Abstract: A first main plate has a first principal surface and a second principal surface. A second main plate has a third principal surface, a fourth principal surface, and an aperture. A piezoelectric element is provided on the first main plate and vibrates the first main plate. A first frame is disposed outside an outer peripheral end of the first main plate. First connecting portions connect the first main plate and the first frame to each other. Apertures are formed between the first connecting portions and connect a space adjacent to the first principal surface and a space adjacent to the second principal surface to each other. The second frame is disposed outside an outer peripheral end of the first frame. A second connecting portion connects the first frame and the second frame to each other.

Abstract: A pump includes a vibrating plate, a flow path forming member, a pump chamber, and a film valve. The vibrating plate is provided with a piezoelectric element, vibrates due to distortion of the piezoelectric element, and has a gap on an outer periphery. The flow path forming member is disposed so as to face the vibrating plate, and has a hole in a portion facing the vibrating plate. The pump chamber is surrounded by the vibrating plate and the flow path forming member, and has a central space communicating with the hole and an outer edge space communicating with the gap. The film valve is disposed in the pump chamber. The film valve is in contact with the vibrating plate and the flow path forming member when a pressure in the central space is lower than a pressure in the outer edge space.

Abstract: A piezoelectric blower includes a valve unit, a pump unit, a controller, and an outer housing. The valve unit includes a plurality of ejection holes and film holes. The pump unit includes a plurality of communication holes and suction holes. The outer housing covers the valve unit and the pump unit with a gap between the outer housing and each of the valve unit and the pump unit. Thus, the outer housing forms vent passages between the outer housing and the valve unit and between the outer housing and the pump unit. The inlet communicates with the vent passage. The outlet communicates with the vent passage. At least one of the inlet and the outlet is displaced from a central axis of the pump chamber. The ejection holes, the film holes, the communication holes, and the suction holes are symmetric about the central axis of the pump chamber.

Abstract: A fluid control device includes: a first flat plate; a frame disposed outside an outer peripheral end of the first flat plate via openings; a connection member connecting the first flat plate and the frame; a plate member having through holes in a portion facing the first flat plate; and a valve member configured to rectify a fluid flow. An outer end of the valve member projects toward an outside of the outer peripheral end of the first flat plate. A portion of the valve member closer to an inner end thereof located closer to a center of the first flat plate is fixed to the first flat plate. The outer end of the valve member is not fixed. The valve member has a first portion closer to the outer end, and a second portion closer to an inner end of the first portion.

Abstract: A pump device includes a first piezoelectric pump, a second piezoelectric pump connected in series to the first piezoelectric pump on an upstream side of the first piezoelectric pump, a driver unit that supplies alternating-current input power to the first piezoelectric pump and the second piezoelectric pump, and a distribution setting unit that sets a distribution ratio of the input power to be supplied from the driver unit to each of the first piezoelectric pump and the second piezoelectric pump, wherein the distribution setting unit sets a ratio of the input power for the second piezoelectric pump to the input power for the first piezoelectric pump to a value greater than 1 and equal to or less than 1.57.

Abstract: A pump (10) includes: a flat plate (20); a piezoelectric element (21); a flat plate (30); a side wall (40); a support member (22); a support member (32); a shielding plate (500); a ventilation hole (23); a ventilation hole (33); a film valve (61); and a film valve (62). The film valve (61) is arranged in a region where the flat plate (20) and the shielding plate (500) face each other. The film valve (62) is arranged in a region where the flat plate (30) and the shielding plate (500) face each other. A center side of one of the film valve (61) and the film valve (62) is fixed in a state in which an outer edge side is movable, and the outer edge side of the other is fixed in a state in which the center side is movable.

Abstract: An actuator includes a frame, a central flat plate and connecting members. The frame has a regular square opening. The central flat plate has a circular shape and is disposed inside the regular square opening. A driving device is attached to the central flat plate. The connecting members are disposed inside the regular square opening at a position between the central flat plate and the frame. The connecting members connect the central flat plate and the frame. Each connecting member includes a first portion and a second portion. The first portion extends in a radial direction extending outward from the center of the central flat plate. The first portion is connected to the central flat plate and to the second portion. The second portion extends in a direction different from the extending direction of the first portion.

Abstract: A pump includes a vibrating plate, a flow path forming member, a pump chamber, and a film valve. The vibrating plate is provided with a piezoelectric element, vibrates due to distortion of the piezoelectric element, and has a gap on an outer periphery. The flow path forming member is disposed so as to face the vibrating plate, and has a hole in a portion facing the vibrating plate. The pump chamber is surrounded by the vibrating plate and the flow path forming member, and has a central space communicating with the hole and an outer edge space communicating with the gap. The film valve is disposed in the pump chamber. The film valve is in contact with the vibrating plate and the flow path forming member when a pressure in the central space is lower than a pressure in the outer edge space.

Abstract: A pump includes a housing, a piezoelectric device, a plurality of first holes, a plurality of second holes, and a plurality of first valves. The housing has a pump chamber defined by a first major plate, a second major plate, and a peripheral plate. The piezoelectric device is provided on the first major plate. The plurality of first holes each extend through the first major plate and are arranged annularly. The plurality of second holes each extend through the second major plate. The plurality of first valves are provided at the plurality of first holes, respectively. When the piezoelectric device is activated, the first major plate undergoes bending vibration with a node defined between a center and a peripheral edge of the first major plate. The plurality of first holes are provided between the node and the peripheral edge.

