Patents by Inventor Naonori Akae

Naonori Akae has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS
    Publication number: 20080268644
    Abstract: There are provided the steps of loading a substrate into a reaction vessel; forming a film on the substrate while supplying a film forming gas into the reaction vessel; unloading the substrate after film formation from the reaction vessel; supplying a cleaning gas into the reaction vessel while lowering a temperature in the reaction vessel and removing a deposit deposited on at least an inner wall of the reaction vessel in the film forming step.
    Type: Application
    Filed: February 5, 2008
    Publication date: October 30, 2008
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Kenji Kameda, Naonori Akae, Kenichi Suzaki, Yushin Takasawa, Sadao Nakashima