Abstract: A pump includes a vibrating plate, a flow path forming member, a pump chamber, and a film valve. The vibrating plate is provided with a piezoelectric element, vibrates due to distortion of the piezoelectric element, and has a gap on an outer periphery. The flow path forming member is disposed so as to face the vibrating plate, and has a hole in a portion facing the vibrating plate. The pump chamber is surrounded by the vibrating plate and the flow path forming member, and has a central space communicating with the hole and an outer edge space communicating with the gap. The film valve is disposed in the pump chamber. The film valve is in contact with the vibrating plate and the flow path forming member when a pressure in the central space is lower than a pressure in the outer edge space.

Abstract: A valve includes a first plate having a first vent hole; a second plate defining a valve chamber, which communicates with the first vent hole, between the second plate and the first plate, the second plate having a second vent hole that communicates with the valve chamber and that does not face the first vent hole; and a movable plate having a third vent hole that faces the second vent hole and disposed in the valve chamber such that the movable plate is movable between the first plate and the second plate. The second plate has an auxiliary hole that does not face the third vent hole in the movable plate, the auxiliary hole being surrounded by an edge portion that forms a first corner portion having a substantially convex rounded shape in front view of a principal surface of the second plate at a side facing the valve chamber.

Abstract: An actuator includes a vibrating member, a frame, and an adhesive. The vibrating member includes a main surface and a main surface, and a piezoelectric element is mounted on the main surface. The vibrating member has a plate shape and includes an outer edge portion having a greater shape than the piezoelectric element in plan view and not abutting the piezoelectric element). The frame has an outer edge shape that is smaller than the vibrating member. The frame and the main surface in the outer edge portion of the vibrating member are adhered to each other with the adhesive. In plan view, the outer edge shape of the frame is smaller than an outer shape of the outer edge portion of the vibrating member. The frame includes a projection portion that projects outward from part of an outer edge.

Abstract: The present disclosure includes: a vibrating plate having a piezoelectric body connected to a main surface thereof; a cover including a top plate that faces another main surface of the vibrating plate and that has an opening part, and a side wall connected to an outer peripheral portion of the top plate so as to surround a space between the top plate and the vibrating plate; a support portion connected to the side wall and supports an outer periphery of the vibrating plate; an opening between the side wall and the vibrating plate; and a protrusion on any one out of the top plate, the side wall, and the vibrating plate so as to protrude into the space. The protrusion is provided between the opening part of the top plate and the side wall in a cross section.

Abstract: A piezoelectric pump includes a first top plate, a second top plate, a diaphragm, a first side wall, and a second side wall. The diaphragm has a vibrating part to which a piezoelectric element is attached, a frame part, and a connecting part. The connecting part has formed therein a third opening which lets a first pump chamber and a second pump chamber communicate. The frame part has formed therein a fourth opening which communicates with the third opening and also communicates with outside. The piezoelectric pump further includes: in the first pump chamber, an annular first valve provided as spaced from a first opening in a planar view so as to surround the first opening; and in the second pump chamber, an annular second valve provided as spaced from a second opening in the planar view so as to surround the second opening.

Abstract: A fluid control device (101) includes a pump (20), a container (70) that is pressurized or decompressed by the pump (20), a valve (60) that allows communication between the container (70) and an outside of the container (70) when the valve (60) is in an opened state, and a controller (90) that controls the pump (20) and the valve (60). The controller (90) pressurizes or decompresses the container (70) by closing the valve (60) and driving the pump (20) and then cools down the pump (20) by opening the valve (60) and driving the pump (20). Accordingly, an increase in the temperature of the pump can be reduced, and convenience of the fluid control device can be improved.

Abstract: A piezoelectric pump includes a first top board, a second top board, a diaphragm, a first side wall, a second side wall, a first valve, and a second valve. The first valve has an annular shape to surround the first aperture while being spaced apart from the first aperture and the second aperture, and is disposed in the first pump chamber between the first aperture and the second aperture when viewed in a plan. The second valve has an annular shape to surround the third aperture while being spaced apart from the third aperture and the fourth aperture, and is disposed in the second pump chamber between the third aperture and the fourth aperture when viewed in a plan.

Abstract: A nebulizer includes a housing and a mouthpiece. The housing surrounds a pump for spraying a liquid reagent out of the nebulizer. An opening is formed in the housing. The inside and the outside of the housing communicate with each other through the opening. Arrow indicates an air flow from the opening to an inlet of the pump.

Abstract: A fluid control apparatus includes a piezoelectric pump, a pressure vessel, an input unit, a drive control unit, and a driving circuit. The piezoelectric pump has a pump chamber whose volume fluctuates due to displacement of a piezoelectric element, a valve chamber communicated with the pump chamber and has a valve diaphragm, a pump chamber opening that allows the pump chamber to be communicated with an outside of the pump chamber, and a valve chamber opening that allows the valve chamber communicate with an outside of the valve chamber. The pressure vessel is communicated with the valve chamber. The driving circuit drives the piezoelectric element upon application of a driving power-supply voltage from the drive control unit. The drive control unit adjusts the driving power-supply voltage or a driving current corresponding to the driving power-supply voltage in accordance with a vibration state of the valve diaphragm.

