Abstract: A signal control apparatus is connected to a plurality of traffic signals located on a road with a plurality of intersections having travel lanes with designated traffic classifications. The signal control apparatus comprises: means for detecting the number of vehicles staying in the travel lane or lanes of the same traffic classification among the travel lanes of the plurality of intersections; means for determining whether or not to extend or reduce signaling time for permitting traffic of the traffic classification of the travel lane or lanes based on the number of vehicles staying in the travel lane or lanes of the same traffic classification at the plurality of intersections and means for adjusting split of the plurality of traffic signals based on a result of the determination so as to extend or reduce the signaling time.

Abstract: A laser reflow apparatus reflows solder bumps disposed on a side of a semiconductor chip in a workpiece and included in an irradiation range on the workpiece by applying a laser beam to an opposite side of the semiconductor chip. The laser reflow apparatus includes a spatial beam modulation unit including a laser power density setting function to locally set the laser power density in the irradiation range of a laser beam emitted from a laser beam source, and an image focusing unit including an image focusing function to focus the laser beam emitted from the laser beam source and apply the focused laser beam to the irradiation range on the workpiece.

Abstract: A measuring apparatus includes a holding unit and a measuring unit. The measuring unit includes a first optical fiber for transmitting light emitted from a light source, a branching member for branching the light transmitted through the first optical fiber to at least two measuring optical fibers, a plurality of heads including respective beam condensers for converging the light branched by the branching member onto a measurand, a shutter device for shifting timings of application of the light applied from the heads to the measurand, a second optical fiber branched from the branching member and transmitting returning light reflected from the measurand, a spectroscopic unit having a light detector for detecting the returning light, and a controller for controlling the shutter device to control the timings of application of the light applied from the heads to the measurand and controlling the light detector to detect the returning light individually.

Abstract: [Object] Provided are a 11C-labeled acyclic retinoid that can be synthesized in a short time with a high yield and can be suitably used for PET for elucidating intracerebral kinetics, a PET probe using it, and methods for producing them. [Solution] The 11C-labeled acyclic retinoid of the present invention is characterized by being represented by the following chemical formula (a). This compound can be produced by a coupling step of cross-coupling a methyl iodide labelled with 11C and the following organotin compound (b) (provided that in the formula, R1 and R2 represent alkyl groups which may have a branch) in an aprotic solvent in the presence of a palladium complex, a phosphine ligand, and a cuprous halide.

Abstract: A measuring apparatus includes a holding table that holds a measurement-target object and a measuring unit that measures a height or a thickness of the measurement-target object held by the holding table. The measuring unit includes a light source unit, an optical fiber that guides light emitted by the light source unit, and a light collector that focuses the light guided by the optical fiber on the measurement-target object held by the holding table. The light source unit includes an excitation light source, a fluorescent body that emits fluorescence when receiving excitation light emitted by the excitation light source, and a collecting lens that focuses the excitation light emitted by the excitation light source on the fluorescent body.

Abstract: A thickness measuring apparatus that measures a thickness of a workpiece held by a chuck table. The thickness measuring apparatus includes plural image sensors that detect intensity of light spectrally split on each wavelength basis by plural diffraction gratings and generate a spectral interference waveform and a thickness output unit that outputs thickness information from the spectral interference waveform generated by the plural image sensors.

Abstract: A laser applying apparatus includes a beam spot shaper for shaping a spot of a laser beam into a slender spot and orienting the polarization direction of a linearly polarized laser beam of the laser beam along a longer side of the slender spot, and a spot control unit for positioning a P-polarized laser beam on slanted surfaces of a recess that is formed in a wafer by orienting the longer side of the slender spot transversely across projected dicing lines and for orienting a shorter side of the slender spot in a processing direction along the projected dicing lines. A method of processing a wafer includes a functional layer removing step that is a step of removing a functional layer on a semiconductor substrate of the wafer by applying laser beams to the projected dicing lines with the use of the laser applying apparatus. The functional layer removing step is carried out a plurality of times to remove the functional layer on the projected dicing lines.

Abstract: A laser beam irradiation unit of a laser processing apparatus includes a laser oscillator, a condenser lens that condenses a laser beam emitted from the laser oscillator, and a phase modulation element arranged between the laser oscillator and the condenser lens. Individual differences of the condenser lens are prevented by applying, to the phase modulation element, voltages corresponding to a combined pattern of a shape correction pattern which is configured to correct differences between an actual shape and design values of the condenser lens, and an adjustment pattern which is configured to adjust optical characteristics of the laser beam at each processing point.

Abstract: A laser beam irradiation unit of a laser processing apparatus includes a laser oscillator that oscillates a laser, a Y-axis scanner that executes a high-speed scan with a laser beam emitted from the laser oscillator in a Y-axis direction, an X-axis scanner that executes processing feed of the laser beam emitted from the laser oscillator in an X-axis direction, and a beam condenser. The Y-axis scanner is selected from any of an AOD, a resonant scanner, and a polygon scanner and the X-axis scanner is selected from a galvano scanner and a resonant scanner.

Abstract: A pulse duration measuring apparatus includes a polarizing beam splitter for splitting a pulsed laser beam into a first laser beam and a second laser beam, a first mirror for reflecting the first laser beam traveling toward the polarizing beam splitter, a second mirror for reflecting the second laser beam traveling toward the polarizing beam splitter, a first quarter wavelength plate disposed between the polarizing beam splitter and the first mirror, a second quarter wavelength plate disposed between the polarizing beam splitter and the second mirror, an optical path length changing unit for moving the first mirror or the second mirror to change the length of the respective optical paths, a nonlinear crystal body for allowing a combined laser beam to pass therethrough, and a photodetector for measuring an optical intensity of the combined laser beam that has passed through the nonlinear crystal body.

