Patents by Inventor Natsuki Fukuda
Natsuki Fukuda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230326859Abstract: Contact plugs extend along a first axis. Each contact plug includes a second conductor and a first insulator. A first insulator is between the first conductors and the second conductor. A lower face of each contact plug is in contact with an upper face of a unique one of the first conductors. A first one and second one of the contact plugs are adjacent along a second axis that crosses the first axis. A third one of the contact plugs is between the first and second contact plugs on the second axis, and is at a different position from positions of the first and second contact plugs on a third axis orthogonal to the first and second axes.Type: ApplicationFiled: September 8, 2022Publication date: October 12, 2023Applicant: Kioxia CorporationInventors: Natsuki FUKUDA, Tadashi IGUCHI
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Publication number: 20230088929Abstract: A semiconductor memory device includes a substrate including a first region and a second region, a plurality of first conductive layers, a first semiconductor layer disposed in the first region, an electric charge accumulating layer, a contact electrode disposed in the second region and connected to one of the plurality of first conductive layers, and a plurality of first structures and a plurality of second structures disposed in the second region. The first structure includes a second semiconductor layer opposed to the plurality of first conductive layers and including a semiconductor material in common with the first semiconductor layer, and a first insulating layer disposed between the plurality of first conductive layers and the second semiconductor layer and including an insulating material in common with the electric charge accumulating layer. The second structure does not include the semiconductor material or the insulating material.Type: ApplicationFiled: August 22, 2022Publication date: March 23, 2023Inventors: Natsuki FUKUDA, Tadashi IGUCHI
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Publication number: 20230090305Abstract: A semiconductor storage device includes a substrate having a memory region and a hook-up region arranged in a first direction and a plurality of memory structures arranged in a second direction intersecting the first direction. The plurality of memory structures include a plurality of conductive layers arranged in a third direction intersecting a surface of the substrate and extending in the first direction over the memory region and the hook-up region and a plurality of contact electrodes provided in the hook-up region and extending in the third direction to have an outer peripheral surface surrounded by a part of the plurality of conductive layers, each contact electrode being connected to any of the plurality of conductive layers. The hook-up region includes a first area and a second area arranged in the first direction. The first region includes a first contact electrode and a second contact electrode, and the second region includes a third contact electrode.Type: ApplicationFiled: March 3, 2022Publication date: March 23, 2023Applicant: Kioxia CorporationInventors: Tadashi IGUCHI, Natsuki FUKUDA
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Patent number: 11515300Abstract: A semiconductor memory device includes a first chip and a second chip. The first chip includes a semiconductor substrate and a plurality of transistors disposed on a surface of the semiconductor substrate. The second chip includes a plurality of first conductive layers, a plurality of first semiconductor layers, and a plurality of memory cells disposed in intersection portions of the plurality of first conductive layers and the plurality of first semiconductor layers. The second chip includes a second semiconductor layer farther from the semiconductor substrate than the plurality of first conductive layers. The second semiconductor layer is connected to the plurality of first semiconductor layers and a first insulating layer that includes a part farther from the semiconductor substrate than a surface on a side opposite to the semiconductor substrate of the second semiconductor layer and a part closer to the semiconductor substrate than the surface.Type: GrantFiled: September 10, 2020Date of Patent: November 29, 2022Assignee: Kioxia CorporationInventors: Atsushi Oga, Natsuki Fukuda, Moto Yabuki
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Publication number: 20220310640Abstract: A semiconductor storage device includes a first conductive layer that extends in a first direction; a second conductive layer that extends in the first direction and is arranged with the first conductive layer in a second direction; a first insulating layer that is provided between the first conductive layer and the second conductive layer; a semiconductor layer that extends in the second direction and faces the first conductive layer, the second conductive layer, and the first insulating layer in a third direction; a first charge storage layer that is provided between the first conductive layer and the semiconductor layer; a second charge storage layer that is provided between the second conductive layer and the semiconductor layer; a first high dielectric constant layer that is provided between the first conductive layer and the first charge storage layer; and a second high dielectric constant layer provided between the second conductive layer and the second charge storage layer.Type: ApplicationFiled: August 30, 2021Publication date: September 29, 2022Applicant: Kioxia CorporationInventors: Natsuki FUKUDA, Ryota NARASAKI, Takashi KURUSU, Yuta KAMIYA, Kazuhiro MATSUO, Shinji MORI, Shoji HONDA, Takafumi OCHIAI, Hiroyuki YAMASHITA, Junichi KANEYAMA, Ha HOANG, Yuta SAITO, Kota TAKAHASHI, Tomoki ISHIMARU, Kenichiro TORATANI
