Patents by Inventor Mutsuya Takahashi
Mutsuya Takahashi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20060159601Abstract: A microfluidic device includes a processing layer and a temperature control layer. The processing layer applies a predetermined process to a subject fluid. The temperature control layer is disposed adjacent to the processing layer to give a predetermined temperature environment to the processing layer.Type: ApplicationFiled: August 18, 2005Publication date: July 20, 2006Applicant: Fuji Xerox Co., Ltd.Inventors: Takayuki Yamada, Kazuaki Tabata, Mutsuya Takahashi, Yoshihisa Yamazaki
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Publication number: 20060140829Abstract: A microstructure includes first and second plates. The first plate defines a recess. The second plate is bonded to the first plate to block an opening of the recess to thereby form a closed vacuum space or a closed space filled with inert gas.Type: ApplicationFiled: August 18, 2005Publication date: June 29, 2006Applicant: Fuji Xerox Co., Ltd.Inventors: Kazuaki Tabata, Takayuki Yamada, Mutsuya Takahashi, Yoshihisa Yamazaki
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Publication number: 20050229737Abstract: A manufacturing system for a microstructure includes a rough motion stage having predetermined positioning accuracy and a large stroke length, a fine motion stage disposed on the rough motion stage and having higher positioning accuracy than the rough motion stage and a small stroke length, and the like collectively as a stage device disposed in a vacuum container, laser length measuring machines for measuring a distance to a mirror disposed on the fine motion stage, a stage control device for driving the fine motion stage by a result of measurement by the laser length measuring machines, and the like collectively as a stage control unit, and a pressing rod 44 for holding a pressure-contacting target member disposed opposite to a pressure-contacted member held by the stage device and pressure-contacting and separating the members, a pressure-contacting drive mechanism for applying a pressure-contacting force to the pressing rod 44, and the like collectively as a pressure-contacting mechanism unit.Type: ApplicationFiled: February 18, 2005Publication date: October 20, 2005Applicant: Mitsubishi Heavy Industries, Ltd.Inventors: Takeshi Tsuno, Takayuki Goto, Satoshi Tawara, Masato Kinouchi, Shin Asano, Osamu Hasegawa, Takayuki Yamada, Mutsuya Takahashi
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Publication number: 20050233064Abstract: A method of and system for manufacturing a microstructure having high form accuracy and a manufacturing system is disclosed. On a rough motion stage having a predetermined positioning accuracy and a large stroke length, a fine motion stage having a small stroke length and a higher positioning accuracy is placed. First, the rough motion stage is moved to a desired position. By use of a mirror placed on a laser length measuring machine and the fine motion stage, the current position of a thin film member on the fine motion stage is precisely measured. This measurement value is feed-backed to a stage control device, and a difference between the current position and a target position is calculated by an error correcting unit. Thus, an error correcting instruction value is generated to move the fine motion stage to the target position. Thus, an error of the rough motion stage is corrected.Type: ApplicationFiled: February 18, 2005Publication date: October 20, 2005Applicants: Mitsubishi Heavy Industries, Ltd., Fuji Xerox Co., Ltd.Inventors: Takeshi Tsuno, Takayuki Goto, Satoshi Tawara, Masato Kinouchi, Shin Asano, Osamu Hasegawa, Takayuki Yamada, Mutsuya Takahashi
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Patent number: 6890788Abstract: A release layer is formed on a substrate, and plural thin-film patterns are formed on the release layer. The release layer is etched back at a prescribed depth at least in regions close to the circumferences of the thin-film patterns. The thin-film patterns are transferred sequentially to a counter substrate to be laminated on the counter substrate and to thereby form a micro structure. This manufacturing method is employed in a case that the combination of thin-film patterns and are lease layer is such that when a prescribed pressure is applied to each of the thin-film patterns on the release layer in the transferring, the height of a raised portion of the release layer that would be appeared in a region close to the circumference of the thin-film pattern if the release layer were not be etched back is greater than or equal to the thickness of the thin-film pattern.Type: GrantFiled: March 8, 2004Date of Patent: May 10, 2005Assignee: Fuji Xerox Co., Ltd.Inventors: Hiroyuki Hotta, Takayuki Yamada, Mutsuya Takahashi
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Publication number: 20050020005Abstract: A release layer is formed on a substrate, and plural thin-film patterns are formed on the release layer. The release layer is etched back at a prescribed depth at least in regions close to the circumferences of the thin-film patterns. The thin-film patterns are transferred sequentially to a counter substrate to be laminated on the counter substrate and to thereby form a micro structure. This manufacturing method is employed in a case that the combination of thin-film patterns and are lease layer is such that when a prescribed pressure is applied to each of the thin-film patterns on the release layer in the transferring, the height of a raised portion of the release layer that would be appeared in a region close to the circumference of the thin-film pattern if the release layer were not be etched back is greater than or equal to the thickness of the thin-film pattern.Type: ApplicationFiled: March 8, 2004Publication date: January 27, 2005Applicant: FUJI XEROX CO., LTD.Inventors: Hiroyuki Hotta, Takayuki Yamada, Mutsuya Takahashi