Abstract: A fluid control apparatus (10) includes a first major plate (20), a piezoelectric device (30), a second major plate (40), a peripheral plate (50), a first film (61), and a second film (62). A space enclosed by the first major plate (20), the second major plate (40), and the peripheral plate (50) serves as a pump chamber (100) of the fluid control apparatus (10). A rectification base member (80) is provided between the first major plate (20) and the second major plate (40). The first film (61) is provided on the first major plate (20) and includes a movable portion positioned closer to the peripheral plate (50) than a fixed end thereof. The second film (62) is provided on a major surface (802) of the rectification base member (80) and includes a movable portion positioned across the fixed end thereof from the peripheral plate (50).

Abstract: A piezoelectric pump includes a first faceplate, a second faceplate, a diaphragm, a first peripheral wall, and a second peripheral wall. The diaphragm includes a vibrating portion to which a piezoelectric device is attached, a frame portion, and a connecting portion. The connecting portion defines a third opening that allows a first pump chamber and a second pump chamber to communicate with each other. The first pump chamber is provided with an annular first valve surrounding a first opening at a distance from the first opening in plan view from a major surface of the first faceplate toward a major surface of the diaphragm.

Abstract: A pump includes a housing, a first vibrating body, a second vibrating body, and a peripheral wall portion that define a pump chamber, and a driving body. The housing has a first wall portion opposed to the first vibrating body and a second wall portion. The first wall portion includes a first concave portion that opens toward the first vibrating body and opposed to a central portion of the first vibrating body and a first circumferential portion adjacent to the first concave portion. A first chamber includes a first wide portion defined by the first concave portion and the first vibrating body, and a first narrow portion defined by the first circumferential portion and the first vibrating body. The first narrow portion overlaps with at least part of the first vibrating body.

Abstract: A fluid control device includes a valve, a pump and a film valve. The valve includes a first main plate, a second main plate, a first side plate, and a valve chamber. The first main plate has a first vent hole, and the second main plate has a second vent hole. The film valve is disposed in the valve chamber. The first vent hole is positioned in a central region of the valve chamber, and the second vent hole is positioned in an outer end region of the valve chamber. The film valve is positioned between the first vent hole and the second vent hole. The film valve is fixed to the second main plate in a state in which an end portion on a side of the outer end region or an end portion on a side of the central region is capable of vibrating.

Abstract: A first main plate has a first principal surface and a second principal surface. A second main plate has a third principal surface, a fourth principal surface, and an aperture. A piezoelectric element is provided on the first main plate and vibrates the first main plate. A first frame is disposed outside an outer peripheral end of the first main plate. First connecting portions connect the first main plate and the first frame to each other. Apertures are formed between the first connecting portions and connect a space adjacent to the first principal surface and a space adjacent to the second principal surface to each other. The second frame is disposed outside an outer peripheral end of the first frame. A second connecting portion connects the first frame and the second frame to each other.

Abstract: A fluid control device includes: a case that includes a case top plate having a first vent hole, a case side plate, and a case bottom plate having a second vent hole; a pump body; and a holding member that holds the pump body relative to the case. The pump body includes a first main plate, a second main plate that faces one main surface of the first main plate, a side plate, and a driving member that is arranged on the first main plate. The first main plate includes a plurality of first openings arranged in a ring shape. The second main plate is arranged at a side of the first main plate nearer the case top plate and has a second opening at a position that overlaps the first vent hole in a plan view.

Abstract: A fluid control device includes a housing. The housing includes a first main plate, a second main plate, and a side plate connecting the first main plate and the second main plate. The housing has a pump chamber defined by the first main plate, the second main plate, and the side plate. The fluid control device also includes a driver, a first hole that extends through the first main plate or the second main plate, and a first recess formed in the first main plate between a center and a circumference or the second main plate between a center and a circumference.

Abstract: A fluid control device includes a pump and an outer housing containing the pump. The outer housing has a first outer wall that forms an internal space on a flat plate side of the pump and that has a through hole allowing the internal space and an external space to communicate with each other. The first outer wall includes an outer wall main plate facing a piezoelectric element, and a side plate that is connected to the outer wall main plate and that has the through hole. The outer wall main plate has a higher thermal conductivity than that of a second outer wall.

Abstract: A fluid control device has a housing. A first main plate of the housing includes a vibration portion, on which a drive body is disposed, having a rotationally symmetric shape in plan view, and multiple openings which is formed outside the vibration portion and through which a pump chamber and the outside communicate with each other. A second main plate includes an opening through which the pump chamber and the outside communicate with each other and which has a rotationally symmetric shape in plan view. The opening is arranged to include the center of the vibration portion in plan view of the first main plate and the second main plate. An opening area of the opening is from 10% to 75% of an area of the vibration portion.

Abstract: A fluid control device includes a fluid conveying element formed by a pump and a valve, and an outer housing containing the fluid conveying element. The outer housing includes a first outer wall forming an internal space closer to the pump, and a second outer wall forming an internal space closer to the valve. The second outer wall includes an outer-wall main plate having a part overlapping, in plan view, a through hole that is a discharge hole of the valve. A thermal conductivity of the part of the outer-wall main plate overlapping the discharge hole is higher than a thermal conductivity of the first outer wall.

Abstract: A pressure-controlling device (10) includes a pump (21), a connection pipe (30), a first valve (41), and a second valve (42). The pump (21) has an inlet port (211) and an outlet port (212). The connection pipe (30) has a first end in communication with the outlet port (212), and a second end in communication with the inlet port (211) and that has a first space (31) that contains the first end, a second space (32) that contains the second end, and a third space (33) that is located between the first space (31) and the second space (32).