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Publication number: 20220285389Abstract: A semiconductor memory device includes a substrate, conductive layers arranged in a first direction and extend in a second direction, a semiconductor layer extending in the first direction and opposed to the conductive layers, and n contact electrode regions arranged in a third direction. The n is a power of 2. The contact electrode region includes contact electrodes arranged in the second direction. The conductive layers include a first conductive layer and a second conductive layer that is an n-th conductive layer counted from the first conductive layer. The contact electrodes include a first contact electrode connected to the first conductive layer, a second contact electrode connected to the second conductive layer, and a third contact electrode disposed between them. The first contact electrode, the second contact electrode, and the third contact electrode are arranged in the second direction or the third direction.Type: ApplicationFiled: August 9, 2021Publication date: September 8, 2022Applicant: Kioxia CorporationInventors: Natsuki FUKUDA, Tadashi IGUCHI
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Publication number: 20210388112Abstract: The present invention provides a scFv comprising a heavy chain variable region (VH) and a light chain variable region linked by a first peptide linker, wherein an N-terminus and a C-terminus thereof are linked by a second peptide linker.Type: ApplicationFiled: July 8, 2019Publication date: December 16, 2021Inventors: HIROSHI MORIOKA, YOSHIHIRO KOBASHIGAWA, TAKASHI SATO, NATSUKI FUKUDA, SOICHIRO YAMAUCHI
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Publication number: 20210288038Abstract: A semiconductor memory device includes a first chip and a second chip. The first chip includes a semiconductor substrate and a plurality of transistors disposed on a surface of the semiconductor substrate. The second chip includes a plurality of first conductive layers, a plurality of first semiconductor layers, and a plurality of memory cells disposed in intersection portions of the plurality of first conductive layers and the plurality of first semiconductor layers. The second chip includes a second semiconductor layer farther from the semiconductor substrate than the plurality of first conductive layers and connected to the plurality of first semiconductor layers and a first insulating layer that includes a part farther from the semiconductor substrate than a surface on aside opposite to the semiconductor substrate of the second semiconductor layer and a part closer to the semiconductor substrate than the surface.Type: ApplicationFiled: September 10, 2020Publication date: September 16, 2021Applicant: Kioxia CorporationInventors: Atsushi OGA, Natsuki FUKUDA, Moto YABUKI
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Patent number: 10957702Abstract: According to an embodiment, a semiconductor memory device includes: a first stacked body including a first semiconductor layer, a first memory film, a second semiconductor layer and a first insulating layer; a joining member provided on the first semiconductor layer, the second semiconductor layer, and the first insulating layer; a first layer provided above the joining member and covering the first semiconductor layer and the first memory film; a second layer provided above the joining member, located away from the first layer as viewed in a second direction perpendicular to the first direction, and covering the second semiconductor layer and the second memory film; a second stacked body including a third semiconductor layer, a fourth semiconductor layer, a fourth memory film and a second insulating layer.Type: GrantFiled: March 7, 2019Date of Patent: March 23, 2021Assignee: TOSHIBA MEMORY CORPORATIONInventors: Atsushi Oga, Hideaki Harakawa, Satoshi Nagashima, Natsuki Fukuda
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Patent number: 10910388Abstract: According to one embodiment, a semiconductor storage device includes a first charge storage part, a first insulating part, a second charge storage part, a second insulating part, a first select transistor, and a hollow part. The first charge storage part is at a first position separated from a surface of a substrate by a first distance in a third direction. The first select transistor is at a second position separated from the surface of the substrate by a second distance in the third direction. The second distance is greater than the first distance. The hollow part is up to a third position in the third direction separated from the surface of the substrate by a third distance in the third direction. The third distance is greater than or equal to the first distance and shorter than or equal to the second distance.Type: GrantFiled: July 22, 2019Date of Patent: February 2, 2021Assignee: TOSHIBA MEMORY CORPORATIONInventors: Natsuki Fukuda, Satoshi Nagashima, Tetsu Morooka, Noritaka Ishihara
