd (mass %) of Pd relative to the entire wire is 0.02 or more and 0.
    Type: Grant
    Filed: March 16, 2022
    Date of Patent: August 25, 2026
    Assignee: Nippon Micrometal Corporation
    Inventors: Daizo Oda, Motoki Eto, Takashi Yamada, Teruo Haibara, Ryo Oishi
  • Publication number: 20260200018
    Abstract: To provide an Al connection material that may suppress generation of internal cracks at the time of manufacture and exhibits excellent temperature cycle reliability. The Al connection material containing 3.0% by mass or more and 12.0% by mass or less of Si, and containing 5 mass ppm or more and 800 mass ppm or less of one or more of Sr, Na, Eu, and Ca in total.
    Type: Application
    Filed: November 27, 2023
    Publication date: July 16, 2026
    Inventors: Tomohiro UNO, Daizo ODA, Motoki ETO, Yuya SUTO
  • Publication number: 20260201510
    Abstract: To provide an Al connection material that may suppress generation of internal cracks at the time of manufacture and exhibits excellent temperature cycle reliability. An Al connection material containing 3.0% by mass or more and 12.0% by mass or less of Si, in which an average value of a ratio between a short side length c and a long side length d (c/d) of an Al phase in an L cross-section (cross section in a center axis direction including a center axis) of the Al connection material is equal to or larger than 0.25 and equal to or smaller than 0.7, and an average value of a ratio between a short side length e and a long side length f (e/f) of a Si phase in the L cross-section of the Al connection material is equal to or larger than 0.2 and equal to or smaller than 0.7.
    Type: Application
    Filed: November 27, 2023
    Publication date: July 16, 2026
    Inventors: Tomohiro UNO, Tetsuya OYAMADA, Daizo ODA, Motoki ETO, Yuya SUTO
  • Patent number: 12685206
    Abstract: To provide an Al bonding wire exhibiting a favorable high-temperature and high-humidity service life in a high-temperature and high-humidity environment required for next-generation vehicle-mounted power devices. The Al bonding wire for semiconductor devices containing equal to or larger than 3 mass ppm and equal to or smaller than 500 mass ppm of one or more of Pd and Pt in total, in which, as a result of measuring a crystal orientation on a cross section parallel to a wire axis direction including a wire axis of the bonding wire, an orientation ratio of a <100> crystal orientation angled at 15 degrees or less to the wire axis direction is equal to or higher than 30% and equal to or lower than 90%.
    Type: Grant
    Filed: January 31, 2022
    Date of Patent: July 14, 2026
    Assignees: Nippon Micrometal Corporation, NIPPON STEEL Chemical & Material Co., Ltd.
    Inventors: Yuya Suto, Tomohiro Uno, Tetsuya Oyamada, Daizo Oda, Motoki Eto, Yuto Kurihara
  • Patent number: 12677689
    Abstract: There is provided a novel Al wiring material that achieves both of a suppression of chip damage and a thermal shock resistance. In aspect 1, the Al wiring material includes an Al core material and an Al coating layer formed on a surface of the Al core material, and satisfies 1.2?H1h/H1s where H1h is a Vickers hardness of the Al core material (Hv) and H1s is a Vickers hardness of the Al coating layer (Hv). In aspect 2, the Al wiring material includes an Al core material and an Al coating layer formed on a surface of the Al core material, and satisfies 1.2?H2h/H2s where H2s is a Vickers hardness of the Al core material (Hv) and H2h is a Vickers hardness of the Al coating layer (Hv).
    Type: Grant
    Filed: January 31, 2022
    Date of Patent: July 7, 2026
    Assignees: Nippon Micrometal Corporation, NIPPON STEEL Chemical & Material Co., Ltd.
    Inventors: Yuto Kurihara, Daizo Oda, Motoki Eto, Ryo Oishi, Tetsuya Oyamada, Tomohiro Uno
  • Publication number: 20260097454
    Abstract: In a copper alloy bonding wire for semiconductor devices, the bonding longevity of a ball bonded part under high-temperature and high-humidity environments is improved. The copper alloy bonding wire for semiconductor devices includes in total 0.03% by mass or more to 3% by mass or less of at least one or more kinds of elements selected from Ni, Zn, Ga, Ge, Rh, In, Ir, and Pt (first element), with the balance Cu and inevitable impurities. The inclusion of a predetermined amount of the first element suppresses production of an intermetallic compound susceptible to corrosion under high-temperature and high-humidity environments at the wire bonding interface and improves the bonding longevity of a ball bonded part.
