Abstract: A single crystal silicon substrate at least a part of which constitutes a flow path for liquid includes a first through-hole including an inclined side wall inclined with respect to a substrate surface of the single crystal silicon substrate, and a second through-hole constituting the flow path and including a side wall constituted by a vertical side wall more nearly vertical to the substrate surface than the inclined side wall is. The first through-hole is formed by crystal anisotropic etching. The second through-hole is formed by metal-assisted chemical etching.

Abstract: A method of manufacturing a piezoelectric actuator includes preparing a laminate including a substrate, a first electrode layer disposed on the substrate, a piezoelectric layer disposed on the first electrode layer, and a second electrode layer disposed on the piezoelectric layer, and forming a contour shape of the piezoelectric layer. The forming of the contour shape includes dry etching the piezoelectric layer from the second electrode layer side to dig the piezoelectric layer halfway in a thickness direction, covering, with a resist film, a dry etched surface formed on a side surface of the piezoelectric layer by the dry etching, and wet etching the piezoelectric layer from the second electrode layer side to dig the piezoelectric layer until the first electrode layer is reached.

Abstract: A vibrator includes a vibrating part including a pair of vibrating plates and a piezoelectric material provided between the pair of vibrating plates, a supporting part including a pair of supporting plates and an interplate portion provided between the pair of supporting plates, and a wire provided in the vibrating part and the supporting part, wherein the wire is exposed from the supporting part.

Abstract: A method of manufacturing a piezoelectric actuator includes preparing a laminate including a substrate, a first electrode layer disposed on the substrate, a piezoelectric layer disposed on the first electrode layer, and a second electrode layer disposed on the piezoelectric layer, and forming a contour shape of the piezoelectric layer. The forming of the contour shape includes dry etching the piezoelectric layer from the second electrode layer side to dig the piezoelectric layer halfway in a thickness direction, covering, with a resist film, a dry etched surface formed on a side surface of the piezoelectric layer by the dry etching, and wet etching the piezoelectric layer from the second electrode layer side to dig the piezoelectric layer until the first electrode layer is reached.

Abstract: A piezoelectric actuator includes a vibrating plate having a piezoelectric material, and a contact part provided in an end portion of the vibrating plate in contact with a driven part, wherein the contact part has a first portion in contact with the driven part and a second portion provided between the first portion and the vibrating plate and having lower rigidity than the first portion. Further, a width of the second portion in a direction crossing an arrangement direction of the first portion and the second portion is smaller than a width of the first portion in the crossing direction.

Abstract: An electric device includes an electric component that includes an electrode terminal which includes a projection portion, and a circuit substrate that includes a connected portion which is electrically connected to the projection portion, in which the connected portion includes a recess portion that is in contact with the projection portion.

Abstract: An optical scale includes a tabular base material and an optical pattern provided above a principal plane of the base material and including a first region where a resin layer including photosensitive resin is formed and a second region where the resin layer is not formed. The optical pattern includes a pigment.

Abstract: A method for producing a piezoelectric element includes a step of forming a first electrode layer, a step of forming a piezoelectric body layer on the first electrode layer, a step of forming a second electrode layer on the piezoelectric body layer, a step of patterning the second electrode layer, a step of patterning the piezoelectric body layer by wet etching, and a step of forming an organic insulating layer on a side surface of the patterned piezoelectric body layer.

Abstract: A vibrator includes a vibrating part including a pair of vibrating plates and a piezoelectric material provided between the pair of vibrating plates, a supporting part including a pair of supporting plates and an interplate portion provided between the pair of supporting plates, and a wire provided in the vibrating part and the supporting part, wherein the wire is exposed from the supporting part.

Abstract: A piezoelectric actuator includes a vibrating plate having a piezoelectric material, and a contact part provided in an end portion of the vibrating plate in contact with a driven part, wherein the contact part has a first portion in contact with the driven part and a second portion provided between the first portion and the vibrating plate and having lower rigidity than the first portion. Further, a width of the second portion in a direction crossing an arrangement direction of the first portion and the second portion is smaller than a width of the first portion in the crossing direction.

Abstract: An electric device includes an electric component that includes an electrode terminal which includes a projection portion, and a circuit substrate that includes a connected portion which is electrically connected to the projection portion, in which the connected portion includes a recess portion that is in contact with the projection portion.