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Publication number: 20200286902Abstract: According to one embodiment, a semiconductor storage device includes a first charge storage part, a first insulating part, a second charge storage part, a second insulating part, a first select transistor, and a hollow part. The first charge storage part is at a first position separated from a surface of a substrate by a first distance in a third direction. The first select transistor is at a second position separated from the surface of the substrate by a second distance in the third direction. The second distance is greater than the first distance. The hollow part is up to a third position in the third direction separated from the surface of the substrate by a third distance in the third direction. The third distance is greater than or equal to the first distance and shorter than or equal to the second distance.Type: ApplicationFiled: July 22, 2019Publication date: September 10, 2020Applicant: Toshiba Memory CorporationInventors: Natsuki FUKUDA, Satoshi NAGASHIMA, Tetsu MOROOKA, Noritaka ISHIHARA
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Publication number: 20200075615Abstract: According to an embodiment, a semiconductor memory device includes: a first stacked body including a first semiconductor layer, a first memory film, a second semiconductor layer and a first insulating layer; a joining member provided on the first semiconductor layer, the second semiconductor layer, and the first insulating layer; a first layer provided above the joining member and covering the first semiconductor layer and the first memory film; a second layer provided above the joining member, located away from the first layer as viewed in a second direction perpendicular to the first direction, and covering the second semiconductor layer and the second memory film; a second stacked body including a third semiconductor layer, a fourth semiconductor layer, a fourth memory film and a second insulating layer.Type: ApplicationFiled: March 7, 2019Publication date: March 5, 2020Applicant: TOSHIBA MEMORY CORPORATIONInventors: Atsushi OGA, Hideaki HARAKAWA, Satoshi NAGASHIMA, Natsuki FUKUDA
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Patent number: 10211259Abstract: A semiconductor memory device according to an embodiment comprises: a semiconductor substrate extending in a first direction and a second direction, the first and second directions intersecting each other; a first wiring line disposed above the semiconductor substrate and extending in the first direction; a second wiring line disposed above the semiconductor substrate and extending in a third direction, the third direction intersecting the first direction and the second direction; a variable resistance film disposed at an intersection of the first wiring line and the second wiring line; a first insulating film disposed aligned with the second wiring line in the first direction; a first film disposed between the first wiring line and the first insulating film; and a second film disposed between the first insulating film and the first film and configured from a material different from that of the first film.Type: GrantFiled: March 21, 2017Date of Patent: February 19, 2019Assignee: TOSHIBA MEMORY CORPORATIONInventors: Atsushi Oga, Mutsumi Okajima, Natsuki Fukuda, Takeshi Yamaguchi, Toshiharu Tanaka, Hiroyuki Ode
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Patent number: 10192928Abstract: A semiconductor device according to an embodiment includes: a stacked body including a plurality of first conductive films stacked via an inter-layer insulating film; a first conductive body contacting the stacked body to extend in a stacking direction; and a plurality of first insulating films in the same layers as the first conductive films and disposed between the first conductive body and the first conductive films, the first conductive body including a projecting part that projects along tops of one of the first insulating films and one of the first conductive films, and a side surface of the projecting part contacting an upper surface of the one of the first conductive films.Type: GrantFiled: September 15, 2017Date of Patent: January 29, 2019Assignee: TOSHIBA MEMORY CORPORATIONInventors: Natsuki Fukuda, Mutsumi Okajima, Atsushi Oga, Toshiharu Tanaka, Takeshi Yamaguchi, Takeshi Takagi, Masanori Komura
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Publication number: 20180006089Abstract: A semiconductor device according to an embodiment includes: a stacked body including a plurality of first conductive films stacked via an inter-layer insulating film; a first conductive body contacting the stacked body to extend in a stacking direction; and a plurality of first insulating films in the same layers as the first conductive films and disposed between the first conductive body and the first conductive films, the first conductive body including a projecting part that projects along tops of one of the first insulating films and one of the first conductive films, and a side surface of the projecting part contacting an upper surface of the one of the first conductive films.Type: ApplicationFiled: September 15, 2017Publication date: January 4, 2018Applicant: TOSHIBA MEMORY CORPORATIONInventors: Natsuki FUKUDA, Mutsumi OKAJIMA, Atsushi OGA, Toshiharu TANAKA, Takeshi YAMAGUCHI, Takeshi TAKAGI, Masanori KOMURA
