Abstract: (a) Scattered light from the surface of a sample subjected to the same process as a process for an inspection object is observed, a defect is detected from an intensity of scatted light, and a position of the detected defect and an intensity of scattered light caused by the detected defect are acquired. (b) Defects detected at the step (a) are classified into a group detectable by observing secondary electrons emitted when an electron beam is applied to the surface of the sample and a group not detectable. (c) A decision threshold value of a scattered light intensity for extracting defects to be counted is determined, in accordance with a result of classification by the step (b) and the intensity of scattered light caused by the detected defect.

Abstract: An inspecting method is capable of efficiently inspecting a wafer. According to the inspecting method, the chip area of a wafer is inspected for defects, and based on the results, a defect density D0p of each of peripheral-zone chips in the chip area which are located closely to the peripheral area of the wafer is calculated. A peripheral-zone chip with a high defect density D0p is selected, and an area in the peripheral area which is outward of the selected peripheral-zone chip is inspected for defects. Since only the area in the peripheral area which is located outward of the peripheral-zone chip selected based on the defect density D0p is inspected for defects, the wafer is inspected efficiently.

Abstract: A first defect classification section uses a pre-inspection test target as the inspected piece, and classifies the defects, based on results of the defect inspection executed a plurality of times by the defect detection system, into first defects detected constantly in each of the plurality of times of inspection, and into second defects detected only in a part of, but not in the residual part of the plurality of times of inspection.

Abstract: A reference substrate for defect detection sensitivity calibration has: patterns and programmed defective portions which are cone defects with different sizes and are formed at random on a silicon substrate. By using reference substrate for defect detection sensitivity calibration, it is possible to obtain an index, usable in manufacturing management, for determining sensitivity adjustment after a lamp is replaced in an illumination part of a defect inspection apparatus.

Abstract: A reference substrate for defect detection sensitivity calibration has: patterns and programmed defective portions which are cone defects with different sizes and are formed at random on a silicon substrate. By using the reference substrate for defect detection sensitivity calibration, it is possible to obtain an index, usable in manufacturing management, for determining sensitivity adjustment after a lamp is replaced in an illumination part of a defect inspection apparatus.

Abstract: A surface inspection method in a surface inspection system which comprises a photodetection unit and a photodetection polarizing angle changing means, comprising the step of receiving a scattered reflection light from a substrate surface where standard particles are coated by changing a photodetection polarizing angle by the photodetection polarizing angle changing means, and the step of performing surface inspection by setting the photodetection polarizing angle to a condition where an S/N ratio of photodetection output is at the highest.

Abstract: Disclosed is a surface inspection device that performs a defect inspection throughout a surface of a wafer. In the defect detection using a defect review SEM, an X-Y coordinate system is set throughout a surface (excluding a round end face) of a product wafer to allow the inspection throughout the surface of the product wafer. Therefore, the defect detection can be performed also in an area other than an effective chip area. Further, the inspection results of the area are stored in relation to the coordinates in a position where the inspection results are acquired. Therefore, the inspection results can be effectively used for an analysis and a defect cause can be investigated with a higher degree of accuracy. As a result, the quality and yield of chips can be improved.

Abstract: A surface inspection method in a surface inspection system which comprises a photodetection unit and a photodetection polarizing angle changing means, comprising the step of receiving a scattered reflection light from a substrate surface where standard particles are coated by changing a photodetection polarizing angle by the photodetection polarizing angle changing means, and the step of performing surface inspection by setting the photodetection polarizing angle to a condition where an S/N ratio of photodetection output is at the highest.

Abstract: In the present invention, main information being selected by a display indicator is changed in accordance with selection operations and corresponding detailed information is taken out of a storage means when the selection operations are interrupted and is displayed at a part of a display means, thereby call numbers can be displayed without performing selection and determination operations, so that information can be retrieved with simple operations.

Abstract: A holder for mounting an air bag module, the holder including a bottomed, substantially box-like body having a peripheral wall and an opening, the holder adapted to be fastened to a side plate of a seat back frame in a cavity of a back pad with the opening thereof facing a body of an automotive vehicle and with a bottom plate section thereof being applied to the side plate, and wrapped at the peripheral wall thereof by margin pieces which are provided around an opening portion in a side of a seat cover, rolled in the holder from the opening of the holder, and fastened to the holder, the air bag module having an air bag housed within an air bag case, the air bag module adapted to be incorporated in the holder and fastened to the side plate through the holder, whereby the air bag module is installed in the side of the seat back, the holder further including flanges, and at least first and second brittle sections serving as breaking portions, the peripheral wall including a front side wall section facing a front

Abstract: A module case having an air bag module accommodated therein is disposed in a side face of a seat back, so that a lid of the module case is opened by a pressure of an air bag expanded upon a side collision of a vehicle, and the air bag is deployed through the resulting opening, termed the “primary” opening into a vehicle compartment. As a result of a tear line provided in the module case, even if the lid is held down by the door which has been deformed by a shock resulting from the collision, so that the lid cannot be opened to provide the primary opening, the tear line in a case body of the module case is broken, whereby a front wall is pivoted forwardly to form an alternate or “secondary” opening from the module case. Therefore, the air bag can be deployed without hindrance through the alternate secondary opening defined in the front wall of the module case into the vehicle compartment.

