Abstract: An electronic circuit apparatus and integrated circuit device, wherein an arrangement of connection terminals, external connection terminals and input/output interface circuits of a semiconductor chip as a unit circuit device is optimized so as to attain suppression of a power consumption and a shorter signal transmission time, configured that only connection pads are allocated to be arranged on a mutually adjacent side of semiconductor chips 1 and 2, and input/output interface circuits, test pads and external connection pads are arranged along remaining three sides, moreover, the connection pads and the electronic circuits are directly connected not via the input/output interface circuits.

Abstract: This invention relates to an interior panel unit having a structure in which a plurality of rectangular floor base members to be installed on a foundation floor of a room are connected to each other by base joint members. A plurality of fundamental support members having the same height and a plurality of connecting support members having the same height as that of the fundamental support members are located on each floor base member. Each floor panel member supported by the fundamental support members and the connecting support members is arranged to assure a predetermined space with the corresponding floor base member. Cables and various types of equipment which constitute an office-automation system are mounted in the space defined by the floor panel member and the floor base member. The space defined by the floor panel member and the floor base member is partitioned by vertical and horizontal separator members. The cables and various types of equipment are appropriately arranged in the partitioned space.

Abstract: This invention relates to an interior panel unit having a structure in which a plurality of rectangular floor base members to be installed on a foundation floor of a room are connected to each other by base joint members. A plurality of fundamental support members having the same height and plurality of connecting support members having the same height as that of the fundamental support members are located on each floor base member. Each floor panel member supported by the fundamental support members and the connecting support members is arranged to assure a predetermined space with the corresponding floor base member. Cables and various types of equipment which constitute an office-automation system are mounted in the space defined by the floor panel member and the floor base member. The space defined by the floor panel member and the floor base member is partitioned by vertical and horizontal separator members. The cables and various types of equipment are appropriately arranged in the partitioned space.

Abstract: This invention relates to an interior panel unit having a structure in which a plurality of rectangular floor base members to be installed on a foundation floor of a room are connected to each other by base joint members. A plurality of fundamental support members having the same height and a plurality of connecting support members having the same height as that of the fundamental support members are located on each floor base member. Each floor panel member supported by the fundamental support members and the connecting support members is arranged to assure a predetermined space with the corresponding floor base member. Cables and various types of equipment which constitute an office-automation system are mounted in the space defined by the floor panel member and the floor base member. The space defined by the floor panel member and the floor base member is partitioned by vertical and horizontal separator members. The cables and various types of equipment are appropriately arranged in the partitioned space.

Abstract: This invention relates to an interior panel unit having a structure in which a plurality of rectangular floor base members to be installed on a foundation floor of a room are connected to each other by base joint members. A plurality of fundamental support members having the same height and a plurality of connecting support members having the same height as that of the fundamental support members are located on each floor base member. Each floor panel member supported by the fundamental support members and the connecting support members is arranged to assure a predetermined space with the corresponding floor base member. Cables and various types of equipment which constitute an office-automation system are mounted in the space defined by the floor panel member and the floor base member. The space defined by the floor panel member and the floor base member is partitioned by vertical and horizontal separator members. The cables and various types of equipment are appropriately arranged in the partitioned space.

Abstract: This invention relates to an interior panel unit having a structure in which a plurality of rectangular floor base members to be installed on a foundation floor of a room are connected to each other by base joint members. A plurality of fundamental support members having the same height and a plurality of connecting support members having the same height as that of the fundamental support members are located on each floor base member. Each floor panel member supported by the fundamental support members and the connecting support members is arranged to assure a predetermined space with the corresponding floor base member. Cables and various types of equipment which constitute an office-automation system are mounted in the space defined by the floor panel member and the floor base member. The space defined by the floor panel member and the floor base member is partitioned by vertical and horizontal separator members. The cables and various types of equipment are appropriately arranged in the partitioned space.

Abstract: A magnetron sputtering etching apparatus includes a pair of electrodes opposed to each other in a vacuum vessel and a radio-frequency power source applying radio-frequency power to the opposed electrodes. Magnetic lines of force, whose components are in parallel with electric lines of force of the radio-frequency power, are set to reach the surface of a substrate to be processed between the electrodes. Magnets are arranged on rear sides of the pair of electrodes, respectively, so that different poles of the magnets are in opposition to each other. At least one of the magnets is rotated about an axis substantially in parallel with the electric lines of force. With this arrangement, charged particles in plasma are spirally rotated with the aid of the magnetic lines of force and the plasma concentrates at locations where magnetic fluxes concentrate thereby accelerating the etching of the substrate.

Abstract: A static pressure gas bearing apparatus equipped with a static pressure gas bearing that can support in floated state the rotating shaft of the turbocharger to be placed on an internal combustion engine comprises an air pump device for pressurizing and supplying a gas, an accumulator for storing the pressurized gas supplied form the air pump device, a pressurized gas supply passage device for connecting the accumulator to the static pressure gas bearing, a bypass passage device for connecting the air pump device to the static pressure gas bearing by bypassing the accumulator, and a control device for controlling the opening and the closing of the bypass passage device in response to the internal pressure of the accumulator.

Abstract: The turbine rotor unit comprises a ceramic rotor and a ceramic shaft. Connection or bonding of the rotor and the shaft is made by applying a slip of ceramic material to engaging sections of the rotor and the shaft and baking them for solidification of the slip. If metal-silicone is used as a material for the rotor and the shaft, the connection or bonding of them can be made without the slip.