Abstract: A diaphragm valve includes a body 3 having a flow path 2 formed therein, a sheet 4 formed in the flow path 2, a metal diaphragm 5 for opening and closing the flow path 2 by abutting on or separating from the sheet 4, a pair of clamping parts 6 and 7 for claiming peripheral edge portions of both side surfaces of the metal diaphragm 5 respectively to fix the metal diaphragm 5 to the body 3, and an actuator 8 for abutting the metal diaphragm 5 on the sheet 4 or separating the metal diaphragm from the sheet 4, wherein a fluorine resin coating is formed on a sheet side surface 5a of the metal diaphragm 5 in a region excluding a clamping region D-C between the sheet side surface 5a and the clamping part 7, and at least in a contact region B-A with the sheet 4 in a region C surrounded by the clamping region D-C.

Abstract: A pressure-type flow rate control device includes a restriction part; a control valve provided upstream of the restriction part; an upstream pressure sensor for detecting pressure between the restriction part and the control valve; and an arithmetic processing circuit connected to the control valve and the upstream pressor sensor. The device is configured to perform flow rate control by controlling the control valve according to an output of the upstream pressure sensor. The arithmetic processing circuit performs an operation of closing the control valve in order to reduce a flow rate of a fluid flowing through the restriction part, and performs an operation of closing the control valve by feedback control in which a target value is an exponential function more gradual than the pressure drop characteristic data when a gas flows out of the restriction part.

Abstract: The liquid level meter according to the present invention includes a resistive temperature detector, a temperature measuring body located above it, a temperature detecting unit detecting temperatures of the resistive temperature detector and the temperature measuring body, a current controlling unit determining a current value to be flowed through the resistive temperature detector so that the resistive temperature detector and the temperature measuring body become a predetermined temperature difference, a power supply unit supplying the current of the determined current value to the resistive temperature detector, and a liquid level detecting unit detecting a position of a liquid level.

Abstract: In order to appropriately control temperatures of fluid heating sections that are maintained at different temperatures, the fluid control device (100) comprises a plurality of fluid heating sections (1) connected to each other and each having a flow path or a fluid accommodating portion inside, heaters (10) configured to heat each of the plurality of fluid heating sections to different temperatures, and heat insulating members (13, 13?) disposed between adjacent fluid heating sections.

Abstract: A concentration measuring device 100 comprises: a measurement cell 4 having a flow path, a light source 1, a photodetector 7 for detecting light emitted from the measurement cell, and an arithmetic circuit 8 for calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portion 3 fixed to the cell body so as to contact the flow path, and a reflective member 5 for reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell body 40 by a window holding member 30 via a gasket 15, an annular sealing protrusion 15a is provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusion 42a is also provided on a support surface 42 of the cell body for supporting the second surface opposite to the first surface of the gasket.

Abstract: A self-diagnosis method of a flow rate control device includes: a step (a) for measuring a pressure drop characteristic after a pressure control valve (6) has been changed to a closed state from a state where a fluid flows from the upstream side of the pressure control valve with the opening of a flow rate control valve (8) is larger than a restriction part; a step (b) for measuring the pressure drop characteristic after the pressure control valve has been changed to the closed state from a state where the fluid flows from the upstream side of the flow rate control valve to the downstream side with the opening of the flow rate control valve is smaller than the restriction part; a step (c) for determining whether there is an abnormality by comparing the pressure drop characteristic measured in step (a) with a corresponding reference pressure drop characteristic; a step (d) for determining whether there is an abnormality by comparing the pressure drop characteristic measured in step (b) with a corresponding ref

Abstract: The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ?P between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.

Abstract: The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, optical fibers 11 and 12 for connecting the electric unit 20 and the fluid unit 10 and is configured to measure the concentration of the fluid in the measurement cell by detecting the light incident from the light source 22 to the measurement cell and then emitted from the measurement cell by the photodetector 24, where optical connection parts 32 and 34 connected to the optical fibers 11, 12 and the light source 22 or the photodetector 24 are integrally provided in the electric unit 20.

Abstract: A concentration measurement device 20 for measuring the concentration of the a gas flowing through a junction block 14 connected to a plurality of gas supply lines includes a light source 40 for generating light incident to a flow path formed in the junction block, a photodetector 44 for receiving light emitting from the flow path, and an arithmetic control circuit 46 for determining the concentration of the gas flowing through the flow path based on the output of the photodetector, translucent incident windows 26 and 23 for making light from the light source incident to the flow path and, at least one of the translucent emitting windows 28 and 23 for emitting light passing through the flow path being sealed and fixed to the junction block 14.

Abstract: A piezoelectric element-driven valve 1 including a main body, a valve element, piezoelectric actuators, a plurality of cylindrical actuator boxes arranged in series, a cylindrical outer connecting jig detachably connecting the adjacent actuator boxes and having an opening for drawing out wiring, a plurality of piezoelectric actuators accommodated in the actuator box respectively in the same direction, and a cylindrical inner connecting jig slidably accommodated in the outer connecting jig and having an opening for positioning the adjacent piezoelectric actuators and drawing out wiring.

