Abstract: In one exemplary embodiment, there is provided an etching method. The method includes (a) preparing a substrate, the substrate comprising a silicon-containing film and a mask, the silicon-containing film including a recess, the mask being provided on the silicon-containing film and including an opening that exposes the recess; (b) forming a carbon-containing film on a side wall of the silicon-containing film, the side wall defining the recess; and (c) by using a plasma generated from a processing gas, forming a protective film containing tungsten on the carbon-containing film and etching the silicon-containing film in the recess, the processing gas including a fluorine-containing gas and a tungsten-containing gas.

Abstract: A plasma processing system includes: first and second processing chambers having respective first and second substrate supports; a transport chamber connected to the first and second processing chambers, and having a transport device; and a controller that executes processing of (a) disposing a substrate including a silicon-containing film having a recess portion and a mask on the silicon-containing film on the first substrate support of the first processing chamber, (b) forming a carbon-containing film on a side wall of the silicon-containing film defining the recess portion in the first processing chamber, (c) transporting the substrate from the first processing chamber to the second processing chamber via the transport chamber and disposing the substrate on the second substrate support, and (d) etching a bottom portion of the recess portion where the carbon-containing film is formed by using a plasma formed from a first processing gas in the second processing chamber.

Abstract: A wireless communication device is provided for transmitting and receiving a high-frequency signal having a first frequency for communication is disclosed. The device includes a loop pattern having a first electrode and a second electrode as both ends, an antenna pattern, a third electrode capacitively coupled to the first electrode, and a fourth electrode capacitively coupled to the second electrode. The device includes an RFIC having a capacitive impedance at a second frequency higher than the first frequency, and a first current path and a second current path connected in parallel with each other between the third electrode and the fourth electrode. The RFIC is included in the first current path and the second current path has an inductive impedance at a second frequency.

Abstract: An antenna device is provided as a near-field communication antenna device that is configured by arranging a plurality of loop antennas. Each loop antenna includes a plurality of parallel circuits each having a capacitor and a resistance element; and a plurality of looped conductors in a shape of a loop that is divided. The divided looped conductors are connected to each other via the parallel circuits, and the plurality of looped conductors and the plurality of parallel circuits form a loop.

Abstract: The present disclosure provides an additive manufacturing method by which a uniform powder bed can be formed even when the interior of a chamber is depressurized and a powder bed is formed on a stage as the stage is preheated and an inert gas is supplied. An additive manufacturing method for a shaped object S includes forming a powder bed PB on a stage 51 in a chamber 10, and fusing the powder bed PB by laser emission. According to this additive manufacturing method, a pressure in the chamber 10 is reduced to a pressure equal to or higher than 8000 [Pa] and equal to or lower than 30,000 [Pa], and the powder bed PB is formed on the stage 51 as the stage 51 is preheated and an inert gas is supplied.

Abstract: A plasma processing method performed in a plasma processing apparatus having a chamber is provided. This method comprises: (a) providing a substrate having a film stack including a silicon oxide film and a silicon nitride film onto a substrate support in the chamber; and (b) forming a plasma from a processing gas containing HF gas and at least one of CxFy gas (where x and y are integers equal to or greater than 1) and phosphorus-containing gas to etch the film stack, wherein, in (b), the substrate support is controlled to a temperature of 0° C. or more and 70° C. or less, and a bias RF signal of 10 kW or more or a bias DC signal of 4 kV or more is supplied to the substrate support.

Abstract: A heat exchanger which exchanges heat with a DUT while contacting the DUT includes: a heat exchange block which thermally contacts the DUT; a first heat transfer sheet which overlaps a front end surface of the heat exchange block; a second heat transfer sheet which overlaps the front end surface of the heat exchange block through the first heat transfer sheet; and a first holding member which holds the second heat transfer sheet.

Abstract: Provided is a tire that can satisfy both low heat build-up property and fracture resistance at a higher level than conventional tires. The tire has a center gauge of not less than 50 mm and contains a rubber composition obtained by blending less than 20 parts by mass of a silica with respect to 100 parts by mass of a rubber component, along with a thiuram-based accelerator, a sulfenamide-based accelerator, and a resin.

Abstract: A W3 of a third belt of a belt layer arranged between a carcass and a tread portion is 65% to 85% of a tire maximum width Wm and a W4 of a fourth belt is 55% to 75% of the tire maximum width Wm. A metal cord adopted in a metal cord-rubber composite forming each of the third belt and the fourth belt is formed such that N atoms in a surface thereof is set in a range between 2 atom % and 60 atom % of and a Cu/Zn ratio in the surface is set in a range between 1 and 4. A rubber composition that coats the metal cord includes 1 part by mass to 15 parts by mass of silica and 0 parts by mass to 1 part by mass of cobalt-containing compound based on 100 parts by mass of a rubber component.

Abstract: A heat exchanger which exchanges heat with a DUT while contacting the DUT includes: a heat exchange block which thermally contacts the DUT; a first heat transfer sheet which overlaps a front end surface of the heat exchange block; a second heat transfer sheet which overlaps the front end surface of the heat exchange block through the first heat transfer sheet; and a first holding member which holds the second heat transfer sheet.