Abstract: A first power supply member and a second power supply member are arranged on the same side of a first member in a thickness direction of an actuator. The first power supply member includes a first external connection terminal. The second power supply member includes a second external connection terminal. The first external connection terminal and the second external connection terminal are arranged on the same positions in the thickness direction. A second insulating layer is arranged between the second power supply member and a frame body. A far end side portion on an opposite side to a side, on which the first external connection terminal protrudes, in the first power supply member is bent toward the frame body to be electrically connected with the frame body.

Abstract: A fluid control device includes a first main plate, a second main plate, a driving body, a frame body, a plurality of support bodies, a plurality of gaps, a side wall member, a valve film, and a fixing member. A pump chamber is formed by a flat plate part consisting of the first main plate, the frame body, and the plurality of support bodies, and the second main plate and the side wall member. The valve film is disposed on a main surface of the first main plate on the side where the pump chamber is located. The valve film has an annular shape and fixed to the first main plate by the fixing member so that an outer end thereof is a movable end. The outer end of the valve film overlaps the plurality of gaps located between the plurality of support portions in plan view.

Abstract: A fluid control device includes: a case that includes a case top plate having a first vent hole, a case side plate, and a case bottom plate having a second vent hole; a pump body; and a holding member that holds the pump body relative to the case. The pump body includes a first main plate, a second main plate that faces one main surface of the first main plate, a side plate, and a driving member that is arranged on the first main plate. The first main plate includes a plurality of first openings arranged in a ring shape. The second main plate is arranged at a side of the first main plate nearer the case top plate and has a second opening at a position that overlaps the first vent hole in a plan view.

Abstract: A pump includes a vibrating plate having a piezoelectric body on a first main surface, a cover including a top panel and a side wall, the top panel opposing a second main surface of the vibrating plate opposite to the first main surface, the top panel having a first cavity, and the side wall being connected to an outer peripheral portion of the top panel to surround a space between the top panel and the vibrating plate, a support portion connected to the side wall and supporting an outer periphery of the vibrating plate, and a second cavity formed between the side wall and the vibrating plate in a cross-sectional view in a direction orthogonal to a direction in which the second main surface of the vibrating plate and a main surface of the top panel oppose each other.

Abstract: An actuator includes a first main plate at which a piezoelectric element is disposed, a frame body, and a connection part. The frame body is disposed on an outer side of an outer edge of the first main plate and apart from the first main plate. The connection part is disposed between the first main plate and the frame body. The connection part has a plurality connection bodies and a gap, which are disposed along the outer edge, the plurality of connection bodies being connected to the first main plate and the frame body, the gap being disposed between the plurality of connection bodies. The first main plate and the connection bodies are made of the same material. A thickness of the connection bodies is more than a thickness of the first main plate.

Abstract: A pump includes a first pump chamber formed by a first plate member and a second plate member, a second pump chamber formed by a first plate member and a third plate member, and a driving member. The driving member causes the first plate member to perform flexural vibration, thereby causing pressure changes in both of the first pump chamber and the second pump chamber. The first plate member is provided with first hole portions not overlapping an axial line orthogonal to a central region of the first plate member, and a check valve is provided to each of the first hole portions. The second plate member and the third plate member are provided with a second hole portion and a third hole portion respectively, and the check valve is provided to at least one of the second hole portion and the third hole portion.

Abstract: A fluid control apparatus includes a valve and a pump. The valve has a valve chamber. The first main plate has a first aperture through which the valve chamber communicates with the outside, and the second main plate has a second aperture through which the valve chamber communicates with the outside. The valve further includes a valve diaphragm disposed inside the valve chamber. The valve diaphragm is configured to switch the communication state. The pump includes a piezoelectric device. The pump has a pump chamber. The pump chamber communicates with the valve chamber through the second aperture. In addition, in flexural vibration of the vibration unit, a frequency coefficient of the first main plate is greater than a frequency coefficient of the second main plate.

Abstract: A fluid control device includes: a case 200 that includes a case top plate having a first vent hole, a case side plate, and a case bottom plate having a second vent hole; a pump body; and a holding member that holds the pump body relative to the case. The pump body includes a first main plate, a second main plate that faces one main surface of the first main plate, a side plate, and a driving member that is arranged on the first main plate. The first main plate includes a plurality of first openings arranged in a ring shape. The second main plate is arranged at a side of the first main plate nearer the case top plate and has a second opening at a position that overlaps the first vent hole in a plan view.

Abstract: A fluid control device includes a piezoelectric pump having a piezoelectric element, a driving circuit that receives a driving power supply voltage applied thereto and drives the piezoelectric element, and a startup circuit disposed between the driving circuit and an input terminal for a power supply voltage. The startup circuit increases the driving power supply voltage to a voltage (V1) lower than a constant voltage (Vc) in a first stage (P1) after startup, maintains or decreases the driving power supply voltage in a second stage (P2) following the first stage (P1), and increases the driving power supply voltage to the constant voltage (Vc) in a third stage (P3) following the second stage (P2).

Abstract: A fluid control apparatus includes a first major plate, a piezoelectric device, a second major plate, a peripheral plate, a first film, and a second film. The first film is provided on a side of the first major plate that faces a pump chamber. The first film is provided on a first major surface in such a manner as to have a movable portion one end of which serves as a movable end. The second film is provided on a side of the second major plate that faces the pump chamber. The second film is provided on a third major surface in such a manner as to have a movable portion one end of which serves as a movable end. The first film and the second film are positioned between a first opening provided in the first major plate and a second opening provided in the second major plate.