Abstract: A seat having a seat back and a seat cushion, the seat back including a first frame and a first support member stretched within the first frame, the first support member being made of a first elastic body, the first elastic body including a first section having first tension suitable for supporting a person sitting on the seat, and second sections having second tension lower than the first tension.

Abstract: A seat having a seating face made of sheet resilient material is assembled from a seat frame comprising a substantially quadrilateral frame body, the sheet resilient material forming the seating face, a pad member forming a largely rising bank, and a skin material enclosing the pad member, wherein the sheet resilient material is stretched within a frame body of the seat frame, one end of the skin material is abutted against and fixed on the frame body of the seat frame, the pad member is assembled outside the seat frame, the skin material covers outside of the pad member from the one end which is abutted against and fixed on the frame body of the seat frame, and the other end is wound and stopped around a back of the seat frame, a bank which rises larger than the surface position of the seating face made of the sheet resilient material which is stretched within the frame of the seat frame is formed, and the bank is assembled as a strong bank with a simple structure, and the pad member prevents the seat frame

Abstract: A holder for mounting an air bag module, the holder including a bottomed, substantially box-like body having a peripheral wall and an opening, the holder adapted to be fastened to a side plate of a seat back frame in a cavity of a back pad with the opening thereof facing a body of an automotive vehicle and with a bottom plate section thereof being applied to the side plate, and wrapped at the peripheral wall thereof by margin pieces which are provided around an opening portion in a side of a seat cover, rolled in the holder from the opening of the holder, and fastened to the holder, the air bag module having an air bag housed within an air bag case, the air bag module adapted to be incorporated in the holder and fastened to the side plate through the holder, whereby the air bag module is installed in the side of the seat back, the holder further including flanges, and at least first and second brittle sections serving as breaking portions, the peripheral wall including a front side wall section facing a front

Abstract: A seat is provided which comprises a generally quadrilateral seat frame and a seat cushion formed from a resilient sheet and provided bridging between lateral sides of, and inside, the seat frame. A cushion member is provided opposite to the resilient sheet and bridging between lateral sides of, and inside, the seat frame. The cushion member is deflectable, under the weight of a sitting person, along with the resilient sheet which mainly receives the weight of the sitting person on the seat.

Abstract: A trim cover 5 capable of vending and deforming together with the sheet resilient material by pressure of a body of a sitting passenger is stretched within the frame of the frame body such as to face a front surface side of the sheet resilient material 2. With this structure, it is possible to suppress the air from an air conditioner in a vehicle from directly flowing from the seating face to a sitting passenger, thereby preventing the excessive effect of the air conditioner in the vehicle. Further, the design of the entire seat can be enhanced.

Abstract: A seat structure for a vehicle includes a center seat that is slidable in the front-rear direction of the vehicle along a predetermined path extending through front and rear seat rows between respective left and right seats of the seat rows separated from each other transversely to the travelling direction of the vehicle. A console box is provided rearwardly of the center seat and slidable in the front-rear direction of the vehicle. The console box includes an armrest pivotable relative to the body of the box. The console box is located in an area defined by the left and right seats of the rear seat row when these seats are inclined rearward.

Abstract: A folding spare seat for a vehicle, adapted to be arranged in a space about a side of a seat cushion of a main seat and adapted to be accommodated vertically in the space about the side of the seat cushion of the main seat after use of the spare seat, the spare seat comprising a seat cushion, a seat back foldably supported to the seat cushion of the spare seat, a support mechanism for pivotally supporting the seat cushion of the spare seat, the seat cushion of the spare seat pivotally supported to the support mechanism at points thereof which are spaced laterally from the side of the seat cushion of the main seat at an interval which is longer than a total width of the seat cushion and seat back of the spare seat in a folded state, and a locking mechanism for releasably locking the seat cushion of the spare seat to keep the seat cushion of the spare seat horizontal or vertical.

Abstract: A process for producing an antimony-containing oxide catalyst with improved strength is described, by the steps of preparing a slurry containing an antimony compound, a polyvalent metal compound and a silica sol as the essential ingredients, adjusting the pH of the slurry to 7 or less, heat treating the slurry at a temperature of 40.degree. C. or higher, and thereafter drying the slurry and calcining the dried particles, wherein said slurry is irradiated with ultrasonic waves during the pH adjustment, or after the pH adjustment and before completion of the heat treatment.