Abstract: The flow rate measuring method is performed in a common gas supply system comprising a plurality of gas supply paths each having a first valve, and a gas measuring device formed downstream side of the plurality of gas supply paths, having a pressure sensor, a temperature sensor, and a downstream side second valve.

Abstract: An abnormality detection method performed using a flow rate control device including a restriction portion, a control valve, a first pressure sensor, a second pressure sensor, and a downstream valve, includes a step of changing the control valve and the downstream valve from an open state to a closed state, a step of measuring an upstream pressure or a downstream pressure in the closed state, and at least one step of (a) extracting an upstream pressure at a point when a difference between the upstream pressure and the downstream pressure reaches a predetermined value as an upstream convergence pressure, and extracting the downstream pressure as a downstream convergence pressure, and (b) extracting the time from a point when the control valve are changed to a closed state to a point when a difference between the upstream pressure and the downstream pressure reaches a predetermined value as a convergence time.

Abstract: A Concentration measurement device 100 comprises: a measurement cell 4 having a flow path through which a gas flows, a light source 1 for generating incident light to the measurement cell, a photodetector 7 for detecting light emitted from the measurement cell, a pressure sensor 20 for detecting a pressure of the gas in the measurement cell, a temperature sensor 22 for detecting a temperature of the gas in the measurement cell, and an arithmetic circuit 8 for calculating a concentration of the gas based on an output P of the pressure sensor, an output T of the temperature sensor, an output I of the photodetector, and an extinction coefficient ?, wherein the arithmetic circuit 8 is configured to calculate the concentration using the extinction coefficient ? determined on the basis of the output of the temperature sensor 22.

Abstract: A flow rate control method performed using a flow rate control device 100 comprising a first control valve 6 provided in a flow path, a second control valve 8 provided downstream of the first control valve, and a pressure sensor 3 for measuring fluid pressure downstream of the first control valve, the method comprising steps of: (a) closing the opening of the first control valve from a state in which, while controlling the opening of the first control valve based on an output of the pressure sensor so as to be the first flow rate, maintaining the opening of the second control valve in an open state, and flowing a fluid at the first flow rate; and (b) based on the output of the pressure sensor, the pressure remaining downstream of the first control valve is controlled by adjusting the opening of the second control valve, and flowing the fluid at the second flow rate downstream of the second control valve.

Abstract: A concentration measuring device 100 comprises: a measurement cell 4 having a flow path, a light source 1, a photodetector 7 for detecting light emitted from the measurement cell, and an arithmetic circuit 8 for calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portion 3 fixed to the cell body so as to contact the flow path, and a reflective member 5 for reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell body 40 by a window holding member 30 via a gasket 15, an annular sealing protrusion 15a is provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusion 42a is also provided on a support surface 42 of the cell body for supporting the second surface opposite to the first surface of the gasket.

Abstract: A fluid controller is provided having a flow path through which a fluid can flow, a closed space separated from the flow path by an isolation member, and a leak port capable of communicating the closed space with an external part. An anomaly detection device for detecting an anomaly has a pressure sensor detachably fixed to the leak port, a pressure sensor for detecting the pressure in the closed space, a processing module for executing a predetermined information processing, and an detachable mechanism for blocking the leak port from the external part in the state of being fixed. The processing module determines an anomaly of the fluid controller by comparing a detection value detected by the pressure sensor to a predetermined threshold, and transmits a discrimination result of the anomaly of the fluid controller to a server.

Abstract: A fluid control device includes a main body block including a first flow passage, and a second flow passage, a first and second fluid control units installed on an installation surface of the main body block. The first and second flow passages include a first portion extending along a first direction and a second flow passage portion orthogonal to the first direction. The second portion is formed of a hole extending from a side surface of the main body block and a sealing member.

Abstract: A concentration measurement method is performed using a concentration measurement device comprising: a measurement cell for flowing a fluid to be measured; a light source for generating light incident on the measurement cell; a photodetector for detecting light emitted from the measurement cell; an arithmetic unit for calculating the absorbance and concentration of the fluid to be measured based on an output of the photodetector; and a temperature sensor for measuring the temperature of the fluid to be measured.

Abstract: A flow rate control method for raising a flow rate performed in a flow control device having a first control valve, a second control valve downstream of the first control valve, and a pressure sensor for measuring a pressure between the first and the second control valves, comprises a step (a) of determining a pressure remaining downstream of the first control valve in a state of closing the second control valve, and a step (b) of controlling the pressure remaining downstream of the first control valve by adjusting the opening degree of the second control valve based on the output of the pressure sensor to flow the fluid downstream the second control valve at the first flow rate.

Abstract: A concentration measurement device 100 includes a light source 22 for generating incident light to a measurement space 10A, a photodetector 24 for receiving light emitted from the measurement space, and an arithmetic control circuit 26 for calculating a concentration of a measurement fluid on the basis of an output of the photodetector, and the light source includes a first light-emitting element 22a for generating light having a first wavelength, and a second light-emitting element 22b for generating light having a second wavelength, and the concentration measurement device is configured so as to calculate the concentration using either light of the first wavelength or the second wavelength on the basis of the pressure or temperature of the measurement fluid.