Abstract: Disclosed is an apparatus for collecting a by-product in a semiconductor process, the apparatus including: a housing; a heater plate; a heater power supply unit; first and second upper horizontal brackets collecting a part of a by-product in a powder form; a by-product collecting tower allowing the exhaust gas to pass vertically and collecting a part of the by-product in a powder form; a lower horizontal bracket guiding the exhaust gas toward a window and collecting a part of the by-product in a powder form; the window blocking the powder form by-product from introducing toward a gas collecting and discharging port and guiding the exhaust gas thereto; and the gas collecting and discharging port. Accordingly, the apparatus can increase capacity of collecting by-products with a simple structure, thereby extending a replacement period of the apparatus and collect a large amount of by-products efficiently over a long period of time.

Abstract: Disclosed is an apparatus for collecting a by-product in a semiconductor process, the apparatus including: a housing; a heater plate; a heater power supply unit; first and second upper horizontal brackets collecting a part of a by-product in a powder form; a by-product collecting tower allowing the exhaust gas to pass vertically and collecting a part of the by-product in a powder form; a lower horizontal bracket guiding the exhaust gas toward a window and collecting a part of the by-product in a powder form; the window blocking the powder form by-product from introducing toward a gas collecting and discharging port and guiding the exhaust gas thereto; and the gas collecting and discharging port. Accordingly, the apparatus can increase capacity of collecting by-products with a simple structure, thereby extending a replacement period of the apparatus and collect a large amount of by-products efficiently over a long period of time.

Abstract: Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.

Abstract: An audio tuning system including: an interface configured to provide a test signal to a reference device and to a target device; and a controller configured to acquire a result of audio processing in response to the test signal from the reference device and a result of audio processing in response to the test signal from the target device; compare the results; and adjust an audio processing characteristic value of the target device to match that of the reference device based on a result of the comparison. The audio tuning system may automatically tune the audio characteristic of the target device to match the reference device.

Abstract: Disclosed are a gas sensor, and a method of manufacturing and using the same. The method includes: forming a detection material on a heater; coating an encapsulant on the detection material; and heating the heater to remove the encapsulant from the detection material when the gas sensor is operated.

Abstract: The present invention relates to a core-shell nanoparticle, a method of fabricating the same and a gas sensor using the same, more particularly to a core-shell nanoparticle which includes a core including a first metal oxide and a shell including a second metal oxide, the first metal oxide and the second metal oxide being oxides of the same metal having different oxidation states, a method of fabricating the same and a gas sensor using the same.

Abstract: An audio tuning system including: an interface configured to provide a test signal to a reference device and to a target device; and a controller configured to acquire a result of audio processing in response to the test signal from the reference device and a result of audio processing in response to the test signal from the target device; compare the results; and adjust an audio processing characteristic value of the target device to match that of the reference device based on a result of the comparison. The audio tuning system may automatically tune the audio characteristic of the target device to match the reference device.

Abstract: Provided are a dual-side micro gas sensor and a method of fabricating the same. The sensor may include an elastic layer, a heat-generating resistor layer on the elastic layer, an interlayered insulating layer on the heat-generating resistor layer, an upper sensing layer on the interlayered insulating layer, and a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, thereby reducing heat loss of the heat-generating resistor layer.

Abstract: Provided is a catalytic combustible gas sensor using a porous membrane embedded micro-heater and a micro electro mechanical system (MEMS) technology. The present disclosure provides a gas sensor that is structurally, mechanically, and electrically stable, and has a simple device fabrication process in a MEMS catalytic combustible gas sensor that is miniaturized and also consumes a significantly small amount of power by puncturing a plurality of holes in membranes, a heating resistor, and a sensing electrode, by etching and thereby thermally isolating a substrate by a predetermined thickness through the plurality of holes, and by including a sensing structure formed using a sensing material and a compensation structure formed using a compensation material.

Abstract: Provided are a dual-side micro gas sensor and a method of fabricating the same. The sensor may include an elastic layer, a heat-generating resistor layer on the elastic layer, an interlayered insulating layer on the heat-generating resistor layer, an upper sensing layer on the interlayered insulating layer, and a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, thereby reducing heat loss of the heat-generating resistor layer.

Abstract: An electronic device and a method for measuring quality of a voice signal are provided. The method includes generating a mask of an echo signal and a mask of a speech signal by comparing the echo signal and the speech signal included in an input sound with respective thresholds, calculating an estimation of the echo signal and an estimation of the speech signal, and measuring quality of the input speech signal by using each of the calculated estimation of the echo signal and the calculated estimation of the speech signal.

Abstract: Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.

Abstract: Disclosed are a gas sensor, and a method of manufacturing and using the same. The method includes: forming a detection material on a heater; coating an encapsulant on the detection material; and heating the heater to remove the encapsulant from the detection material when the gas sensor is operated.

Abstract: Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.

Abstract: Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.

Abstract: Provided is a method of manufacturing porous metal oxide, the method including: preparing a metal-organic framework (MOF) wherein an ion of a metal to be used as a catalyst is linked to an organic ligand; impregnating the MOF with a precursor solution of metal oxide to be manufactured; and thermally treating the metal oxide precursor solution-impregnated MOF to remove the organic ligand. The inventive method of manufacturing porous metal oxide involves the impregnation of a metal oxide precursor solution in a MOF wherein metal ions are uniformly linked to organic ligands and the thermal treatment (calcination) of the metal oxide precursor solution-impregnated MOF to remove the organic ligands.

Abstract: A method and an apparatus for designing a sound compensation filter of a portable terminal are provided. The method includes synchronizing a signal input through a microphone of the system and a test signal, estimating a loss interval of the synchronized signal, compensating for a frame signal delayed by a signal loss in a time axis when the signal loss of the estimated loss interval is greater than a threshold and restoring the loss interval of the signal.

Abstract: Provided is a convergence control module for a three-dimensional (3D) camera that can be operated with low power to reduce power consumption, which has been a problem in the 3D camera. A 3D camera module includes at least one camera module, a moving guide for supporting the camera module and providing a moving path, a control driver for moving the camera module along the moving guide, and a control unit for controlling the control driver.

Abstract: Metal nanoparticle-polymer composites, a method of manufacturing the same, and a polymer actuator using the same are provided. The method includes synthesizing an organometallic compound as a precursor of metal nanoparticles, preparing a solution mixture containing the organometallic compound and a polymer, and drying and annealing the solution mixture to generate the metal nanoparticle-polymer composite including metal nanoparticles. Thus, highly efficient metal nanoparticle-polymer composite materials may be manufactured with a uniform distribution without synthesizing nanoparticles.

Abstract: A polymer actuator containing graphene and a method of preparing the same are provided. The polymer actuator includes an ion-conductive polymer membrane, a metal electrode disposed on both surfaces of the ion-conductive polymer membrane, and graphene dispersed within the ion-conductive polymer membrane. As the graphene is dispersed within the polymer membrane, reverse ion migration due to an osmotic pressure occurring after solvent migration caused by electrostimulation in operation of the actuator can be prevented, and thus drivability of the polymer actuator can be improved.