Abstract: A fluorescent X-ray analyzing apparatus capable of being used as either a wavelength dispersive type or an energy dispersive type is provided, with which the analysis can be performed quickly and accurately. The fluorescent X-ray analyzing apparatus includes a detecting unit for detecting and analyzing fluorescent X-ray (5) emitted from at least one target area (1a) of a sample (1) to be analyzed as a result of excitation of such target area (1a) with a primary X-ray (3). The detecting unit includes a wavelength dispersive type detecting unit (6) including a spectroscope (8) and a first detector (9), and an energy dispersive type detecting unit (11) including a second detector (12) of an energy dispersive type.

Abstract: An X-ray analyzing apparatus includes a drive unit for moving a sample, a plurality of field-limiting slits each having a slit size corresponding to the size of a measuring area of the sample, a selector unit for selectively bringing the field-limiting slits into a path of travel of the secondary X-ray between the sample and the detecting unit, a drive controller for controlling the drive unit to move the sample according to the size of the measuring area of the sample to a position at which the intensity of radiation of a primary X-ray towards the measuring area of the sample attains a maximum value; and a selector controller for controlling the selector unit to render only the secondary X-ray emanating from the measuring area of the sample to be incident upon the detecting unit.