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Publication number: 20040234231Abstract: A manufacturing method for a three-dimensional structural body includes sequentially bonding/transferring and laminating plural cross-sectional form members, each held in space above a first substrate through a coupling member and a frame member and corresponding to a slice pattern of the three-dimensional structural body, onto a second substrate.Type: ApplicationFiled: February 3, 2004Publication date: November 25, 2004Applicant: FUJI XEROX CO., LTDInventors: Daisuke Nagao, Takayuki Yamada, Mutsuya Takahashi, Hiroyuki Hotta, Takashi Ozawa, Teiichi Suzuki
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Patent number: 6557607Abstract: A substrate on which a plurality of thin films having a plurality of cross-sections corresponding to the cross-section of a micro-structure are formed is placed on a substrate holder. The substrate holder is elevated to bond a thin film formed on the substrate to the surface of a stage, and by lowering the substrate holder, the thin film is separated from the substrate and transferred to the stage side. The transfer process is repeated to laminate a plurality of thin films on the stage and to form the micro-structure. Accordingly, there are provided a micro-structure having high dimensional precision, especially high resolution in the lamination direction, which can be manufactured from a metal or an insulator such as ceramics and can be manufactured in the combined form of structural elements together, and a manufacturing method and an apparatus thereof.Type: GrantFiled: February 26, 2001Date of Patent: May 6, 2003Assignee: Fuji Xerox Co., Ltd.Inventors: Takayuki Yamada, Mutsuya Takahashi, Masaki Nagata
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Publication number: 20010042598Abstract: A substrate on which a plurality of thin films having a plurality of cross-sections corresponding to the cross-section of a micro-structure are formed is placed on a substrate holder. The substrate holder is elevated to bond a thin film formed on the substrate to the surface of a stage, and by lowering the substrate holder, the thin film is separated from the substrate and transferred to the stage side. The transfer process is repeated to laminate a plurality of thin films on the stage and to form the micro-structure. Accordingly, there are provided a micro-structure having high dimensional precision, especially high resolution in the lamination direction, which can be manufactured from a metal or an insulator such as ceramics and can be manufactured in the combined form of structural elements together, and a manufacturing method and an apparatus thereof.Type: ApplicationFiled: February 26, 2001Publication date: November 22, 2001Applicant: Fuji Xerox Co., Ltd.Inventors: Takayuki Yamada, Mutsuya Takahashi, Masaki Nagata
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Publication number: 20010023010Abstract: A substrate on which a plurality of thin films having a plurality of cross-sections corresponding to the cross-section of a micro-structure are formed is placed on a substrate holder. The substrate holder is elevated to bond a thin film formed on the substrate to the surface of a stage, and by lowering the substrate holder, the thin film is separated from the substrate and transferred to the stage side. The transfer process is repeated to laminate a plurality of thin films on the stage and to form the micro-structure. Accordingly, there are provided a micro-structure having high dimensional precision, especially high resolution in the lamination direction, which can be manufactured from a metal or an insulator such as ceramics and can be manufactured in the combined form of structural elements together, and a manufacturing method and an apparatus thereof.Type: ApplicationFiled: February 26, 2001Publication date: September 20, 2001Applicant: Fuji Xerox Co. Ltd.Inventors: Takayuki Yamada, Mutsuya Takahashi, Masaki Nagata
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Patent number: 6245249Abstract: A substrate on which a plurality of thin films having a plurality of cross-sections corresponding to the cross-section of a micro-structure are formed is placed on a substrate holder. The substrate holder is elevated to bond a thin film formed on the substrate to the surface of a stage, and by lowering the substrate holder, the thin film is separated from the substrate and transferred to the stage side. The transfer process is repeated to laminate a plurality of thin films on the stage and to form the micro-structure. Accordingly, there are provided a micro-structure having high dimensional precision, especially high resolution in the lamination direction, which can be manufactured from a metal or an insulator such as ceramics and can be manufactured in the combined form of structural elements together, and a manufacturing method and an apparatus thereof.Type: GrantFiled: April 22, 1998Date of Patent: June 12, 2001Assignee: Fuji Xerox Co., Ltd.Inventors: Takayuki Yamada, Mutsuya Takahashi, Masaki Nagata