Abstract: A first correction component calculation processing unit calculates diagonal components of a correction matrix based on first and second detection values. The first and second detection values are obtained by measurement in which a calibration reference body and the probe are moved relatively to each other in a normal direction on a surface of the calibration reference body so as to bring a measurement tip into contact with the surface of the calibration reference body at one point. A second correction component calculation processing unit calculates non-diagonal components of the correction matrix based on third and fourth detection values. The third and fourth detection values are obtained by scanning measurement using the measurement tip on the surface of the calibration reference body while maintaining a constant relative distance between the center of the measurement tip and a reference point or a reference line of the calibration reference body.

Abstract: A calculator includes a first filter, a second filter, and an adding device. The first filter outputs, as a first corrected value, a value in which displacement of a displacement table detected by a scale has been corrected based on first frequency transfer characteristics from a scale to a measured object station. The second filter outputs, as a second corrected value, a value in which the first corrected value is corrected based on second frequency transfer characteristics from a ball tip to a ball tip displacement detector. The adding device adds the second corrected value and displacement of the ball tip detected by the ball tip displacement detector to calculate a measured value.

Abstract: A shape measuring machine includes a slider that supports a scanning probe including a tip sphere. A scale unit detects a displacement of the slider. A tip sphere displacement detection unit detects a displacement of the tip sphere. A calculation unit includes a correction filter and an adder, and calculates a measurement value from the displacements of the slider and the tip sphere. The correction filter outputs a correction value that is obtained by correcting the displacement of the tip sphere detected by the tip sphere displacement detection unit based on an inverse characteristic of a frequency transfer characteristic from the scale unit to the tip sphere. The adder calculates the measurement value by adding the displacement of the slider detected by the scale unit and the correction value.

Abstract: A shape measuring machine includes a slider that supports a scanning probe. A scale unit detects a displacement of the slider. A tip sphere displacement detection unit detects a displacement of the tip sphere. A calculation unit includes a correction filter including a first and second filters and an adder, and calculates a measurement value from the displacements of the slider and the tip sphere. The first filter corrects the displacement of the slider based on a frequency transfer characteristic from the scale unit to the tip of the slider. The second filter outputs a value that is obtained by correcting a value corrected by the first filter based on a frequency transfer characteristic from the tip of the slider to the tip sphere as the correction value. The adder outputs a measurement value obtained by adding the correction value and the displacement of the tip sphere.

Abstract: A line image sensor including a light receiving plane on which two or more straight rows of pixels are disposed, the straight rows of pixels capturing images of regular fringes generated from light reflected from an irradiated body in accordance with the amount of light received by each pixel; at least two rows of pixels acquiring images of linear fringes crossing at right angles in two directions among the fringe projected onto the light receiving plane.

Abstract: A shape measuring machine includes a slider that supports a scanning probe including a tip sphere. A scale unit detects a displacement of the slider. A tip sphere displacement detection unit detects a displacement of the tip sphere. A calculation unit includes a correction filter and an adder, and calculates a measurement value from the displacements of the slider and the tip sphere. The correction filter outputs a correction value that is obtained by correcting the displacement of the tip sphere detected by the tip sphere displacement detection unit based on an inverse characteristic of a frequency transfer characteristic from the scale unit to the tip sphere. The adder calculates the measurement value by adding the displacement of the slider detected by the scale unit and the correction value.

Abstract: A shape measuring machine includes a slider that supports a scanning probe. A scale unit detects a displacement of the slider. A tip sphere displacement detection unit detects a displacement of the tip sphere. A calculation unit includes a correction filter including a first and second filters and an adder, and calculates a measurement value from the displacements of the slider and the tip sphere. The first filter corrects the displacement of the slider based on a frequency transfer characteristic from the scale unit to the tip of the slider. The second filter outputs a value that is obtained by correcting a value corrected by the first filter based on a frequency transfer characteristic from the tip of the slider to the tip sphere as the correction value. The adder outputs a measurement value obtained by adding the correction value and the displacement of the tip sphere.

Abstract: A coordinate measuring machine includes: a probe provided with a measurement piece; a moving mechanism that effects a scanning movement of the probe; and a host computer for controlling the moving mechanism. The host computer includes a displacement acquiring unit for acquiring a displacement of the moving mechanism and a measurement value calculating unit for calculating a measurement value. The measurement value calculating unit includes a correction-amount calculating unit for calculating a correction amount for correcting a position error of the measurement piece and a correcting unit for correcting the position error of the measurement piece based on the displacement of the moving mechanism and the correction amount.

Abstract: A method for manufacturing a wiring board, which prevents electrostatic destruction generated in a mask pattern, by employing a structured exposure mask at a low cost is provided. The method can comprise the steps of forming a photosensitive resin layer on an insulating layer located underneath a predetermined conductor layer, forming a plating resist by exposing and developing the photosensitive resin layer with an exposure light while an exposure mask is disposed on a surface of the photosensitive resin layer, forming a metal plating layer that has a conductor pattern formed by applying a metal plating to an opening of the plating resist, and removing the plating resist. The exposure mask may have a plurality of graphic patterns, and each corner of the graphic patterns maybe chamfered by 50 micrometers or more so that electrostatic destruction due to electric discharge between the adjacent graphic patterns is prevented.

