Abstract: The present method of forming a metal oxide film can increase production efficiency while maintaining the low resistance of the metal oxide film. The present method of forming a metal oxide film includes first misting a solution containing a metallic element and ethylenediamine; meanwhile, heating a substrate; and then, supplying the misted solution onto a first main surface of the substrate.

Abstract: The present invention aims at providing a method for forming a metal oxide film which can further improve the production efficiency while maintaining low resistance of a metal oxide film formed thereby. In the method for forming a metal oxide film of the present invention, a solution (4) containing a metallic element and ammonia (4a) is formed into a mist. Meanwhile, a substrate (2) is heated. Then, the solution (4) formed into a mist is supplied onto a first main surface of the substrate (2) being heated.

Abstract: A compression formed preparation that rapidly disintegrates in the mouth or in an aqueous solvent, which imparts an excellent feeling during administration, and maintains a suitable hardness required for handling such as distribution and the like, and a method for manufacturing the compression formed preparation. The present invention provides a rapidly disintegrating compression formed preparation comprising one or more compounds selected from gluconolactones and pullulans added to the pharmaceutical base. The pharmaceutical base is preferably a saccharide and particularly preferably a sugar alcohol and starch syrup. The compression formed preparation is prepared by compressing granules obtained by granulation of particles comprising preparation assistants in addition to the pharmaceutical base in a solution of gluconolactone or pullulan dissolved in an aqueous solvent or together with gluconolactone or pullulan in an aqueous solvent.