    Type: Application
    Filed: March 6, 2025
    Publication date: April 9, 2026
    Inventors: Daizo ODA, Takashi YAMADA, Motoki ETO, Teruo HAIBARA, Tomohiro UNO
  • Patent number: 12581982
    Abstract: There is provided a bonding wire for semiconductor devices that exhibits a favorable bondability even when being applied to wedge bonding at the room temperature, and also achieves an excellent bond reliability. The bonding wire includes a core material of Cu or Cu alloy (hereinafter referred to as a “Cu core material”), and a coating containing a noble metal formed on a surface of the Cu core material. A concentration of Cu at a surface of the wire is 30 to 80 at %.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: March 17, 2026
    Assignees: NIPPON MICROMETAL CORPORATION, NIPPON STEEL Chemical & Material Co., Ltd.
    Inventors: Motoki Eto, Daizo Oda, Tomohiro Uno, Tetsuya Oyamada
  • Patent number: 12532767
    Abstract: There is provided an Al bonding wire which can achieve a sufficient bonding reliability of bonded parts of the bonding wire under a high temperature state where a semiconductor device using the Al bonding wire is operated. The Al bonding wire contains 0.01 to 1% of Sc, and further contains 0.01 to 0.1% in total of at least one or more of Y, La, Ce, Pr and Nd. With regard to the Al bonding wire, a recrystallization temperature thereof is increased, so that the proceeding of recrystallization of the bonding wire can be suppressed, and strength of the wire can be prevented from being decreased even when the semiconductor device is continuously used under a high temperature environment. Accordingly, the Al bonding wire can sufficiently secure the reliability of the bonded parts after a high-temperature long-term hysteresis.
    Type: Grant
    Filed: March 13, 2020
    Date of Patent: January 20, 2026
    Assignees: NIPPON MICROMETAL CORPORATION, NIPPON STEEL CHEMICAL & MATERIAL CO., LTD.
    Inventors: Takashi Yamada, Akihito Nishibayashi, Teruo Haibara, Daizo Oda, Motoki Eto, Tetsuya Oyamada, Takayuki Kobayashi, Tomohiro Uno
  • Publication number: 20250379177
    Abstract: To provide an Al bonding wire satisfying excellent temperature cycle reliability and a favorable 1st bondability. The Al bonding wire contains 3.0% by mass or more and 10.0% by mass or less of Si, and an average diameter of a Si phase in a cross section (L cross-section) in a center axis direction including a wire center axis of the Al alloy bonding wire is equal to or larger than 0.8 ?m and equal to or smaller than 5.5 ?m.
    Type: Application
    Filed: June 30, 2023
    Publication date: December 11, 2025
    Inventors: Tetsuya OYAMADA, Tomohiro UNO, Daizo ODA, Motoki ETO, Yuya SUTO
  • Publication number: 20250372565
    Abstract: There is provided a novel Cu bonding wire for semiconductor devices that achieves a favorable shape stability of a 2nd bonded part.
    Type: Application
    Filed: June 21, 2023
    Publication date: December 4, 2025
    Inventors: Tomohiro UNO, Daizo ODA, Motoki ETO
  • Patent number: 12463172
    Abstract: There is provided an Ag alloy bonding wire for semiconductor devices which exhibits a favorable bond reliability in a high-temperature environment even when using a mold resin of high S content and can suppress a chip damage at the time of ball bonding. The Ag alloy bonding wire is characterized by containing at least one element selected from the group consisting of Pd and Pt (hereinafter referred to as a “first element”) and at least one element selected from the group consisting of P, Cr, Zr and Mo (hereinafter referred to as a “second element”) so as to satisfy 0.05?x1?3.0, and 15?x2?700 where x1 is a total concentration of the first element [at. %] and x2 is a total concentration of the second element [at. ppm], with the balance including Ag.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: November 4, 2025
    Assignees: NIPPON MICROMETAL CORPORATION, NIPPON STEEL Chemical & Material Co., Ltd.
