Abstract: In step S1, the address generator generates address information composed of a sync signal which is recorded on an optical disc, address data and an error correction code for the address data, pre-encodes and supplies it to a modulator. At the same time, a carrier signal generator generates a carrier signal which is to carry the address information, and supplies it to the modulator. In step S2, the modulator makes MSK modulation of the carrier signal supplied from the carrier signal generator on the basis of the pre-encoded address information supplied from the address generator, and supplies a resultant MSK modulation signal to a wobbling unit. In step S3, the wobbling unit forms, on the optical disc, a spiral groove wobbled adaptively to the MSK modulation signal supplied from the modulator. In this optical disc, a given address can be accessed quickly and accurately.

Abstract: A method for forming an interconnect structure with airgaps, includes: providing a structure having a trench formed on a substrate; depositing a spacer oxide layer on sidewalls of the trench as sidewall spacers by plasma enhanced atomic layer deposition; filling the trench having the sidewall spacers with copper; removing the sidewall spacers to form an airgap structure; and encapsulating the airgap structure, wherein airgaps are formed between the filled copper and the sidewalls of the trench.

Abstract: In step S1, the address generator generates address information composed of a sync signal which is recorded on an optical disc, address data and an error correction code for the address data, pre-encodes and supplies it to a modulator. At the same time, a carrier signal generator generates a carrier signal which is to carry the address information, and supplies it to the modulator. In step S2, the modulator makes MSK modulation of the carrier signal supplied from the carrier signal generator on the basis of the pre-encoded address information supplied from the address generator, and supplies a resultant MSK modulation signal to a wobbling unit. In step S3, the wobbling unit forms, on the optical disc, a spiral groove wobbled adaptively to the MSK modulation signal supplied from the modulator. In this optical disc, a given address can be accessed quickly and accurately.

Abstract: An optical disk reproducing device includes: a signal reproducing section configured to read and decode information recorded on an optical disk by an optical pickup unit, and reproduce the information, wherein the signal reproducing section includes a gain controlled amplifier circuit configured to amplify an radio frequency signal generated from a light receiving element, an automatic gain control circuit configured to control a gain of the gain controlled amplifier circuit, and a signal processing section configured to derive a part of an automatic gain control value generated in the automatic gain control circuit, and generate a control signal for adjusting one of an optical system path and a detection system path for controlling the optical pickup unit.

Abstract: Disclosed herein is an optical disk playback apparatus including: a signal playback device configured to read and decode information recorded to an optical disk through an optical pickup unit in order to reproduce the information; the signal playback device including a signal generation circuit, a first signal processing device, a second signal processing device, a modulator, a switch, an analog to digital converter, and a third signal processing device.

Abstract: A method of forming an insulation film by alternating multiple times, respectively, a process of adsorbing a precursor onto a substrate and a process of treating the adsorbed surface using reactant gas and a plasma, wherein a plasma is applied in the process of supplying the precursor.

Abstract: A film forming cycle based on pulse CVD or ALD is repeated multiple times to form a single layer of insulation film, while a reforming cycle is implemented in the aforementioned process, either once or multiple times per each film forming cycle, by treating the surface of formed film using a treating gas that has been activated by a plasma.

Abstract: A DPD tracking error signal detection apparatus includes the following. Four differentiators remove DC components and differentiate four signal with varying differential phases. The signals are then sampled and quantized by four A/D converters, and output to a non-inverting unit and an inverting unit. A phase inverter/compositor then leaves as-is or phase-inverts the output signals, according to a control signal. The non-inverting and the inverting unit each include two Hilbert transformers that phase-shift the output from the A/D converters, two delay units that delay the output of the other A/D converters to match the delay of the Hilbert transformers, two cross-correlators that calculate the cross-correlation between pairs of Hilbert transformers and delay units, and an adding unit that combines the cross-correlator results and outputs the combined result to the phase inverter/compositor.

Abstract: A substrate processing method includes preparing a substrate having a low-k interlayer dielectric film as a to-be-etched film and a photoresist film, formed on the low-k interlayer insulating film, serving as an etching mask with a predetermined circuit pattern; etching the low-k interlayer insulating film through the photoresist film to form grooves and/or holes in the low-k interlayer insulating film; ashing the photoresist film by using hydrogen radicals generated by bring a hydrogen-containing gas into contact with a catalyst of a high temperature; and recovering damage to the low-k interlayer insulating film due to the ashing by supplying a specific recovery gas. The method further includes recovering damage to the low-k interlayer insulating film due to the etching by supplying a specific recovery gas.

Abstract: A tracking error signal detection device employing a differential phase detection method includes first and second differentiators which remove direct current components in first and second signal groups in which a phase difference between the first and second signal groups changes in accordance with a tracking error signal, and which differentiate the first and second signal groups, first and second analog/digital converters which sample and quantize signals output from the first and second differentiators, respectively, a Hilbert transformer performing a 90-degree phase shift on one of signals output from the first and second analog/digital converters, a delay circuit delaying one of the signals output from the second and first analog/digital converters by an amount of delay equal to that caused by the Hilbert transformer, and a phase comparator calculating a phase difference between a signal output from the Hilbert transformer and a signal output from the delay circuit.

Abstract: In step S1, the address generator generates address information composed of a sync signal which is recorded on an optical disc, address data and an error correction code for the address data, pre-encodes and supplies it to a modulator. At the same time, a carrier signal generator generates a carrier signal which is to carry the address information, and supplies it to the modulator. In step S2, the modulator makes MSK modulation of the carrier signal supplied from the carrier signal generator on the basis of the pre-encoded address information supplied from the address generator, and supplies a resultant MSK modulation signal to a wobbling unit. In step S3, the wobbling unit forms, on the optical disc, a spiral groove wobbled adaptively to the MSK modulation signal supplied from the modulator. In this optical disc, a given address can be accessed quickly and accurately.

