Patents by Inventor Nobuto Kawahara
Nobuto Kawahara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11745409Abstract: A storage device stores an ejection cartridge including an accommodating container that accommodates an ejection material, and an ejection head that includes an ejection port for ejecting the ejection material accommodated in the accommodating container. The storage device includes a mount on which the ejection cartridge is mounted, and includes a pressure regulating tank configured to control a pressure of an inside of the accommodating container of the ejection cartridge fixed to the mount with its ejection port not enclosed.Type: GrantFiled: April 2, 2020Date of Patent: September 5, 2023Assignee: CANON KABUSHIKI KAISHAInventors: Nobuto Kawahara, Yoshimasa Araki, Yutaka Mita, Noriyasu Hasegawa, Yuichi Iwasaki
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Patent number: 11573487Abstract: An imprint apparatus that molds an imprint material on a substrate with a mold, the imprint apparatus including a applying device that includes a discharge surface in which a discharge opening is formed, the applying device applying the imprint material to the substrate through the discharge opening, and a measuring device that measures the position of the discharge opening by having the measuring device measure a position of an uneven structure formed in a protruded shape or a recessed shape with respect to a direction perpendicular to the discharge surface.Type: GrantFiled: August 13, 2018Date of Patent: February 7, 2023Assignee: Canon Kabushiki KaishaInventors: Nobuto Kawahara, Yutaka Mita
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Patent number: 11535039Abstract: An ejection-material ejection apparatus and an imprinting apparatus are provided which are capable of quickly detecting damage of a flexible membrane and avoiding contact between an ejection material and an operating liquid even if part of the flexible membrane is damaged. The flexible membrane includes a first film (1) covering a first storing space (5) for the ejection material, a second film (2) covering a second storing space (6) for the operating liquid, and an inter-film space 4 situated between the first film (1) and the second film (2). A change in state of the inter-film space (4) resulting from communication between at least one of the first storing space (5) and the second storing space (6) and the inter-film space (4) is detected with a liquid sensor (41), a flow speed sensor (77), and a liquid leakage sensor (42).Type: GrantFiled: November 28, 2018Date of Patent: December 27, 2022Assignee: CANON KABUSHIKI KAISHAInventors: Nobuto Kawahara, Yoshimasa Araki, Yuichi Iwasaki, Noriyasu Hasegawa
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Patent number: 11333972Abstract: An ejection device is used for an imprint apparatus that presses a mold against an ejection material ejected onto a substrate to form a pattern. The ejection device includes: a housing unit having an ejection head configured to eject the ejection material onto the substrate, and housing configured to accommodate the ejection material; and a control unit configured to control processing of the ejection device. The control unit switches the processing according to a usage status of a consumable part included in the housing unit.Type: GrantFiled: April 14, 2020Date of Patent: May 17, 2022Assignee: CANON KABUSHIKI KAISHAInventors: Hisashi Namba, Noriyasu Hasegawa, Ken Katsuta, Nobuto Kawahara, Hideki Matsumoto
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Patent number: 11267252Abstract: Provided is an ejection apparatus including: an ejection head having an ejection opening for ejecting an ejection material in a liquid state; a storage container storing therein the ejection material and communicating with the ejection head; and a pressure control unit that maintains the pressure inside the storage container at a negative pressure. The pressure control unit generates a first pressure in the storage container in a normal operation, the first pressure being capable of forming a meniscus of the ejection material in the ejection opening. The pressure control unit drops the pressure inside the storage container to at least the first pressure in a case where the pressure inside the storage container reaches a predetermined pressure above the first pressure.Type: GrantFiled: May 21, 2020Date of Patent: March 8, 2022Assignee: CANON KABUSHIKI KAISHAInventors: Masahiro Kuri, Noriyasu Hasegawa, Hisashi Namba, Ken Katsuta, Keita Sakai, Nobuto Kawahara, Kenichi Kobayashi
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Publication number: 20210362507Abstract: An ejection-material ejection apparatus and an imprinting apparatus are provided which are capable of quickly detecting damage of a flexible membrane and avoiding contact between an ejection material and an operating liquid even if part of the flexible membrane is damaged. The flexible membrane includes a first film (1) covering a first storing space (5) for the ejection material, a second film (2) covering a second storing space (6) for the operating liquid, and an inter-film space 4 situated between the first film (1) and the second film (2). A change in state of the inter-film space (4) resulting from communication between at least one of the first storing space (5) and the second storing space (6) and the inter-film space (4) is detected with a liquid sensor (41), a flow speed sensor (77), and a liquid leakage sensor (42).Type: ApplicationFiled: November 28, 2018Publication date: November 25, 2021Inventors: Nobuto Kawahara, Yoshimasa Araki, Yuichi Iwasaki, Noriyasu Hasegawa