Abstract: A piezoelectric driving apparatus including a substrate; a piezoelectric element which has a first electrode provided on the substrate, a piezoelectric body layer provided on the first electrode, and a second electrode provided on the first piezoelectric body layer, a layer including copper provided along an outer periphery of the substrate in plan view and electrically connected to the first electrode; and a conductive layer including nickel and phosphorus provided so as to cover the layer including copper.

Abstract: A piezoelectric device comprising a substrate having two surface sides; a vibration plate on one of the two surface side, a piezoelectric element including a first electrode provided on the vibration plate, a piezoelectric body layer provided on the first electrode, the piezoelectric body layer having a groove section on a side surface, the groove section including a first surface facing to the vibration plate, and a second electrode provided on the piezoelectric body layer, and a stress application film having tensile stress and provided on an inner surface of the groove section.

Abstract: A piezoelectric device comprising a substrate having two surface sides; a vibration plate on one of the two surface side, a piezoelectric element including a first electrode provided on the vibration plate, a piezoelectric body layer provided on the first electrode, the piezoelectric body layer having a groove section on a side surface, the groove section including a first surface facing to the vibration plate, and a second electrode provided on the piezoelectric body layer, and a stress application film having tensile stress and provided on an inner surface of the groove section.

Abstract: A liquid ejecting head which includes a piezoelectric element which includes a first electrode, a piezoelectric layer which is provided on the first electrode, and on which a plurality of piezoelectric films are laminated, a second electrode which is provided on the piezoelectric layer, and a plurality of active units which are interposed between the first electrode and the second electrode, and a pressure generating chamber which communicates with nozzle openings which eject liquid, and in which a pressure fluctuation is generated by the piezoelectric element, in which a plurality of grooves with inner faces facing the first electrode side are formed on a side surface of the piezoelectric layer on each interface of each of the piezoelectric films along a first direction and a second direction which cross a third direction which goes from the first electrode to the second electrode.

Abstract: A flow channel substrate has pressure chambers, and the pressure chambers communicate with nozzle openings configured to eject liquid. Each of piezoelectric elements on the flow channel substrate has a piezoelectric layer, a pair of electrodes, and a wiring layer coupled to the electrodes. The wiring layer has a first layer on the flow channel substrate side and a second layer on the first layer. The first layer contains palladium and is formed by pretreatment, whereas the second layer contains nickel and is formed by electroless plating.

Abstract: There is provided a liquid ejecting head including: a flow path formation substrate on which a pressure generation chamber communicating with nozzle openings for discharging liquid is provided; and a piezoelectric element which is provided on the flow path formation substrate and includes a piezoelectric layer, an electrode, and a wiring layer connected to the electrode, in which the wiring layer includes an adhesion layer which is provided on the electrode side and contains at least titanium and tungsten, and a conductive layer containing copper which is provided on a side of the adhesion layer opposite the electrode.

Abstract: There is provided a liquid ejecting head including: a flow path formation substrate on which a pressure generation chamber communicating with nozzle openings for discharging liquid is provided; and a piezoelectric element which is provided on the flow path formation substrate and includes a piezoelectric layer, an electrode, and a wiring layer connected to the electrode, in which the wiring layer includes an adhesion layer which is provided on the electrode side and contains at least titanium and tungsten, and a conductive layer containing copper which is provided on a side of the adhesion layer opposite the electrode.

Abstract: A flow channel substrate has pressure chambers, and the pressure chambers communicate with nozzle openings configured to eject liquid. Each of piezoelectric elements on the flow channel substrate has a piezoelectric layer, a pair of electrodes, and a wiring layer coupled to the electrodes. The wiring layer has a first layer on the flow channel substrate side and a second layer on the first layer. The first layer contains palladium and is formed by pretreatment, whereas the second layer contains nickel and is formed by electroless plating.

Abstract: A liquid droplet ejecting head includes a fluid path forming substrate having a fluid path communicating with nozzle holes and a diaphragm on the fluid path forming substrate. The diaphragm has a first surface facing a second surface. A piezoelectric element on the first surface of the diaphragm has a piezoelectric body layer interposed between a first electrode and a second electrode. A support substrate on the first surface of the diaphragm has a space for containing the piezoelectric element. The support substrate includes a first member formed on the first surface of the diaphragm, and a second member formed on the first member. The first member has a first opening for containing the piezoelectric element. The space of the support substrate is defined by the first opening of the first member and the second member. The main material of the first member is resin.