Abstract: A damage detection apparatus and method which detect a damage occurring in a specimen include energizing an inspection area on a specimen into a predetermined energized condition, measuring a potential difference at predetermined intervals in the inspection area, and analyzing an existence or otherwise of a damage, and a shape thereof, based on a plurality of items of potential difference data. Parameters specifying a hypothetical damage are hypothesized in advance and, based on the potential difference data, calculation is executed using a maximum likelihood estimation method on a double body in which hypothetical specimens are doubled by bringing together their front surfaces, and furthermore on a quadruple body quadrupled by bringing rear surfaces of hypothetical specimens together, a maximum likelihood estimation value of the parameters is calculated.

Abstract: To provide a damage detection apparatus and damage detection method enabling an identification of a crack at a higher speed with a nondestructive inspection method which enables a quantification of a damage such as a crack buried inside a specimen, a crack exposed on a surface, or a wall thinning of the specimen, in three dimensions with an optional aspect ratio and inclination.

Abstract: An atomic force microscope including a cantilever, a transferring device and a displacement detecting device is used for conducting a material test of a test member based on a load amount and a displacement amount. The test member may be fixed to the cantilever or may be entirely replaced with the cantilever. The transferring device, which is normally used for transferring the cantilever or the sample in accordance with a shape of the sample, constitutes a load applying device for applying a load to the test member, and a displacement of the test member is detected by the displacement detecting device. The load applying device can apply slight displacement and load to the test member, so that the material test for the small material can be conducted.