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Publication number: 20200376851Abstract: Provided is an ejection apparatus including: an ejection head having an ejection opening for ejecting an ejection material in a liquid state; a storage container storing therein the ejection material and communicating with the ejection head; and a pressure control unit that maintains the pressure inside the storage container at a negative pressure. The pressure control unit generates a first pressure in the storage container in a normal operation, the first pressure being capable of forming a meniscus of the ejection material in the ejection opening. The pressure control unit drops the pressure inside the storage container to at least the first pressure in a case where the pressure inside the storage container reaches a predetermined pressure above the first pressure.Type: ApplicationFiled: May 21, 2020Publication date: December 3, 2020Inventors: Masahiro Kuri, Noriyasu Hasegawa, Hisashi Namba, Ken Katsuta, Keita Sakai, Nobuto Kawahara, Kenichi Kobayashi
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Publication number: 20200338806Abstract: A storage device stores an ejection cartridge including an accommodating container that accommodates an ejection material, and an ejection head that includes an ejection port for ejecting the ejection material accommodated in the accommodating container. The storage device includes a mount on which the ejection cartridge is mounted, and includes a pressure regulating tank configured to control a pressure of an inside of the accommodating container of the ejection cartridge fixed to the mount with its ejection port not enclosed.Type: ApplicationFiled: April 2, 2020Publication date: October 29, 2020Inventors: Nobuto Kawahara, Yoshimasa Araki, Yutaka Mita, Noriyasu Hasegawa, Yuichi Iwasaki
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Publication number: 20200341369Abstract: An ejection device is used for an imprint apparatus that presses a mold against an ejection material ejected onto a substrate to form a pattern. The ejection device includes: a housing unit having an ejection head configured to eject the ejection material onto the substrate, and housing configured to accommodate the ejection material; and a control unit configured to control processing of the ejection device. The control unit switches the processing according to a usage status of a consumable part included in the housing unit.Type: ApplicationFiled: April 14, 2020Publication date: October 29, 2020Inventors: Hisashi Namba, Noriyasu Hasegawa, Ken Katsuta, Nobuto Kawahara, Hideki Matsumoto
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Patent number: 10513125Abstract: A fluid containing member includes a first containing chamber that contains a first fluid, and a second containing chamber that contains a second fluid. The first containing chamber and the second containing chamber are separated from each other by a first separation film on a side of the first containing chamber and a second separation film on a side of the second containing chamber. The first separation film and the second separation film are partly connected to each other or partly contact each other so as to move together in accordance with a change in an internal pressure of the first containing chamber or an internal pressure of the second containing chamber.Type: GrantFiled: July 12, 2018Date of Patent: December 24, 2019Assignee: CANON KABUSHIKI KAISHAInventors: Nobuto Kawahara, Yutaka Mita, Yoshimasa Araki, Noriyasu Hasegawa
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Patent number: 10335984Abstract: Provided is an imprint apparatus for contacting a resin applied to a substrate with a mold to perform patterning on the substrate. The imprint apparatus includes a substrate holding unit for holding the substrate, wherein the substrate holding unit comprises a plurality of holding areas arranged in a predetermined direction, the plurality of holding areas has different width dimension in the direction respectively based on positions in the direction, a surface ratio between two holding areas of the plurality of holding areas with different width dimension respectively is within a range of 0.8 to 1.2.Type: GrantFiled: April 7, 2015Date of Patent: July 2, 2019Assignee: CANON KABUSHIKI KAISHAInventors: Byung-jin Choi, Anshuman Cherala, Zhengmao Ye, Xiaoming Lu, Kang Luo, Nobuto Kawahara, Yoshikazu Miyajima
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Publication number: 20190057881Abstract: An imprint apparatus that molds an imprint material on a substrate with a mold, the imprint apparatus including a applying device that includes a discharge surface in which a discharge opening is formed, the applying device applying the imprint material to the substrate through the discharge opening, and a measuring device that measures the position of the discharge opening by having the measuring device measure a position of an uneven structure formed in a protruded shape or a recessed shape with respect to a direction perpendicular to the discharge surface.Type: ApplicationFiled: August 13, 2018Publication date: February 21, 2019Inventors: Nobuto Kawahara, Yutaka Mita
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Patent number: 10199244Abstract: An imprint apparatus includes a substrate holder including a plurality of chucking regions for chucking a substrate, and a controller that controls chucking forces of the chucking regions. The chucking regions include a first chucking region for chucking a periphery of a first substrate having a first diameter, a second chucking region for chucking a periphery of a second substrate having a second diameter larger than the first diameter, a third chucking region group divided into a plurality of regions inside the first chucking region, and a fourth chucking region group divided into a plurality of regions between the first chucking region and the second chucking region. The controller controls the chucking forces of each of the chucking regions.Type: GrantFiled: August 11, 2015Date of Patent: February 5, 2019Assignee: CANON KABUSHIKI KAISHAInventors: Nobuto Kawahara, Yoshikazu Miyajima, Zhengmao Ye, Anshuman Cherala, Byung-Jin Choi, Xiaoming Lu, Kang Luo