    Inventors: Daizo Oda, Takumi Ookabe, Motoki Eto, Noritoshi Araki, Ryo Oishi, Teruo Haibara, Tomohiro Uno, Tetsuya Oyamada
  • Patent number: 12388044
    Abstract: There is provided an Al bonding wire which can achieve a sufficient bonding reliability of bonded parts of the bonding wire under a high temperature state where a semiconductor device using the Al bonding wire is operated. The Al bonding wire is characterized in that the wire contains 0.02 to 1% by mass of Fe, further contains 0.05 to 0.5% by mass in total of at least one or more of Mn and Cr, and the balance includes Al and inevitable impurities, wherein a total content of Fe, Mn and Cr in solid solution is 0.01 to 1% by mass. The Al bonding wire contains Mn and Cr in addition to Fe, so that Fe, Mn and Cr can be promoted to form a solid solution in quenching treatment after the solution treatment. Accordingly, the Al bonding wire can achieve an effect of solid-solution strengthening of the wire due to the increase in the total content of Fe, Mn and Cr in solid solution and an effect of preventing recrystallization from proceeding during use of the semiconductor device at a high temperature for a long time.
    Type: Grant
    Filed: March 25, 2020
    Date of Patent: August 12, 2025
    Assignees: NIPPON MICROMETAL CORPORATION, NIPPON STEEL Chemical & Material Co., Ltd.
    Inventors: Takashi Yamada, Akihito Nishibayashi, Teruo Haibara, Daizo Oda, Motoki Eto, Tetsuya Oyamada, Takayuki Kobayashi, Tomohiro Uno
  • Patent number: 12325901
    Abstract: There is provided an Al wiring material which suppresses a chip crack and achieves thermal shock resistance while suppressing lowering of a yield at the time of manufacture. The Al wiring material contains at least Sc and Zr so as to satisfy 0.01?x1?0.5 and 0.01?x2?0.3 where x1 is a content of Sc [% by weight] and x2 is a content of Zr [% by weight], with the balance comprising Al.
    Type: Grant
    Filed: September 17, 2020
    Date of Patent: June 10, 2025
    Assignees: NIPPON MICROMETAL CORPORATION, NIPPON STEEL Chemical & Material Co., Ltd.
    Inventors: Yuto Kurihara, Ryo Oishi, Motoki Eto, Daizo Oda, Tetsuya Oyamada, Yuya Suto, Tomohiro Uno
  • Patent number: 12300658
    Abstract: In a copper alloy bonding wire for semiconductor devices, the bonding longevity of a ball bonded part under high-temperature and high-humidity environments is improved. The copper alloy bonding wire for semiconductor devices includes in total 0.03% by mass or more to 3% by mass or less of at least one or more kinds of elements selected from Ni, Zn, Ga, Ge, Rh, In, Ir, and Pt (first element), with the balance Cu and inevitable impurities. The inclusion of a predetermined amount of the first element suppresses production of an intermetallic compound susceptible to corrosion under high-temperature and high-humidity environments at the wire bonding interface and improves the bonding longevity of a ball bonded part.
    Type: Grant
    Filed: September 12, 2022
    Date of Patent: May 13, 2025
    Assignees: NIPPON MICROMETAL CORPORATION, NIPPON STEEL CHEMICAL & MATERIAL CO., LTD.
    Inventors: Daizo Oda, Takashi Yamada, Motoki Eto, Teruo Haibara, Tomohiro Uno
  • Patent number: 12290883
    Abstract: There is provided a novel alloy-coated Cu bonding wire that achieves a favorable FAB shape and also a favorable initial bondability of a 2nd bonding part including adhesion of the 2nd bonding part, and that reduces a galvanic corrosion in a high-temperature environment to achieve a favorable bond reliability of the 2nd bonding part. The alloy-coated Cu bonding wire includes a core material of Cu or Cu alloy, and a coating layer having a total concentration of Pd and Ni of 90 atomic % or more formed on a surface of the core material. The bonding wire is characterized in that: in a concentration profile in a depth direction of the wire obtained by performing measurement using Auger electron spectroscopy (AES) so that the number of measurement points in the depth direction is 50 or more for the coating layer, a thickness of the coating layer is 10 nm or more and 130 nm or less, an average value X is 0.1 or more and 35.