Abstract: A coordinate measuring machine includes: a probe that has a contact point capable of movement within a predetermined range; a movement mechanism for moving the probe; and a controller for controlling the movement mechanism. The controller has a measurement value calculating unit for calculating a position of the contact point based on a displacement of the movement mechanism and a displacement of the probe. The measurement value calculating unit includes: a correction parameter calculator for calculating a correction parameter for correcting the displacement of the probe based on a measurement condition in measuring an object; a corrector for correcting the displacement of the probe based on the correction parameter; and a displacement synthesizing unit that synthesizes the displacement of the movement mechanism and the displacement of the probe corrected by the corrector to calculate the position of the contact point.

Abstract: The controller includes a position commander and an error corrector. The position commander outputs a position command value for moving a moving mechanism. The error corrector includes a feedforward controller and a compensator calculator. The feedforward controller performs a feedforward control of the moving mechanism based on the position command value outputted from the position commander and includes a compensator. The compensator calculator calculates a value to be set as the compensator of the feedforward controller based on the position command value outputted from the position commander.

Abstract: A coordinate measuring machine includes: a probe that has a contact point capable of movement within a predetermined range; a movement mechanism for moving the probe; and a controller for controlling the movement mechanism. The controller has a measurement value calculating unit for calculating a position of the contact point based on a displacement of the movement mechanism and a displacement of the probe. The measurement value calculating unit includes: a correction parameter calculator for calculating a correction parameter for correcting the displacement of the probe based on a measurement condition in measuring an object; a corrector for correcting the displacement of the probe based on the correction parameter; and a displacement synthesizing unit that synthesizes the displacement of the movement mechanism and the displacement of the probe corrected by the corrector to calculate the position of the contact point.

Abstract: A surface-profile measuring instrument includes a movement-estimating unit that estimates a movement state of a drive mechanism in accordance with a scanning vector command issued by a scanning vector commanding unit to calculate an estimated movement state quantity, and a correction calculating unit that corrects a detection value of a drive sensor in accordance with the estimated movement state quantity calculated by the movement-estimating unit. The movement-estimating unit has a nominal model setting unit in which a nominal model from the scanning vector commanding unit to the probe is set.

Abstract: The controller includes a position commander and an error corrector. The position commander outputs a position command value for moving a moving mechanism. The error corrector includes a feedforward controller and a compensator calculator. The feedforward controller performs a feedforward control of the moving mechanism based on the position command value outputted from the position commander and includes a compensator. The compensator calculator calculates a value to be set as the compensator of the feedforward controller based on the position command value outputted from the position commander.

Abstract: A coordinate measuring machine includes: a probe provided with a measurement piece; a moving mechanism that effects a scanning movement of the probe; and a host computer for controlling the moving mechanism. The host computer includes a displacement acquiring unit for acquiring a displacement of the moving mechanism and a measurement value calculating unit for calculating a measurement value. The measurement value calculating unit includes a correction-amount calculating unit for calculating a correction amount for correcting a position error of the measurement piece and a correcting unit for correcting the position error of the measurement piece based on the displacement of the moving mechanism and the correction amount.

Abstract: A control device includes a first switch (400) by which an input signal to a motor speed control loop (910) is selected from a signal of a position control loop (300) and a signal of the speed control loop (200), and a switch controller (500) that controls switching of the first switch (400), so that the first switch (400) can switch between a quadruple loop (a current control loop, the motor speed control loop, the speed control loop (200) and the position control loop (300)) with the speed control loop (200) embedded therein, and a triple loop (the current control loop, the motor speed control loop and the position control loop (300)) without the speed control loop (200), corresponding to a transient state and a steady state.

Abstract: An arithmetic unit 212 is a correction filter 212a based on the relative displacement characteristics between a scale unit 19b and the end of a slider 16, and calculates a measured value by adding up together the displacement of the stylus tip 17a and a value found by applying the correction filter 212a to the displacement of the slider 16 detected by the scale unit 19b.

Abstract: A surface-profile measuring instrument includes a movement-estimating unit (600) that estimates an movement state of a drive mechanism in accordance with a scanning vector command issued by a scanning vector commanding unit (220) to calculate an estimated movement state quantity, and a correction calculating unit (700) that corrects a detection value of a drive sensor in accordance with the estimated movement state quantity calculated by the movement estimating unit (600). The movement-estimating unit (600) has a nominal model setting unit (311) in which a nominal model as a frequency transfer characteristics from the scanning vector commanding unit to the probe of the scanning probe is set.

Abstract: In a quadruple loop position control device (1) including: a drive controller (5) having a current control loop that controls motor current (I) and a motor speed control loop that controls a motor speed (Vm); a speed control loop (3) that controls a speed (Vd) of a driven body (2); and a position control loop (4) that controls a position (Pd) of the driven body (2), an adder (6) that adds an output value from the position control loop (4) and an output value from the speed control loop (3) and inputs an addition result to the motor speed control loop is provided. By providing the adder (6), the position control device (1) functions as a control device of a first-order system, so that occurrence of an overshoot may securely be avoided even when respective transfer functions of the position control device (1) are set for purpose of suppressing a vibrating behavior of the driven body (2).

Abstract: An arithmetic unit 212 is a correction filter 212a based on the relative displacement characteristics between a scale unit 19b and the end of a slider 16, and calculates a measured value by adding up together the displacement of the stylus tip 17a and a value found by applying the correction filter 212a to the displacement of the slider 16 detected by the scale unit 19b.