Abstract: A method of correcting positional error in an actuator that is equipped with a motor and a wave gear reduction drive that transmits a motor output to the target load. Positioning error relative to the absolute position of the actuator output shaft is measured, to compile error correction data relating to each position on the rotation of the motor shaft. The rotational position of the motor shaft is detected and rotational position correction information produced by adding error correction values assigned to the position concerned. The rotational positional error information thus produced is used as position feedback information for controlling the positioning of the output shaft.

Abstract: A method and apparatus for inspecting bends in wires bonded between, for instance, pads of semiconductor chips and leads of lead frames using detection ranges established within imaging ranges in which images of bends are taken. Imaging range areas are established by dividing the distance between a first bonding point and a second bonding point of a target wire by the width of the detection range, and the wire bend is then detected in the respective imaging range areas.

Abstract: A pellet conveying device used with a bonding machine for, for example, semiconductor devices, including a conveying arm that has a collet for holding pellets. The conveying arm can move vertically and pivot horizontally by two different driving sources so that the collet can be moved between predetermined two positions such as a pellet pick-up position and a pellet releasing position.