Abstract: In step S1, the address generator generates address information composed of a sync signal which is recorded on an optical disc, address data and an error correction code for the address data, pre-encodes and supplies it to a modulator. At the same time, a carrier signal generator generates a carrier signal which is to carry the address information, and supplies it to the modulator. In step S2, the modulator makes MSK modulation of the carrier signal supplied from the carrier signal generator on the basis of the pre-encoded address information supplied from the address generator, and supplies a resultant MSK modulation signal to a wobbling unit. In step S3, the wobbling unit forms, on the optical disc, a spiral groove wobbled adaptively to the MSK modulation signal supplied from the modulator. In this optical disc, a given address can be accessed quickly and accurately.

Abstract: In step S1, the address generator generates address information composed of a sync signal which is recorded on an optical disc, address data and an error correction code for the address data, pre-encodes and supplies it to a modulator. At the same time, a carrier signal generator generates a carrier signal which is to carry the address information, and supplies it to the modulator. In step S2, the modulator makes MSK modulation of the carrier signal supplied from the carrier signal generator on the basis of the pre-encoded address information supplied from the address generator, and supplies a resultant MSK modulation signal to a wobbling unit. In step S3, the wobbling unit forms, on the optical disc, a spiral groove wobbled adaptively to the MSK modulation signal supplied from the modulator. In this optical disc, a given address can be accessed quickly and accurately.

Abstract: The present invention provides a supply apparatus and a receiving apparatus for enabling a user of a production apparatus such as a component mounter, to visually comprehend accurate support information provided from a manufacturer in accordance with the life cycle of the production apparatus, and realize more appropriate production apparatus maintenance. In the support information received by the receiving apparatus, the period after the purchase of the component mounter is displayed in the life cycle, and a list of equipment productivity-related items as well as diagnosis-related items is displayed as support items which are predicted for such life cycle.

Abstract: A record carrier has a servo track (4) indicating an information track (9) intended for recording information blocks. The servo track (4) has a periodic variation of a physical parameter at a predetermined frequency and modulated parts for encoding position information at regular intervals. The modulated parts start with a bit sync element and are of a data type having a data bit element or of a word sync type having a word sync element. The bit sync element, word sync element and the data bit element being modulated according to a same predetermined type of modulation of the periodic variation. All distances between two adjacent of the elements constituting the modulated parts are unique.

Abstract: In step S1, the address generator generates address information composed of a sync signal which is recorded on an optical disc, address data and an error correction code for the address data, pre-encodes and supplies it to a modulator. At the same time, a carrier signal generator generates a carrier signal which is to carry the address information, and supplies it to the modulator. In step S2, the modulator makes MSK modulation of the carrier signal supplied from the carrier signal generator on the basis of the pre-encoded address information supplied from the address generator, and supplies a resultant MSK modulation signal to a wobbling unit. In step S3, the wobbling unit forms, on the optical disc, a spiral groove wobbled adaptively to the MSK modulation signal supplied from the modulator. In this optical disc, a given address can be accessed quickly and accurately.

Abstract: In an optical disc, a wobble signal is to be detected by a simple configuration. In the optical disc, the address information, modulated onto a sinusoidal cannier signal by adding even harmonics signals to the sinusoidal carrier signal and by changing the polarity of the harmonics signals, is formed into the wobble signal. In detecting the wobble signal from the optical disc to demodulate the address information, in a method for detecting the wobble signal, an even harmonics signal and data clocks are generated, and the even harmonics signal so generated are multiplied with the reproduced wobble signal. The resulting product signal is integrated every data clock. The sign of the digital information is verified based on the integrated value at an end edge of the data clock.

Abstract: A first multiplier 251 multiplies a reproduced RF signal rf(t) by a DC component of an APC monitoring output signal m(t), which component is an output signal from an LPF 252, and then supplies a signal resulting from the multiplication to an arithmetic unit 255. A second multiplier 254 multiplies the reproduced RF signal rf(t) by a laser noise component of the APC monitoring output signal m(t), which component is an output signal from an HPF 253, and then supplies a signal resulting from the multiplication to the arithmetic unit 255. The arithmetic unit 255 subtracts the signal from the multiplier 254 from the signal from the multiplier 251 to thereby remove both an additive noise component and a modulated noise component of laser noise.

Abstract: In an optical disc, a wobble signal is to be detected by a simple configuration. In the optical disc, the address information, modulated onto a sinusoidal carrier signal by adding even harmonics signals to said sinusoidal carrier signal and by changing the polarity of said harmonics signals, is formed into the wobble signal. In detecting the wobble signal from the optical disc to demodulate the address information, in a method for detecting the wobble signal, an even harmonics signal and data clocks are generated, and the even harmonics signal so generated are multiplied with the reproduced wobble signal. The resulting product signal is integrated every data clock. The sign of the digital information is verified based on the integrated value at an end edge of the data clock.

Abstract: Insulating films 34 through 38 (of which insulating films 34, 36, 38 are silicon nitride films and insulating films 35, 38 are silicon oxide films) are sequentially formed on the wires 33 of the fourth wiring layer and groove pattern 40 is transferred into the insulating film 38 by means of photolithography. An anti-reflection film 41 is formed to fill the grooves 40 of the insulating film 38 and then a resist film 42 carrying a hole pattern 43 is formed. The films are subjected to an etching operation in the presence of the resist film 42 to transfer the hole pattern into the insulating films 38, 37, 36 and part of the insulating film 35. Subsequently, the resist film 42 and the anti-reflection film 41 are removed and the groove pattern 40 and the hole pattern 43 are transferred respectively into the insulating film 37 and the insulating film 35 by using the insulating film 38 as mask.