Patents by Inventor Myung-Woo Han

Myung-Woo Han has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum processing apparatus
    Publication number: 20060191118
    Abstract: Disclosed herein is a vacuum processing apparatus for performing a desired process for a substrate after establishing a vacuum atmosphere therein. More particularly, the vacuum processing apparatus includes a vacuum chamber, which is divided into a chamber body and an upper cover. The upper cover is configured to be easily opened away from and closed to the chamber body.
    Type: Application
    Filed: February 2, 2006
    Publication date: August 31, 2006
    Inventors: Young Lee, Jun Choi, Hyoung-Kyu Son, Jeong-Bin Lee, Gyeong-Hoon Kim, Hyung-Soo Kim, Myung-Woo Han