Abstract: An invention relates to a contact lithography device and comprises a soft X-ray source (preferable as an X-ray tube 1 with a rotating anode), a half lens 2 for a divergent radiation of this source transforming to a quasi-parallel one (the said lens includes a set of channels for a radiation transporting with total external reflection, the said channels are oriented along a generatrix of barrel-shaped surfaces), the means for placing a mask 3 and a substrate 4 with a resist 5 applied on it (the said means are placed on the output face side of a half lens 2), and an absorbing filter 6 for smoothing a nonuniformity of a beam intensity of an emergent radiation of a half lens, presenting in intensity decreasing as from the center to the periphery of a beam.

Abstract: The device according to a first invention is adapted for producing the image of an object with the aid of radiation that either has been transmitted therethrough or excited therein or else scattered thereby. It contains an integrated lens, which is placed between a radiation source and a means for placing the object, or between the latter means and an image-forming means (that registers the distribution of intensity of the radiation incident thereon) (or else in both of these spaces).

Abstract: The present invention provides for bending the beams, their focusing, transforming a divergent radiation into a quasi-parallel one, and vice versa, its filtering and monochromatization. Also attained are reduced radiation transfer losses, extended range of energies used, and higher radiation concentration. A possibility is provided for the use of larger radiation sources without decreasing the proportion of the captured particles, as well as for controlling the radiation spectrum. With this purpose in view, provision is made in the proposed method, apart from multiple reflection of particles upon interaction with different-density alternating media, for diffuse and potential scattering or interference of particles that diffract on multilayer structures applied to reflecting surfaces. In a device carrying the proposed method into effect, the aforementioned surfaces are coated with layers differing in electromagnetic properties.