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Publication number: 20190016145Abstract: A fluid containing member includes a first containing chamber that contains a first fluid, and a second containing chamber that contains a second fluid. The first containing chamber and the second containing chamber are separated from each other by a first separation film on a side of the first containing chamber and a second separation film on a side of the second containing chamber. The first separation film and the second separation film are partly connected to each other or partly contact each other so as to move together in accordance with a change in an internal pressure of the first containing chamber or an internal pressure of the second containing chamber.Type: ApplicationFiled: July 12, 2018Publication date: January 17, 2019Inventors: Nobuto Kawahara, Yutaka Mita, Yoshimasa Araki, Noriyasu Hasegawa
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Publication number: 20170047234Abstract: An imprint apparatus includes a substrate holder including a plurality of chucking regions for chucking a substrate, and a controller that controls chucking forces of the chucking regions. The chucking regions include a first chucking region for chucking a periphery of a first substrate having a first diameter, a second chucking region for chucking a periphery of a second substrate having a second diameter larger than the first diameter, a third chucking region group divided into a plurality of regions inside the first chucking region, and a fourth chucking region group divided into a plurality of regions between the first chucking region and the second chucking region. The controller controls the chucking forces of each of the chucking regions.Type: ApplicationFiled: August 11, 2015Publication date: February 16, 2017Inventors: Nobuto Kawahara, Yoshikazu Miyajima, Zhengmao Ye, Anshuman Cherala, Byung-Jin Choi, Xiaoming Lu, Kang Luo
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Publication number: 20170028598Abstract: Provided is an imprint apparatus for contacting a resin applied to a substrate with a mold to perform patterning on the substrate. The imprint apparatus includes a substrate holding unit for holding the substrate, wherein the substrate holding unit comprises a plurality of holding areas arranged in a predetermined direction, the plurality of holding areas has different width dimension in the direction respectively based on positions in the direction, a surface ratio between two holding areas of the plurality of holding areas with different width dimension respectively is within a range of 0.8 to 1.2.Type: ApplicationFiled: April 7, 2015Publication date: February 2, 2017Inventors: Byung-jin Choi, Anshuman Cherala, Zhengmao Ye, Xiaoming Lu, Kang Luo, Nobuto Kawahara, Yoshikazu Miyajima
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Publication number: 20150328827Abstract: An imprint apparatus includes a substrate holder configured to hold a substrate, wherein the substrate holder includes a plurality of holding areas arranged in a predetermined direction and wherein shapes of the plurality of holding areas are defined to be capable of holding a first substrate in a first external diameter and a second substrate in a second external diameter different from the first external diameter.Type: ApplicationFiled: May 5, 2015Publication date: November 19, 2015Inventors: Yoshikazu Miyajima, Nobuto Kawahara
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Patent number: 7864297Abstract: A light blocking device includes a deformable member deformable in a first direction and elongating in a second direction intersecting with the first direction, a plurality of light blocking plates arrayed along the second direction, each of the plurality of light blocking plates being connected to the deformable member, so that adjoining blocking plates of the plurality of light blocking plates partly overlap with each other, and a plurality of actuators arrayed along the second direction and which cause deformation of the deformable member. At least one of the plurality of light blocking plates is tiltable independently from the other light blocking plates in response to deformation of the deformable member. A light blocking region is thereby defined, based on edges of the plurality of light blocking plates.Type: GrantFiled: May 10, 2007Date of Patent: January 4, 2011Assignee: Canon Kabushiki KaishaInventor: Nobuto Kawahara
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Publication number: 20100182581Abstract: A lens 10 is used in a state where a direction of an optical axis 1b passing through a curvature center of a lens surface is different from a direction of a gravitational force, and a position of a center 1a of a light beam effective portion 3 (a position of the optical axis on the lens surface) is displaced (is eccentric) from a position of an outside diameter center 2a of the lens 10 (a center position of a lens outside diameter). Specifically, the center 1a of the light beam effective portion 3 is positioned at an upper side by a distance ? from the outside diameter center 2a of the lens 10.Type: ApplicationFiled: January 15, 2010Publication date: July 22, 2010Applicant: CANON KABUSHIKI KAISHAInventor: Nobuto Kawahara
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Publication number: 20070268473Abstract: A light blocking device includes a deformable member being deformable in a first direction, a plurality of light blocking plates connected to the deformable member and movable independently of each other, and an actuator configured to apply a force to the deformable member to change a light blocking region defined by the light blocking plates.Type: ApplicationFiled: May 10, 2007Publication date: November 22, 2007Applicant: CANON KABUSHIKI KAISHAInventor: Nobuto Kawahara