    Type: Grant
    Filed: June 27, 2023
    Date of Patent: May 6, 2025
    Assignee: NIPPON MICROMETAL CORPORATION
    Inventors: Daizo Oda, Motoki Eto, Ryo Oishi
  • Publication number: 20250114877
    Abstract: There is provided a novel alloy-coated Cu bonding wire that achieves a favorable FAB shape and also a favorable initial bondability of a 2nd bonding part including adhesion of the 2nd bonding part, and that reduces a galvanic corrosion in a high-temperature environment to achieve a favorable bond reliability of the 2nd bonding part. The alloy-coated Cu bonding wire includes a core material of Cu or Cu alloy, and a coating layer having a total concentration of Pd and Ni of 90 atomic % or more formed on a surface of the core material. The bonding wire is characterized in that: in a concentration profile in a depth direction of the wire obtained by performing measurement using Auger electron spectroscopy (AES) so that the number of measurement points in the depth direction is 50 or more for the coating layer, a thickness of the coating layer is 10 nm or more and 130 nm or less, an average value X is 0.1 or more and 35.
    Type: Application
    Filed: June 27, 2023
    Publication date: April 10, 2025
    Inventors: Daizo ODA, Motoki ETO, Ryo OISHI
  • Patent number: 12166006
    Abstract: A bonding wire includes a core material of Cu or Cu alloy, and a coating layer containing a conductive metal other than Cu on a surface of the core material. In a concentration profile in a depth direction of the wire obtained, an average value of sum of a Pd concentration CPd (atomic %) and an Ni concentration CNi (atomic %) for measurement points in the coating layer is 50 atomic % or more, an average value of a ratio of CPd to CNi for measurement points in the coating layer is from 0.2 to 20 and a thickness of the coating layer is from 20 nm to 180 nm. An Au concentration CAu at a surface of the wire is from 10 atomic % to 85 atomic %. An average size of crystal grains in a circumferential direction of the wire is from 35 nm to 200 nm.
    Type: Grant
    Filed: October 18, 2022
    Date of Patent: December 10, 2024
    Assignees: NIPPON STEEL Chemical & Material Co., Ltd., NIPPON MICROMETAL CORPORATION
    Inventors: Tomohiro Uno, Tetsuya Oyamada, Daizo Oda, Motoki Eto
  • Patent number: 12132026
    Abstract: A bonding wire includes a core material of Cu or Cu alloy, and a coating layer containing a conductive metal other than Cu on a surface of the core material. In a concentration profile in a depth direction of the wire obtained, an average value of sum of a Pd concentration CPd (atomic %) and an Ni concentration CNi (atomic %) for measurement points in the coating layer is 50 atomic % or more, an average value of a ratio of CPd to CNi for measurement points in the coating layer is from 0.2 to 20 and a thickness of the coating layer is from 20 nm to 180 nm. An Au concentration CAu at a surface of the wire is from 10 atomic % to 85 atomic %. An average size of crystal grains in a circumferential direction of the wire is from 35 nm to 200 nm.
    Type: Grant
    Filed: October 18, 2022
    Date of Patent: October 29, 2024
    Assignees: NIPPON STEEL Chemical & Material Co., Ltd., NIPPON MICROMETAL CORPORATION
    Inventors: Tomohiro Uno, Tetsuya Oyamada, Daizo Oda, Motoki Eto
  • Patent number: 12132025
    Abstract: There is provided a metal-coated Al bonding wire which can provide a sufficient bonding reliability of bonded parts of the bonding wire under a high temperature state where a semiconductor device using the metal-coated Al bonding wire is operated. The bonding wire includes a core wire of Al or Al alloy, and a coating layer of Ag, Au or an alloy containing them formed on the outer periphery of the core wire, and the bonding wire is characterized in that when measuring crystal orientations on a cross-section of the core wire in a direction perpendicular to a wire axis of the bonding wire, a crystal orientation <111> angled at 15 degrees or less to a wire longitudinal direction has a proportion of 30 to 90% among crystal orientations in the wire longitudinal direction. Preferably, the surface roughness of the wire is 2 ?m or less in terms of Rz.
    Type: Grant
    Filed: March 12, 2020
    Date of Patent: October 29, 2024
    Assignees: NIPPON MICROMETAL CORPORATION, NIPPON STEEL Chemical & Material Co., Ltd.
    Inventors: Takashi Yamada, Akihito Nishibayashi, Teruo Haibara, Daizo Oda, Motoki Eto, Tetsuya Oyamada, Takayuki Kobayashi, Tomohiro Uno