Abstract: A light irradiation apparatus that splits white light into light rays of a plurality of wavelengths to apply the light ray includes a white light source, a diffraction grating that splits white light emitted by the white light source into light rays of a plurality of wavelengths, and a light selector that selects a light ray of a specified wavelength from the light rays of the plurality of wavelengths split by the diffraction grating.

Abstract: An inspecting apparatus includes a table for supporting a workpiece thereon, a light applying unit for applying light to the workpiece supported on the table, and a light detector for detecting light reflected from the workpiece. The light detector includes a camera and a diffusion plate disposed between the table and the camera.

Abstract: A measuring apparatus includes a holding unit and a measuring unit. The measuring unit includes a first optical fiber for transmitting light emitted from a light source, a branching member for branching the light transmitted through the first optical fiber to at least two measuring optical fibers, a plurality of heads including respective beam condensers for converging the light branched by the branching member onto a measurand, a shutter device for shifting timings of application of the light applied from the heads to the measurand, a second optical fiber branched from the branching member and transmitting returning light reflected from the measurand, a spectroscopic unit having a light detector for detecting the returning light, and a controller for controlling the shutter device to control the timings of application of the light applied from the heads to the measurand and controlling the light detector to detect the returning light individually.

Abstract: A spectral interference height detecting apparatus includes a chuck table for holding a workpiece thereon and a height detecting unit for detecting the height of an upper surface of the workpiece held on the chuck table. The height detecting unit includes a light source for emitting light in a predetermined wavelength band into a first optical path, a condenser disposed in the first optical path for converging light onto the workpiece held on the chuck table, a beam splitter disposed between the light source and the condenser for splitting the light in the first optical path into a second optical path, a mirror disposed in the second optical path to form a basic optical path length, for reflecting light into the second optical path and returning light through the beam splitter to the first optical path.

Abstract: A measuring apparatus includes a holding table that holds a measurement-target object and a measuring unit that measures a height or a thickness of the measurement-target object held by the holding table. The measuring unit includes a light source unit, an optical fiber that guides light emitted by the light source unit, and a light collector that focuses the light guided by the optical fiber on the measurement-target object held by the holding table. The light source unit includes an excitation light source, a fluorescent body that emits fluorescence when receiving excitation light emitted by the excitation light source, and a collecting lens that focuses the excitation light emitted by the excitation light source on the fluorescent body.

Abstract: A thickness measuring apparatus for measuring the thickness of a workpiece held on a chuck table includes the followings: a light source configured to emit white light; an optical branching unit configured to branch, to a second optical path, reflected light applied from the light source to the workpiece held on the chuck table via a first optical path and reflected from the workpiece; a diffraction grating disposed in the second optical path; an image sensor configured to detect an optical intensity signal of light separated into each wavelength by the diffraction grating; and a thickness output unit configured to generate a spectral interference waveform on the basis of the optical intensity signal detected by the image sensor, determine the thickness on the basis of the spectral interference waveform, and output the thickness.

Abstract: A laser beam irradiation unit of a laser processing apparatus includes a laser oscillator that oscillates a laser, a Y-axis scanner that executes a high-speed scan with a laser beam emitted from the laser oscillator in a Y-axis direction, an X-axis scanner that executes processing feed of the laser beam emitted from the laser oscillator in an X-axis direction, and a beam condenser. The Y-axis scanner is selected from any of an AOD, a resonant scanner, and a polygon scanner and the X-axis scanner is selected from a galvano scanner and a resonant scanner.

Abstract: A laser beam irradiation unit of a laser processing apparatus includes a laser oscillator, a condenser lens that condenses a laser beam emitted from the laser oscillator, and a phase modulation element arranged between the laser oscillator and the condenser lens. Individual differences of the condenser lens are prevented by applying, to the phase modulation element, voltages corresponding to a combined pattern of a shape correction pattern which is configured to correct differences between an actual shape and design values of the condenser lens, and an adjustment pattern which is configured to adjust optical characteristics of the laser beam at each processing point.

Abstract: A thickness measuring apparatus has a thickness measuring unit including a white light source, a diffracting mechanism that diffracts white light emitted from the white light source into diffracted light at time differences corresponding to the wavelengths of light components of the white light, a two-dimensional image sensor having a photodetection area that include a plurality of pixels for detecting return light reflected from upper and lower surfaces of a plate-shaped workpiece, a storage unit that stores, as a spectral interference waveform, intensities of the return light corresponding to the wavelengths of the light components successively received at the time differences by the pixels, and a waveform table recording therein a plurality of kinds of sample spectral interference waveforms corresponding to plate-shaped workpiece thicknesses.

Abstract: A laser reflow apparatus reflows solder bumps disposed on a side of a semiconductor chip in a workpiece and included in an irradiation range on the workpiece by applying a laser beam to an opposite side of the semiconductor chip. The laser reflow apparatus includes a spatial beam modulation unit including a laser power density setting function to locally set the laser power density in the irradiation range of a laser beam emitted from a laser beam source, and an image focusing unit including an image focusing function to focus the laser beam emitted from the laser beam source and apply the focused laser beam to the irradiation range on the workpiece.