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Publication number: 20170373119Abstract: A semiconductor memory device according to an embodiment comprises: a semiconductor substrate extending in a first direction and a second direction, the first and second directions intersecting each other; a first wiring line disposed above the semiconductor substrate and extending in the first direction; a second wiring line disposed above the semiconductor substrate and extending in a third direction, the third direction intersecting the first direction and the second direction; a variable resistance film disposed at an intersection of the first wiring line and the second wiring line; a first insulating film disposed aligned with the second wiring line in the first direction; a first film disposed between the first wiring line and the first insulating film; and a second film disposed between the first insulating film and the first film and configured from a material different from that of the first film.Type: ApplicationFiled: March 21, 2017Publication date: December 28, 2017Applicant: TOSHIBA MEMORY CORPORATIONInventors: Atsushi OGA, Mutsumi OKAJIMA, Natsuki FUKUDA, Takeshi YAMAGUCHI, Toshiharu TANAKA, Hiroyuki ODE
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Patent number: 9768233Abstract: A semiconductor device according to an embodiment includes: a stacked body including a plurality of first conductive films stacked via an inter-layer insulating film; a first conductive body facing the stacked body to extend in a stacking direction; and a plurality of first insulating films in the same layers as the first conductive films and disposed between the first conductive body and the first conductive films, the first conductive body including a projecting part that projects along tops of one of the first insulating films and one of the first conductive films, and a lower surface of the projecting part contacting an upper surface of the one of the first conductive films.Type: GrantFiled: March 18, 2016Date of Patent: September 19, 2017Assignee: TOSHIBA MEMORY CORPORATIONInventors: Natsuki Fukuda, Mutsumi Okajima, Atsushi Oga, Toshiharu Tanaka, Takeshi Yamaguchi, Takeshi Takagi, Masanori Komura
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Publication number: 20170256588Abstract: A semiconductor device according to an embodiment includes: a stacked body including a plurality of first conductive films stacked via an inter-layer insulating film; a first conductive body facing the stacked body to extend in a stacking direction; and a plurality of first insulating films in the same layers as the first conductive films and disposed between the first conductive body and the first conductive films, the first conductive body including a projecting part that projects along tops of one of the first insulating films and one of the first conductive films, and a lower surface of the projecting part contacting an upper surface of the one of the first conductive films.Type: ApplicationFiled: March 18, 2016Publication date: September 7, 2017Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Natsuki FUKUDA, Mutsumi OKAJIMA, Atsushi OGA, Toshiharu TANAKA, Takeshi YAMAGUCHI, Takeshi TAKAGI, Masanori KOMURA
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Patent number: 9728585Abstract: A semiconductor memory device according to an embodiment includes: a semiconductor substrate which extends in first and second directions that intersect each other; a plurality of first wiring lines which are arranged in a third direction that intersects the first direction and the second direction, and which extend in the first direction; a plurality of second wiring lines which are arranged in the first direction and extend in the third direction; and a plurality of memory cells disposed at intersections of the first wiring lines and the second wiring lines, one of the memory cells having a first film whose resistance changes electrically, a thickness in the second direction of the first film changing with respect to a change of position in the third direction, and the first films of two of the memory cells adjacent in the third direction being separated between the two memory cells.Type: GrantFiled: September 20, 2016Date of Patent: August 8, 2017Assignee: KABUSHIKI KAISHA TOSHIBAInventors: Masaki Yamato, Takeshi Yamaguchi, Takeshi Takagi, Natsuki Fukuda
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Patent number: 9721961Abstract: In this semiconductor memory device, the first conducting layers are arrayed laminated in a first direction, and extend in a second direction intersecting with the first direction. The first conducting layers are arrayed in a third direction via interlayer insulating films. The third direction intersects with the first direction and the second direction. The interlayer insulating film is disposed between the first conducting layers arrayed in the third direction, and extends in the first direction. The second conducting layer is disposed between the first conducting layers arrayed in the third direction, and extends in the first direction. The second conducting layer has an approximately circular cross-sectional shape intersecting with the first direction. The variable resistance layer surrounds a peripheral area of the second conducting layer, and is disposed at a position between the second conducting layer and the first conducting layer.Type: GrantFiled: December 15, 2015Date of Patent: August 1, 2017Assignee: KABUSHIKI KAISHA TOSHIBAInventors: Mutsumi Okajima, Atsushi Oga, Takeshi Yamaguchi, Hiroyuki Ode, Toshiharu Tanaka, Natsuki Fukuda