Patents by Inventor Nae Lee

Nae Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radical assisted oxidation apparatus
    Publication number: 20050115946
    Abstract: Provided is a radical assisted oxidation apparatus comprising a gas supply system, a radical source, a growth chamber, a load lock chamber, and a vacuum system, whereby it is possible to manufacture a high quality oxide film at a low temperature and improve a low frequency noise (1/f).
    Type: Application
    Filed: April 6, 2004
    Publication date: June 2, 2005
    Inventors: Kyu Shim, Young Song, Sang Kim, Nae Lee, Jin Kang