Abstract: A balloon catheter and a stent delivery system are disclosed, which includes a shaft portion of which an axially orthogonal cross section of an outer peripheral surface has a polygonal shape, and a balloon which is foldable on the outer peripheral surface of the shaft portion and in which turned-back portions are formed when folded. Portions formed to linearly extend along an axial direction in the turned-back portions are respectively positioned on sides of the polygonal shape. A stent can be arranged on an outer periphery of a balloon in the balloon catheter and expands in response to dilation of the balloon.

Abstract: A stent includes linear struts that form an outer periphery of a cylindrical shape in which a gap is formed between adjacent struts. Each strut has a first convex portion that protrudes inward in a radial direction R in at least a portion in a cross section along an axial direction of the cylindrical shape, and, in a state in which the stent is indwelled in a lumen in a living body, the first convex portion has a vertex that is formed to be positioned more on an upstream side of blood flow than a downstream side of blood flow and an upstream curved portion that curves and extends to protrude inward in the radial direction from the vertex toward the upstream side.

Abstract: A stent able to minimize occurrences of strain and stress concentration in a drug coat layer upon expansive deformation of the stent in a radial direction to avoid the possibility of the drug separating from the stent, includes a stent body and a drug coating layer coated on the outside surface of the stent body so that the thickness of the drug coating layer gradually decreases toward a bent portion of the stent.

Abstract: A stent is configured to facilitate directional proliferation of cells on the inner surface of the stent to relatively quickly coat the stent surface with the cells so that the onset of late stent thrombosis or restenosis can be reduced or prevented. The stent includes a cylindrical stent main body having openings at both ends and extending along the longitudinal direction between the openings at both ends. A coating layer is provided on the inner surface of the stent main body and contains a substance having a cell adhesion ability to promote the adhesion of cells. The coating layer is formed by arranging multiple linear coating parts, each extending linearly in a striped manner.

Abstract: A stent able to minimize occurrences of strain and stress concentration in a drug coat layer upon expansive deformation of the stent in a radial direction to avoid the possibility of the drug separating from the stent, includes a stent body and a drug coating layer coated on the outside surface of the stent body so that the thickness of the drug coating layer gradually decreases toward a bent portion of the stent.

Abstract: A stent able to minimize occurrences of strain and stress concentration in a drug coat layer upon expansive deformation of the stent in a radial direction to avoid the possibility of the drug separating from the stent, includes a stent body and a drug coating layer coated on the outside surface of the stent body so that the thickness of the drug coating layer gradually decreases toward a bent portion of the stent.

Abstract: A chamber having a water jet generation apparatus and a mesh installed inside is pushed against a surface of a peening object. A rotary vane of the water jet generation apparatus, disposed in a region in the chamber between the mesh and the chamber, is rotated to generate a water jet flowing toward the peening object in one region in the chamber, the one region is a region closer to the peening object than the mesh. A plurality of shots 4 put in the region 30A moves toward the peening object along with the water jet and collides with the surface of the peening object. After the collision, the shots move toward the mesh along with the water jet. Compression residual stress is given to the surface of the peening object with which the shots have collided. Thus, spreading of contaminants peeled off from a peening object can be prevented.

Abstract: A balloon catheter and a stent delivery system are disclosed, which includes a shaft portion of which an axially orthogonal cross section of an outer peripheral surface has a polygonal shape, and a balloon which is foldable on the outer peripheral surface of the shaft portion and in which turned-back portions are formed when folded. Portions formed to linearly extend along an axial direction in the turned-back portions are respectively positioned on sides of the polygonal shape. A stent can be arranged on an outer periphery of a balloon in the balloon catheter and expands in response to dilation of the balloon.

Abstract: In a water jet peening apparatus, a high-pressure under-water pump is installed on an upper end of a casing and an injection nozzle drive mechanism equipped with an injection nozzle is attached to the casing. A high-pressure hose whose one end is connected to the high-pressure under-water pump is disposed in the casing and the other end of the high-pressure hose is connected to the injection nozzle. The casing is seated at an upper end of a control rod drive mechanism housing and the high-pressure under-water pump is driven. The high-pressure water pressurized by the high-pressure under-water pump is supplied to the injection nozzle through the high-pressure hose in the casing and is jetted toward the weld portion between the control rod drive mechanism housing and a stub tube. The time required for a water jet peening operation can be shortened.

Abstract: A chamber having a water jet generation apparatus and a mesh installed inside is pushed against a surface of a peening object. A rotary vane of the water jet generation apparatus, disposed in a region in the chamber between the mesh and the chamber, is rotated to generate a water jet flowing toward the peening object in one region in the chamber, the one region is a region closer to the peening object than the mesh. A plurality of shots 4 put in the region 30A moves toward the peening object along with the water jet and collides with the surface of the peening object. After the collision, the shots move toward the mesh along with the water jet. Compression residual stress is given to the surface of the peening object with which the shots have collided. Thus, spreading of contaminants peeled off from a peening object can be prevented.